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| Number | Title | Issue Date |
| 7367119 | Method for forming a reinforced tip for a probe storage device Systems and methods in accordance with the present invention can include a tip contactable with a media. In an embodiment, the tip comprises a substantially hollow structure formed of a metal. The tip can be formed by depositing a first metal layer over silicon ther... | 05/06/2008 |
| 7336524 | Atomic probes and media for high density data storage A device in accordance with embodiments of the present invention comprises a contact probe for high density data storage reading, writing, erasing, or rewriting. In one embodiment, the contact probe can include a silicon core having a conductive coating. Contact pro... | 02/26/2008 |
| 7309630 | Method for forming patterned media for a high density data storage device Systems in accordance with the present invention can include a tip contactable with a media, the media including a substrate and a plurality of cells disposed over the substrate, one or more of the cells being electrically isolated from the other of the cells by a m... | 12/18/2007 |
| 7301887 | Methods for erasing bit cells in a high density data storage device Methods in accordance with the present invention can be applied, in an embodiment, to a media comprising a phase change material to alter a resolved portion of the phase change material to have a resistance different from a resistance of the bulk material. A tip hav... | 11/27/2007 |
| 7292132 | NTC thermistor probe An apparatus for temperature measurement comprising at least one insulator, at least one thermistor attached to the insulator, the thermistor having at least one of a Ge NTC die and an Si NTC die, and at least one outer electrically conductive film attached to the i... | 11/06/2007 |
| 7249409 | Method for trimming resistors There is provided a method and circuit for trimming a functional resistor on a thermally isolated micro-platform such that a second functional resistor on the same micro-platform remains substantially untrimmed; a method and circuit for providing and trimming a circ... | 07/31/2007 |
| 7214295 | Method for tantalum pentoxide moisture barrier in film resistors The present invention discloses a method of manufacturing a thin film resistor with a moisture barrier by depositing a metal film layer on a substrate and depositing a layer of tantalum pentoxide film overlaying the metal film layer. The present invention also inclu... | 05/08/2007 |
| 7059041 | Methods for producing passive components on a semiconductor substrate Methods are specified for producing passive components on a substrate, which methods permit, with a low outlay and a good yield, the production of different components, in particular high-resistance and low-resistance resistor elements and/or capacitor elements havi... | 06/13/2006 |
| 7037595 | Thin hafnium oxide film and method for depositing same A thin layer of hafnium oxide or stacking of thin layers comprising hafnium oxide layers for producing surface treatments of optical components, or optical components, in which at least one layer of hafnium oxide is in amorphous form and has a density less than 8 gm... | 05/02/2006 |
| 7002159 | Boron coated straw neutron detector A neutron detector technology based on 10B thin film conversion of neutrons and detection of neutron capture reaction products in a counter gas within a thin straw tube detector body is described. This neutron detector is based on gas-filled thin wall str... | 02/21/2006 |
| 6975031 | Semiconductor device and chip carrier There are provided a carrier substrate, a temperature sensing resistor film formed directly on the carrier substrate, first and second conductive patterns formed on the carrier substrate and connected to both ends of the temperature sensing resistor film respectivel... | 12/13/2005 |
| 6953931 | Bolometer type infrared detector A bolometer type infrared detector can restrict temperature drift due to self-heating and has a structure not causing degradation of characteristics by noise. The bolometer type infrared detector has a bolometer thin film serving as infrared ray detecting element, t... | 10/11/2005 |
| 6899828 | Composite coatings The invention describes composite coatings, in particular comprising carbon and another metallic element such as silicon or aluminum. These coatings have improved properties compared with pure tetrahedral amorphous carbon coatings, in that they have reduced stress l... | 05/31/2005 |
