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| Application No. | Application Title | Issue Date |
| 20120042731 | MEMS Pressure Sensor Device and Method of Fabricating Same A microelectromechanical systems (MEMS) pressure sensor device (20, 62) includes a substrate structure (22, 64) having a cavity (32, 68) formed therein and a substrate structure (24) having a reference element (36) formed therein. A se... | 02/23/2012 |
| 20120024074 | SENSOR ELEMENT FOR CAPACITIVELY MEASURING DIFFERENTIAL PRESSURE A capacitive differential pressure sensor is described which has a simple configuration, and which provides reliable measuring results even in corrosive measuring environments. The sensor element for capacitively measuring differential pressure includes a sensor diaphra... | 02/02/2012 |
| 20120024073 | High temperature capacitive static/dynamic pressure sensors and methods of making the same Disclosed are capacitive pressure probes or sensors for high temperature applications. The capacitive pressure sensors of the present invention include, inter alia, a sapphire diaphragm which is disposed within an interior sensing chamber of the probe housing and has a ... | 02/02/2012 |
| 20110314922 | WIRELESS SELF-POWERED MONOLITHIC INTEGRATED CAPACITIVE SENSOR AND METHOD OF MANUFACTURE Disclosed is a wireless self-powered monolithic integrated capacitive sensor, as well as methods of manufacturing same. A single monolithic chip may include various technologies, including RF MEMS, CMOS devices and related circuitry, and physical sensor MEMS. An example... | 12/29/2011 |
| 20110308320 | Inductively Coupled Pressure Sensor In one embodiment, a pressure sensor assembly for use with an application specific integrated circuit includes a capacitive sensor, a sensor coil within a first sensor compartment and operatively connected to the capacitive sensor to form a sensor L-C tank circuit, a me... | 12/22/2011 |
| 20110301575 | IMPLANTABLE MEDICAL PUMP WITH PRESSURE SENSOR The disclosure is directed to a pressure sensor of an implantable medical device. The pressure sensor may utilize detect fluid pressure based on a changing capacitance between two capacitive elements. The pressure sensor may define at least a portion of a fluid enclosur... | 12/08/2011 |
| 20110296925 | CAPACITIVE PRESSURE SENSOR ASSEMBLY The disclosure is directed to a capacitive pressure sensor, and the assembly of a capacitive pressure sensor, that may be used within an implantable medical pump. In one example, a housing ferrule that encloses one capacitive plate and includes at least one protrusion f... | 12/08/2011 |
| 20110296926 | DIFFERENTIAL PRESSURE SENSOR WITH LINE PRESSURE MEASUREMENT A pressure sensor assembly for sensing a pressure of a process fluid includes a sensor body having a cavity formed therein and first and second openings to the cavity configured to apply first and second pressures. A diaphragm in the cavity separates the first opening f... | 12/08/2011 |
| 20110271764 | Capacitive Pressure Sensor With Vertical Electrical Feedthroughs And Method To Make The Same A sensing device capable of detecting pressure using micro-electro-mechanical system (“MEMS”) capacitive pressure sensor with vertical electric feed-through is disclosed. The sensing device includes a first sensing element, a second sensing element, and a sensing ci... | 11/10/2011 |
| 20110232388 | SYSTEMS AND METHODS FOR MEASURING FLUID PRESSURE WITHIN A DISPOSABLE IV SET CONNECTED TO A FLUID SUPPLY PUMP Systems and methods of measuring pressure of fluid in a disposable IV set connected to a fluid supply pump is disclosed. At least one sensing arrangement coupled to the fluid supply pump is provided. A chamber having a movable element is provided, the movable element co... | 09/29/2011 |
| 20110185816 | Micromechanical sensor element for capacitive pressure detection A micromechanical capacitive pressure sensor has a layered structure, which includes at least one deflectable carrier element for at least one deflectable measuring electrode in a first layer plane and at least one stationary carrier structure for at least one counter e... | 08/04/2011 |
| 20110146410 | PRESSURE SENSOR INCLUDING SWITCHABLE SENSOR ELEMENTS A semiconductor device includes a first sensor element in a first branch of a Wheatstone bridge and a second sensor element in a second branch of the Wheatstone bridge. The semiconductor device includes a first reference element in the first branch and a second referenc... | 06/23/2011 |
| 20110126632 | LATERALLY INTEGRATED MEMS SENSOR DEVICE WITH MULTI-STIMULUS SENSING A microelectromechanical systems (MEMS) sensor device (20) includes a substrate (22) having sensors (24, 26) disposed on the same side (28) of the substrate (22) and laterally spaced apart from one another. The sensor (26) inclu... | 06/02/2011 |
| 20110100129 | MEASURING CELL AND A METHOD OF USE THEREFOR The present invention is a measuring cell comprising a base body. Layered upon the base body is a measurement membrane having a first measuring element, a measurement device, and an intermediate membrane. The intermediate membrane is arranged between the measurement mem... | 05/05/2011 |
| 20110040206 | IN SITU OFFSET COMPENSATION FOR PRESSURE SENSORS A pressure sensor having a substrate and a first, deformable membrane, partially supported by the substrate, which generates a first sensor reading when deformed by pressure. A second membrane is contiguous to the first membrane. When the second membrane is energized, i... | 02/17/2011 |
