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Class 134/94.1 - With plural means for supplying or applying different fluids at the same workstation


Subclass of Class 134 - Cleaning and liquid contact with solids
Definition: Apparatus having one work treating station which includes
No. of patents: 152
Last issue date: 01/03/2012


1        
NumberTitleIssue Date
8087418Deaeration device and ultrasonic cleaning device using the same
A deaeration device for bubbling dissolved air in the cleaning liquid by cavitation is connected on a cleaning-liquid circulation path so as to bubble the dissolved air in the cleaning liquid flowing through the cleaning-liquid circulation path, and the bubbled diss...
01/03/2012
8051862Liquid processing apparatus and liquid processing method
A liquid treatment device having a rotatable substrate holding section (2) for horizontally holding a wafer (W), an annular-shaped rotation cup (4) which surrounds the wafer (W) which rotates with the wafer (W), a rotation mechanism (3) for inte...
11/08/2011
8037890Substrate cleaning device and substrate cleaning method
A substrate cleaning device and a substrate cleaning method reduces liquid drops remaining on a substrate to prevent the irregular heating of the substrate by a heating process due to liquid drops or water marks remaining on the substrate. A cleaning liquid is poure...
10/18/2011
8001983Cleaning apparatus, coating and developing apparatus, and cleaning method
A wafer W is held in a horizontal attitude within an airtight container 41 by a vacuum chuck 42 such that small gaps are formed between the wafer W and the inner surfaces of the airtight container 41. A cleaning liquid is supplied toward the cen...
08/23/2011
7975708Proximity head with angled vacuum conduit system, apparatus and method
A proximity head including a head surface. The head surface including a first flat region and a plurality of first conduits. Each one of the plurality of first conduits being defined by corresponding one of a plurality of first discrete holes. The plurality of first...
07/12/2011
7931032Bulk dispensing of chemicals into a residential dishwasher
A fluid dispensing system for a residential dishwasher comprises a fluid reservoir that can hold liquid gel dish detergent in bulk quantities, preferably comprising the contents of at least one bottle of detergent as sold at retail, which is disposed inside a door o...
04/26/2011
7918235Steam generator auto—blow down and scale reduction system
The invention is a dual functioning system for de-scaling or blowing down an electrically powered steam boiler. The steam boilers are generally used for sterilizing equipment and other items commonly used by health care professionals. The system includes a microproc...
04/05/2011
7913702Substrate cleaning method, substrate cleaning apparatus, substrate processing system, substrate cleaning program and storage medium
In a substrate cleaning method for cleaning a backside of a substrate on a surface of which a predetermined processing is performed, a two phase substance contacts the backside of the substrate, and a flow of the substance is generated near the backside of the subst...
03/29/2011
7900640Cleaning apparatus including cleaning tank with improved cover
A cleaning apparatus includes a cleaning tank (2) which stores a process liquid used for cleaning a target object (W), a target object holding mechanism (4) which holds the target object (W) in the cleaning tank (2), and a process liquid supply ...
03/08/2011
7823595Apparatus for etching substrate and method of fabricating thin-glass substrate
An apparatus for etching a substrate includes (a) a nozzle system including at least one nozzle through which acid solution containing at least hydrofluoric acid is sprayed onto the substrate, (b) a mover which moves at least one of the nozzle system and the substra...
11/02/2010
7802579Apparatus and method for treating substrates
A substrate treating apparatus includes a substrate support unit with a chuck on which a substrate is loaded; a bottom chamber having an open top and configured to surround the circumference of the chuck; a top chamber configured to open or close the top of the bott...
09/28/2010
7775219Process chamber lid and controlled exhaust
A method and apparatus for efficiently exhausting harmful vapors and fumes from a substrate processing chamber is described. The processing chamber includes a lower volume configured as a liquid atmosphere, and an upper volume configured as a gaseous atmosphere to a...
