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| Number | Title | Issue Date |
| 8015983 | Surface treatment apparatus The surface treatment apparatus includes: a supply device for supplying an introduced workpiece to the inside of a treatment cell of a subsequent surface treatment device; a surface treatment device for supplying a surface treatment liquid to the inside of the treat... | 09/13/2011 |
| 7581551 | Cleaning apparatus The invention provides a cleaning apparatus which can remove an organic material for an organic EL element attaching to a mask made of a thin metal film. The cleaning apparatus of the invention includes first and second cleaning tanks cleaning a mask with a predeter... | 09/01/2009 |
| 7549428 | Substrate processing apparatus A substrate processing apparatus includes a photosensor for detecting the presence/absence of a substrate in each place within a carrier cassette, a pair of processing tanks for performing the same process at the same time, and a supply mechanism for supplying a pro... | 06/23/2009 |
| 7427330 | Cleaning bench for removing contaminants from semiconductor process equipment Described are cleaning benches and methods for removing contaminant layers from semiconductor process components using small volumes of hazardous liquids and minimizing cross-contamination between components from different deposition chambers. Components to be clean... | 09/23/2008 |
| 7384484 | Substrate processing method, substrate processing apparatus and substrate processing system After subjected to a developing process, a rinsing process and a replacing process in this order in a developing unit 10A, 10B, a substrate W wet with an anti-drying solution is wet-transported to a supercritical drying unit 20 by a primary tran... | 06/10/2008 |
| 7350528 | Warewash machine with moveable table and multi-position rack support track A warewash machine includes a housing at least in part defining a washing chamber having an access opening and a door mounted for movement between a closed position for washing and an open position for inlet/outlet of wares through the access opening. At least one n... | 04/01/2008 |
| 7332440 | Wet etching apparatus and method A wet etching apparatus and method to shorten processing time and to eliminate formation of unintended mask pattern are described. In the conventional art, after a mask pattern is formed, alien substances such as water mist or stain are left on the substrate. The al... | 02/19/2008 |
| 7328712 | Cleaning bench for removing contaminants from semiconductor process equipment Described are cleaning benches and methods for removing contaminant layers from semiconductor process components using small volumes of hazardous liquids and minimizing cross-contamination between components from different deposition chambers. Components to be clean... | 02/12/2008 |
| 7290551 | Washing device and its work conveying method The present invention resides in a washing device constructed by a conveyer of a carrying-in side arranged in a frame, a reservoir lower portion having plural rails for holding the work and an ultrasonic generator arranged in this frame, each reservoir upper portion... | 11/06/2007 |
| 7270134 | System for treating mass-production parts A system for treating, in liquids, a mass-production parts contained in transport baskets, comprising at least one tank which contains liquid for submerging the transport baskets, at least one transport vehicle for the transport baskets by which the transport basket... | 09/18/2007 |
| 7252098 | Apparatus for cleaning and drying substrates A method and apparatus for cleaning, rinsing and Marangoni drying substrates is provided. A line of fluid is sprayed along a substrate surface forming an air/fluid interface line, and a line of drying vapor is supplied to the interface line to achieve Marangoni dryi... | 08/07/2007 |
| 7080652 | Automated semiconductor processing systems A semiconductor processing system for wafers or other semiconductor articles. The system uses an interface section at an end of the machine accessible from the clean room. A plurality of processing stations are arranged away from the clean room interface. A transfer... | 07/25/2006 |
| 7029539 | Angular spin, rinse, and dry module and methods for making and implementing the same A method for processing a wafer in a spin, rinse, and dry (SRD) module is provided. The method includes engaging a wafer in a process plane, spinning the wafer in the process plane, and cleaning a top surface and a bottom surface of the wafer while spinning the wafe... | 04/18/2006 |
