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| Application No. | Application Title | Issue Date |
| 20120024075 | CAPACITANCE PRESSURE SENSOR The present invention provides a capacitance pressure sensor having a traces structure which can stably measure a pressure. A capacitance pressure sensor according to an embodiment of the present invention includes: a substrate having a first insulation layer to a third... | 02/02/2012 |
| 20120017690 | Pressure Sensor A pressure sensor, comprising: a monocrystalline membrane body, which includes a measuring membrane and an edge region surrounding the measuring membrane. The edge region has a greater material thickness than the measuring membrane and the edge region has a first mounti... | 01/26/2012 |
| 20120017691 | ELECTROSTATIC CAPACITIVE PRESSURE SENSOR In an electrostatic capacitance pressure sensor provided with a pressure sensor chip of a diaphragm structure for detecting an electrostatic capacitance in accordance with a pressure of a medium to be measured, one face of a sensor diaphragm of the pressure sensor is a ... | 01/26/2012 |
| 20110290031 | CAPACITANCE TYPE PRESSURE SENSOR The present invention is adapted to prevent a diaphragm from being deformed by a thermal stress caused by thermal expansion coefficients of a sensor main unit and a fixing member and includes a sensor main unit to which a fixed electrode is fixed, a diaphragm structure ... | 12/01/2011 |
| 20110239773 | RESONANT FREQUENCY BASED PRESSURE SENSOR A pressure sensor for sensing a pressure of a process fluid includes a sensor body exposed to the pressure of the process fluid. The sensor body deforms in response to the pressure. A diaphragm suspended from the sensor body has a tension which changes in response to de... | 10/06/2011 |
| 20110209552 | RELATIVE PRESSURE SENSOR A relative pressure sensor for registering pressure of a medium relative to surrounding atmospheric pressure includes: a pressure measuring cell having a measuring membrane and a platform, wherein pressure of the medium can act on a first side of the measuring membrane ... | 09/01/2011 |
| 20110209554 | COMBINED TYPE PRESSURE GAUGE, AND MANUFACTURING METHOD OF COMBINED TYPE PRESSURE GAUGE The present invention allows manufacturing of a capacitive diaphragm pressure gauge and a Pirani pressure gauge on a single silicon substrate, which makes it possible to reduce the manufacturing cost by the miniaturization of products and mass production. According to a... | 09/01/2011 |
| 20110154905 | CAPACITIVE SENSOR AND MANUFACTURING METHOD THEREOF A capacitive sensor includes a substrate, at least one first electrode, at least one second electrode, a sensing device, at least one anchor base, at least one movable frame, and a plurality of spring members. The first and second electrodes are disposed on the substrat... | 06/30/2011 |
| 20110160560 | Pressure sensor apparatus, system and method An implantable pressure sensor system having a sensor assembly configured and adapted to measure pressure in a volume, the sensor assembly including at least a first MEMS pressure sensor, an application-specific integrated circuit (ASIC) having memory means, temperature... | 06/30/2011 |
| 20110121843 | SENSOR A sensor including a carrier, a plurality of conductive bumps, a capacitive sensing element connected to the carrier through the conductive bumps, and a cover is provided. The capacitive sensing element has a membrane, and a channel is formed among the capacitive sensin... | 05/26/2011 |
| 20110120228 | CAPACITIVE PRESSURE SENSOR A capacitive pressure sensor array is made of two conductive layers, wherein each conductive layer is formed with a plurality of elongated conductors disposed in a substantially parallel manner between an upper and a lower insulating sheet, wherein the upper and lower i... | 05/26/2011 |
| 20110100130 | MEASURING CELL AND A METHOD OF USE THEREFOR The present invention is a measuring cell with a base body, a measurement membrane which is arranged on the base body, and a measurement device, where a clearance between the measurement membrane and the base body is filled with a fluid which presents an increased heat ... | 05/05/2011 |
| 20110071775 | PRESSURE MEASUREMENT USING A MEMS DEVICE A device to measure pressure is disclosed. In one embodiment, the device includes at least one element with two layers separated by a space which changes over a variable time period in response to a voltage applied across the two layers. The time period may be measured ... | 03/24/2011 |
