Did You Know...
...that after Parker Brothers executives turned down the game of Monopoly because it had "52 fundamental errors" (including taking too long to play), a copy of the game wound up in the home of the company president who stayed up until 1 a.m. to finish playing it? He was so impressed by the game that the next day he wrote to inventor Charles Darrow and offered to buy it!
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| Number | Title | Issue Date |
| 4197000 | Positive developing method and apparatus A positive developer and method spraying developer solution against rotating wafers stacked along rotation axis to remove photoresist and recycling the developer solution in successive cycles and batches of wafers being processed; adding small quantities ... | 04/08/1980 |
| 4190481 | Apparatus for ion control of solutions A system is provided for control of ion concentration (as for example in pH or redox control), for use for example in etching articles, wherein other features such as specific gravity control are also provided. The ion concentration control is provided wi... | 02/26/1980 |
| 4186759 | Closed system quick coupling head assembly A coupling head assembly for coupling a source container of chemical in a closed system, the assembly including a main passageway for flow of chemical from the container, an auxiliary passageway for rinsing the container when connected to a source of rins... | 02/05/1980 |
| 4186032 | Method for cleaning and drying semiconductors A semiconductor wafer is cleansed of loose foreign surface matter and chemical impurities near the surface in an apparatus which passes superheated steam over the wafer. Condensate is permitted to form and drip off the wafer. After rising above 100° C. t... | 01/29/1980 |
| 4181222 | Kit for processing printed circuit boards A method and apparatus for etching, developing, or plating circuit boards with a solution utilizing a transparent container in which the circuit board is contacted with the solution.... | 01/01/1980 |
| 4161356 | Apparatus for in-situ processing of photoplates An apparatus for in-situ processing of photoplates which minimizes photoplate contamination. Frustro-conical sloping walls are provided in opposed bowl-shaped mating domes containing a centrally disposed photoplate mounted for rotation. Condensing vapor o... | 07/17/1979 |
| 4132567 | Apparatus for and method of cleaning and removing static charges from substrates Wafers are cleaned in the manufacture of integrated circuits by revolving the wafers successively through a spray of deionized water and drying nitrogen gas in a closed chamber, and introducing ionized nitrogen gas into the closed chamber to eliminate sta... | 01/02/1979 |
| 4129457 | Post-polishing cleaning of semiconductor surfaces Semiconductor materials are cleaned after silica polishing by treatment with an aqueous quarternary ammonium salt solution followed by rinsing in water. The treatment coagulates the silica sols and suspends them so that they do not form a film on the semi... | 12/12/1978 |
| 4118649 | Transducer assembly for megasonic cleaning A transducer assembly adapted to oscillate at an ultrasonic frequency comprises a metallic foil having a back surface, at least one transducer having one face thereof mounted adjacent to the back surface by conductive means disposed therebetween, and insu... | 10/03/1978 |
| 4092176 | Apparatus for washing semiconductor wafers An apparatus for washing semiconductor wafers is disclosed which comprises a washing tub, a basket holding semiconductor wafers to be washed and placed in the washing tub, nozzles provided above and below the basket respectively for constantly squirting a... | 05/30/1978 |
| 4089339 | Solvent cleaning system Apparatus adapted for cleaning or degreasing work pieces by contacting with an organic degreasing agent such as a halogenated hydrocarbon. The work pieces are moved in and out of contact with the degreasing agent and are supported on an array of substanti... | 05/16/1978 |
| 4077416 | Apparatus for treating articles To eliminate the manual handling of individual articles associated with loading and unloading conventional treating apparatus, a plurality of articles are simultaneously treated in the carriers which are used for batch handling prior to and subsequent to ... | 03/07/1978 |
| 4077467 | Method and apparatus for soldering, fusing or brazing An apparatus for soldering an article which is placed within a first confined region in hot saturated vapors of a primary high temperature liquid. The vapors condense on the article to heat the article for such purpose. A second body of hot saturated vapo... | 03/07/1978 |
| 4064885 | Apparatus for cleaning workpieces by ultrasonic energy A delicate workpiece, such as a semiconductor wafer is cleaned by supporting the workpiece on a shaft which is rotated. A film of liquid solvent is caused to continuously flow across the exposed workpiece surface while the workpiece is in rotation and ult... | 12/27/1977 |
| 4027686 | Method and apparatus for cleaning the surface of a semiconductor slice with a liquid spray of de-ionized water Method and apparatus for cleaning the surface of a slice of semiconductor material through the use of a liquid spray, wherein the liquid spray is delivered at an angle to the exposed surface of a rotating semiconductor slice at a controlled pressure and v... | 06/07/1977 |