| 7026015 | Device and method for the surface treatment of workpieces The invention relates to a device for the surface treatment of workpieces (12) such as vehicle bodies. One such device has a plurality of successive treatment stations (1–9), a guiding system (16, 17) having a first guiding section (16)... | 04/11/2006 |
| 7021323 | Dust-incompatible article transfer container cleaner To clean the inside and outside of a container capable of containing dust-free objects for carrying, a cleaning apparatus is used within a clean room or a housing in which the cleaning apparatus is installed. The clean room or housing is kept highly cleaned. By the ... | 04/04/2006 |
| 7021322 | Warewash machine with wrap-around hood and multi-position splash guard, and drip flange for warewash machine A warewash machine includes a multi-position splash guard enabling multiple machine configurations in which undesired overspray is reduced or eliminated. A drip flange may also be provided to increase the amount of water that impinges upon wares. ... | 04/04/2006 |
| 7000622 | Methods and systems for processing a bevel edge of a substrate using a dynamic liquid meniscus A system and method for processing an edge of a substrate includes an edge roller and a first proximity head. The first proximity head being mounted on the edge roller. The first proximity head capable of forming a meniscus and including a concave portion and multip... | 02/21/2006 |
| 6941957 | Method and apparatus for pretreating a substrate prior to electroplating A method including the step of providing a substrate having a contact pad, and an under bump metallurgy overlying the contact pad, and a photoresist layer overlying the under bump metallurgy, and wherein the photoresist layer has an opening defined therein down to t... | 09/13/2005 |
| 6942738 | Automated semiconductor processing system An automated semiconductor processing system has an indexer bay perpendicularly aligned with a process bay within a clean air enclosure. An indexer in the indexer bay provides stocking or storage for work in progress semiconductor wafers. Process chambers are locate... | 09/13/2005 |
| 6926017 | Wafer container washing apparatus The present invention is directed to a semi-conductor handling equipment cleaning apparatus configured for use with wafer carriers. The base of the cleaning apparatus is configured to support the wafer carrier in sealing contact about a first aperture. A first fluid... | 08/09/2005 |
| 6913028 | Flexible container for liquid transport, liquid transport method using the container, liquid transport apparatus using the container, method for washing the container, and washing equipment A flexible container for liquid transport made of a flexible material includes a top face portion, a bottom face portion, and a peripheral face portion connecting the top face portion and the bottom face portion. An air tight, water resistant slide fastener is opena... | 07/05/2005 |
| 6904920 | Method and apparatus for cleaning containers A machine for cleaning containers such as flat media carriers has inside and outside arrays of nozzles arranged to spray a cleaning solution onto containers supported on a spinning rotor in a chamber. The cleaning solution, a mixture of water and a detergent or surf... | 06/14/2005 |
| 6792957 | Wet etching apparatus and method A wet etching apparatus and method to shorten processing time and to eliminate formation of unintended mask pattern are described. In the conventional art, after a mask pattern is formed, alien substances such as water mist or stain are left on the substrate. The al... | 09/21/2004 |
| 6755313 | Overhead traveling crane system An overhead traveling crane system has cylindrical guide members (16d, 18d) and guide bars (15a, 16a) installed on a moving device (18) and a lifting device (15), respectively. The guide bars (... | 06/29/2004 |
| 6742530 | Semi-aqueous solvent cleaning of paste processing residue from substrates A process of cleaning of objects that relate to semiconductor fabrication processes, such as, for example, conductive paste screening in the production of multilayer ceramic substrates and composite solder paste by stencil printing in electronic circuit assembly. Sp... | 06/01/2004 |
| 6637446 | Integrated substrate processing system A system and methods for substrate preparation are provided. In one example, a wafer processing system includes a system enclosure that contains wafer processing apparatus within an isolated wafer processing environment. The wafer processing apparatus inc... | 10/28/2003 |