| 20110056302 | ELECTRONIC CIRCUIT FOR CONTROLLING A CAPACITIVE PRESSURE SENSOR AND CAPACITIVE PRESSURE SENSOR SYSTEM An electronic circuit (10) for controlling a capacitive pressure sensor (1), which capacitive pressure sensor (1) comprises a plate electrode capacitor (C) with a capacity that varies in dependence on pressure changes exerted on a deflectable diaphr... | 03/10/2011 |
| 20110005325 | Design and fabrication method of a flexible capacitive pressure sensor The invention relates to a capacitive pressure sensor and a method for fabricating thereof. The capacitive pressure sensor comprises a cover, a plurality of first electrode, a substrate and a plurality of second electrode. The cover owns an upper wall and a plurality of... | 01/13/2011 |
| 20110000303 | MONOLITHIC VACUUM MANOMETER UTILIZING ELECTROSTATIC INTERFERENCE AS A MEANS OF DETECTION A monolithic manometer and method of sensing pressure changes may include sensing a change in parasitic capacitive coupling between multiple parasitic capacitive coupled conductive elements in response to a diaphragm disturbing the parasitic capacitive coupling between ... | 01/06/2011 |
| 20100300208 | CAPACITIVE ELECTRO-MECHANICAL TRANSDUCER A capacitive electro-mechanical transducer includes a cell, the cell including a first electrode and a second electrode that is disposed opposite the first electrode with a gap therebetween; and a pressure-adjusting unit for adjusting pressure in the gap.... | 12/02/2010 |
| 20100281993 | PRESSURE SENSOR PACKAGE A semiconductor package (10) including a pressure sensor die (14) has an interconnect layer (22) formed over a first major surface of the pressure sensor die (14). An encapsulant (18) encapsulates a second major surface and sides of th... | 11/11/2010 |
| 20100263452 | Pressure Sensor for Hydraulic Media in Motor Vehicle Brake Systems Disclosed is a pressure sensor, especially for measuring pressures exceeding 100 bar, with a diaphragm (1, 1′) that can be deflected and/or deformed as a result of pressurization. It has an enclosed hollow volume (6) that is disposed below the diaphragm ... | 10/21/2010 |
| 20100242617 | AIR PRESSURE SENSOR WITH TEMPERATURE COMPENSATION An air pressure sensor that has a first conductive membrane configured for deflection in response to pressure differences between air at a reference pressure and air at a pressure to be sensed. The sensor also has a second conductive membrane configured for deflection i... | 09/30/2010 |
| 20100218613 | SEMICONDUCTOR DEVICE INCLUDING A CAVITY A semiconductor device includes a substrate including a cavity and a first material layer over at least a portion of sidewalls of the cavity. The semiconductor device includes an oxide layer over the substrate and at least a portion of the sidewalls of the cavity such t... | 09/02/2010 |
| 20100217541 | INTEGRATED APPARATUS FOR MEASURING STATIC PRESSURE An apparatus for measuring a static pressure inside a component is provided. The apparatus includes a housing coupled to the component, the housing includes a moveable component disposed therein, the moveable component operably extendable into the component and retracta... | 08/26/2010 |
| 20100199778 | CAPACITIVE PRESSURE SENSOR A pressure sensor includes a platform 1 and an elastic measuring membrane 2, which is joined with a surface of the platform 1 to form a measuring chamber 3 sealed closed at the edge, wherein the platform 1 and/or the measuring membrane... | 08/12/2010 |
| 20100192694 | PRESSURE SENSOR INCLUDING THERMAL SELFTEST A semiconductor device includes a diaphragm, a sensing element, and a circuit. The sensing element is configured to sense deflection of the diaphragm. The circuit is configured to heat the diaphragm to induce deflection of the diaphragm.... | 08/05/2010 |
| 20100154553 | PRESSURE GAUGE A pressure/vacuum sensor and method, comprising: driving a MEMS piezoresistive resonator (8) into resonant vibration, applying Joule heating to the resonator (8); and sensing a variable parameter that varies in response to the tendency of the resonant freq... | 06/24/2010 |
| 20100099008 | PRESSURE SENSOR WITH NONLINEAR CHARACTERISTIC CURVE A pressure sensor adapted to provide a high resolution at a low pressure and a high pressure of an operating range is provided. The pressure sensor includes a body having an interface sur ace, a membrane sealingly disposed in the cavity adjacent the interface surface, a... | 04/22/2010 |
| 20100083731 | Pressure-based diagnostic system for process transmitter A process transmitter for measuring a process variable in an industrial process comprises a gauge pressure sensor, an excitation source and transmitter circuitry. The gauge pressure sensor measures a pressure difference between a process fluid and a reference volume, an... | 04/08/2010 |