| 6787047 | Methods for manufacturing a microstructured sensor A method for manufacturing a sensor, the sensor including a three-dimensional interdigital electrode arrangement positioned on a substrate, comprising applying a temperature sensing resistor onto the substrate by sputtering a first adhesion layer and a first metalli... | 09/07/2004 |
| 6706156 | Method of making an improved MR sensor A method of making a magnetoresistance sensor which detects stored information from a medium and which provides an output voltage to a auxiliary circuitry is disclosed. The method comprises sputtering a bias layer in a sputtering gas mixture of nitrogen and argon. A... | 03/16/2004 |
| 6562207 | Refractory metal silicide alloy sputter targets, use and manufacture thereof Sputter target, method of manufacture of same and sputter coating process using the target as a sputtering source are disclosed. The sputter target comprises an Me/Si multi-phase, consolidated blend wherein the Si component is present in a very small amou... | 05/13/2003 |
| 6413385 | Thin-film temperature-sensitive resistor material and production process thereof Described are a thin-film temperature-sensitive resistor material which comprises, at a temperature-sensitive resistor portion, a mixed crystal of a nitride and oxide of a transition metal such as vanadium [preferably, that represented by the formula: MN | 07/02/2002 |
| 6368729 | Tungsten film, method of manufacturing the same, and thin-film heater The invention provides a thin-film heater having a high heat-resisting property and a high resistivity and suitable for low power consumption and for a compact and fine structure, and a method of manufacturing this thin-film heater. A thin-film heater con... | 04/09/2002 |
| 6238531 | Method and apparatus to improve the properties of ion beam deposited films in an ion beam sputtering system An ion beam sputtering system having a chamber, an ion beam source, multiple targets, a shutter, and a substrate stage for securely holding a wafer substrate during the ion beam sputtered deposition process in the chamber. The substrate stage is made to t... | 05/29/2001 |
| 6217722 | Process for producing Ti-Cr-Al-O thin film resistors Thin films of Ti-Cr-Al-O are used as a resistor material. The films are rf sputter deposited from ceramic targets using a reactive working gas mixture of Ar and O2. Resistivity values from 104 to 1010 Ohm-cm have been meas... | 04/17/2001 |
| 6210494 | High temperature ZrN and HfN IR scene projector pixels A structure and method of making resistive emitting members which exhibit high resistivity while at the same time providing high temperature operation significantly above that known in the art. Specifically the use of nitrides of Group IVB transition meta... | 04/03/2001 |
| 6203673 | Method of producing a thin-film platinum temperature-sensitive resistor for a thin-film microstructure sensor A thin-film microstructure sensor includes a substrate having an insulation layer. A thin-film platinum temperature-sensitive resistor is provided on the insulation layer of the substrate, the thin-film platinum temperature-sensitive resistor comprising a... | 03/20/2001 |
| 6171922 | SiCr thin film resistors having improved temperature coefficients of resistance and sheet resistance A process for increasing the sheet resistance and lowering the temperature coefficient of resistance of a thin film resistor deposited on a wafer, the process comprising ramping the temperature of the wafer to an annealing temperature above the decomposit... | 01/09/2001 |
| 6153062 | Magnetoresistive sensor and head PtMn films are used as antiferromagnetic layers of a dual spin-valve type magnetoresistive sensor. An exchange anisotropic magnetic field is achieved regardless of whether the PtMn film is formed over or under the pinned magnetic layer. Also, an effective... | 11/28/2000 |
| 6086727 | Method and apparatus to improve the properties of ion beam deposited films in an ion beam sputtering system An ion beam sputtering system having a chamber, an ion beam source, a multiple targets, a shutter, and a substrate stage for securely holding a wafer substrate during the ion beam sputtered deposition process in the chamber. The substrate stage is made to... | 07/11/2000 |
| 6013160 | Method of making a printhead having reduced surface roughness The nucleation efficiency of a thermal ink jet printhead is improved by providing a heater resistor with a thin planar oxide film formed over a conductive heater resistive layer. In a preferred embodiment, zirconium diboride is sputtered onto a silicon su... | 01/11/2000 |