| 6631818 | Overhead traveling crane system An overhead traveling crane system, wherein at least two locking members (25a) are mounted vertically slidably on a lifting device (15), a stopper (25b) and a contact member are fixed to the upper and lower end parts of each locking member (25a), respecti... | 10/14/2003 |
| 6615852 | Cleaning machine for die used for synthetic resin mould A machine for cleaning a die by using electrolysis and ultrasonic vibration which has in combination a degreasing processing system, an electrolytic-cleaning system with an electrolyte circulator system, and a rinse system. The die, in a container, is dip... | 09/09/2003 |
| 6576065 | Installation and method for chemical treatment of microelectronics wafers The invention relates to an installation for treating wafers made of materials serving as microelectronics substrates including a tank for containing a treatment bath, a wafer support device capable of receiving at least one wafer of a first size, and an ... | 06/10/2003 |
| 6575177 | Semiconductor substrate cleaning system A modular semiconductor substrate cleaning system is provided that processes vertically oriented semiconductor substrates. The system features a plurality of cleaning modules that may include a megasonic tank-type cleaner followed by a scrubber. An input ... | 06/10/2003 |
| 6569252 | Semi-aqueous solvent cleaning of paste processing residue from substrates A process of cleaning of objects that relate to semiconductor fabrication processes, such as, for example, conductive paste screening in the production of multilayer ceramic substrates and composite solder paste by stencil printing in electronic circuit a... | 05/27/2003 |
| 6460549 | Method and apparatus for degreasing a metal part Disclosed is a process of recycling and reusing an aqueous degreasing solution for further use as a component of a coolant solution which is itself recycled and reused in metal cutting machines. Also disclosed is a method of degreasing parts, and a degrea... | 10/08/2002 |
| 6435199 | Treatment apparatus In an apparatus for treating semiconductor wafers, a plurality of chemical treatment tanks 21a to 21c filled with treatment liquids for processing semiconductor wafers W and a plurality of rinse treatment tanks 22a to 22c filled with rinse liquids for rin... | 08/20/2002 |
| 6394113 | Method and apparatus for cleaning filters In a method and apparatus for cleaning filters, the cleaning is efficiently performed by selecting cleaning steps according to the degree of contamination of the filter media. The degree of contamination of the filter media is analyzed before the filter i... | 05/28/2002 |
| 6345635 | Conveying system for work pieces A circuit-like system which includes a lower conveyor line, an upper conveyor line and a pair of lift or transfer mechanisms at the end of each line constructed for moving a work piece. A travel and hoist mechanism and a beam assembly are provided for dis... | 02/12/2002 |
| 6318382 | Cleaning method and cleaning apparatus, and electrophotographic photosensitive member and cleaning method of electrophotographic photosensitive member A method for efficiently cleaning a cleaning subject, especially a method for cleaning an electrophotographic photosensitive member enables a uniform and high quality image to be obtained without leaving image defects and irregular images. The method incl... | 11/20/2001 |
| 6308719 | Pre-clean deluge system A pre-clean deluge system for cleaning automobile white bodies including a cleaning solution filtration and distribution system. The filtration system includes a series of filters specially adapted to remove metal particles from the cleaning solution. The... | 10/30/2001 |
| 6294028 | Mercury process gold ballbond removal apparatus A method and apparatus for reducing the risk of environmental contamination from mercury spillage during carry over between processing tanks during the gold ball bond removal process by providing a self-contained, compact, environmentally safe system for ... | 09/25/2001 |
| 6277209 | Method and apparatus of regenerating filtration membrane cartridge for activated sludge In cleaning by sodium hypochlorite, filtration membrane cartridges are immersed in a washing tank storing a solution of sodium hypochlorite to decompose and remove organic contaminants clogging the pores of filtration membranes by oxidation of sodium hypo... | 08/21/2001 |
| 6245156 | Substrate transport method and apparatus, and substrate processing system Substrate transporting method comprising (a) inputting process data, (b) determining whether a number of units required for processing the wafer is an odd number or an even number, (c1) when a determination result of the step (b) is an odd number, transpo... | 06/12/2001 |