| 20100083767 | Dual purpose pressure sensor A pressure transducer, particularly adapted to measure the pressure in a tire and to enable the tire to be filled includes a first housing, having an internal hollow. Positioned in the hollow of the first housing is a second housing, also having an internal hollow. The ... | 04/08/2010 |
| 20100083768 | Thermal-based diagnostic system for process transmitter A process transmitter for measuring a process variable in an industrial process comprises a sensor module, a heating device and transmitter circuitry. The sensor module has a sensor for sensing a process variable of an industrial process and generating a sensor signal. ... | 04/08/2010 |
| 20100000326 | High temperature capacitive static/dynamic pressure sensors Disclosed is a capacitive pressure probe for high temperature applications, such as for use in a gas turbine engine. The capacitive probe or pressure sensor of the present invention includes, inter alia, a sensor housing that defines an interior sensing chamber having a... | 01/07/2010 |
| 20090301211 | CAPACITANCE TYPE PRESSURE SENSOR A capacitance-type pressure sensor for measuring a change in a physical volume of a medium to be measured, by measuring two capacitances wherein the capacitances vary differently from each other in accordance with a change in the physical volume of the medium to be meas... | 12/10/2009 |
| 20090266172 | SENSE ELEMENT ASSEMBLY AND METHOD Described herein is the sense element assembly for a capacitive pressure sensor and method for creating same that has increased sensitivity without additional size. The sense element assembly and method includes fabricating an off-centered elliptically shaped center ele... | 10/29/2009 |
| 20090266173 | PRESSURE SENSOR In a pressure sensor including a pressure detecting element in an intermediate portion or at a deep side of a through hole formed in a protrusion, a body portion (a base portion and the protrusion) is made of ceramic or an insulative resin material and molded into a pre... | 10/29/2009 |
| 20090260448 | Apparatus for Measuring Pressure by Using Diaphragm and Method of Pressure Measurement by Using Diaphragm The present invention relates to a capacitance type pressure measurement apparatus by using a diaphragm, and more specifically to an apparatus for measuring pressure by using a diaphragm capable of measuring pressure of atmospheric pressure or less as well as pressure o... | 10/22/2009 |
| 20090260438 | INDUSTRIAL PROCESS DEVICE UTILIZING PIEZOELECTRIC TRANSDUCER A process device for coupling to an industrial process for use in monitoring or controlling the process includes a device housing configured to physically couple to the industrial process. A process variable sensor is configured to measure a process variable and measure... | 10/22/2009 |
| 20090260447 | DIAPHRAGM ATTACHING STRUCTURE OF ELECTROSTATIC CAPACITY TYPE PRESSURE GAGE The present invention provides a diaphragm attaching structure of an electrostatic capacity type pressure gauge which can achieve an improvement of a measuring precision by inhibiting a poor weld and a heat strain from being generated while restricting an increase of a ... | 10/22/2009 |
| 20090255343 | PHYSICAL QUANTITY SENSOR AND METHOD FOR MANUFACTURING THE SAME A physical quantity sensor includes two substrates and a movable electrode that is disposed between the two substrates and is bonded to the two substrates. In the physical quantity sensor, the movable electrode has an elastically deformable diaphragm and one of the two ... | 10/15/2009 |
| 20090255342 | Capacitance Manometers and Methods of Making Same A capacitance manometer comprises: a flexible diaphragm including a first electrode structure; an electrode structure including second and third spaced-apart electrode structures secured relative to the diaphragm so as to establish a capacitance between the first electr... | 10/15/2009 |
| 20090216466 | CAPACITATIVE NODE MEASUREMENT IN A CAPACITATIVE MATRIX PRESSURE INDUCER A method and system for measuring the distribution of pressure forces over a selected area includes a sensor having an array of pressure sensing capacitance nodes formed by intersecting rows and columns, where measured capacitance of a node is compared to a fixed value ... | 08/27/2009 |
| 20090193905 | Pressure Sensor Package Structure Embodiments of the present disclosure are directed to a package having pressure sensor including a first substrate having a fixed electrode bonded to a second substrate having a movable electrode disposed at a predetermined interval from the fixed electrode, a support s... | 08/06/2009 |
