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| Number | Title | Issue Date |
| 7371332 | Uniform etch system Etching a layer over a substrate is provided. The substrate is placed in a plasma processing chamber. A first gas is provided to an inner zone within the plasma processing chamber. A second gas is provided to the outer zone within the plasma processing chamber, wher... | 05/13/2008 |
| 7323063 | Apparatus for changing concentration of treatment solution and treatment solution supply apparatus According to the present invention, in changing the concentration of a treatment solution supplied to a substrate, a volume of an existing treatment solution in a tank connected to a treatment solution supply section for supplying the treatment solution to the subst... | 01/29/2008 |
| 7232273 | Method and apparatus for applying sealant to fasteners A sealant dispenser system and method for applying sealant to fasteners. The sealant dispenser system comprising a syringe that engages a dispenser head, wherein the dispenser head has a plurality of dispenser feed channels that receive sealant from an intermediate ... | 06/19/2007 |
| 7201803 | Valve control system for atomic layer deposition chamber A valve control system for a semiconductor processing chamber includes a system control computer and a plurality of electrically controlled valves associated with the processing chamber. The system further includes a programmable logic controller in communication wi... | 04/10/2007 |
| 7169231 | Gas distribution system with tuning gas An apparatus for providing different gases to different zones of a processing chamber is provided. A gas supply for providing an etching gas flow is provided. A flow splitter in fluid connection with the gas supply for splitting the etching gas flow from the gas sup... | 01/30/2007 |
| 7137536 | Inverted aerosol dispenser An inverted aerosol dispensing device is disclosed having an undercap rotatably secured to the aerosol container with a bottom portion of the undercap supporting the aerosol container on a supporting surface to store the aerosol dispensing device in an inverted posi... | 11/21/2006 |
| 7076928 | Suspended ceiling panel edge and rib technology Panels for a suspended ceiling of the torsional spring type are disclosed. Such panels can include: a circumferential edge configuration that preserves a very tight tolerance between a surface bearing against a foot portion of a T-bar and a face of the panel; and/or... | 07/18/2006 |
| 7059945 | Pipe weld cleaning machine A pipe joint between welded exposed metal end sections of coated pipe being formed into a pipeline is cleaned before a corrosion resistant film is applied. A cleaning head of a cleaning mechanism is placed with a mounting frame on the pipe in the area of the pipe en... | 06/13/2006 |
| 6833030 | Liquid delivery system having safe unit and operating method thereof A liquid delivery system having safe unit includes: an injection valve connected to a chamber; a mass flow controller connected to the injection valve; an auxiliary valve connected between the injection valve and the mass flow controller; an auxiliary pump connected... | 12/21/2004 |
| 6761770 | Atmospheric pressure wafer processing reactor having an internal pressure control system and method An atmospheric pressure wafer processing system for delivering at least one gas is provided, having an exhaust control feedback system that utilizes sensors to measure the pressure within the system and adjusts control units to maintain the desired set pressures wit... | 07/13/2004 |
| 6692572 | Active compensation metering system This invention relates generally to systems for depositing a material onto a surface, and more particularly, to control systems for metering the amount of material being dispensed. The present invention provides an active compensation metering system that... | 02/17/2004 |
| 6680078 | Method for dispensing flowable substances on microelectronic substrates A method for dispensing a flowable substance, such as a flowable photoresist, on a microelectronic substrate. The method can include dispensing a portion of the flowable substance on the microelectronic substrate, receiving an image of at least some of th... | 01/20/2004 |
| 6589350 | Vacuum processing chamber with controlled gas supply valve An apparatus for and a method of introducing a gas into a vacuum processing chamber are provided. In one aspect, a processing apparatus is provided that includes a vacuum processing chamber, a first source of gas coupled to the vacuum processing chamber, ... | 07/08/2003 |
