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| Number | Title | Issue Date |
| 8048228 | Masking apparatus and method of fabricating electronic component A masking apparatus includes a mask base body and a mask plate. The mask base body includes at least one spacer plate, and a cavity in which an electronic component can be housed. The mask plate is disposed on an upper surface and/or a lower surface of the mask base... | 11/01/2011 |
| 7976633 | Device and method of forming film A film forming device includes a mask member that is made of silicon and has first openings of predetermined patterns; a magnetic member that is made of a magnetic material and has a second opening, and that is aligned with the mask member so that the first openings... | 07/12/2011 |
| 7909932 | Mask, mask manufacturing method, film forming method, electro-optic device manufacturing method, and electronic apparatus A mask includes: a base plate having an opening; a chip having an aperture pattern positioned at the opening in the base plate; a plug detachably arranged to the base plate; and a joining member joining the chip and the plug. ... | 03/22/2011 |
| 7794545 | Mask, film forming method, light-emitting device, and electronic apparatus Provided is a mask which is used to form on the surface of a substrate a plurality of linear film members disposed in parallel to each other by fixing one surface of the mask to the substrate and supplying a film material through the other surface of the mask by the... | 09/14/2010 |
| 7718006 | Mask holding structure, film forming method, electro-optic device manufacturing method, and electronic apparatus A mask includes a base plate having aperture parts, and chips having aperture patterns and positioned in the aperture parts of the base plate. The mask is arranged on a bottom surface of a bed plate with a substrate on which a film is to be formed sandwiched therebe... | 05/18/2010 |
| 7435300 | Dynamic film thickness control system/method and its utilization A dynamic film thickness control system/method and its utilization consisting of a minimum of one mask plate arranged between a substrate and a vapor source. A film thickness control device is utilized for real-time control over deposited film thickness and graduall... | 10/14/2008 |
| 7413610 | Method and apparatus for coating or heat treatment of blisks for aircraft gas turbines A method for hard-material coating or heat treatment of the blade airfoils of blisks for gas turbines provides for partial heat-insulation and cooling of the other blisk parts during the respective process to prevent their properties from being changed by the high t... | 08/19/2008 |
| 7396558 | Integrated mask and method and apparatus for manufacturing organic EL device using the same An integrated mask including a plurality of deposition masks, each deposition mask having an array of deposition apertures formed in accordance with a deposition pattern; and a base plate having a plurality of openings on which the deposition masks are arranged is p... | 07/08/2008 |
| 7371428 | Duplex gas phase coating Method of forming different diffusion aluminide coatings on different surface regions of the same superalloy substrate involves positioning the substrate in a coating chamber having a aluminum-bearing coating gas flowing therein with a first substrate surface region... | 05/13/2008 |
| 7354500 | Mask and apparatus using it to prepare sample by ion milling A mask for use with a sample preparation apparatus that prepares an ion-milled sample adapted to be observed by an electron microscope is offered. It is possible to prepare the sample having a desired cross section by the use of the mask. The mask, which defines the... | 04/08/2008 |
| 7339248 | Self-adjusting serial circuit of thin layers and method for production thereof The invention relates to a self-adjusting serial connection of thin layers and a method for the production thereof. The invention is characterized in that electrically conducting conductor tracks (20) are applied to a substrate (10), whereupon several ... | 03/04/2008 |
| 7338699 | Island projection-modified part, method for producing the same, and apparatus comprising the same In film-forming devices and plasma-processing devices, filmy matter adheres to the surfaces of the inner parts and it peels to cause dust and particles in the devices. In the devices, the dust and particles contaminate the objects for film formation thereon or the o... | 03/04/2008 |
| 7311939 | Vacuum coating unit and a method for the differentiated coating of spectacle lenses Substrates, such as spectacle lenses for example, may be provided with a coating which is not uniform by way of screens. The screens are aperture rings, arranged concentric to a symmetry axis of the vaporising crucible in a vacuum coating unit, by way of a screen ho... | 12/25/2007 |
