Did You Know...
...that after Walter Hunt patented the safety pin in 1849, he sold the rights to it for $400?
PatentStorm News
Make the Most of Our Site
See this month's Top Inventors and Most Cited Patents.
Stay on top of the latest innovations by subscribing to an RSS feed.
Registered users: Manage your profile.
| Number | Title | Issue Date |
| 8177912 | Evaporation source and vacuum evaporator using the same An evaporation source having a nozzle structure that makes the distribution of film thickness uniform in the width direction of a substrate and a vacuum evaporator using the same are provided. A vapor produced by evaporation or sublimation by heating to evaporation ... | 05/15/2012 |
| 8168002 | Device for clamping and positioning an evaporator boat The invention relates to a vacuum treatment plant comprising an evaporator (1) for vacuum coating facilities. The evaporator (1) according to the invention comprises a device for guiding a supply line (4) movable in a gripping direction (A) and ... | 05/01/2012 |
| 8157916 | Apparatus for fabricating display device An apparatus for forming a thin film includes: a chamber; a susceptor in the chamber; a gas injector over the susceptor, the gas injector having a plurality of injection holes; a shaft connected to the gas injector, the shaft having a flow path connected to the plur... | 04/17/2012 |
| 8137470 | Inner plate and crucible assembly for deposition having the same A crucible assembly for deposition and an inner plate used in the crucible assembly. The crucible assembly includes a main body having an inner space accommodating a deposition material and an opening arranged at an upper portion of the inner space, a cap having an ... | 03/20/2012 |
| 8118939 | Temperature control unit for bubblers A temperature control device for use in a process reactor system with a bubbler having a container provided with a side wall. The device includes a vessel having an internal chamber adapted to receive the container of the bubbler. An enclosure member is extendable b... | 02/21/2012 |
| 8101023 | Preparation of membranes using solvent-less vapor deposition followed by in-situ polymerization A system of fabricating a composite membrane from a membrane substrate using solvent-less vapor deposition followed by in-situ polymerization. A first monomer and a second monomer are directed into a mixing chamber in a deposition chamber. The first monomer and the ... | 01/24/2012 |
| 8092604 | Solid organometallic compound-filled container and filling method thereof A solid organometallic compound novel filled container stably supplies an apparatus for vapor phase epitaxial growth such as an MOCVD apparatus with a solid organometallic compound over a long term. The solid organometallic compound-filled container has a carrier ga... | 01/10/2012 |
| 8075693 | Crucible heating apparatus and deposition apparatus including the same A crucible heating apparatus and a deposition apparatus including the same. The crucible heating apparatus includes: a crucible including a main body to house a deposition material, and a cover disposed on the main body, having a nozzle; a band coupled to the crucib... | 12/13/2011 |
| 8062427 | Particulate material metering and vaporization Apparatus for metering and vaporizing a particulate material, includes a metering device for metering particulate material including: a reservoir for receiving particulate material; a housing having an internal volume and having first and second openings; a rotatabl... | 11/22/2011 |
| 8048230 | Metering and vaporizing particulate material Apparatus for metering and vaporizing a particulate material, includes: a metering device for metering particulate material having: a reservoir for receiving particulate material; a housing having first and second openings; a rotatable shaft disposed in the internal... | 11/01/2011 |
| 8048229 | Apparatus for depositing an organic layer and method for controlling a heating unit thereof An apparatus for depositing an organic layer and a method for controlling the heating unit thereof are provided. The apparatus includes a crucible positioned in a deposition chamber and containing materials for evaporation. The apparatus also includes a heating unit... | 11/01/2011 |
| 8034182 | Apparatus for forming a film and an electroluminescence device A device having three evaporation sources and a unit for moving the respective evaporation sources in one chamber is used, whereby it becomes possible to increase efficiency of use of an evaporation material. Consequently, manufacturing cost can be reduced, and a un... | 10/11/2011 |
| 8029621 | Raw material feeding device, film formation system and method for feeding gaseous raw material A raw material feeding device for feeding a gaseous raw material formed by sublimating a solid raw material to a film formation system includes a raw material container for holding the solid raw material therein, a first heating unit placed at a first side of the co... | 10/04/2011 |
