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| Number | Title | Issue Date |
| 7439208 | Growth of in-situ thin films by reactive evaporation A method of forming MgB2 films in-situ on a substrate includes the steps of (a) depositing boron onto a surface of the substrate in a deposition zone; (b) moving the substrate into a reaction zone containing pressurized, gaseous magnesium; (c) moving the ... | 10/21/2008 |
| 7393600 | Sputtering target, sintered article, conductive film fabricated by utilizing the same, organic EL device, and substrate for use therein A sintered article is fabricated which contains one or more of indium oxide, zinc oxide, and tin oxide as a component thereof and contains any one or more types of metal out of hafnium oxide, tantalum oxide, lanthanide oxide, and bismuth oxide. A backing plate is at... | 07/01/2008 |
| 7335283 | Production method for composite oxide thin film and device therefor and composite oxide film produced thereby A method and an apparatus which permits making a composite oxide thin film excellent in crystallinity easily and at a low temperature, with the capability of controlling the basic unit cell structure as desired, and without the need for a post annealing, as well as ... | 02/26/2008 |
| 7247340 | Method of making a superconducting conductor A method of forming a superconducting conductor is disclosed. The method provides translating a substrate tape through a deposition chamber and along a helical path, where the helical path has multiple windings of the substrate tape and each winding of the substrate... | 07/24/2007 |
| 7189425 | Method of manufacturing a superconducting magnesium diboride thin film A superconducting magnesium diboride (MgB2) thin film having c-axial orientation and a method and apparatus for fabricating the same are provided. The fabrication method includes forming a boron thin film on a substrate and thermally processing the substr... | 03/13/2007 |
| 7151347 | Passivated niobium cavities A niobium cavity exhibiting high quality factors at high gradients is provided by treating a niobium cavity through a process comprising: 1) removing surface oxides by plasma etching or a similar process; 2) removing hydrogen or other gases absorbed in the bulk niob... | 12/19/2006 |
| 7074744 | Apparatus for consecutive deposition of high-temperature superconducting (HTS) buffer layers A method of coating a substrate for a high temperature superconductor material is disclosed, including loading a substrate into a first deposition chamber, routing the substrate in the first deposition chamber such that the substrate forms a helical winding in the f... | 07/11/2006 |
| 7056866 | Superconductivity in square-planar compound systems Described is a superconducting composition comprising an oxide complex of the formula [L1−xMx]aAbOy wherein L is lanthanum, lutetium, yttrium, or scandium; A is copper, bismuth, titanium, tungsten, zirconium, ... | 06/06/2006 |
| 7045430 | Atomic layer-deposited LaAlO3 films for gate dielectrics A dielectric film containing LaAlO3 and method of fabricating a dielectric film contained LaAlO3 produce a reliable gate dielectric having a thinner equivalent oxide thickness than attainable using SiO2. The LaAlO3 gate di... | 05/16/2006 |
| 7037595 | Thin hafnium oxide film and method for depositing same A thin layer of hafnium oxide or stacking of thin layers comprising hafnium oxide layers for producing surface treatments of optical components, or optical components, in which at least one layer of hafnium oxide is in amorphous form and has a density less than 8 gm... | 05/02/2006 |
| 6994775 | Multilayer composites and manufacture of same The present invention is directed towards a process of depositing multilayer thin films, disk-shaped targets for deposition of multilayer thin films by a pulsed laser or pulsed electron beam deposition process, where the disk-shaped targets include at least two segm... | 02/07/2006 |
| 6929820 | Method of forming a superconductor film A method includes forming an as-grown film of a superconductor composed of a MgB2 compound which is made by simultaneous evaporation of magnesium and boron. The as-grown film is superconductive without an annealing process to make the film superconductive... | 08/16/2005 |
| 6906008 | Apparatus for consecutive deposition of high-temperature superconducting (HTS) buffer layers The present invention is a deposition system for the production of coated substrates that provides a first deposition process that subsequently feeds a second deposition process and where the two deposition processes are occurring concurrently. The consecutive depos... | 06/14/2005 |
