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| Number | Title | Issue Date |
| 6799584 | Condensation-based enhancement of particle removal by suction This invention is directed to apparatus and a method for removing particles from a surface, such as a semiconductor wafer. A fluid is applied to the surface on which the particles are distributed so as to coat the particles with the fluid. At least some of these par... | 10/05/2004 |
| 6800142 | Method for removing photoresist and post-etch residue using activated peroxide followed by supercritical fluid treatment Methods for cleaning semiconductor wafers are presented. Contaminants, particularly photoresist and post-etch residue, are removed from semiconductor wafers. A wafer or wafers is first treated with a peroxide-containing medium, for example, to oxidatively cleave bon... | 10/05/2004 |
| 6797077 | Latex paint remover Isobutyl isobutyrate is a safe, effective, and environmentally-friendly cleaning composition for removing dried latex paint. ... | 09/28/2004 |
| 6797073 | Plant for washing plastic material A plant for the continuous washing of plastic material in scales. The plant having a washing apparatus, at least one filtering unit connected to the apparatus for purifying the washing fluid and means for varying the time the scales remain in the washing apparatus a... | 09/28/2004 |
| 6793739 | Method of cleaning an ozone generator A cleaning method for removing solid deposits of the oxides of nitrogen, especially dinitrogen pentoxide, from ozone generator tubes and dielectrics is described. The method circulates warm dry gas in the tube section of the generator, warm water in the shell sectio... | 09/21/2004 |
| 6793740 | Method for cleaning pressurized containers containing moisture sensitive chemicals The present invention relates to a method for cleaning a pressurized container having at least one chemical contained therein. The pressurized container may be any type of container able to store chemicals under pressure. Preferably, however, the container is a rail... | 09/21/2004 |
| 6790291 | Method of and apparatus for processing substrate In a substrate processing apparatus for use in performing a reduced-pressure pull up drying method, a liquid drainage pipe (46) for draining a drainage liquid containing an organic solvent from a processing chamber (26) including therein a processing b... | 09/14/2004 |
| 6790292 | Reticle cleaning without damaging pellicle A reticle having a pellicle frame and pellicle membrane is cleaned without removing or damaging the pellicle membrane. A cover encases the pellicle membrane and pellicle frame, sealing the pellicle membrane from the external environment during a cleaning process. Th... | 09/14/2004 |
| 6789552 | Method of cleaning a toilet A spray gun is connected to a source of pressurized liquid. In one aspect, the worker positions the nozzle of the spray gun into the bowl, adjacent the lower, interior edge of the rim, and aims the liquid outlet of the spray gun toward the primary interior surface o... | 09/14/2004 |
| 6786977 | Gas-expanded liquids, methods of use thereof, and systems using gas-expanded liquids for cleaning integrated circuits Gas-expanded liquids, methods of use thereof, and systems of using gas-expanded liquids are provided. One exemplary system, among others, includes: a gas-expanded liquid system comprising a gas and a liquid, wherein the gas-expanded liquid system is adapted to gener... | 09/07/2004 |
| 6783602 | Multistep single chamber parts processing method The present invention is directed to a method for controlled environment processing of parts in a chamber or chambers wherein solvents and/or solutions used for processing the parts can be introduced. The process includes applying a negative gauge pressure to the ch... | 08/31/2004 |
| 6779239 | Method for removing a seal A method is disclosed for removing a seal that is fixed in a groove of a component. A highly pressurised jet of liquid is aimed at the seal or between the seal to free it from the groove. The method is particularly suitable for freeing a sealing strip in a rotor or ... | 08/24/2004 |
| 6780253 | Gradient dragout system in a continuous plating line An enhanced gradient dragout system conserves plating chemicals, including precious metals by providing a series of tanks with cascading rinse solutions having a flow rate controlled by heating the first tank to increase the evaporation rate. A portion of the concen... | 08/24/2004 |