| 8025734 | Method for controlling the volume of a molecular beam A molecular beam source for use in thin-film accumulation, which enables the adjustment of the volume of a molecular beam, which is discharged per hour by using a needle valve, to be constant irrespective of a decrease in a thin-film element-forming material remaini... | 09/27/2011 |
| 8025733 | Heating crucible and deposition apparatus using the same A deposition apparatus includes a vacuum chamber and a heating crucible. A substrate, on which deposition films are formed, is installed in the vacuum chamber. The heating crucible is installed opposite to the substrate so as to vaporize an organic compound. The hea... | 09/27/2011 |
| 8012260 | Apparatus and method for coating an areal substrate An apparatus for coating an areal substrate, for example a rectangular plate comprises a vaporizer source and a distributor system for the supply of vaporized material onto the substrate. The distributor system comprises a line source, with this line source and the ... | 09/06/2011 |
| 7993459 | Delivering particulate material to a vaporization zone It is an object of the present invention to provide an effective way of replenishing particulate material for vaporization. This object is achieved by a method for delivering material into a deposition chamber having a vaporization zone to vaporize such material to ... | 08/09/2011 |
| 7976636 | Multiple nozzle evaporator for vacuum thermal evaporation Disclosed is a multiple nozzle evaporator in which a material to be evaporated in the evaporator can be deposited on a substrate with an improved efficiency of use of the material, thereby forming a large-area uniform thin film. The evaporator includes a rectangular... | 07/12/2011 |
| 7972443 | Metering of particulate material and vaporization thereof Apparatus for metering and vaporizing a particulate material, includes: a metering device having: a reservoir for receiving particulate material; a housing having an internal volume and having first and second openings; a rotatable shaft disposed in the internal vol... | 07/05/2011 |
| 7967911 | Apparatus and methods for chemical vapor deposition Methods and apparatus are disclosed for the formation of vaporizing liquid precursor materials. The methods or apparatus can be used as part of a chemical vapor deposition apparatus or system, for example for forming films on substrates. The methods and apparatus in... | 06/28/2011 |
| 7964037 | Deposition apparatus A vacuum deposition apparatus capable of enhancing the productivity of an organic electroluminescence device is realized. A first pipe is connected to a deposition source for evaporating an organic electroluminescence material, and two second pipes are directed to t... | 06/21/2011 |
| 7942970 | Apparatus for making crystalline composition A composition including a polycrystalline metal nitride having a number of grains is provided. These grains have a columnar structure with one or more properties such as, an average grain size, a tilt angle, an impurity content, a porosity, a density, and an atomic ... | 05/17/2011 |
| 7922821 | Source, an arrangement for installing a source, and a method for installing and removing a source The invention relates to an arrangement for installing a source into a gas deposition reactor. The arrangement comprises at least one source fitting for the source such that the source fitting is connected to a reaction space of the gas deposition reactor, and a sou... | 04/12/2011 |
| 7922820 | Heating crucible and deposition apparatus including the same A heating crucible and a deposition apparatus are provided that have a uniform deposition rate and good reproducibility. The heating crucible of the deposition apparatus includes a titanium body with an internal cavity to contain a material to be deposited and an op... | 04/12/2011 |
| 7914620 | Supporting device for heating crucible and deposition apparatus having the same A device for supporting a heating crucible includes a supporting table having an upper surface in which a plurality of holes are formed, and a contamination prevention plate arranged at an entrance of each of the holes of the supporting table and having an opening p... | 03/29/2011 |
| 7914621 | Vapor deposition source and vapor deposition apparatus having the same A vapor deposition source has a reduced size by disposing a crucible, a heating portion, and a nozzle portion in one defined space. A vapor deposition apparatus deposits deposition materials on a substrate using the vapor deposition source. The vapor deposition sour... | 03/29/2011 |