| 7303635 | Deposition mask, method for manufacturing display unit using it, and display unit A deposition mask and a display unit and method of manufacturing same are provided. A red continuous organic layer, a green continuous organic layer, and a blue continuous organic layer are provided over two or more lines of a matrix configuration of organic light e... | 12/04/2007 |
| 7294245 | Cover ring and shield supporting a wafer ring in a plasma reactor A magnetic dipole ring assembly positioned inside a vacuum chamber and around a wafer being sputter deposited with a ferromagnetic material such as NiFe or other magnetic materials so that the material is deposited with a predetermined magnetization direction in the... | 11/13/2007 |
| 7284690 | Article to be processed having ID, and production method thereof A processed article is provided with a plurality of IDs having the same information for machine reading but difference to be confirmed visually. The information such as the production lot number which is read from the plurality of IDs by the reading device is the sa... | 10/23/2007 |
| 7271111 | Shadow mask deposition of materials using reconfigurable shadow masks A shadow mask deposition system includes a plurality of identical shadow masks arranged in a number of stacks to form a like number of compound shadow masks, each of which is disposed in a deposition vacuum vessel along with a material deposition source. Materials f... | 09/18/2007 |
| 7241476 | Airflow masking of carbon-carbon composites for application of antioxidants Mask (10, 10′, 21, 22) for use in coating a carbon-carbon composite brake disc (25) with anti-oxidant. The mask is composed of carbon-carbon composite material or nonreactive ceramic material. The mask is configured with edge ridges (11, 13) t... | 07/10/2007 |
| 7223674 | Methods for forming backside alignment markers useable in semiconductor lithography Disclosed herein are methods for forming photolithography alignment markers on the back side of a substrate, such as a crystalline silicon substrate used in the manufacture of semiconductor integrated circuits. According to the disclosed techniques, laser radiation ... | 05/29/2007 |
| 7204886 | Apparatus and method for hybrid chemical processing A method and apparatus for performing multiple deposition processes is provided. In one embodiment, the apparatus includes a chamber body and a gas distribution assembly disposed on the chamber body. In one embodiment, the method comprises positioning a substrate su... | 04/17/2007 |
| 7205033 | Method for forming polycrystalline silicon film of polycrystalline silicon TFT Disclosed is a method for forming a polycrystalline silicon film of a polycrystalline silicon thin film transistor. The method includes a step of crystallizing an amorphous silicon film deposited on a glass substrate by irradiating a laser beam onto the amorphous si... | 04/17/2007 |
| 7185419 | Method of manufacturing a mask for evaporation A mask frame assembly for evaporation includes a mask and a frame which supports the mask. The mask includes a metal layer having a predetermined pattern, and a coating layer which is formed on a surface of the metal layer so as to increase a precision of the predet... | 03/06/2007 |
| 7179335 | In situ adaptive masks A variable adaptive mask is provided that can be dynamically modified in situ in a physical vapor deposition process. The mask comprises a fixed mask portion, a plurality of channels extending through the fixed mask portion, a control mechanism for controlling throu... | 02/20/2007 |
| 7171882 | Knife-like cutting die A knife-like die for cutting a thermoformed plastic article from a sheet of thermoformable plastic. The die includes a die build up plate that is mounted to a first platen and a striker plate that is mounted to a second platen. The die further includes a die board h... | 02/06/2007 |
| 7169626 | Method for detecting alignment mark shielding A method of testing a test wafer includes shielding test centers on a test wafer using shielding tabs during the deposition of a layer. The test wafer has the same size and shape of product wafers. The shielding tabs are then removed from the test wafer. A plurality... | 01/30/2007 |
| 7163607 | Process kit for improved power coupling through a workpiece in a semiconductor wafer processing system Apparatus for supporting a substrate such as a semiconductor wafer in a process chamber to improve power coupling through the substrate. The apparatus contains a pedestal assembly and a pedestal cover positioned over the top surface of and circumscribing the pedesta... | 01/16/2007 |
