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| Number | Title | Issue Date |
| 7673645 | Gas delivery method and system including a flow ratio controller using a multiple antisymmetric optimal control arrangement The multiple antisymmetric optimal (MAO) control algorithm is disclosed for a gas delivery system including a flow ratio controller for dividing a single mass flow into multiple flow lines. In the MAO control algorithm, each flow line is provided with a flow sensor ... | 03/09/2010 |
| 7621290 | Gas delivery method and system including a flow ratio controller using antisymmetric optimal control The antisymmetric optimal control algorithm is disclosed for a gas delivery system including a flow ratio controller for dividing a single mass flow into at least two flow lines. Each flow line includes a flow meter and a valve. Both valves of the flow ratio control... | 11/24/2009 |
| 7543595 | Valve calibration method and apparatus An arrangement for calibrating a Venturi valve includes a source of flow measurements and a processing circuit. The Venturi valve has a variable shaft position and is operable to provide an air flow corresponding to the variable shaft position. The processing circui... | 06/09/2009 |
| 7424894 | Method and apparatus for providing a determined ratio of process fluids A fluid flow control system that includes a fluid inlet to receive a flow of process fluid and a plurality of fluid outlets. The plurality of fluid outlets include a first fluid outlet and at least one second fluid outlet. The first fluid outlet provides a first pre... | 09/16/2008 |
| 7389786 | Ultrasonic and sonic odorization systems A system is shown for injecting a chemical, such as an odorant, from a chemical supply into a fluid containing system such as a natural gas pipeline or an LPG pipeline. A tank of odorant is maintained under a positive pressure which exceeds that of the pipeline. An ... | 06/24/2008 |
| 7360551 | Method and apparatus for providing a determined ratio of process fluids A fluid flow control system that includes a fluid inlet to receive a flow of process fluid and a plurality of fluid outlets. The plurality of fluid outlets include a first fluid outlet and at least one second fluid outlet. The first fluid outlet provides a first pre... | 04/22/2008 |
| 7360446 | Ceramic oscillation flow meter having cofired piezoresistive sensors An apparatus is provided for measuring the amount of fluid (21) flowing in a channel (18, 20). The apparatus comprises a fluidic oscillation flow meter (10) including a housing (14) defining an inlet (16) for receiving the fluid ( | 04/22/2008 |
| 7353841 | Relative pressure control system and relative flow control system Provided is a relative pressure control system has a simple configuration, but enables accurate regulation of a division ratio of an operation gas, and concurrently makes it possible to securely drain the operation gas from an operation gas pipeline in case of emerg... | 04/08/2008 |
| 7340790 | Universal dispenser for dispensing of laundry additives during automatic machine laundering of fabrics Disclosed are systems, methods, devices and kits for dispensing laundry additive materials into the drum of an automatic washing machine as that machine is used to carry out a fabric laundering operation. To bring about such dispensing of additives, a lidded housing... | 03/11/2008 |
| 7278447 | Co-axial solenoid actuator An actuator assembly comprised of: a first coil and a second coil, each with a bore and a producing a magnetic flux when subject to an electric signal; a tube extending through the bores such that coils are coaxial; a magnetic pole piece within the tube and generall... | 10/09/2007 |
| 7246787 | Solenoid valve assembly A valve assembly comprised of a solenoid coil, having a coil bore, and being operative to produce a magnetic field when subject to an electric signal, a fixed magnetic pole piece within the coil bore, a generally cylindrically and axially translatable armature with ... | 07/24/2007 |
| 7244335 | Substrate processing system and substrate processing method A substrate processing system is provided with an ozone generator capable of generating an ozone-containing gas by discharging electricity in an oxygen-containing gas, and a plurality of processing chambers each capable of holding substrates therein to process the s... | 07/17/2007 |
| 7201179 | Modular fluid supply system A modular fluid supply system for use with a liquid supply source includes a plurality of container packs, a fluid delivery line in fluid communication with the containers of the packs, and a controller. Each container pack includes at least one container that conta... | 04/10/2007 |
