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| Number | Title | Issue Date |
| 8181660 | Treatment liquid permeation unit and treating apparatus A treatment liquid permeation unit comprises: at least one vibration unit; and a vibration transmission unit for transmitting a vibration from the vibration unit. The vibration transmission unit is positioned between an adhesive with which a wafer is combined to a s... | 05/22/2012 |
| 8141570 | System and method for removing foreign particles from semiconductor device A vibration device separates foreign particles from a semiconductor device, and a suction interface of a suction device covers an opening portion of the semiconductor device. A space connected with a vacuum passage and a communication passage is formed between the s... | 03/27/2012 |
| 8122899 | Apparatus and method for treating substrate An apparatus is provided for supplying a plurality of chemicals or gases to the surface of a substrate to clean and dry the substrate. The apparatus includes a substrate support unit with a chuck on which a substrate is loaded, a bottom chamber having an open top an... | 02/28/2012 |
| 8104489 | Dishwasher Provided is a dishwasher. The dishwasher includes a sump case forming a space to store wash liquid, and a drain pump provided at one side of the sump case. The drain pump includes a drain impeller that induces a flow of wash liquid, and a plurality of mutually separ... | 01/31/2012 |
| 8015987 | Vibration-type cleaning device for contact lenses A vibration-type cleaning device for contact lenses comprises an adaptor that is provided with a support part thereon for supporting a contact lens case and a base that is provided under the bottom of the adaptor. The base is connected with the adapter via a positio... | 09/13/2011 |
| 8011378 | Megasonic cleaning module Disclosed herein is a megasonic cleaning module. The megasonic cleaning module includes a vibrator having a piezoelectric element mounted therein for generating ultrasonic waves by the vibration of the piezoelectric element, a first vibratory rod having a diameter g... | 09/06/2011 |
| 7958900 | Scrubbing machine for cleaning instruments The invention relates to a cleaning machine (MA) comprising a vessel (VE) having a stirring member (BA) mounted therein, the stirring member carrying a load of utensils of a first type. The stirring member also carries a load of utensils of a second type. The invent... | 06/14/2011 |
| 7913703 | Method and apparatus for uniformly applying a multi-phase cleaning solution to a substrate An apparatus used to supply a force onto a cleaning solution for processing a substrate for cleaning surface contaminants is disclosed. The apparatus includes a force applicator and a gate. The force applicator is configured to be adjusted to a first height off the ... | 03/29/2011 |
| 7913704 | Systems and methods for washing-out concrete pouring equipment A system for washing-out concrete pouring equipment includes a bin for receiving waste materials washed with water from the concrete pouring equipment. The bin includes openings allowing liquid to drain into a base unit that includes sidewalls defining a receptacle ... | 03/29/2011 |
| 7886753 | Disinfection apparatus with pump device The invention relates to a disinfection apparatus (1) for disinfecting liquid cleaning of health care objects and the like, which disinfection equipment comprises a washing system (2) for supplying liquid to a chamber (3) which is adapted to hol... | 02/15/2011 |
| 7886754 | Ultrasonic cleaning apparatus and household appliance having the same The invention relate to an ultrasonic cleaning apparatus (1) for treating textile products comprising a body (2, 3) including an opening (7), wherein at least a portion of the body (2) is formed as a gripping element, an ultrasonic transd... | 02/15/2011 |
| 7836901 | Method and apparatus for wafer cleaning An apparatus for wet processing individual wafers comprising; a means for holding the wafer; a means for providing acoustic energy to a non-device side of the wafer; and a means for flowing a fluid onto a device side of the wafer. ... | 11/23/2010 |
| 7814918 | Apparatus for cleaning inkjet head and cleaning method thereof In a method of cleaning an ejection face by supplying a head liquid on a surface (ejection face) of an inkjet head provided with ink ejection outlets, and then by performing wiping operations thereon, an ink residue on the ejection face is efficiently and surely rem... | 10/19/2010 |