| 6776853 | Cleaning method and method for manufacturing liquid crystal device In a cleaning apparatus 500, as a pre-cleaning step, cleaning is performed in a first and a second backup cleaning bath 602 and 603 using a hydrocarbon-based cleaning liquid composed of a normal paraffin, such as normal nonane or normal decane, ... | 08/17/2004 |
| 6776171 | Cleaning of semiconductor wafers by contaminate encapsulation An apparatus and method are provided for removing contaminate particulate matter from substrate surfaces such as semiconductor wafers. The method and apparatus use a material, preferably a liquid curable polymer, which is applied as a sacrificial coating to the surf... | 08/17/2004 |
| 6773668 | Detergent dispenser A solid detergent dispenser for use with a dishwashing machine includes a chamber and a lid. The chamber is configured and arranged to receive a solid detergent having a particular composition. A water inlet receives water from a water source, and the water flows th... | 08/10/2004 |
| 6770150 | Process for removing deposits from enclosed chambers Alkaline and acid cleaning solutions (180, 182), are used sequentially for removing organic and inorganic residues, respectively, from the chamber. The two cleaning solutions are stored in separate storage containers (52, 54) carried by the cart. The a... | 08/03/2004 |
| 6749691 | Methods of cleaning discolored metallic arrays using chemical compositions Methods of removing discoloration from a metal surface of an electronic device are presented the methods comprising the steps of exposing a metallic surface of an electronic device to a first composition comprising an organic reagent, the metallic surface having dis... | 06/15/2004 |
| 6746544 | Apparatus for cleaning and drying substrates A method and apparatus for cleaning, rinsing and Marangoni drying substrates is provided. A line of fluid is sprayed along a substrate surface forming an air/fluid interface line, and a line of drying vapor is supplied to the interface line to achieve Marangoni dryi... | 06/08/2004 |
| 6746543 | Apparatus for and method of cleaning objects to be processed A cleaning apparatus and a cleaning method for cleaning a object are provided. In the cleaning apparatus, a drying chamber 42 and a cleaning bath 41 are separated from each other up and down, respectively. Thus, a space in the drying chamber 42 ... | 06/08/2004 |
| 6736148 | Automated semiconductor processing system An automated semiconductor processing system has an indexer bay perpendicularly aligned with a process bay within a clean air enclosure. An indexer in the indexer bay provides stocking or storage for work in progress semiconductor wafers. Process chambers are locate... | 05/18/2004 |
| 6735276 | Sample preprocessing system for a fluorescent X-ray analysis and X-ray fluorescence spectrometric system using the same A sample preprocessing system for a fluorescent X-ray analysis includes a sample preprocessing apparatus for retaining on a surface of a substrate a substance to be measured that is found on the surface of the substrate, after such substance has been dissolved and s... | 05/11/2004 |
| 6733594 | Method and apparatus for reducing He backside faults during wafer processing A method and system for processing a wafer is disclosed. The method includes receiving a wafer having a process side and a backside. The method further includes removing un-wanted particles from the backside of the wafer to prevent gaps from forming between the back... | 05/11/2004 |
| 6730177 | Method and apparatus for washing and/or drying using a revolved coanda profile A method for exposing an object to fluid using principles of the present invention includes the steps of introducing the object into a coanda flow forming passage and directing a coanda jet onto a coanda profile that surrounds the object to cause amplified flow to s... | 05/04/2004 |
| 6726777 | Cleaning method and apparatus using fluid spraying Cleaning fluid is sprayed upwards from under a substantially horizontally-held object to be cleaned for cleaning the underside of the object. At this time, an accelerating fluid accelerates the cleaning fluid to change its spraying direction toward a surface of the ... | 04/27/2004 |
| 6715495 | Reduced particle contamination manufacturing and packaging for reticles A method of transporting a reticle is disclosed. The reticle is placed in a reticle carrier that has an ionizer. Moreover, the reticle may be attached with a pellicle. The pellicle consists of a pellicle frame and a pellicle film stretched over the pellicle frame. T... | 04/06/2004 |
| 6716307 | Process and system for the removal of scale build-up A method to remove scale build-up in a vessel having at least one screen is described and involves placing a cover inside the vessel such that it is located beneath at least one screen to separate the screen from the rest of the vessel. The cover in the vessel forms... | 04/06/2004 |