| 6843898 | High temperature superconducting composite conductors Copper or excess copper is added to one or more layers of a superconducting composite structure to reduce migration of copper form a copper based superconducting layer. ... | 01/18/2005 |
| 6835696 | Method of forming a superconductor film The present invention provides methods forming the superconductor of as-grown film of MgB2 which is made with magnesium and boron ejected from a magnesium target and a boron target, respectively, each in simultaneously sputtering process. The as-grown fil... | 12/28/2004 |
| 6752911 | Device and method for coating objects at a high temperature The invention relates to a device for coating an object at a high temperature by means of cathode sputtering, having a vacuum chamber and a sputter source, the sputter source having a sputtering cathode. Inside the vacuum chamber is arranged an inner chamber formed ... | 06/22/2004 |
| 6740624 | Spraying method to form a thick coating and products obtained A method and an apparatus for spraying materials onto a substrate to produce a coating thereon is described which allows very thick layers of complex metal oxides to be produced. The apparatus and method are particularly suitable for producing superconducting coatin... | 05/25/2004 |
| 6676811 | Method of depositing nanoparticles for flux pinning into a superconducting material A method of depositing nanoparticles for flux pinning into a superconducting material is described. According to the method of the present invention, a target made of superconducting material and a substrate are placed in the deposition chamber of a pulse... | 01/13/2004 |
| 6555221 | Method for forming an ultra microparticle-structure A method for forming an ultra microparticle-structure composed of ultra microparticles including the steps of: forming on a substrate higher wettability parts and lower wettability parts to a material to be deposited, depositing on the substrate the material t... | 04/29/2003 |
| 6506439 | Apparatus and process for the production of a superconductive layer An apparatus and process for applying a superconductive layer on an elongate substrate that includes moving the elongate substrate through a heating zone, applying a pulsed laser beam against a target, having a length, that is coated with superconductive ... | 01/14/2003 |
| 6387851 | Micro-fabrication method and equipment thereby An SrTiO3 monocrystal substrate having a crystallographic plane (100) or (110) is anisotropically etched in an H3 PO4 solution using an SiO2 thin film as an etching mask. The H3 PO4 solution ... | 05/14/2002 |
| 6333111 | Method of producing layered aluminum fine particles and use thereof The present invention provides a method for producing layered aluminum fine particles, and applications to single electron tunneling quantum devices, and the present invention further relates to a method for producing spherical metallic aluminum fine part... | 12/25/2001 |
| 6214772 | Process for preparing polycrystalline thin film, process for preparing oxide superconductor, and apparatus therefor A method is presented for making a polycrystalline thin film (B) by depositing particles emitted from a target (36) on a substrate base (A) to form the film (B) constituted by the target material while concurrently irradiating the depositing particles wit... | 04/10/2001 |
| 6156707 | Method of manufacturing superconducting microwave component substrate A substrate for a superconducting microwave component is composed of a pair of oxide superconductor thin films formed on opposite surfaces of a dielectric substrate, respectively. After Tl-type oxide superconducting thin films are deposited the opposite s... | 12/05/2000 |
| 6110336 | High pressure magnetron cathode assembly and sputtering apparatus utilizing same A magnetron cathode and sputtering system in which the cathode assembly includes a diaphragm arrangement with one or more diaphragms which overlie at least the edge of the cathode at the dark side region of the gas discharge so that plasmas cannot form be... | 08/29/2000 |
| 6057271 | Method of making a superconducting microwave component by off-axis sputtering A microwave component includes a single dielectric layer, and one pair of conductor layers formed on opposite surfaces of the dielectric layer, respectively, one of the pair of conductor layers forming a ground conductor, and the other of the pair of cond... | 05/02/2000 |
| 5976444 | Nanochannel glass replica membranes The present invention is a process for making a nanochannel glass (NCG) rica, having the steps of: coating a face of an etched NCG with a replica material (with or without an intervening buffer layer), where the etched NCG face has a plurality of channel... | 11/02/1999 |