| 7798159 | At-home integrated cleaning and disinfection system and method for dental hardware An at-home integrated cleaning and disinfection system for dental hardware, for consumer use includes a compact and portable base unit sized for at-home use by a consumer, the base unit including a holding frame and an ultraviolet lamp. The system also includes a cl... | 09/21/2010 |
| 7757701 | Ultrasonic cleaning method and device An ultrasonic cleaning device (50) comprises: an ultrasonic oscillation plate (2) having a plurality of ultrasonic oscillators (1); an ultrasonic wave guide chamber (3) for collecting an ultrasonic wave force generated by the ultrasonic o... | 07/20/2010 |
| 7726325 | Deaeration device and ultrasonic cleaning device using the same A deaeration device for bubbling dissolved air in the cleaning liquid by cavitation is connected on a cleaning-liquid circulation path so as to bubble the dissolved air in the cleaning liquid flowing through the cleaning-liquid circulation path by the deaeration dev... | 06/01/2010 |
| 7681582 | Multiple spray arm dishwashing apparatus and method for assembling same A dishwasher includes a cabinet, an upper rack and a lower rack disposed within the cabinet. The upper and lower racks support articles to be cleaned. The dishwasher also includes a first spray arm and a second spray arm rotatably mounted within the cabinet. The fir... | 03/23/2010 |
| 7597110 | Water-bearing domestic appliance comprising a drainage pump and corresponding drainage pump A water-bearing domestic appliance includes a retainer for retaining items to be subjected to a liquid treatment and a drainage pump having an inlet through which liquid enters the drainage pump. The drainage pump also includes an outlet through which liquid exits t... | 10/06/2009 |
| 7581553 | Domestic injection type ultrasonic washing apparatus Disclosed herein is a domestic injection-type ultrasonic washing apparatus comprising an oscillator module and an injector module. The oscillator module includes an oscillation circuit unit provided with various elements to generate electric vibration, ultrasonic vi... | 09/01/2009 |
| 7549429 | Ultrasonic washing device In an ultrasonic washer for washing by splaying washing toward an object to be washed or a portion to be washed from a front end of a nozzle, a part of an ultrasonic wave propagation member connected to an ultrasonic transducer is protruded into a cavity of the nozz... | 06/23/2009 |
| 7527062 | Kitchenware washers and methods of manufacturing the same A kitchenware washing assembly includes at least one wall defining at least a portion of a tank for holding fluid for washing kitchenware. The kitchenware washing assembly also includes at least one pump and at least one chamber in fluid communication with the tank.... | 05/05/2009 |
| 7451774 | Method and apparatus for wafer cleaning An apparatus for wet processing individual wafers comprising; a means for holding the wafer; a means for providing acoustic energy to a non-device side of the wafer; and a means for flowing a fluid onto a device side of the wafer. ... | 11/18/2008 |
| 7422024 | Ultrasonic shower cleaning apparatus of double-side cleaning type An ultrasonic shower cleaning apparatus is disclosed which is capable of efficiently cleaning both surfaces of an article and configured to have a reduced size enabling an installation space thereof to be decreased. A pair of ultrasonic shower cleaning mechanisms ea... | 09/09/2008 |
| 7415985 | Substrate cleaning and drying apparatus A substrate cleaning and drying apparatus for performing drying treatment after cleaning treatment of substrates. The apparatus includes a treating tank for storing a treating liquid, and performing the cleaning treatment of the substrates immersed in the treating l... | 08/26/2008 |
| 7412982 | Cleaning probe and megasonic cleaning apparatus having the same A cleaning probe capable of providing uniform cleaning to an entire wafer while not damaging the edge portion of the wafer, and a megasonic cleaning apparatus having the cleaning probe are provided. The cleaning probe comprises a front portion located near the cente... | 08/19/2008 |
| 7396416 | Substrate cleaning device A substrate cleaning device comprises a chamber for cleaning a substrate; a substrate support installed in the chamber providing a surface for supporting the substrate during cleaning thereof; at least one cleaning solution supply outlet for spraying a cleaning solu... | 07/08/2008 |
| 7395827 | Apparatus to produce acoustic cavitation in a liquid insonification medium An apparatus to produce acoustic cavitation by controlling cavitation events in a liquid insonification medium utilizing a waveform to excite a transducer with a series of bipolar inharmonic tone bursts having medium recovery intervals between respective bursts so t... | 07/08/2008 |
