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Class 134/78 - With rotary or swinging work transfer means


Subclass of Class 134 - Cleaning and liquid contact with solids
Definition: Apparatus in which the means to transfer, carry, or convey
No. of patents: 30
Last issue date: 03/09/2010


NumberTitleIssue Date
7673637Photomask cleaner
A photomask cleaner includes a clamp assembly using clamping plates with an elastic buffer device for clamping a photomask to be cleaned positively, a displacement mechanism for moving the clamp assembly among workstations subject to a predetermined track, a cleanin...
03/09/2010
7290551Washing device and its work conveying method
The present invention resides in a washing device constructed by a conveyer of a carrying-in side arranged in a frame, a reservoir lower portion having plural rails for holding the work and an ultrasonic generator arranged in this frame, each reservoir upper portion...
11/06/2007
7267128Substrate treating apparatus
A substrate treating apparatus for treating substrates includes a treating tank for receiving and treating the substrates, a holding device movable, while holding the substrates in a cantilever mode, between a treating position in the treating tank and a transfer po...
09/11/2007
7240680Substrate processing apparatus
A substrate processing apparatus includes a rotor 45 for rotating a plurality of wafers W paralleled each other at appropriate intervals. While rotating the wafers W by the rotor 45, a chemical liquid is supplied to the wafers W for their processing. T...
07/10/2007
7233841Vision system
A vision system and method for calibrating motion of a robot disposed in a processing system is provided. In one embodiment, a vision system for a processing system includes a camera and a calibration wafer that are positioned in a processing system. The camera is p...
06/19/2007
7085622Vision system
Generally a method and apparatus for viewing images within a processing system is provided. In one embodiment, an apparatus includes a plate having a camera, transmitter and battery coupled thereto. The plate is adapted to be transported about a semiconductor proces...
08/01/2006
7080652Automated semiconductor processing systems
A semiconductor processing system for wafers or other semiconductor articles. The system uses an interface section at an end of the machine accessible from the clean room. A plurality of processing stations are arranged away from the clean room interface. A transfer...
07/25/2006
6946052Separating apparatus and processing method for plate member
This invention is to guarantee that in separating a plate member such as a bonded substrate stack, a fluid is injected to an appropriate portion of the plate member. While a bonded substrate stack (50) is rotated, the vertical position of its peripheral porti...
09/20/2005
6945260Machine for treating objects
A machine for treating objects having a series of stations (12) whereof each includes a system for gripping (16) a container (11) in a loading point of the path, wherein, between the loading and unloading points, the container (11) is dis...
09/20/2005
6916231Polishing apparatus
A polishing apparatus for polishing a workpiece has a polishing unit and a cleaning unit. The polishing unit has a polishing table having a polishing surface thereon, and a top ring for pressing the workpiece against the polishing surface. The cleaning unit has a ro...
07/12/2005
6910487Method and apparatus for liquid-treating and drying a substrate
The present invention is related to a method and apparatus for liquid treating and drying a substrate, such as a semiconductor wafer, the method comprising the step of immersing a substrate or a batch of substrates in a tank filled with a liquid, and removing the su...
06/28/2005
6871655Automated semiconductor processing systems
A semiconductor processing system for wafers or other semiconductor articles. The system uses an interface section at an end of the machine accessible from the clean room. A plurality of processing stations are arranged away from the clean room interface. A transfer...
03/29/2005
6701943System for cleaning perforated panels
A system for cleaning grates includes a first power wash portion for applying a pressurized wash fluid to a first side of a grate, and a second power wash portion for applying a further pressurized wash fluid to a second side of the grate. A receiving por...
03/09/2004
6632751Method and apparatus for liquid-treating and drying a substrate
The present invention is related to a method and apparatus for liquid treating and drying a substrate, such as a semiconductor wafer, the method comprising the step of immersing a substrate or a batch of substrates in a tank filled with a liquid, and remo...
10/14/2003
6629539Sample processing system
