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Class 117/200 - APPARATUS


Subclass of Class 117 - Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
Definition: Subject matter comprising apparatus for growing single-crystal* (i.e.,
No. of patents: 379
Last issue date: 05/22/2012


1                    
NumberTitleIssue Date
8182607In-situ crystalline material screening apparatus and method
There is provided a method and apparatus for assessing in-situ crystal formation in a test sample. Both optical imaging and X-ray diffraction techniques are utilized, with the results of these processes being combined in such a way as to produce an overall score rel...
05/22/2012
8152920Crucible for the crystallization of silicon
A crucible and method for the crystallization of silicon utilize release coatings. The crucible is used in the handling of molten materials that are solidified in the crucible and then removed as ingots. The crucible does not require the preparation of a very thick ...
04/10/2012
8097082Nonplanar faceplate for a plasma processing chamber
A method and apparatus for adjust local plasma density during a plasma process. One embodiment provides an electrode assembly comprising a conductive faceplate having a nonplanar surface. The nonplanar surface is configured to face a substrate during processing and ...
01/17/2012
8075689Apparatus for the production of silica crucible
In an apparatus for the production of a silica crucible comprising a carbon mold suitable for producing the silica crucible by the rotating mold method, the carbon mold has a thermal conductivity of not more than 125 W/(m·K). ...
12/13/2011
8057597Capsule and elements for synthesised diamond production
The present invention consists in obtaining, with the capsule described, a vertical gradient favorable for diamond growth that prevails over any radial gradient by means of heating discs placed at the ends of the heating area, which implies a considerable control ov...
11/15/2011
7927422Microfluidic protein crystallography
The use of microfluidic structures enables high throughput screening of protein crystallization. In one embodiment, an integrated combinatoric mixing chip allows for precise metering of reagents to rapidly create a large number of potential crystallization condition...
04/19/2011
7922815System and method for epitaxial deposition of a crystal using a liquid-solvent fluidized-bed mechanism
A system and method for growing diamond crystals from diamond crystal seeds by epitaxial deposition at low temperatures and atmospheric and comparatively low pressures. A solvent is circulated (by thermal convection and/or pumping), wherein carbon is added in a hot ...
04/12/2011
7909931Silica glass crucible
The present invention provides a silica glass crucible for manufacturing a silicon single crystal, in which melt vibration can be controlled more certainly and a high yield of single crystal can be realized. A first substantially bubble-free layer 10a ...
03/22/2011
7901508Method, system, and apparatus for the growth of SiC and related or similar material, by chemical vapor deposition, using precursors in modified cold-wall reactor
An approach for the growth of high-quality epitaxial silicon carbide (SiC) films and boules, using the Chemical Vapor Deposition (CVD) technique is described here. The method comprises modifications in the design of the typical cold-wall CVD reactors, providing a be...
03/08/2011
7875118Crystallization method and crystallization apparatus
A crystallization method includes the steps of melting a crystallized material in a crucible by heating, and growing a crystal by cooling and coagulating the melted material, wherein said melting step includes introducing a predetermined gas into the melted material...
01/25/2011
7862657Crystal growth method and apparatus
A crystal growth method for forming a semiconductor film, the method includes: while revolving one or more substrates about a rotation axis, passing raw material gas and carrier gas from the rotation axis side in a direction substantially parallel to a major surface...
01/04/2011
7837794Vapor phase growth apparatus and vapor phase growth method
A vapor phase growth apparatus and a vapor phase growth method improve the uniformity of film formed are provided. The vapor phase growth apparatus includes a chamber, a rotatable holder having a susceptor, an internal heater and an external heater which are arrange...
11/23/2010
7837793Method of manufacturing diamond substrates
A tiled array of diamond plates, which is suitable for wafer scale processing, for example, in the manufacture of electronic or other device structures on the diamond plates. The diamond plates are fixed to a support layer, preferably a polycrystalline diamond suppo...
11/23/2010
7824494Method and apparatus for production of a cast component
A system for producing cast components from molten metal. One form of the present invention includes a system for the precision pouring of molten metal within a casting mold. The precision pouring system is driven by a pressure differential. ...
11/02/2010
7785416Crucible and single crystal growth method using crucible
Provided are a crucible which prevents polycrystal formation to easily allow growth of optical part material single crystals, and a single crystal growth method employing the crucible. The crucible has a smooth surface of about Rmax 3.2 s as the surface roughness of...
08/31/2010
7776155Surface modified quartz glass crucible and its modification process
A surface modified quartz glass crucible and a process for modifying the crucible includes a layer of a metal oxide on the whole or a part of the inside and/or outside of the crucible, and baking it. At least an inside surface of the crucible is coated with a said m...
08/17/2010
7744697Bulk monocrystalline gallium nitride
The present invention refers to an ammonobasic method for preparing a gallium-containing nitride crystal, in which gallium-containing feedstock is crystallized on at least one crystallization seed in the presence of an alkali metal-containing component in a supercri...
06/29/2010
7736436Detachable edge ring for thermal processing support towers
An edge ring for use in batch thermal processing of wafers supported on a vertical tower within a furnace. The edge rings are have a width approximately overlapping the periphery of the wafers and are detachably supported on the towers equally spaced between the waf...
06/15/2010
7704324Apparatus for processing materials in supercritical fluids and methods thereof
An apparatus and method for processing materials in supercritical fluids is disclosed. The apparatus includes a capsule configured to contain a supercritical fluid, a high strength enclosure disposed about the capsule and a sensor configured to sense pressure differ...
04/27/2010
7695565Sublimation chamber for phase controlled sublimation
A method of forming a silicon carbon compound. A silicon source is introduced into an environment. Silicon particles are formed therefrom. One or more hydrocarbons are introduced into the environment separately from the silicon source, thereby forming one or more si...
