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Class 134/182 - With non-impelling fluid deflector or baffle other than conduits or nozzles


Subclass of Class 134 - Cleaning and liquid contact with solids
Definition: Apparatus having a baffle or deflector which is not operable
No. of patents: 240
Last issue date: 01/11/2011


1            
NumberTitleIssue Date
7866330Cleaning device, a lithographic apparatus and a lithographic apparatus cleaning method
A cleaning tool to clean a surface of a liquid confinement system of an immersion lithographic apparatus is disclosed, the liquid confinement system having an aperture to allow passage of a beam of radiation therethrough of an immersion lithographic apparatus. The c...
01/11/2011
7841352Cleaning device, a lithographic apparatus and a lithographic apparatus cleaning method
A cleaning tool to clean a surface of a liquid confinement system of an immersion lithographic apparatus is disclosed, the liquid confinement system having an aperture to allow passage of a beam of radiation therethrough of an immersion lithographic apparatus. The c...
11/30/2010
7686023Pressure washing system, components and methods
According to certain embodiments of the invention, a pressure washing system delivers a cleaning fluid under pressure to a surface to be cleaned, and includes a fluid pump unit for supplying the fluid to the surface. A fluid collector captures wastewater runoff of t...
03/30/2010
7409960Cleaning fluid container
The invention aims at improving a cleaning fluid container (3) for a cleaning device (RV) for personal needs, in particular for cleaning a shaving head (SK) of a dry shaving apparatus (R), with a housing (20), with an inlet port (15) provided on...
08/12/2008
7392815Chamber for wafer cleaning and method for making the same
A wafer processing chamber “chamber” is provided. Broadly speaking, the chamber allows a fluid flow and a fluid pressure within the chamber to be controlled in a variable manner. More specifically, the chamber utilizes removable plates that can be configured to ...
07/01/2008
7349158Diffraction grating-based encoded micro-particles for multiplexed experiments
Microparticles 8 includes an optical substrate 10 having at least one diffraction grating 12 disposed therein. The grating 12 having a plurality of colocated pitches Λ which represent a unique identification digital code that is detected...
03/25/2008
7337792Liquid processing apparatus and liquid processing method
A cleaning apparatus 1 includes a foup loading/unloading part 2 for mounting foups F each accommodating a plurality of wafers W at intervals of a constant pitch (normal pitch), a rotor 34 capable of holding the wafers W at half the normal pitch ...
03/04/2008
7323066Paint accessory cleaning device and method
A device and method for cleaning paint accessories and particularly roller covers and/or other paint accessories simultaneously or individually. A spray head has a fluid inlet engageable to a source of fluid and a fluid collection chamber in communication with the f...
01/29/2008
7311823Pool filter cleaning device
A pool filter cleaning device (1) which allows a person to thoroughly clean a filter cartridge (15) quickly and easily with minimal amount of splash back. The pool filter cleaning device (1) is comprised of a handle (2), an angled head se...
12/25/2007
7300526Method and system for removal of contaminates from phaseshift photomasks
A system and method to clean the pellicle frame and adhesive ring of a photomask reticle are described. One embodiment includes a cover that isolates the photomasks from the pellicle frame. The reticle is secured between a spin chuck and the cover so that the photom...
11/27/2007
7296583Pretreatment spray clean tank configuration
A spray clean stage of a pretreatment system for treating a product surface having contaminants includes a tank for holding a cleaning solution to clean the product surface. A solution applicator is in fluid communication with the tank through an applicator inlet. T...
11/20/2007
7264008Apparatus for cleaning a wafer
An apparatus for cleaning a wafer includes a plurality of holders for contacting and securing peripheral portions of a wafer, and for rotating the wafer, a first plate disposed to face a first surface of the wafer, the first plate having a plurality of first nozzles...