| 4021278 | Reduced meniscus-contained method of handling fluids in the manufacture of semiconductor wafers The invention relates to a method for reducing the consumption of deleterious materials used in the manufacture of semiconductor devices comprising the steps of supporting a semiconductor wafer, supplying a predetermined volume of said materials onto the ... | 05/03/1977 |
| 4015615 | Fluid application system A fluid application system which is useful for the subjection of substantially planar objects to various fluids for cleaning, etching, photoresist developing and the like. The system includes a chamber which has at least one agitation mechanism. The agita... | 04/05/1977 |
| 4008729 | Solvent article cleaner Apparatus for cleaning articles in volatile solvent is provided wherein the article to be cleaned is situated in a solvent collector with siphon tube attached above a reservoir of solvent and below a water-cooled vapor condenser, the solvent being heated ... | 02/22/1977 |
| 4003392 | Process and apparatus for cleaning MOS-LSI die A process and apparatus for cleaning particles from the surfaces of MOS-LSI die is disclosed. The present invention involves cleaning apparatus that includes a process tank, a manifold fixture that secures a plurality of universal inserts having variable ... | 01/18/1977 |
| 3996949 | Solvent cleaning system Apparatus adapted for cleaning or degreasing work pieces by contacting with an organic degreasing agent such as a halogenated hydrocarbon. The work pieces are moved in and out of contact with the degreasing agent and are supported on an array of substanti... | 12/14/1976 |
| 3995588 | Apparatus for positioning articles in a treating medium to form layers of fusible metal thereon In fabricating sealed contacts, often their axially extending leads are solder coated to protect them from contamination and to enhance their solderability into circuits. An apparatus for solder coating the leads, which minimizes their bending, includes a... | 12/07/1976 |
| 3990462 | Substrate stripping and cleaning apparatus A substrate stripping and cleaning apparatus including a closed bowl with an exhaust vent and a liquid drain, a rotating turntable in the bowl carrying baskets of substrates, a spray post with multiple fluid passages, orifices and spray nozzles directing ... | 11/09/1976 |
| 3983361 | Electric heating apparatus for heating corrosive solutions A pyrex tank for heating corrosive solutions is formed with a main body portion having an open top and with a small annular cavity portion depending from the bottom of the main body portion. A heater unit comprising a heating element enclosed in a quartz ... | 09/28/1976 |
| 3973572 | Self-purging apparatus for determining the quantitative presence of derived ions An apparatus for determining the quantitative presence of ions derived from solids, liquids, gases or similar items in which a deionized liquid dissolves the ions from the items, the liquid then is evaluated for conductivity by virtue of the presence of t... | 08/10/1976 |
| 3973987 | Water recycle treatment system for use in metal processing A water recycle treatment system comprising two main treatment sub-systems for treatment of contaminated water from a plurality of concentrated solutions and rinse baths to separate out the impurities therein. A first sub-system treats less concentrated s... | 08/10/1976 |
| 3970471 | Methods and apparatus for treating wafer-like articles Wafer-like articles are inserted through an input port into one of a plurality of slots in a rotatable disc having a slotted periphery. The disc is disposed in a vertical plane between a pair of closely-spaced parallel plates which laterally retain the ar... | 07/20/1976 |
| 3968013 | System for cleaning work pieces with solvent Apparatus adapted for cleaning or degreasing work pieces by contacting with an organic degreasing agent such as a halogenated hydrocarbon. The work pieces are moved in and out of contact with the degreasing agent and are supported on an array of substanti... | 07/06/1976 |
| 3964956 | System for maintaining uniform copper etching efficiency System and apparatus for the controlled etching of copper work pieces with ferric chloride etchants. The working solution is constantly monitored with regard to its oxidation reduction potential (ORP) by comparison with a standard solution or voltage. To ... | 06/22/1976 |
| 3964957 | Apparatus for processing semiconductor wafers Circular wafers of semiconductor (silicon) are chemically treated, e.g., etched, by supporting the wafers vertically by contacting their edges with annularly grooved drive rollers, immersing the supported wafers in a body of chemical medium (e.g., etchant... | 06/22/1976 |
| 3958585 | Apparatus for stripping residual solvent from polymer pellets Apparatus for continuous stripping of residual volatiles from polymer pellets, having their surfaces wet with water, by the use of an upwardly moving flow of steam through a downwardly moving column of wetted polymer pellets, moving in plug-flow, which mi... | 05/25/1976 |
| 3950184 | Multichannel drainage system Disclosed is a multichannel drainage system for separately draining the centrifugally broadcast residue of different liquids sequentially dispensed on the top surface of a semiconductor wafer spun on a spindle at a work station. The multichannel drainage ... | 04/13/1976 |