| 5948216 | Method for making thin film tantalum oxide layers with enhanced dielectric properties and capacitors employing such layers The present applicants have discovered a method for making thin films comprising tantalum oxide that enhances the dielectric constant with or without TiO2 doping. Specifically, applicants have discovered sputtering Ta2 O5 ... | 09/07/1999 |
| 5681671 | Electro-conductive oxides and electrodes using the same Electro-conductive oxides showing excellent electro-conductivity, electrodes using the electro-conductive oxide and methods for manufacturing the same are described. The electro-conductive oxides are represented by the general formula: M(1)x M(... | 10/28/1997 |
| 5665209 | Method for forming refractory metal nitride film A method for forming a refractory metal nitride film having excellent diffusion barrier properties suitable for a dielectric electrode includes a step of depositing a refractory metal film containing nitrogen on a silicon substrate in a mixed gas atmosphe... | 09/09/1997 |
| 5585776 | Thin film resistors comprising ruthenium oxide In a first embodiment of the invention a layer of ruthenium oxide is reactively deposited onto a substrate, then annealed for TCR adjustment and for stabilization. In a second, bi-layer embodiment of the invention, a layer of tantalum nitride is first rea... | 12/17/1996 |
| 5549977 | Article comprising magnetoresistive material A magnetoresistance ratio of 200% (absolute value) or more at room temperature in a field of 6T can be achieved in a layer of material of nominal composition XMnOy (X is La and at least one of Ca, Sr and Ba, y in the range 2-3.5), if, after for... | 08/27/1996 |
| 5468672 | Thin film resistor and method of fabrication A method of fabricating a thin film resistor includes a step of sputter depositing a thin film of resistive material such as a chromium diboride compound on an insulative substrate using an argon sputter gas having a percentage of dopant such as nitrogen ... | 11/21/1995 |
| 5446437 | Temperature sensor An improved temperature sensor is designed for the sensitive detection of temperature changes. The temperature sensor includes a frame 9 of monocrystalline silicon and a dielectric diaphragm 13 stretched on it. A monocrystalline silicon structure 35 is di... | 08/29/1995 |
| 5382341 | Method of making smoke detector This invention relates to solid-state smoke detectors and smoke (fire) alarm systems, and more particularly to a novel and improved smoke-sensitive element comprising a bismuth oxide film deposited on one surface of an electrically insulating material. It... | 01/17/1995 |
| 5367285 | Metal oxy-nitride resistance films and methods of making the same Film resistors, for example, thin film thermistors having a negative temperature coefficient (NTCR) or near-zero TCR electronics resistors, are formed of an alloy of both an electrically insulating oxide and an electrically conducting nitride of at least ... | 11/22/1994 |
| 5288380 | Method for fabrication of thin-film bolometric material A technique for fabrication of thin-film bolometric materials for use in -ohm resistance multi-detector devices. A group IB periodic table element is reactively co-sputtered with small amounts of a dopant in a reduced gas atmosphere. The reactive co-sput... | 02/22/1994 |
| 5281485 | Structure and method of making Alpha-Ta in thin films The present invention relates generally to a structure and a method of making Alpha-Ta films, and more particularly, to a structure and a method of making Alpha-Ta in thin films. A seed layer of Ta reactively sputtered in a nitrogen containing environment... | 01/25/1994 |
| 5221449 | Method of making Alpha-Ta thin films The present invention relates generally to a structure and a method of making Alpha-Ta films, and more particularly, to a structure and a method of making Alpha-Ta in thin films. A seed layer of Ta reactively sputtered in a nitrogen containing environment... | 06/22/1993 |
| 5218335 | Electronic circuit device having thin film resistor and method for producing the same In an electronic circuit device, a thin film resistor is formed on a substrate and includes first regions including one kind of atom such as Cr and exhibiting an electric conductivity and a second region including a compound such as SiO2 compos... | 06/08/1993 |
| 5216404 | SiC thin-film thermistor A thin-film thermistor element which has an electrically insulating substrate having first and second surfaces opposite to each other and also having a pair of through-holes defined therein so as to extend completely across the thickness thereof, and a pa... | 06/01/1993 |