04/13/2010
7682451PBN container and method for producing PBN container
There is disclosed a PBN container in which a conductive film is deposited on a surface of a body formed by depositing PBN (pyrolytic boron nitride), wherein, at least, an angle between a PBN cut face of the body and at least one wall surface adjacent to the PBN cut...
03/23/2010
7611580Controlling melt-solid interface shape of a growing silicon crystal using a variable magnetic field
System for controlling crystal growth in a Czochralski crystal growing apparatus. A magnetic field is applied within the crystal growing apparatus and varied to control a shape of the melt-solid interface where the ingot is being pulled from the melt. The shape of t...
11/03/2009
7608148Crystallization apparatus and crystallization method
A crystallization apparatus includes an illumination system which illuminates a phase shifter having a phase shift portion, and irradiates a polycrystal semiconductor film or an amorphous semiconductor film with a light beam having a predetermined light intensity di...
10/27/2009
7572334Apparatus for fabricating large-surface area polycrystalline silicon sheets for solar cell application
A method and apparatus for forming a semiconductor sheet suitable for use as a solar cell by depositing an array of solidified drops of a feed material on a sheet support. The desired properties of the sheet fabricated with the teaching of this invention are: flatne...
08/11/2009
7540921Crystallization apparatus, crystallization method, phase modulation element, device and display apparatus
A phase modulation element according to the present invention has a first area having a first phase value based on a phase modulation unit having a predetermined size and a second area having a second phase value based on the phase modulation unit having the predete...
06/02/2009
7524374Method and apparatus for generating a precursor for a semiconductor processing system
Embodiments of the present invention are directed to an apparatus for generating a precursor for a semiconductor processing system (320). The apparatus includes a canister (300) having a sidewall (402), a top portion and a bottom portion. The ca...
04/28/2009
7524376Method and apparatus for aluminum nitride monocrystal boule growth
A crystal growth setup within a physical vapor transport growth furnace system for producing AlN monocrystal boules at high temperatures includes a crucible effective to contain an AlN source material and a growing AlN crystal boule. This crucible has a thin wall th...
04/28/2009
7524375Growth of uniform crystals
The invention provides for growing semiconductor and other crystals by loading a vessel in its lower portion with a seed crystal, loading a charge thereon in the vessel, heating the charge to a molten state and electromagnetically stirring the melt using magnetic an...
04/28/2009
7497907Partially devitrified crucible
A vitreous crucible for holding semiconductor material during a moncrystalline ingot growing process has a sidewall. Part of the sidewall is coated with a devitrification promoter and part of the sidewall is substantially free from devitrification promoter coating. ...
03/03/2009
7491270Heat shield member and single crystal pulling device
A heat shielding member 20 that thermally shields the periphery of a single crystal 16 used in a Czochralski single crystal pulling device that pulls the single crystal 16 from a melt 15 that is collected in a crucible 10 is disclo...
02/17/2009
7473317Crystal growth crucible
A crystal growth crucible made of boron nitride includes a cylindrical tip portion for accommodating a seed crystal, and a cylindrical straight-body portion for growing a crystal, which is formed above the tip portion and has a diameter larger than that of the tip p...
01/06/2009
7470326Apparatus for manufacturing silicon single crystal, method for manufacturing silicon single crystal, and silicon single crystal
The apparatus for manufacturing a silicon single crystal includes: a crucible for storing molten silicon; a pulling-up device for pulling up a silicon single crystal from the molten silicon in the crucible to grow; a detecting device for detecting a position of the ...
12/30/2008
7442255Crucible for a device for producing a block of crystalline material and method for producing same
The bottom of the crucible has much greater thermal transfer properties, parallel to an axis substantially perpendicular to the bottom, than those of the side walls. The bottom and side walls are formed by materials having the same main chemical constituents. The bo...
10/28/2008
7435379System for performing crystallization trials
A trial generation station is provided comprising: a deck configured to receive a crystallization plate from a transport mechanism, the crystallization plate including a plurality of trial zones where crystallization trials are generated; and a head configured to be...
10/14/2008
7435397System for performing crystallization trials
A crystallization system is provided comprising a screen generation station; a screen storage station; including a housing configured to store a plurality of screen storage plates and mechanics for retrieving a selected screen storage plate from among the plurality ...
10/14/2008
7431768System for performing crystallization trials
A crystallization system is provided comprising: a screen replicator configured to transfer screen solutions from wells of a screen storage plate into well regions of multiple crystallization plates; a trial generation station configured to generate crystallization ...
10/07/2008
7427327Silica glass crucible with barium-doped inner wall
A silica glass crucible includes a thin barium-doped inner layer, a stable, bubble-free intermediate layer, and a stable opaque outer layer. The fusion process of the present invention controls the dynamic gas balance at the fusion front where formed grain is melted...
09/23/2008
7422634Three inch silicon carbide wafer with low warp, bow, and TTV
A high quality single crystal wafer of SiC is disclosed. The wafer has a diameter of at least about 3 inches, a warp of less than about 5 μm, a bow less than about 5 μm, and a total thickness variation of less than about 2.0 μm. ...
09/09/2008
7419547Method for marking a crystalline material using cathodoluminescence
In a first exemplary embodiment of the present invention, a method is provided for marking a sample of a doped crystalline material. According to a feature of the present invention, the method comprises the steps of causing a controlled alteration to the crystalline...
09/02/2008
7413718Reaction apparatus for producing silicon
A silicon production reactor including a reaction vessel and heating element, the reaction vessel has a vertically extending wall and a space surrounded by the wall, the heating element being capable of heating at least a part, including lower end portion, of the wa...
08/19/2008
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