| 6391111 | Coating apparatus To provide a coating apparatus which is capable of making short a lag time up to action of a valve and making operate a discharging pump and a valve with the best timing. By employing electric-air regulators ER1 and ER2 of small size and high response spe... | 05/21/2002 |
| 5951767 | Molecular beam epitaxy isolation tube system A molecular beam epitaxy (MBE) growth chamber which provides separate longitudinally oriented isolation chambers for each effusion cell thereof. Wall structures bounding each isolation chamber are hollow to receive cryogenic material and are in fluid comm... | 09/14/1999 |
| 5914000 | Apparatus for manufacturing semiconductor device and method of removing silicon oxidation film A polysilicon film which realizes an excellent ohmic contact is obtained. A board 4 to which a silicon substrate 3 is fixed is disposed within a chamber 1. An SiH4 gas, an N2 gas, a TEOS gas and an anhydrous HF gas are introduced int... | 06/22/1999 |
| 5803107 | Method and apparatus for pressure control in vacuum processors A method and apparatus is disclosed for controlling the pressure of reaction chamber in wafer processing equipment. The disclosed apparatus and method uses a ballast port for inserting gas into the evacuation system, thereby controlling the pressure in th... | 09/08/1998 |
| 5799578 | Printing press and liquid supply A printing press including a device for feeding a viscous fluid, such as a lacquer or varnish. The viscous fluid, such as a lacquer or varnish, can be taken from a cartridge and be distributed to a printed sheet or other suitable medium. In the manner of ... | 09/01/1998 |
| 5788776 | Molecular beam epitaxy isolation tube system A molecular beam epitaxy (MBE) growth chamber which provides separate longitudinally oriented isolation chambers for each effusion cell thereof. Wall structures bounding each isolation chamber are hollow to receive cryogenic material and are in fluid comm... | 08/04/1998 |
| 5758680 | Method and apparatus for pressure control in vacuum processors A method and apparatus is disclosed for controlling the pressure of reaction chamber in wafer processing equipment. The disclosed apparatus and method uses a ballast port for inserting gas into the evacuation system, thereby controlling the pressure in th... | 06/02/1998 |
| 5725671 | Apparatus for manufacturing chalcopyrite film An apparatus for manufacturing an ABC2 chalcopyrite film (wherein A represents Cu or Ag, B represents In, Ga or Al, C represents S, Se or Te) includes a substrate holder, a substrate heater, a supply source for supplying elements A, B or C onto... | 03/10/1998 |
| 5647910 | Apparatus for delivering loose fill packaging material and applying an additive thereto A method and apparatus for controllably delivering discrete loose fill dunnage particles from a supply to a packaging site and for applying an additive to at least a portion of an exposed surface on a plurality of particles to cause abutting particles to ... | 07/15/1997 |
| 5645642 | Method for in-situ liquid flow rate estimation and verification The flow of a liquid reagent gas into a vapor deposition process chamber is adjusted in response to control information provided by a process controller. The controller executes a prescribed mathematical algorithm which utilizes first and second steady-st... | 07/08/1997 |
| 5632818 | Liquid injection apparatus for use in a method of lining the internal surface of a pipe There is provided a liquid injection apparatus for use in a method of lining the internal surface of a pipe. The apparatus comprises a push car having a frame structure, a liquid tank for storing a necessary amount of liquid to be injected into the pipe, ... | 05/27/1997 |
| 5632817 | Dual components mixing system for coating A dual component mixing system for coating comprises a first tank containing a main agent, a second tank containing a hardening agent diluted with thinner, a mixer which mixes the main agent and the hardening agent and supplies the mixture to a manually o... | 05/27/1997 |
| 5615828 | Method and apparatus for applying flux A dispensing apparatus for applying a pulsed thin stream of flux to a surface such as a printed circuit board. The stream of flux is pulsed at a high rate to apply a thin layer of flux on the surface. The dispensing head consists of multiple orifices for ... | 04/01/1997 |
