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| Number | Title | Issue Date |
| 7204886 | Apparatus and method for hybrid chemical processing A method and apparatus for performing multiple deposition processes is provided. In one embodiment, the apparatus includes a chamber body and a gas distribution assembly disposed on the chamber body. In one embodiment, the method comprises positioning a substrate su... | 04/17/2007 |
| 7185594 | Method and apparatus for improving combustion in recovery boilers A combustion air system for a recovery boiler is described in which multiple levels of secondary and tertiary combustion air ports each have an even number of ports, with the ports on opposing walls interlaced. The air system lends itself equally well to front/rear ... | 03/06/2007 |
| 7175713 | Apparatus for cyclical deposition of thin films An apparatus for cyclical depositing of thin films on semiconductor substrates, comprising a process chamber having a gas distribution system with separate paths for process gases and an exhaust system synchronized with operation of valves dosing the process gases i... | 02/13/2007 |
| 7174607 | Card attachment The present invention relates to a card attachment for holding cards. The jaws of the card attachment can be locking in a closed position to ensure a secure grip on a card. Plastic gripping pads are included to increase the friction between the card and the jaws. Si... | 02/13/2007 |
| 7066194 | Valve design and configuration for fast delivery system Embodiments of the present invention relate to a method and apparatus for rapid delivery of pulses of one or more reactants to a substrate processing chamber. One embodiment of a valve body includes a first inlet, a second inlet, and an outlet. A valve chamber is in... | 06/27/2006 |
| 7022948 | Chamber for uniform substrate heating Embodiments of the invention generally provide an apparatus and a method for providing a uniform thermal profile to a plurality of substrates during heat processing. In one embodiment, a cassette containing one or more heated substrate supports is moveably disposed ... | 04/04/2006 |
| 6998014 | Apparatus and method for plasma assisted deposition Embodiments of the present invention relate to an apparatus and method of plasma assisted deposition by generation of a plasma adjacent a processing region. One embodiment of the apparatus comprises a substrate processing chamber including a top shower plate, a powe... | 02/14/2006 |
| 6998579 | Chamber for uniform substrate heating In a first aspect, a first apparatus is provided for heating substrates. The first apparatus includes (1) a chamber having a bottom portion and a top portion; (2) a plurality of heated supports disposed within the chamber to support at least two substrates thereon; ... | 02/14/2006 |
| 6955211 | Method and apparatus for gas temperature control in a semiconductor processing system A method and apparatus for controlling the temperature of at least one gas flowing into a processing chamber is provided. In one embodiment, a gas temperature control apparatus for semiconductor processing includes a gas delivery line coupled between a processing ch... | 10/18/2005 |
| 6915592 | Method and apparatus for generating gas to a processing chamber A method and apparatus for generating gas for a processing system is provided. In one embodiment, an apparatus for generating gas for a processing system includes an unitary, isolatable, transportable canister having a plurality of first spacing elements, a pluralit... | 07/12/2005 |
| 6911391 | Integration of titanium and titanium nitride layers Embodiments of the present invention generally relate to an apparatus and method of integration of titanium and titanium nitride layers. One embodiment includes providing one or more cycles of a first set of compounds, providing one or more cycles of a second set of... | 06/28/2005 |
| 6905737 | Method of delivering activated species for rapid cyclical deposition A method for providing activated species for a cyclical deposition process is provided. In one aspect, the method includes delivering a gas to be activated into a plasma generator, activating the gas to create a volume of reactive species, delivering a fraction of t... | 06/14/2005 |
| 6905541 | Method and apparatus of generating PDMAT precursor A precursor and method for filling a feature in a substrate. The method generally includes depositing a barrier layer, the barrier layer being formed from pentakis(dimethylamido)tantalum having less than about 5 ppm of chlorine. The method additionally may include d... | 06/14/2005 |