09/04/2007
7226514Spin-rinse-dryer
An inventive vertical spin-dryer is provided. The inventive spin-dryer may have a shield system positioned to receive fluid displaced from a substrate vertically positioned within the spin-dryer. The shield system may have one or more shields positioned to at least ...
06/05/2007
7223323Multi-chemistry plating system
Embodiments of the invention generally provide an electrochemical plating system. The plating system includes a substrate loading station positioned in communication with a mainframe processing platform, at least one substrate plating cell positioned on the mainfram...
05/29/2007
7210489Dishwasher
A dishwashing machine containing spraying devices and at least one dish rack. The dishwashing machine has at least one dish rack having stationary spraying devices to optimally clean material stacked in the at least one rack and increase and optimize storage room in...
05/01/2007
7204260Apparatus for cleaning polymeric pieces
A cleaning apparatus capable of sufficiently removing foreign matters such as coating or labels from surfaces of crushed pieces of the collected polymeric mold product is provided. The cleaning apparatus includes a cleaning bath provided with a rotary shaft extendin...
04/17/2007
7190522Chemical synthesis using diffraction grating-based encoded optical elements
An optical identification element having a synthesized chemical attached thereto includes an optical substrate having at least one diffraction grating disposed therein, the grating having a resultant refractive variation at a grating location, said grating being emb...
03/13/2007
7171973Substrate processing apparatus
The substrate processing apparatus has an enclosure structure enclosing a substrate support member to define a processing space. The enclosure structure has an opening closed by a shutter. A processing fluid supply unit, which supplies processing fluid, such as chem...
02/06/2007
7143772Method of manufacturing a circuit board and its manufacturing apparatus
It is possible to obtain a clean high-quality circuit board by removing affected material and foreign matter produced when a hole is formed. A manufacturing method of the circuit board includes (a) preparing a film-coated board material by bonding a film material as...
12/05/2006
7124766Apparatus and use thereof in cleaning a respiratory device
A cleaning apparatus includes a tank housing and a partition disposed in the tank housing so as to divide the interior thereof into pumping and cleaning chambers as the only chambers within the tank housing adapted to contain cleaning liquid. A submersible pump moun...
10/24/2006
7126755Method and apparatus for labeling using diffraction grating-based encoded optical identification elements
A method and apparatus for labeling an item using diffraction grating-based encoded optical identification elements 8 includes an optical substrate 10 having at least one diffraction grating 12 disposed therein. The grating 12 has one or ...
10/24/2006
7106513Diffraction grating-based encoded particle
An encoded particle 8 includes a particle substrate 10; at least a portion of the substrate having at least one diffraction grating disposed therein, the grating having a resultant refractive index variation at a grating location, the grating being emb...
09/12/2006
7101418Method and device for degassing a suspension, specifically a fiber stock suspension
The invention relates to a method and a device for degassing of suspension, specifically fiber stock suspension. The method according to the invention is characterized in that separated excess suspension is discharged sideways through an overflow having an overflow ...
09/05/2006
7092160Method of manufacturing of diffraction grating-based optical identification element
A method for manufacturing a diffusion grating-based optical identification element is provided. The optical identification element includes a known fiber substrate, having a diffraction grating disposed therein the grating being indicative of a code when exposed to...
08/15/2006
7086408Multipurpose system for the automatic washing and drying of industrial containers and appliances in controlled environmental conditions
The present invention relates to a multipurpose system for the automatic washing and drying of industrial containers and appliances, in controlled environmental conditions. ...
08/08/2006
7063095Drain washing apparatus
The present invention relates to apparatus for washing drains. The apparatus includes a support and a nozzle, which are adapted and configured to convey fluid to and to wash a drain. Typically, the apparatus includes a wand as the support and a ball or head as the n...
06/20/2006
7045040Process and system for eliminating gas bubbles during electrochemical processing
A method and system for preventing gas bubble formation on a selected region of a wafer surface as the surface is brought in contact with a process solution for an electrochemical process is provided. The present invention employs the process solution to prevent or ...
