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Class 118/726 - Crucible or evaporator structure


Subclass of Class 118 - Coating apparatus
Definition: Apparatus wherein significance is attributable to a means
No. of patents: 921
Last issue date: 05/07/2013


          13            
NumberTitleIssue Date
5835677Liquid vaporizer system and method
A liquid vaporizer apparatus and method for chemical vapor deposition of liquid solutions into a controlled atmosphere of a CVD reaction chamber. The apparatus comprises an atomizer, gas curtain, heated porous media disks and a carrier gas mixer. The inve...
11/10/1998
5827371Unibody crucible and effusion source employing such a crucible
A unibody, monolithic, one-piece negative draft crucible for an MBE effusion source. The crucible maximizes capacity, uniformity and long term flux stability, and minimizes oval defects, depletion effects, and short term shutter-related flux transients. T...
10/27/1998
5820681Unibody crucible and effusion cell employing such a crucible
A unibody, monolithic, one-piece negative draft crucible for a MBE effusion cell. The crucible maximizes capacity, uniformity and long term flux stability, and minimizes oval defects, depletion effects, and short term shutter-related flux transients. The ...
10/13/1998
5820680Vacuum evaporator
A vacuum evaporator is characterized in that hot-cathode filaments (7) are provided as the electron source around a tip of a rod evaporation material (4); the peripheries of the rod evaporation material (4) and the hot-cathode filaments (7) are disposed i...
10/13/1998
5820678Solid source MOCVD system
A system for MOCVD fabrication of superconducting and non-superconducting oxide films provides a delivery system for the feeding of metalorganic precursors for multi-component chemical vapor deposition. The delivery system can include multiple cartridges ...
10/13/1998
5820682Laser deposition apparatus for depositing a large area oxide thin film on a substrate
A laser deposition apparatus for a large area oxide thin film which can enable thin films of a large area to be deposited by varying a target affixing method when performing a pulse laser deposition which most effectively deposits various oxide thin films...
10/13/1998
5815330Radiation limiter and optical system incorporating the same
An optical system is provided comprising an entry window, an exit window, a radiation transmissive membrane, and first and second lenses. The entry window and the exit window define a radiation path extending from the entry window to the exit window. The ...
09/29/1998
5803938Liquid vaporizing apparatus
A liquid vaporizing apparatus includes a container for holding a liquid at a constant temperature with a temperature adjustment unit and a gas that does not react with the liquid is bubbled through the liquid in the container to vaporize the liquid. The c...
09/08/1998
5803976Vacuum web coating
In an apparatus for vacuum web coating, an evaporation means has a plurality of separately spaced outlet nozzles through which vapour is conveyed to a deposition zone at the surface of a chilled rotatable drum in a vacuum chamber over which drum the subst...
09/08/1998
5800175Method and apparatus for re-implanting teeth
A method and apparatus for extraction and re-implantation of a natural tooth, such tooth being cleaned and repaired while extracted. The crown of the repaired tooth is mechanically masked and the tooth is then mounted in a partitioned vacuum cavity wherei...
09/01/1998
5795628Device for coating a substrate surface
Device containing a vacuum chamber 30 and situated therein a substrate 10 and a vaporization crucible 22 filled with inorganic materials 24. Situated in the region of the vacuum chamber 30 is an electron beam or laser gun 26, the electron or laser beam 27...
08/18/1998
5788769Evaporator boat for an apparatus for coating substrates
A flat, elongate, trough-shaped part (8) made of an electrically conductive ceramic can be heated by the direct passage of current between clamping points at opposite ends. The trough-shaped part (8) being provided with openings (12) for reducing cross se...
08/04/1998
5788776Molecular beam epitaxy isolation tube system
A molecular beam epitaxy (MBE) growth chamber which provides separate longitudinally oriented isolation chambers for each effusion cell thereof. Wall structures bounding each isolation chamber are hollow to receive cryogenic material and are in fluid comm...