08/17/2010
7743777Water vapor cleaning system
A water vapor cleaning system includes a vapor-producing chamber in communication with a water source, e.g. a hot water line, of an existing plumbing system. The vapor-producing device includes a vapor exit. The cleaning system includes a nozzle having an inlet, an ...
06/29/2010
7712475Cleaning apparatus, coating and developing apparatus, and cleaning method
A wafer W is held in a horizontal attitude within an airtight container 41 by a vacuum chuck 42 such that small gaps are formed between the wafer W and the inner surfaces of the airtight container 41. A cleaning liquid is supplied toward the cen...
05/11/2010
7673638System and method to monitor particles removed from a component
Disclosed is a system and method to monitor and count particles removed from a component. The particle monitoring system includes a jet spray device, a snow generator, a particle collection device, and a particle counter. The jet spray device includes an outlet that...
03/09/2010
7584760Substrate processing apparatus
A substrate (W) is held and rotated in its horizontal position on a spin base (10). A processing liquid can be supplied from a processing liquid lower nozzle 15 to the lower surface of the substrate (W). The upper surface of the substrate (W) is covere...
09/08/2009
7578303Device for and a method of adding rinse aids to a home appliance containing liquids
The invention concerns a device and a method of adding rinse aids to a home appliance containing liquid, especially a household dishwasher, with a main tub (1), which has a service opening (4) to put the things to be washed into the main tub (1)...
08/25/2009
7562663High-pressure processing apparatus and high-pressure processing method
A mixing valve assembly 42 is communicated with a dedicated tank 51D, storing therein a compatibilizer D, via an inlet valve 43 and is also communicated with dedicated tanks 51A-51C via three injection valves, the tanks storing the...
07/21/2009
7475696Dishwasher having valved third-level sprayer
A dishwasher has multiple wash zones which are each supplied by a wash liquid supply. An interior tub configured to provide an interior wash chamber for washing dishes is divisible into three wash zones supplied by first, second, and third wash liquid supplies. The ...
01/13/2009
7472711Dishwasher pump and filtration system
A dishwasher includes a pump assembly which functions to chop all fluid entrained soil prior to directing fluid to upper and lower wash arms. A flow conduit leading to the upper wash arm is provided with a sampling port which directs a percentage of the fluid flow i...
01/06/2009
7464718Dishwasher liquid delivery systems
A system for dispensing a liquid, wherein the system includes a reservoir comprising a plurality of apertures disposed therein, and at least one dispenser in flow communication with the reservoir, the dispenser comprising a first and a second tube operatively couple...
12/16/2008
7426932Spray fill device and method for using the same
A spray fill device for delivering water to a washing machine is provided. The spray fill device includes a body defining an inlet, an outlet port, a mounting port, and a plurality of outlet apertures in flow communication with the inlet. The spray fill device also ...
09/23/2008
7422641Substrate cleaning apparatus and substrate cleaning method
A soft spray nozzle discharging a cleaning mist is vertically directed and fixed to an arm. A rinse nozzle discharging rinsing deionized water for suppressing obstruction is vertically fixed to the arm at a prescribed distance from the soft spray nozzle. During clea...
09/09/2008
7418971Vending machine hose controller
A vending machine and a hose controller system for vending machines wherein the dispenser hose is axially and torsionally controlled to facilitate slight twisting, thereby minimizing applicator tool resistance, and making it easier for users to operate the remote ve...
09/02/2008
7418969Dishwasher having a door supply housing and actuator operable to release variable supply volumes for different wash cycles
A dishwasher having at least one actuator, at least one input device, at least one processor and at least one door defining at least part of a washing area when the door is closed. The dishwasher has at least one supply housing supported by the door, and the supply ...
09/02/2008
7404407Substrate processing apparatus
The substrate processing apparatus has an enclosure structure enclosing a substrate support member to define a processing space. The enclosure structure has an opening closed by a shutter. A processing fluid supply unit, which supplies processing fluid, such as chem...