| 7392814 | Substrate processing apparatus and method Pure water dissolving nitrogen gas and containing microbubbles is supplied to a substrate. Since microbubbles are very minute in size and also have the electrostatic property, they can efficiently adsorb particles on the substrate surface or in the pure water. Furth... | 07/01/2008 |
| 7387132 | Apparatus for treating wafer An apparatus for treating a wafer preferably includes a rotating chuck for rotating the wafer and a treating fluid supplying part for supplying the wafer with one or more treating fluids. The treating fluid(s) can be used to clean and/or dry the wafer. The treating ... | 06/17/2008 |
| 7380560 | Wafer cleaning apparatus with probe cleaning and methods of using the same Wafer cleaning apparatus include a cleaning tub configured to receive a wafer to be cleaned. A wafer cleaning unit coupled to the cleaning tub is configured to provide wafer cleaning solution to the wafer. A probe is positioned in the cleaning tub proximate the wafe... | 06/03/2008 |
| 7373941 | Wet cleaning cavitation system and method to remove particulate wafer contamination A cavitation cleaning system and method for using the same to remove particulate contamination from a substrate including providing at least one substrate immersed in a cleaning solution said cleaning solution contained in a cleaning solution container. The containe... | 05/20/2008 |
| 7371694 | Semiconductor device fabrication method and fabrication apparatus The flatness of the surface of a Si substrate is requested as the present gate length is miniaturized. The present invention is a semiconductor device fabrication method for flattening a silicon surface by continuously supplying a high-temperature fluoride ammonium ... | 05/13/2008 |
| 7337790 | Dishwasher Disclosed is a dishwasher, in which upper and lower pipes are opened/closed using a water pressure to simplify a configuration of the dishwasher and to reduce product costs. The present invention includes a washing chamber, top and bottom nozzles injecting water in ... | 03/04/2008 |
| 7334588 | Method and apparatus for wafer cleaning An apparatus for wet processing individual wafers comprising; a means for holding the wafer; a means for providing acoustic energy to a non-device side of the wafer; and a means for flowing a fluid onto a device side of the wafer. ... | 02/26/2008 |
| 7329039 | Systems and methods for determining a state of fluidization and/or a state of mixing Apparatus and methods are disclosed for treating a sample by selectively controlling sonic energy and/or selectively controlling the location of the sample relative to the sonic energy. ... | 02/12/2008 |
| 7306002 | System and method for wet cleaning a semiconductor wafer A system and method for cleaning a substrate, such as a semiconductor wafer, utilizes a rotatable wafer supporting assembly with a cylindrical body to provide stability for the substrate being cleaned, even at high rotational speeds. The rotatable wafer supporting a... | 12/11/2007 |
| 7306001 | Cleaning apparatus with cavitation enhancement unit A method for cleaning tubes and heat exchangers provides a cavitation enhancement unit between a source of pressurized fluid an a lance. The pressurized fluid flows through jets, which impart a high speed rotation to a set of propellers, preferably square in profile... | 12/11/2007 |
| 7299662 | Ultrasonic cleaning system for cleaning a plurality of parallel extending, strand like products, such as example wire, profiles and pipes The invention concerns an arrangement for ultrasound cleaning of several strandlike articles (4) traveling next to each other, such as, e.g., wires, profiles and pipes, by means of a liquid excited by ultrasound in a borehole (3), which is only slightl... | 11/27/2007 |
| 7287537 | Megasonic probe energy director A megasonic cleaning apparatus configured to provide effective cleaning of a substrate without causing damage to the substrate is provided. The apparatus includes a megasonic probe, a transducer configured to energize the probe, and a heat transfer element disposed ... | 10/30/2007 |
| 7278435 | Assembly and system for isolation of waste water in outdoor, open-air wash station A system and method for the collection of waste water generated in the course of maintenance or washing of a large object in an open-air, outdoor environment. The system, in its simplest form, includes a wash deck having a drain located within a valley of the deck, ... | 10/09/2007 |