| 7189580 | Method of pumping fluid through a microfluidic device A method is provided for pumping fluid through a channel of a microfluidic device. The channel has an input port of a predetermined radius and an output port of a predetermined radius. The channel is filled with fluid and a pressure gradient is generated between the... | 03/13/2007 |
| 7189581 | Method of obtaining a sample concentration of a solution in a microfluidic device A method is provided of obtaining a sample concentration of a solution in a microfluidic device. The microfluidic device includes a channel having a reservoir and a collection port. The channel is filled with a solution having particles therein. A reservoir drop is ... | 03/13/2007 |
| 7169231 | Gas distribution system with tuning gas An apparatus for providing different gases to different zones of a processing chamber is provided. A gas supply for providing an etching gas flow is provided. A flow splitter in fluid connection with the gas supply for splitting the etching gas flow from the gas sup... | 01/30/2007 |
| 7168273 | Selective dispensing apparatus A dispensing apparatus for use with a replaceable unit dose package has at least one cavity sealed by a membrane, wherein the cavity contains additive materials to be dispensed. The dispensing apparatus is configured for use, for example, in a washing machine, where... | 01/30/2007 |
| 7155319 | Closed loop control on liquid delivery system ECP slim cell A method for controlling liquid delivery in a processing chamber. The method includes generating an analog input (AI) signal proportional to a process variable and calculating an analog output (AO) signal based on a setpoint and a deadband. The setpoint is a target ... | 12/26/2006 |
| 7150284 | Device for monitoring a wash process A device is provided for monitoring a wash process inside a mechanical washing apparatus, comprising sensor means for measuring physical and/or mechanical parameters of the wash process and recording means for recording the measured parameters within the device. Thi... | 12/19/2006 |
| 7143774 | Method and apparatus for providing a determined ratio of process fluids A fluid flow control system that includes a fluid inlet to receive a flow of process fluid and a plurality of fluid outlets. The plurality of fluid outlets include a first fluid outlet and at least one second fluid outlet. The first fluid outlet provides a first pre... | 12/05/2006 |
| 7140357 | Vortex mixing system for exhaust gas recirculation (EGR) A vortex mixing system mixes intake air with exhaust gases for exhaust gas recirculation (EGR) in an internal combustion engine. The vortex mixing system may have a vortex mixing device connected to an intake air conduit, a supply conduit, and an EGR conduit. The vo... | 11/28/2006 |
| 7105096 | Collection of sludge from the floor of a basin with multiple balanced-flow headers A method meets needs in material collection by significantly increasing the flow rate through headers that collect sludge without causing problems in priming. Telescopic pipes stay in a line adjacent to the bottom of a basin and do not float upwardly into or against... | 09/12/2006 |
| 7096877 | Method of establishing at least one enveloped flow in a channel With a method of establishing an enveloped flow in a channel, in the channel an envelopment area (3) with a channel section (6, 7) is configured to which a stub with an outlet is connected, where the stub, which can be configured as a polyhedron, is ar... | 08/29/2006 |
| 7072743 | Semiconductor manufacturing gas flow divider system and method A system for dividing a single flow into two or more secondary flows of desired ratios, including an inlet adapted to receive the single flow, at least two secondary flow lines connected to the inlet, an input device adapted to receive at least one desired ratio of ... | 07/04/2006 |
| 7066412 | Apparatus, methods, and compositions for adding fragrance to laundry The invention provides an apparatus, methods, and compositions for dispensing a fragrance onto laundry in a dryer without substantial loss of that fragrance during the drying process. The apparatus includes an electrostatic vapor generator capable of dispensing a fr... | 06/27/2006 |
| 7055793 | Valve with compact actuating mechanism The present invention relates to a valve having a base body with a passage opening, a movable valve member for closing and opening the passage opening and an actuating mechanism for moving the valve member in order to open the passage opening. The actuating mechanis... | 06/06/2006 |