| 5529629 | Applicator system for application of color coating on a paper web An applicator system for applying color coating on a paper web is disclosed having a color coating applicator along with a backing roll around which is wrapped the paper web. A measuring system is incorporated for measuring a predetermined property of the... | 06/25/1996 |
| 5480488 | Apparatus for supplying CVD coating devices An apparatus supplies CVD coating devices with coating gas and includes an intermediate reservoir for accommodation of the gaseous coating material arranged between a storage tank and a coating device. The volume of the reservoir is set to a predetermined... | 01/02/1996 |
| 5389149 | Paint system A paint system utilizes a paint pumping station comprising a plurality of small paint pots, one for each color inventoried in the system. A pump is provided for each paint pot and is connected through a like plurality of lines to color changers at each pa... | 02/14/1995 |
| 5288325 | Chemical vapor deposition apparatus In a chemical vapor deposition apparatus in which a liquid raw material is vaporized by bubbling and the vaporized material is used as a raw material gas, an orifice is provided in a pipe between a reaction unit (a dispersion head) and a vaporizing unit (... | 02/22/1994 |
| 5263608 | Method and apparatus for dispensing a constant controlled volume of adhesive A method and apparatus for controlling the flow of adhesive onto a moving substrate is provided using a thermal flowmeter. It is particularly designed for the tobacco industry wherein the flow of adhesive onto a continuous ribbon of paper in forming the s... | 11/23/1993 |
| 5143744 | Dynamic contact angle measurement system An apparatus for measuring the dynamic contact angle of a coating on a discrete web segment includes a rotatable coating wheel around which the web segment is mounted and a syringe which produces a coating bead having no edge bead. The interface between t... | 09/01/1992 |
| 5115844 | Apparatus for injecting glue in joints and hair checks of wood, especially for gluing loose knots in wooden boards An apparatus with a percussion head disposed beneath a percussion rod of a percussion mechanism. The bottom surface of the percussion head includes a shallow, open-bottomed chamber which is defined by an axially compliant sealing ring, and is adapted to b... | 05/26/1992 |
| 5098741 | Method and system for delivering liquid reagents to processing vessels A system for delivering a liquid reagent to a low pressure reactor in the vapor phase includes a source of the liquid reagent, a metering valve for measuring precise volumes of the liquid reagent and transporting those volumes to an expansion valve at a p... | 03/24/1992 |
| 5070813 | Coating apparatus Disclosed is a coating apparatus, comprising a gas exhaust rate controller disposed within an exhaust pipe connected to a cup which houses a substance to be treated, and a branch pipe connected to the exhaust pipe. The flow speed of the fluid within the b... | 12/10/1991 |
| 4836139 | Adhesive-applying apparatus In a computer-controlled adhesive-applying apparatus an adhesive applicator device (20) is guided along a desired path in respect of three axes according to a programmed instruction instruction in the form of digitized co-ordinate axis values, said device... | 06/06/1989 |
| 4778299 | Application for crease setting composition An applicator 10 for crease setting composition comprises an applicator body 12 having at one end thereof a nozzle 14 for applying a crease setting composition to a crease line and at the other end thereof an inlet 26 for compressed air for forcing the co... | 10/18/1988 |
| 4556456 | Multi-vapor level vapor generating and recovery apparatus An apparatus for generating at least two vapor zones, one above the other, by vaporizing a fluid mixture having at least two compounds therein having different vaporizing temperatures. The apparatus includes a chamber with vaporizing means, and vapor cond... | 12/03/1985 |
| 4535719 | Liquid dispensing gun with substrate separator A liquid dispensing gun for applying a liquid to a substrate which includes a movable valve stem for opening and closing a liquid-dispensing valve and a deflector plate movable in conjunction with the valve stem to deflect the substrate away from the gun ... | 08/20/1985 |
| 4369031 | Gas control system for chemical vapor deposition system A gas flow control system in which several constituent gases are mixed and the mixture delivered through controlled injectors to a processing zone. Mass flow controllers control the injector flows with one of the controllers being a master and the other b... | 01/18/1983 |