07/29/2008
7398787Automatic dispensing device for laundry care composition
A non-intrusive device for automatically dosing at least one liquid laundry care composition to an automatic laundry washing machine. The device employs a Venturi tube mechanism or a pump to dose the laundry detergent care composition. The dosing is controlled by a ...
07/15/2008
7395825Method and device for activating an element made of a shape memory alloy
A simple and cost-effective method is provided, according to which a positive temperature component (PTC) element directly controls the element made of a shape memory alloy. A simple and cost effective device for performing the method has a PTC element series-connec...
07/08/2008
7395826Machine for washing and/or sterilizing supplying-batching devices
In a machine for washing and/or sterilizing supplying-batching devices, an enclosing structure has supporting means for a supplying-batching device to be washed and/or sterilized. Feeding ducts are to be connected to a hopper of the supplying-batching device for fee...
07/08/2008
7368016Substrate processing unit and substrate processing apparatus
A substrate processing unit includes: a vertically-movable substrate holder for holding a substrate; a pan surrounding a periphery of the substrate holder; a cell, located below the substrate holder and within the pan, having in its interior a chemical processing se...
05/06/2008
7328713Nozzle apparatus for stripping edge bead of wafer
There is provided a nozzle apparatus for stripping an edge bead from a wafer, which includes a rotatable support arm, and a side rinse nozzle coupled to a leading end of the support arm to remove the bead of photoresist remaining on the edge of a wafer. The side rin...
02/12/2008
7316236Cleaning device for the shaving head of a dry shaving apparatus
A shaving head cleaning device includes a housing, a receptacle configured to receive the dry shaving apparatus, a receiving region configured to receive the shaving head of the dry shaving apparatus, a reservoir for containing cleaning fluid, a supply conduit conne...
01/08/2008
7314529Substrate cleaning apparatus and substrate cleaning method
A soft spray nozzle discharging a cleaning mist is vertically directed and fixed to an arm. A rinse nozzle discharging rinsing deionized water for suppressing obstruction is vertically fixed to the arm at a prescribed distance from the soft spray nozzle. During clea...
01/01/2008
7293570Carbon dioxide snow apparatus
A carbon dioxide snow apparatus of the present invention includes a carbon dioxide snow generation system and a propellant generation system connected to a common carbon dioxide gas source. The carbon dioxide snow generation system includes a condenser having a at l...
11/13/2007
7287535Work washing apparatus
A work washing apparatus including a transfer unit for controlling forward and rearward movements of a work, a table moved by the transfer unit, carrying out the washing of the work from upper and lower surfaces thereof and provided with water/air pipes, an upper su...
10/30/2007
7284561Detergent dispenser for a washer system
A detergent dispenser system is disclosed in which a dispensing valve is provided for fluidly connecting to a detergent supply container. A receptacle is connected to the dispensing valve for receiving a predetermined quantity of detergent from the detergent supply ...
10/23/2007
7275553Liquid processing apparatus and liquid processing method
A cleaning processing apparatus comprises a spin chuck for holding a wafer W, an under plate being positioned to face the back surface of the wafer W with a prescribed gap provided therebetween, a support member for supporting the under plate, and a nozzle hole form...
10/02/2007
7270133System and method for cleaning asphalt contact surfaces
Systems and methods for cleaning asphalt contact surfaces are provided. One such system includes a means for determining a dilution ratio appropriate to a particular asphalt contact surface, a nozzle proximate to the asphalt contact surface, and a pump in fluid comm...
09/18/2007
7258124Apparatus and method for treating surfaces of semiconductor wafers using ozone
An apparatus and method for treating surfaces of semiconductor wafers with a reactive gas, such as ozone, utilizes streams of gaseous material ejected from a gas nozzle structure to create depressions on or holes through a boundary layer of processing fluid formed o...
08/21/2007
7255114Ion sampling system for wafer
An ion sampling method for wafer provides a wafer in a sampling chamber, wherein the wafer surface that is going to be sampled faces upward; spraying an extraction liquid continuously on the wafer surface to form a liquid film thereon; keeping the thickness of the f...
08/14/2007
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