| 5939361 | Method of fabricating Tl or Hg-containing oxide superconductor film A substrate is set in a reaction chamber, to heat the substrate to a predetermined temperature. Tl, Ba, Ca, Cu and O are supplied to the substrate by a Tl evaporation source and a target, to cause a TlBaCaCuO film to grow on the substrate. The TlBaCaCuO f... | 08/17/1999 |
| 5900391 | High temperature superconducting thin film deposition method Herein disclosed is a method for depositing a high Tc superconducting thin film. The superconducting thin film is deposited on one surface of a substrate. The substrate is exposed to an electromagnetic wave to heat the substrate during the process for dep... | 05/04/1999 |
| 5885939 | Process for forming a-axis-on-c-axis double-layer oxide superconductor films A process for forming a laminate of 123-type copper oxide superconductor thin films having dissimilar crystal axis orientations, a laminate of 123-type thin copper oxide superconductor layers exhibiting excellent superconducting property, and wiring for J... | 03/23/1999 |
| 5873985 | Process of making squid device having tilt-boundary junction An oxide film having a desired pattern is first formed on a magnesia substrate. A superconducting oxide film is then formed on the exposed portion of the magnesia substrate and also on the oxide film. Thus, a tilt-boundary junction is formed in the bounda... | 02/23/1999 |
| 5855716 | Parallel contact patterning using nanochannel glass The present invention is a method for modifying a substrate in a predetermined pattern, comprising the steps of: (a) applying a material to the face of an etched nanochannel glass (NCG), where this face has a pattern of channels corresponding to the prede... | 01/05/1999 |
| 5747427 | Process for forming a semiconductive thin film containing a junction Disclosed is a method of forming a thin junction film including a first thin oxide flilm presenting a superconductivity and second thin oxide film presenting an insulator properties or possibly semiconductive properties with an improved production efficie... | 05/05/1998 |
| 5688383 | Method for improving the performance of high temperature superconducting thin film wafers A method for decreasing the microwave surface impedance of high-temperature superconducting thin films comprises (a) applying, preferably by spin-coating, a protective coating (preferably poly(methyl methacrylate) or polyimide) to the surface of a high-te... | 11/18/1997 |
| 5679625 | Method of making an oxide superconducting thin film A method of making a superconducting thin film of a Y--Ba--Cu--O series material by using a diode parallel plate type sputtering apparatus including a vacuum chamber, a substrate disposed within the vacuum chamber and having a substantially flat surface o... | 10/21/1997 |
| 5667650 | High flow gas manifold for high rate, off-axis sputter deposition An improved device for off-axis magnetron sputter deposition of inorganic oxide compounds having a sputter gun, target, substrate, gas flow means and enclosure chamber wherein the improvement comprises a hollow gas flow manifold positioned between the sub... | 09/16/1997 |
| 5650378 | Method of making polycrystalline thin film and superconducting oxide body The present invention relates to a polycrystalline thin film deposit acting as a substrate material composed of grains of a cubic structure in which the intergranular misorientation, defined as the orientation difference between the a-axes (or b-axes) of ... | 07/22/1997 |
| 5601649 | Oxide superconducting film manufacturing apparatus Disclosed herein is an apparatus for manufacturing an oxide superconducting film employing laser ablation method. This apparatus has a thin film forming chamber having a laser-transparent laser entrance window, a target being provided in the thin film for... | 02/11/1997 |
| 5595959 | Method of forming a high-TC microbridge superconductor device A method of forming a high-Tc microbridge superconductor device is disclosed, which comprises the steps of forming an inclined step on the surface of a substrate, the inclined step having an angle of inclination of from about 20 to about 80 degrees; depos... | 01/21/1997 |
| 5567674 | Process of forming oxide superconductor possessing locally different crystal orientations A thin film of oxide superconductor consisting of more than two portions (1, 11, 12) each possessing a predetermined crystal orientation and deposited on a common surface of a substrate (2). At least one selected portion (10) of thin film of oxide superco... | 10/22/1996 |