| 6709530 | Vehicle treatment system and operating method The invention relates to an operating method and a vehicle cleaning system comprising at least one treatment device, a control unit and a device for the optical detection of a vehicle. According to said method a vehicle entering or situated in the system is opticall... | 03/23/2004 |
| 6709529 | Roof brush and method of use A roof brush and method of use. The roof brush comprises a horizontal arm pivotally attached to a vertical arm at a pivot assembly. A cleaning head is disposed on the vertical arm, and has bristles at a predetermined bristle angle to the horizontal arm to maximize t... | 03/23/2004 |
| 6702902 | Method and device for radioactive decontamination of a steel wall Disclosed a method for radioactive decontamination of a steel surface, which is performed by bringing the surface to be decontaminated into contact with a pickling solution comprising a first iron oxidation agent, wherein bringing into contact being achie... | 03/09/2004 |
| 6699330 | Method of removing contamination adhered to surfaces and apparatus used therefor A method of removing surface-deposited contaminants, comprising bringing an ozone-containing treating solution into contact with the surface of a treating target on which contaminants have deposited. The ozone-containing treating solution comprises an org... | 03/02/2004 |
| 6695988 | Method and apparatus for washing or hydration of ophthalmic devices This invention discloses an apparatus and method for hydrating or washing ophthalmic devices, comprising the step of directing to an ophthalmic device having a higher concentration of impurities fluid which has previously been directed to ophthalmic devic... | 02/24/2004 |
| 6684890 | Megasonic cleaner probe system with gasified fluid In accordance with one embodiment there is provided a method of improving the performance of a substrate cleaner of the type having a megasonic probe with a probe shaft extending generally parallel to a surface of a rotating substrate, and at least one di... | 02/03/2004 |
| 6684889 | Method and device for treating a substrate The invention concerns a method and a device for treating a substrate of an integrated circuit or the like during production. The invention is characterized in that it consists in spraying, from the bottom upwards, a treatment liquid (24) on the surface t... | 02/03/2004 |
| 6682607 | Reconditioning of semiconductor substrates to remove photoresist during semiconductor device fabrication A method for reconditioning the surface of a semiconductor substrate to remove an unwanted (i.e. defective) layer of photoresist is disclosed. The method adapts a conventional automated spinner which is used to rotate the substrate at high speed while a s... | 01/27/2004 |
| 6682604 | Restoration of contaminated polymer articles A method of restoring a contaminated polymer article including contacting a contaminated polymer article with an oil which is not a plasticizer under conditions effective to remove substantially all contaminants present on the polymer article to produce a... | 01/27/2004 |
| 6682605 | Apparatus and method for removing coating layers from alignment marks An apparatus and a method for removing coating layers from the top of alignment marks on a wafer are described. The apparatus includes a cleaning chamber that is a cavity and a lid member suspended in the cavity, a wafer chuck that is rotatably mounted in... | 01/27/2004 |
| 6679272 | Megasonic probe energy attenuator The present invention provides a megasonic cleaning apparatus configured to provide effective cleaning of a substrate without causing damage to the substrate. The apparatus includes a probe having one of a variety of cross-sections configured to decrease ... | 01/20/2004 |
| 6679274 | Clean-in-place method for cleaning solution delivery systemes/lines A method is taught for cleaning photographic chemistry product fouling, including a proteinaceous portion and a non-proteinaceous portion from a liquid delivery system. The method comprises the steps of displacing resident product solution in the piping w... | 01/20/2004 |
| 6676769 | Apparatus and method for cleaning a furnace torch An apparatus and a method for cleaning a torch for a vertical furnace used in semiconductor processing are disclosed. The apparatus is constructed by two main components of a basket-shaped fixture body and a cleaning bath. The fixture body is formed of cy... | 01/13/2004 |