| 7052615 | Dispensing system A dispenser system that takes high pressure fluid such as a high pressure water source and reduces the volume flow of the high pressure water as it flows into a dispenser with the dispenser having a low pressure outlet, which offers negligible fluid resistance in co... | 05/30/2006 |
| 7039999 | Method for installation of semiconductor fabrication tools This process for the installation of semiconductor fabrication tools includes designing standard modules for connecting the sources of the process gases and liquids t so that, for each gas and liquid, the sources of each required gas and liquid only need to be conne... | 05/09/2006 |
| 7007707 | Mass flow ratio system and method A system for dividing a single mass flow, including an inlet adapted to receive the single mass flow and at least two flow lines connected to the inlet. Each flow line includes a flow meter and a valve. The system also includes a controller programmed to receive a d... | 03/07/2006 |
| 6941965 | Method and apparatus for providing a determined ratio of process fluids A fluid flow control system that includes a fluid inlet to receive a flow of process fluid and a plurality of fluid outlets. The plurality of fluid outlets include a first fluid outlet and at least one second fluid outlet. The first fluid outlet provides a first pre... | 09/13/2005 |
| 6926205 | Fluid supply failure protection valve A water supply failure protection valve is connected to hot and cold water supplies. The failure protection valve is responsive to the loss of cold water supply pressure to shut off all water flow. The failure protection valve is responsive to the loss of hot water ... | 08/09/2005 |
| 6899114 | Device for the dilution and application of liquids A system and method for the mixing and the application of liquids to various surfaces. The system includes a primary tank having a liquid fill fitting, a gas fitting, and an outlet. A pressurized gas source is in fluid communication with the primary tank by way of t... | 05/31/2005 |
| 6895983 | Method and apparatus for dividing the flow of a gas stream An apparatus for dividing the flow of a gas stream and a method for controlling the flow division of a gas stream are disclosed, the apparatus including an inlet conduit for receiving the gas stream, outlet conduits in fluid communication with the inlet conduit for ... | 05/24/2005 |
| 6857441 | Fluid metering device A fluid metering device that preferably includes a substantially linear series of intermeshing gears. The fluid metering device includes an inlet port adjacent the intermeshing portion of each pair of gears within the series adjacent the point at which the pair of g... | 02/22/2005 |
| 6840257 | Proportional valve with shape memory alloy actuator A proportional valve is disclosed for controlling the outlet pressure of a fluid flowing therethrough. The valve comprises a valve body having an inlet port and an outlet port for the fluid. The valve also has an inner chamber, within which there is formed a valve s... | 01/11/2005 |
| 6840256 | Process and apparatus for supplying a gaseous mixture A method and apparatus for generating a non-flammable gaseous mixture from a first flammable gas and a second gas in which said first gas is flammable. Air may be extracted from the atmosphere or storage container to be treated. The air is circulated in a conduit ( | 01/11/2005 |
| 6772781 | Apparatus and method for mixing gases Provided are apparatuses and methods for mixing gases. The apparatuses are suitable for use in the manufacture of an electronic device. The apparatuses include a gas mixing manifold. A first, bulk gas source is connected to introduce a flow of a first gas to the man... | 08/10/2004 |
| 6752166 | Method and apparatus for providing a determined ratio of process fluids A fluid flow control system that includes a fluid inlet to receive a flow of process fluid and a plurality of fluid outlets. The plurality of fluid outlets include a first fluid outlet and at least one second fluid outlet. The first fluid outlet provides a first pre... | 06/22/2004 |
| 6715505 | Steam pressure reducing and conditioning valve A steam pressure reducing and conditioning valve comprising a first port 21 for inflowing superheated steam S, a body 23 having a cylindrical diffuser with bottom 22 where small holes 22a are scattered on the side, and a second por... | 04/06/2004 |
| 6662817 | Gas-line system for semiconductor-manufacturing apparatus A gas-line system used for a semiconductor-manufacturing apparatus with at least two reactors, includes at least one gas source; a flow-divider means including an input port on the primary side, which receives a source gas from the gas source, and an outp... | 12/16/2003 |