| 6672227 | Arrangement for cleaning, airflow control and pushing away melt in air ports of incineration boilers The arrangement is for cleaning and controlling airflow and where appropriate pushing away melt in an air channel of recovery boilers within the paper and pulp industry. By inclining the regulating device 10 at an angle to the horizontal plane and at the ... | 01/06/2004 |
| 6652267 | Burner for the partial oxidation of liquid fuels which contain carbon The burner has at least two fuel-carrying tubes which are arranged in parallel, the distance between adjacent fuel-carrying tubes being 5 to 30 cm. Each fuel-carrying tube is surrounded by a steam-carrying tube, which at its orifice end has a supply line ... | 11/25/2003 |
| 6446565 | Blast tuyere for shaft furnaces, in particular blast furnaces or hot-blast cupola furnaces A blast tuyere for shaft furnaces, includes a conical hollow main body having inner and outer casings defining a hollow space and interconnected by a tuyere nose. The outer casing is formed by a single-piece base body terminating smoothly in the tuyere no... | 09/10/2002 |
| 6024028 | Protection of the air ports of a recovery boiler A method and apparatus for extending the life of air ports and nozzles in furnaces, particularly recovery boilers for burning black liquor to produce heat and a chemical melt. Apparatus is provided for feeding combustion air into a furnace having a tube w... | 02/15/2000 |
| 5528999 | Air nozzle for a recovery boiler An air nozzle (3) mounted in the wall of a recovery boiler for supplying air from a supply duct (4) into the recovery boiler. The air nozzle (3) comprises a nozzle duct (7) attached to the wall of the recovery boiler and a separate nozzle part (3a) insert... | 06/25/1996 |
| 5368824 | Gas distribution system for fluidized bed reactors A gas distribution system employing an array of parallel gas inlet pipes and a pair of transverse gas inlet pipes located below the first group of pipes to fluidize a particulate bed in a reaction vessel and to remove non-fluidizable particles that may be... | 11/29/1994 |
| 5178819 | Tuyere blocks of vertical reactor furnaces A tuyere opening assembly of a vertical furnace or reactor includes at most four prefabricated elements made of moulded refractory concrete, and a lining therein of ceramized refractory keys of identical shape and size arranged therein for receiving a bur... | 01/12/1993 |
| 5119743 | Device for injecting preheated air into a shaft furnace The device comprises an oblique portion connected by a gooseneck, a nozzle, atuyere and a ball-and-socket joint to the wall of the furnace, in which the oblique portion comprises a tapered tube flange-mounted by its upper part onto an upper connection pie... | 06/09/1992 |
| 5101773 | Heat exchanger feed system and method A heat exchanger feed system and method for distributing fuel through the walls of a combustor or other heat exchanger formed by a plurality of tubes each having first and second ends and adjacent tubes being connected to form an air-tight structure. A fi... | 04/07/1992 |
| 5070823 | Port rodder with anti-drift feature An anti-drift mechanism for a downwardly oriented port rodder for cleaning a port opening of a recovery boiler. The anti-drift mechanism prevents a cutter of the rodder from accidentally drifting from a retracted holding position into the port upon the lo... | 12/10/1991 |
| 5044327 | Air/burner port An air/burner port assembly for a boiler having a water-wall and a windbox spaced rearwardly of the water-wall to form a windbox, comprises a burner and ignitor mounted in the windbox for directing and igniting fuel through a port in the water-wall. A dam... | 09/03/1991 |
| 4987838 | Device for injecting preheated air into a shaft furnace The device is composed of several separate elements consisting of at least one central tubular element connected, on one side, by means of a first ball-and-socket joint and a first compensator to a first connector supplying preheated air and on the opposi... | 01/29/1991 |
| 4940004 | High energy combustion air nozzle and method for improving combustion in chemical recovery boilers Recovery boiler wind boxes are upgraded by providing an air nozzle and damper installation where the nozzle crosses through the inside of the wind box. Air is channeled from the box into the nozzle by the damper. The nozzle is convergent and jets air into... | 07/10/1990 |