| 7153180 | Continuous manufacture of flat panel light emitting devices A method of applying patterned materials for manufacture of a flat panel light source includes providing a flexible continuous substrate; providing one or more application stations, each application station having, one or more stationary sources of material, a suppl... | 12/26/2006 |
| 7150811 | Ion beam for target recovery A charged particle beam apparatus and method for locally removing material from a predetermined location on a workpiece, such as the removal of a metallization layer covering an alignment mark on a wafer. The invention is particularly suited for high-volume mass pro... | 12/19/2006 |
| 7128806 | Mask etch processing apparatus Method and apparatus for supporting and transferring a substrate in a semiconductor wafer processing system are provided. In one aspect, an apparatus is provided for supporting a substrate comprising-a cover ring comprising a base having a bore disposed therethough,... | 10/31/2006 |
| 7125581 | Evaporation method and apparatus thereof An evaporation method and an apparatus thereof are disclosed. The evaporation apparatus comprises a rotator, a heater and a source supplying device. The rotator, which is disposed above the central portion of the substrate, can rotate the substrate. An evaporation s... | 10/24/2006 |
| 7125587 | Ion beam for enhancing optical properties of materials A system and method to expose a material to an ion beam during a continuous material production process may include a vacuum fixture to form the ion beam and a slit in the fixture to allow at least a portion of the ion beam to exit the fixture through the slit. The ... | 10/24/2006 |
| 7115169 | Replaceable shielding apparatus A replaceable shielding apparatus provides a cost effective way of shielding a portion of a workpiece during processing. The apparatus includes a replaceable shield, made of comparable weight as the workpiece for allowing replacement of the shield in the same way as... | 10/03/2006 |
| 7097750 | Device for fixing substrate for thin film sputter and method of fixing substrate using the same A device to fix a substrate for a thin film sputter, includes a mask, a mask pressing plate, a magnetic body, and a driving unit. The mask having patterns is positioned under the substrate so as to form the patterns on the substrate. The mask pressing plate is posit... | 08/29/2006 |
| 7066799 | Protection mask for surface treatment of turbomachine blades A protection mask used during surface treatment for a turbomachine blade, including for example a sand blasting step and/or a metal coating step, includes at least one part matching the shape of a portion of the blade. The mask is designed to resist surface treatmen... | 06/27/2006 |
| 7049549 | Multi-thermal zone shielding apparatus A deposition shield partially covering a substrate and having two zones of different thermal properties can provide minimal deposition on the shield together with minimal heat loss due to substrate contact. A zone of low thermal transmittivity is contact shielding t... | 05/23/2006 |
| 7041569 | Method for fabricating a high density composite MIM capacitor with reduced voltage dependence in semiconductor dies According to a disclosed embodiment, a composite MIM capacitor comprises a lower electrode of a lower MIM capacitor situated in a lower interconnect metal layer of a semiconductor die. The composite MIM capacitor further comprises an upper electrode of the lower MIM... | 05/09/2006 |
| 7026011 | Aluminide coating of gas turbine engine blade A method for applying an aluminide coating on a gas turbine engine blade having an external surface and an internal cooling cavity having an internal surface that is connected to the external surface by cooling holes. The method is conducted in a vapor coating conta... | 04/11/2006 |
| 6993811 | System for applying a diffusion aluminide coating on a selective area of a turbine engine component A method for applying diffusion aluminide coating on a selective area of a turbine engine component and the coating produced by that method is disclosed. A quartz infrared lamp heats only substantially the localized area of the component to be coated, rather than th... | 02/07/2006 |
| 6988652 | Solder printing using a stencil having a reverse-tapered aperture A stencil used for printing solder paste on a contact pad of a printed wiring board has one or more reverse-tapered apertures passing there through, wherein the apertures have a variable cross-section that is larger at the fill side of the stencil (i.e., where solde... | 01/24/2006 |
| 6974637 | Ni-base superalloy having a thermal barrier coating system An article and TBC coating system thereon that in combination exhibit significantly improved spallation resistance. The article comprises a substrate formed of a metal alloy containing ruthenium and one or more refractory elements (e.g., tantalum, tungsten, molybden... | 12/13/2005 |