05/16/2006
7040329Low-noise in-sink dishwasher
A dish-cleaning appliance comprising a sink having a bowl defining a wash chamber with an open top for providing access to the wash chamber. A liquid recirculation system is provided for spraying liquid onto the dish rack to effect the cleaning of any dishes along t...
05/09/2006
7036263Snag-free and stress-free fish catcher
A snag-free and stress-free fish catcher includes a supporting frame, a fish pocket, having a fish cavity, supported by the supporting frame, and a tension resting bed, having a tension surface, supported within the fish cavity, wherein the tension surface of the te...
05/02/2006
7032604Three rack dishwasher
An improved dishwasher is provided with a lower rack, a middle rack, and an upper rack. Each rack has a spray arm associated therewith. A fourth spray arm may also be provided for enhanced cleaning of objects in the racks. The lower rack is a low profile tineless ra...
04/25/2006
7024798Low-pressure dryer and low-pressure drying method
A low-pressure dryer dries a substrate applied a coating solution thereon at low pressure. The dryer includes an airtight chamber installing a substrate table to place the substrate thereon; a diffuser plate, provided as facing the substrate placed on the substrate ...
04/11/2006
7008487Method and system for removal of contaminates from phaseshift photomasks
A system and method to clean the pellicle frame and adhesive ring of a photomask reticle are described. One embodiment includes a cover that isolates the photomasks from the pellicle frame. The reticle is secured between a spin chuck and the cover so that the photom...
03/07/2006
6997193Wash and rinse system for a dishwasher
A dishwasher includes a wash and rinse system that operates to dislodge soil particles that adhere to internal surfaces of a washing chamber. During wash and rinse cycles, the washing chamber is initially filled to a first level with washing fluid. The washing fluid...
02/14/2006
6986214Low-pressure dryer and low-pressure drying method
A low-pressure dryer dries a substrate applied a coating solution thereon at low pressure. The dryer includes an airtight chamber installing a substrate table to place the substrate thereon; a diffuser plate, provided as facing the substrate placed on the substrate ...
01/17/2006
6976903Apparatus for controlling retaining ring and wafer head tilt for chemical mechanical polishing
A CMP system accurately measures eccentric forces applied to carriers for wafer or polishing pad conditioning pucks. An initial coaxial relationship between wafer axis of rotation and a carrier axis is maintained during application of the eccentric force, such that ...
12/20/2005
6956963Imaging for a machine-vision system
Manufacturing lines include inspection systems for monitoring the quality of parts produced. Manufacturing lines for making semiconductor devices generally inspect each fabricated part. The information obtained is used to fix manufacturing problems in the semiconduc...
10/18/2005
6949172Arrangement enabling a liquid to flow evenly around a surface of a sample and use of said arrangement
The invention relates to an arrangement enabling a liquid (2) to flow evenly around a surface of a sample (3); said arrangement has a flow chamber (1) through which a liquid (2) flows via inflow and outflow pipes (7, 8). The sample...
09/27/2005
6948505Cleaning apparatus for medical and/or dental tool
A cleaning apparatus for medical and/or dental tool provides a possibility to clean the burrs and brushes (files) of the remained tooth material on them after operation on patient. An improved cleaning apparatus for medical and/or dental tool includes a container, c...
09/27/2005
6923872Arrangement and method for cleaning fine solid particles from a continuously flowing liquid suspension
The invention relates to an arrangement and a method for cleaning fine solid particles from a continuously flowing liquid suspension. According to the invention, alternate emptying of cleaned liquid in at least two decanting chambers (34, 36) of the cleaning ...
08/02/2005
6910487Method and apparatus for liquid-treating and drying a substrate
The present invention is related to a method and apparatus for liquid treating and drying a substrate, such as a semiconductor wafer, the method comprising the step of immersing a substrate or a batch of substrates in a tank filled with a liquid, and removing the su...
06/28/2005
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