| 4940005 | Device for injecting preheated air into a shaft furnace The device is composed of several tubular elements equipped with an inner refractory lining and connected, on one side, to the wall of the furnace by means of a downpipe, an elbow, a tuyere and a nozzle and, on the other side, to a main circular pipeline ... | 07/10/1990 |
| 4848248 | Tuyere for the introduction of a reaction medium into a hot gas The tuyere (3) is clamped in place with its inlet end by way of an integrally formed flange (4) in a flange connection (5) of a pipe adapter (6) attached to the wall (2) on the outside, and a pipe connection (7), the outlet end of this tuyere being freely... | 07/18/1989 |
| 4748916 | Cast air nozzle A cast air nozzle is adapted to be mounted on the bottom of a combustor, particularly a fluidized-bed combustor. The air nozzle comprises a substantially gun-shaped body having a substantially horizontal upper part with a front portion and a rear portion,... | 06/07/1988 |
| 4744313 | Air supply apparatus for an incinerator A water-cooled air supply system for the combustion chamber of an incinerator. A longitudinal trough is formed in the lower end of the combustion chamber and a plurality of air supply tubes are spaced above the bottom of the trough. Elongated shrouds are ... | 05/17/1988 |
| 4666463 | Method of controlling the temperature of a partial oxidation burner The temperature of a burner in the reaction zone of a partial oxidation gas generator is controlled so that there is substantially no condensation of H2 O from the hot raw product gas on the surface of the burner. Burner corrosion is thereby re... | 05/19/1987 |
| 4653409 | Apparatus for regulating and cleaning an air passage in the wall of a furnace An apparatus for regulating and cleaning air passages (4) provided in the side-wall of a furnace, such as a soda recovery boiler, and connected to an air box positioned outside the wall, comprising a sleeve member reciprocatably mounted in the air box and... | 03/31/1987 |
| 4564143 | Hot-blast nozzles, particularly for blast furnaces The nozzle of the invention comprises a hollow tubular enclosure (1) in which is provided a hollow tubular chamber (10) coaxial with the enclosure and extending from the yoke (7) to the vicinity of the snout (5) thereof; the chamber (10) is connected thro... | 01/14/1986 |
| 4526531 | Burner apparatus for smelting furnace A burner apparatus for a smelting furnace comprising a burner body having a tip insertable into and withdrawable from a burner inserting bore in the wall of the furnace, a seal bar insertable into and withdrawable from the bore for closing the bore, shift... | 07/02/1985 |
| 4437415 | Burner block assembly for industrial furnaces A burner block for an industrial furnace is resiliently seated in a hollow annular member, the latter being made of a metal such as stainless steel and the burner block being made of a refractory material. Because of the resilient mounting, the burner blo... | 03/20/1984 |
| 4344754 | Water cooled vertical gas distributor A vertically disposed gas distributor for injection of combustion air into a shaft kiln. The air distributor extends from the upper portion of the shaft kiln to an intermediate combustion zone, and includes at least one cooling water inlet line and at lea... | 08/17/1982 |
| 4257357 | Furnaces A furnace in which burners are incorporated into water-cooled tube panels without the need for heavy steel castings, the furnace including one or more walls formed of upright tubes having fins connecting adjacent tubes, some of said tubes and associated f... | 03/24/1981 |
| 4212253 | Support device for a blast downpipe of a blast-furnace The device is adapted to avoid the drawbacks of conventional arrangements including tie-rods and tensioners and in particular ensure a correct centering of the nozzle relative to the heel of the tuyere. The device comprises mainly a support fixed to the c... | 07/15/1980 |
| 4177976 | Tuyere for a melting furnace A tuyere for a melting furnace, which comprises inner and outer walls forming a water cooling space therebetween; a cylindrical intermediate wall dividing the water cooling space into an inner water cooling chamber and an outer water cooling chamber, wher... | 12/11/1979 |
| 4166433 | Tuyeres with independent cooling circuits for nose and body portions A cast tuyere has two independent cooling circuits for the nose and the body portions, respectively. The nose channel for the coolant having been formed by a removable frangible core around which the nose portion has been cast. The nose channel preferably... | 09/04/1979 |
