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| Number | Title | Issue Date |
| 7913752 | Cooling device for vacuum treatment device A cooling system for a vacuum processing apparatus is provided with an internal heat conduction path for transfer of heat entering the subject body through the vacuum processing apparatus, a heat radiation path for radiation of the heat to an outside of the vacuum p... | 03/29/2011 |
| 7330236 | Exposure apparatus, and device manufacturing method using the same Disclosed is an exposure apparatus having a specific structure that includes a cold trap plate for attracting contaminant substances which might cause a decrease of reflectance of a mirror when adhered thereto, and a radiation shield member for preventing excessive ... | 02/12/2008 |
| 7317505 | Exposure apparatus and device manufacturing method An exposure apparatus having a projection optical system and configured to expose a substrate to light via a pattern of a mask and the projection optical system. The apparatus includes a chamber to hermetically contain at least part of the projection optical system,... | 01/08/2008 |
| 7262830 | Exposure apparatus, and device manufacturing method An apparatus for exposing a wafer to light. The apparatus includes a light source unit having a light source for emitting light, a first cooling unit for cooling the light source unit, in which the first cooling unit has a gas flowpassage for a gas passing through t... | 08/28/2007 |
| 7235483 | Method of electroless deposition of thin metal and dielectric films with temperature controlled stages of film growth The method of the invention comprises accumulating experimental data or obtaining existing data with regard to the optimal time-temperature relationship of the deposition process on various film-formation stages for various materials, forming nuclei of a selected ma... | 06/26/2007 |
| 7144822 | High density plasma process for optimum film quality and electrical results A method for plasma processing of semiconductor wafers is provided that reduces plasma-induced damage to the gate dielectric while limiting damage to the wafer from particulates that flake off of the interior surfaces of the reaction chamber. Plasma conditions are m... | 12/05/2006 |
| 7080940 | In situ optical surface temperature measuring techniques and devices A temperature sensor that has a thermally conducting contact with a surface that emits electromagnetic radiation in proportion to the temperature of the contact is disclosed. The sensor has a resilient member attached to the contact and configured to extend the cont... | 07/25/2006 |
| 7046025 | Test apparatus for testing substrates at low temperatures A test apparatuss for testing substrates at low temperatures has a chuck, which can be displaced in the working area by means of a chuck drive, the temperature of which can be controlled using heating and cooling means. The chuck has a receiving surface for receivin... | 05/16/2006 |
| 6959554 | Passive gas-gap heat switch for adiabatic demagnetization refrigerator A passive gas-gap heat switch for use with a multi-stage continuous adiabatic demagnetization refrigerator (ADR). The passive gas-gap heat switch turns on automatically when the temperature of either side of the switch rises above a threshold value and turns off whe... | 11/01/2005 |
| 6944255 | Nuclear reactor A nuclear reactor in which a secondary or tertiary coolant system of a nuclear steam supply system is simplified, comprising: a reactor vessel (2) which integrates a reactor core (1); a first coolant (3) which is stored in the reactor vessel ( | 09/13/2005 |
| 6907924 | Thermally conductive chuck for vacuum processor A chuck body mounts a substrate within a vacuum chamber. Contiguous portions of the substrate and the chuck body form a heat-transfer interface. An intermediate sealing structure seals the chuck body to the substrate independently of any contact between the chuck bo... | 06/21/2005 |
| 6443225 | Thermally controlled active heat switch system The present invention discloses a heat transfer changeover switch capable of effecting or cutting off positively heat transfer. The switch requires no contact or separation of a solid contact of a switch piece, is easily incorporated in a fine electronic ... | 09/03/2002 |
| 6269873 | Method for controlling heat exchange in a nuclear reactor A method for controlling heat exchange in a nuclear reactor. The reactor contains at least one thermal valve, at least one heat exchanger having a coolant flowing therein, with the heat exchanger being immersed in a pool containing a fluid. The heat excha... | 08/07/2001 |
| 5950723 | Method of regulating substrate temperature in a low pressure environment A temperature controlled chuck (20) includes a heating unit (24) and a cooling unit (34). A first cavity (30) separates the heating unit (24) from a wafer substrate (18), and a second cavity (50) separates the cooling unit (34) from the heating unit (24).... | 09/14/1999 |
| 5810933 | Wafer cooling device A wafer cooling device (WCD) for cooling a substrate, such as a wafer, during processing is presented. The substrate is mounted to an WCD heat transfer surface, thereby forming a cavity in between the substrate and the heat transfer surface into which gas... | 09/22/1998 |
| 5775416 | Temperature controlled chuck for vacuum processing A temperature controlled chuck (20) includes a heating unit (24) and a cooling unit (34). A first cavity (30) separates the heating unit (24) from a wafer substrate (18), and a second cavity (50) separates the cooling unit (34) from the heating unit (24).... | 07/07/1998 |
| 5676205 | Quasi-infinite heat source/sink An apparatus and method for controlling the temperature of an object, in particular a semiconductor wafer support structure in a wafer processing chamber. A gas gap is created between the two adjacent objects of different temperatures. The pressure in the... | 10/14/1997 |
| 5673750 | Vacuum processing method and apparatus This invention relates to a vacuum processing method and apparatus. When a sample is plasma processed under a reduced pressure, a sample bed is cooled by a cooling medium kept at a predetermined temperature lower than an etching temperature, the sample is... | 10/07/1997 |
| 5379601 | Temperature actuated switch for cryo-coolers A thermally actuated switch is useful for a redundant cryo-cooled system such as a computer system. In the path between two redundant cryo-heads, a thermally actuated switch which has two sensible parallel thermally conducting plates which are separated b... | 01/10/1995 |
| 4903754 | Method and apparatus for the transmission heat to or from plate like object An installation for the transmission of heat energy between a carrier and a small plate receives a gas between the small plate and the carrier in order to improve the transmission of heat. The same gas serves to press the small plate against the carrier b... | 02/27/1990 |
| 4694655 | Controllable helium-II phase separator A controllable helium-II phase separator utilizes the cut-off action of the thermomechanical effect if superfluid helium-II flows through a capillary gap-shaped canal. For controlling the throughput, the gap width of the canal is varied by changing the di... | 09/22/1987 |
| 4541249 | Cryogenic trap and pump system A cryogenic system adapted to trap or pump waste industrial gasses and characterized by a cryogenic assembly having a cryogenically cooled member sealed within an inner enclosure, a thermal switch assembly for injecting and removing gas from within the in... | 09/17/1985 |
| 4438632 | Means for periodic desorption of a cryopump The invention discloses a cryopump comprising a primary cryopanel 67 associated with a low temperature heat sink 60 having means for adsorbing a first low boiling point gas and a secondary cryopanel 80 associated with heat sink 60 and a higher temperature... | 03/27/1984 |
| 4258554 | Refrigerator A refrigerator comprising a freezing compartment and a refrigerating compartment which refrigerator is provided with a primary refrigerating system containing a refrigerant with a primary evaporator disposed in the freezing compartment, and a secondary re... | 03/31/1981 |
| 4224980 | Thermally stressed heat-conducting structural part or corresponding structure part cross section A thermally stressed heat-conducting structural part with a temperature gradient that forms during operation, in which at least one layer of metal hydride is embedded in a hydrogen-impervious and heat-conducting manner transversely to the temperature grad... | 09/30/1980 |
| 3958754 | Snow load removal Means to remove snow loads from a roof includes a roof structure for a building and treating means within the building. The roof structure is characterized by flexibility and relatively high initial thermal insulation value and comprises a relatively non-... | 05/25/1976 |