08/04/1998
5778682Reactive PVD with NEG pump
An apparatus for carrying out reactive physical vapor deposition on a substrate to form a nitride layer, comprises a vacuum chamber, a substrate support in the vacuum chamber, a target over the substrate support made of a refractory or noble metal, for ex...
07/14/1998
5779804Gas feeding device for controlled vaporization of an organanometallic compound used in deposition film formation
A gas-feeding device for feeding a starting gas for deposition-film-formation by the chemical vapor deposition method, comprising a container having a space for discharging the starting gas containing an organometallic compound by introduction of a carrie...
07/14/1998
5776255Chemical vapor deposition apparatus
A chemical vapor deposition apparatus comprises a starting material container holding a starting material in a liquid state, a starting gas generating container into which the liquid starting material is fed from the starting material container, a means f...
07/07/1998
5776254Apparatus for forming thin film by chemical vapor deposition
A chemical vapor deposition (CVD) apparatus for depositing a thin film on a substrate by CVD has a material container for containing a liquid CVD source material, a material feeder for feeding the liquid CVD source material to a vaporizer for vaporizing t...
07/07/1998
5773147Ceramic-coated support for powder metal sintering
This invention relates to an apparatus comprising: a) a article having a composition selected from the group consisting of graphite, carbon/carbon, carbon/graphite, and mixtures thereof, and b) a ceramic coating thereon, wherein the ceramic coating comprises a ...
06/30/1998
5764849Solid precursor injector apparatus and method
An apparatus and method are provided for effectively and controllably vaporizing solid material, in general, and specifically, solid precursor material for chemical phase deposition processes. The apparatus includes a hollow container member, capable of r...
06/09/1998
5755885Gas feeding device for controlled vaporization of an organometallic compound used in deposition film formation
A gas-feeding device for feeding a starting gas for forming a deposited film by the chemical vapor deposition method, comprising a storage area for an organometallic compound having a high viscosity, wherein the storage area has a space for discharging a ...
05/26/1998
5747818Thermoelectric cooling in gas-assisted FIB system
Apparatus for supplying a jet of chemical vapor at a substantially constant rate comprises a crucible for containing a quantity of chemical, a hollow needle, a flow path from the crucible to the hollow needle, a Peltier element in thermal communication wi...
05/05/1998
5738729Coating chamber, accompanying substrate carrier, vacuum evaporation and coating method
In order to maintain a required minimal variation of angle of incidence (a) of a coating material on a flat substrate (3), it is recommended that the substrate (3) be exposed to the evaporation source (1) clamped in a curved position....
04/14/1998
5733375Apparatus for supplying a treatment material
An apparatus for supplying a treating material to a treating device has a tank containing a liquid treating material and a heat exchanger formed by a spiral pipe and provided in the tank. A nitrogen gas (N2 gas) is introduced into the tank and ...
03/31/1998
5730804Process gas supply apparatus
A process gas supply apparatus according to the invention comprises a supply pipe line connecting a supply source containing an organic aluminum metallic compound in a liquid state, to a process device for forming a film on an object using the organic alu...
03/24/1998
5725674Device and method for epitaxially growing gallium nitride layers
An epitaxial growth system comprises a housing around an epitaxial growth chamber. A substrate support is located within the growth chamber. A gallium source introduces gallium into the growth chamber and directs the gallium towards the substrate. An acti...
03/10/1998
5725672Apparatus for the high speed, low pressure gas jet deposition of conducting and dielectric thin sold films
Described is a method for depositing from the vapor phase a chemical species into the form of a thin solid film material which overlays a substrate material. The deposition process consists of three steps: (1) synthesis of depositing species, (2) transpor...
03/10/1998
5714008Molecular beam epitaxy source cell
Apparati and methods for varying the flux of a molecular beam emanating from an effusion cell are disclosed. The apparatus includes a means for controllably adjusting the angular distribution of a molecular field effusing from a source material within the...