| 7905961 | Linear type deposition source A linear type deposition source capable of improving a heating efficiency and reducing a heating temperature by using a plate-type heating source and/or improving a cooling efficiency by including a cooling jacket having a cooling water line in a housing. The linear... | 03/15/2011 |
| 7883583 | Vaporization apparatus with precise powder metering Apparatus for vaporizing a particulate material, comprising a metering apparatus including: a reservoir; a housing having an internal volume and first and second openings for respectively receiving and discharging the particulate material; a rotatable shaft disposed... | 02/08/2011 |
| 7846256 | Ampule tray for and method of precursor surface area A high conductance, multi-tray film precursor evaporation system coupled with a high conductance vapor delivery system is described for increasing deposition rate by increasing exposed surface area of film precursor. The multi-tray film precursor evaporation system ... | 12/07/2010 |
| 7833354 | Multiple nozzle evaporator for vacuum thermal evaporation Disclosed is a multiple nozzle evaporator in which a material to be evaporated in the evaporator can be deposited on a substrate with an improved efficiency of use of the material, thereby forming a large-area uniform thin film. The evaporator includes a cylindrical... | 11/16/2010 |
| 7833353 | Liquid material vaporization apparatus for semiconductor processing apparatus A liquid material vaporization apparatus for a semiconductor processing apparatus includes: a vaporization tank; an inner partition wall disposed in the tank for dividing the interior of the tank into a charging compartment and a vaporization compartment which are l... | 11/16/2010 |
| 7806985 | Vacuum device where power supply mechanism is mounted and power supply method An improvement has been made in contact states between a rotating electrode arranged inside a vacuum chamber and a power supply mechanism which touches the rotating electrode to supply electric power thereto. A vacuum device is provided with a vacuum chamber, a rota... | 10/05/2010 |
| 7727335 | Device and method for the evaporative deposition of a coating material According to a first aspect, the present invention relates to a device for depositing a high temperature superconductor onto a substrate in vacuum comprising a refilling device for containing a stock of high temperature superconductor material, an evaporation device... | 06/01/2010 |
| 7722720 | Delivery device Delivery devices for delivering solid precursor compounds in the vapor phase to reactors are provided. Such devices include a precursor composition of a solid precursor compound with a layer of packing material disposed thereon. Also provided are methods for transpo... | 05/25/2010 |
| 7708835 | Film precursor tray for use in a film precursor evaporation system and method of using A high conductance, multi-tray film precursor evaporation system coupled with a high conductance vapor delivery system is described for increasing the deposition rate by increasing exposed surface area of film precursor. The multi-tray film precursor evaporation sys... | 05/04/2010 |
| 7670435 | Apparatus for epitaxially growing semiconductor device structures with sharp layer interfaces utilizing HVPE A method and apparatus for fabricating thin Group III nitride layers as well as Group III nitride layers that exhibit sharp layer-to-layer interfaces are provided. According to one aspect, an HVPE reactor includes one or more gas inlet tubes adjacent to the growth z... | 03/02/2010 |
| 7666260 | Vaporizer and semiconductor processing apparatus A vaporizer includes a vaporizing chamber configured to vaporize a liquid material and thereby form a gas material. A spray portion is configured to spray the liquid material in the vaporizing chamber. A delivery part is configured to deliver the gas material from t... | 02/23/2010 |
| 7651570 | Solid precursor vaporization system for use in chemical vapor deposition A solid precursor vaporization system configured for use in a deposition system, such as thermal chemical vapor deposition (TCVD), is described. The solid precursor vaporization system comprises a plurality of concentric solid precursor cylinders supported on a gas ... | 01/26/2010 |
| 7641737 | Evaporation source for evaporating an organic The present invention relates to an evaporation source for evaporating an organic electroluminescent layer. In particular, the present invention relates to the evaporation source preventing an aperture, through which a vaporized evaporation material is emitted, from... | 01/05/2010 |
| 7638002 | Multi-tray film precursor evaporation system and thin film deposition system incorporating same A high conductance, multi-tray solid precursor evaporation system coupled with a high conductance vapor delivery system is described for increasing deposition rate by increasing exposed surface area of solid precursor. The multi-tray solid precursor evaporation syst... | 12/29/2009 |