This invention is to provide a processing system suitable for manufacturing, e.g., an SOI substrate. A processing system includes a turntable on which holding mechanisms for holding bonded substrate stacks are mounted at a substantially equal angular inte...
10/07/2003
6584992Cleaning system and method
The present invention comprises a conveyor assembly for carrying an item that has been painted by over-spray or dipping to a cleaning chamber where a cleaning means, typically a high pressure water cleaning device, is used to remove paint layers from an i...
07/01/2003
6558476Substrate processing method
A substrate processing method of the present invention prevents the reattachment of particles to substrates, such as semiconductor wafers, when processing and cleaning the substrates by immersing the substrates held in a vertical attitude in a processing ...
05/06/2003
6523553Wafer edge cleaning method and apparatus
A method and apparatus is provided for removing material from the edge of a disk. In one embodiment, the edge of the disk is contacted with etchant via an etchant containing swab or trough (which may contain one or more transducers) and is rotated such th...
02/25/2003
6446646Substrate processing apparatus
Chambers each include an inlet port for supplying N2 gas and an outlet port for discharging an inner atmosphere, and therefore the chambers have different amounts of supply of N2 gas in a unit of time and different amounts of dischar...
09/10/2002
6273105Method and apparatus for cleaning thin substrates
A method and apparatus are provided for the fine cleaning of a thin substrate. The apparatus has a transporter capable of moving the substrate through the apparatus by non-fluid contact with the edges of the substrate alone. In a typical embodiment, the t...
08/14/2001
6199564Substrate processing method and apparatus
A wafer processing apparatus prevents the reattachment of particles to wafers, such as semiconductor wafers, when processing the wafers by immersing the same held in a vertical attitude in a processing liquid and a cleaning liquid. When immersing the wafe...
03/13/2001
5996596Method and apparatus for cleaning ophthalmic lenses and blocks
A process and machine for cleaning ophthalmic lenses and blocks heats a washing solution in a wash tank and a rinsing solution in a rinse tank to approximately l40° F. Ultrasonic wave agitation is then initiated in the solutions. A set of lenses or block...
12/07/1999
5746234Method and apparatus for cleaning thin substrates
A method and apparatus are provided for the fine cleaning of a thin substrate. The apparatus has a transporter capable of moving the substrate through the apparatus by non-fluid contact with the edges of the substrate alone. In a typical embodiment, the t...
05/05/1998
5464032Dish washing unit for trays loaded with dishes
In a dish washing unit for trays loaded with dishes having a separating stage with a turning device, a delivery and removal stage and a washing stage, the supply conveyor is a transverse conveyor belt with a right-angle deflector. Additionally, the inner ...
11/07/1995
5450867Handling mechanism for workpiece fastening pallets
A handling mechanism for workpiece fastening pallets (1), comprising fastening means (4') for fixing a pallet (1) to the handling mechanism and a wash basin (8) as well as a wash liquid circulating system (9-12). The fastening means (4') is a part of a ro...
09/19/1995
5447170Apparatus for cleaning film
A film cleaning apparatus and method is disclosed where apparatus includes a feed reel and a take-up reel, and a film path created by a number of particle transfer rollers. Also in the film path is a region of high humidity followed by two buffing rollers...
09/05/1995
5203360Disc washing system
An automated disc washing machine having, in sequence, a loading station for loading a disc into the disc washing machine, at least one cleaning station for cleaning a disc, and an unloading station for unloading a cleaned disc from the disc washing machi...
04/20/1993
5092011Disk washing apparatus
Described herein is a disk washing apparatus for cleaning substrate disks of memory medium, which comprises in combination: a loader section having a magazine for holding a number of disks to be washed; a working section including a washing stage arranged...
03/03/1992
4694846Garbage truck with trash bin cleaning system
A garbage truck for handling large trash bins has a system incorporated therein for cleaning and deodorizing the bins after they have been emptied. Immediately after a bin has been emptied into the garbage truck trash compactor and while it is in an inver...
09/22/1987
4381285Contact lens sterilizing device
The present invention comprises a contact lens sterilizing device (10,54,118) which chemically disinfects contact lenses (L) in a cell (20,64,134) containing antimicrobial solution (42,104,144) and which subsequently transfers the lenses (L) to a storage ...
04/26/1983
 
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