02/03/1998
5711816Source reagent liquid delivery apparatus, and chemical vapor deposition system comprising same
A process and apparatus for delivering an involatile reagent in gaseous form, wherein an involatile reagent source liquid is flash vaporized on a vaporization matrix structure at elevated temperature. A carrier gas may be flowed past the flash vaporizatio...
01/27/1998
5711810Apparatus for variable optical focusing for processing chambers
In a pulsed laser deposition system, the two optical actions of focusing rastering, and the optical chamber window are combined into a single optics system. The single optics system is mounted on the processing chamber. Combining the three separate opti...
01/27/1998
5711813Epitaxial crystal growth apparatus
An epitaxial growth apparatus includes a substrate heating member, a growth chamber, a molecular beam source, a nozzle for ejecting a gaseous source material, an exhaust pipe, and a vacuum chamber. When a gate valve is opened between the vacuum chamber an...
01/27/1998
5709753Parylene deposition apparatus including a heated and cooled dimer crucible
Chemical vapor deposition apparatus is provided for the quick and efficient deposition of Parylene AF4 onto silicon wafers in the production of semiconductor chips. The apparatus includes a heated and cooled dimer receptacle for fast and efficient vaporiz...
01/20/1998
5707415Method of vaporizing reactants in a packed-bed, column, film evaporator
A vaporizer (film evaporator) (13) for halide-free, silicon-containing liquid reactants used in producing preforms is provided. The vaporizer includes a plurality of packed-bed columns (22) surrounding a central tube (24). A mixture of liquid reactant, e....
01/13/1998
5702532MOCVD reactor system for indium antimonide epitaxial material
Multiple solid precursor bubblers are used to alleviate channeling effects caused by high carrying gas flow rates to provide for deposition of indium-based epitaxial materials in high-capacity MOCVD reactor systems. Precracking of precursor materials that...
12/30/1997
5698037Integrated delivery system for chemical vapor from non-gaseous sources for semiconductor processing
An integrated module with a heated reservoir to vaporize liquid for semiconductor processes with liquid sources is presented. Shut-off valves and a proportioning pressure valve for controlling the flow of the vapor from the reservoir are mounted on the mo...
12/16/1997
5693146Device for forming a compound oxide superconducting thin film
There is disclosed a device for forming a thin film on a substrate by irradiating a target of a compound oxide superconducting material with a laser beam and evaporating on the substrate a thin film corresponding to a composition of the target in an oxyge...
12/02/1997
5690743Liquid material supply apparatus and method
An apparatus for supplying a low vapor pressure liquid material for deposition to a deposition chamber in which the low vapor pressure liquid material is pushed out of a pressurization passage by a pressure gas to a pressure liquid supply passage; a flow ...
11/25/1997
5679166Magnetic recording media, magnetic recording media fabrication method, and fabrication equipment
A magnetic recording medium fabrication device includes a cooling drum around which a substrate runs while being cooled thereby, an ion gun arranged upstream to a vapor deposition station for kicking out particles absorbed on the plane of the substrate, a...
10/21/1997
5674574Vapor delivery system for solid precursors and method regarding same
A vapor delivery system for vaporization and delivery of a solid precursor includes a housing having an inlet for receiving a carrier gas. A rotatable substrate surface is contained in the housing having a solid precursor material applied thereon. A focus...
10/07/1997
5672211Apparatus for depositing a thin layer on a substrate by laser pulse vapor deposition
A method for depositing a thin layer on a substrate by laser pulse vapor deposition provides a substantially cylindrical target having a cylinder axis and a curved target surface. A pulsed laser beam is generated having an initial path section and an init...
09/30/1997
5672210Method and apparatus for manufacturing superconducting components via laser ablation followed by laser material processing
The method for manufacturing superconducting elements according to the present invention include the following steps of: (a) placing a substrate near a target in a chamber so that the substrate is positioned to face a surface of the target, wherein the ta...
09/30/1997
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