| 20110005323 | PRESSURE SENSOR A diaphragm section has a mesh-like beam section which partitions the diaphragm section into a plurality of rectangular regions, and a thin film section formed in the region partitioned by the beam section, and the thickness of the thin film section is less than that of... | 01/13/2011 |
| 20100294041 | MICROFABRICATED IMPLANTABLE WIRELESS PRESSURE SENSOR FOR USE IN BIOMEDICAL APPLICATIONS AND PRESSURE MEASUREMENT AND SENSOR IMPLANTATION METHODS A variable capacitor, a microfabricated implantable pressure sensor including a variable capacitor and an inductor, and related pressure measurement and implantation methods. The inductor may have a fixed or variable inductance. A variable capacitor and pressure sensors... | 11/25/2010 |
| 20100269594 | CAPACITIVE GAGE PRESSURE SENSOR WITH VACUUM DIELECTRIC A field device includes a capacitive gauge pressure sensor configured to measure a gage pressure of a process media. A sensor body of the pressure sensor includes first and second chambers. The second chamber is under vacuum and forms a vacuum dielectric for the pressur... | 10/28/2010 |
| 20100269595 | INTEGRATED DIFFERENTIAL PRESSURE SENSOR An integrated differential pressure sensor includes, in a monolithic body of semiconductor material, a first face and a second face, a cavity extending at a distance from the first face and delimited therewith by a flexible membrane formed in part by epitaxial material ... | 10/28/2010 |
| 20100241077 | Cannula Assemblies And Ambulatory Infusion Systems With Pressure Sensors Made Of Stacked Coplanar Layers Cannula assemblies with pressure sensors made of stacked coplanar layers and ambulatory infusion systems comprising the same are disclosed. The cannula assemblies include a hub and an infusion cannula. The hub includes a pressure sensor and a fluid channel fluidly coupl... | 09/23/2010 |
| 20100206887 | FUEL STORAGE SYSTEM AND METHOD FOR DETECTING A GAS PRESSURE THEREIN A fuel storage system includes a storage vessel including a dielectric liner, a voltage sensor formed by a pair of plates disposed on opposing surfaces of the liner, and a controller configured to determine a gas pressure in the storage vessel based on voltages measured... | 08/19/2010 |
| 20100186516 | VACUUM MEASURING CELL DEVICE HAVING A HEATER The invention relates to a vacuum measuring cell device comprising a vacuum membrane measuring cell (8) having a connecting means (5, 6) arranged thereon for a communicating connection to the medium to be measured, an electronic system (34), which i... | 07/29/2010 |
| 20100180687 | PRESSURE SENSOR INCLUDING SWITCHABLE SENSOR ELEMENTS A semiconductor device includes a first sensor element in a first branch of a Wheatstone bridge and a second sensor element in a second branch of the Wheatstone bridge. The semiconductor device includes a first reference element in the first branch and a second referenc... | 07/22/2010 |
| 20100170346 | SENSOR ELEMENT FOR CAPACITIVE DIFFERENTIAL-PRESSURE SENSING A sensor design, respectively a micromechanical sensor structure for capacitive relative-pressure measurement, that will allow very small pressure differentials to be reliably recorded at high absolute pressures even in harsh, particle-laden measuring environments. For ... | 07/08/2010 |
| 20100154552 | CAPACITANCE DIAPHRAGM GAUGE AND VACCUM APPARATUS A capacitance diaphragm gauge includes an inclination angle sensor which detects the inclination angle of the gauge. The pressure dependences of capacitance obtained when the capacitance diaphragm gauge is mounted on a vacuum apparatus at the first inclination angle (+9... | 06/24/2010 |
| 20100132472 | METHOD AND APPARATUS FOR PRESSURE MEASUREMENT USING FILL TUBE A pressure sensor includes a fill tube which is arranged to couple to a process pressure. A sensor is coupled to the fill tube and is configured to measure pressure of fluid in the fill tube as a function of a change of a physical property of the fill tube. Circuitry is... | 06/03/2010 |
| 20100107770 | CAPACITIVE PRESSURE SENSOR A capacitive pressure includes a laminated arrangement with a first flexible, electrically insulating carrier film carrying a first capacitor electrode, a second flexible, electrically insulating carrier film carrying a second capacitor electrode and a flexible, electri... | 05/06/2010 |
| 20100095777 | Capacitative Pressure Sensor A capacitative pressure sensor that has a silicon substrate, CMOS layers deposited on the silicon substrate, a conductive layer deposited on the CMOS layer and, a passivation layer on the conductive layer. A conductive membrane extends from the substrate assembly such t... | 04/22/2010 |
| 20100050776 | PRESSURE SENSOR FEATURING OFFSET CANCELLATION AND METHOD OF MAKING A pressure sensor includes a first set of electrodes, a second set of electrodes, and a common electrode. The first and second sets of electrodes overlie an insulative surface, wherein the first set of electrodes represent sense capacitor bottom electrodes and the secon... | 03/04/2010 |
| 20090320606 | ACCESSIBLE STRESS-BASED ELECTROSTATIC MONITORING OF CHEMICAL REACTIONS AND BINDING A sensor may include a substrate that has a cavity formed in a surface thereof. A diaphragm, having a conductive portion, may be suspended over the cavity, a selective coating may be present on a face of the diaphragm outside of the cavity, and a counterelectrode may be... | 12/31/2009 |
| 20090320605 | Optical Interferometric Pressure Sensor A pressure measuring cell has a first housing body and a membrane arranged proximate the housing body, both of ceramic. The membrane has a peripheral edge joined to the first housing body to create a reference pressure chamber. A second housing body made of ceramic mate... | 12/31/2009 |
| 20090308169 | PRESSURE SENSOR CONFIGURATIONS FOR IMPLANTABLE MEDICAL ELECTRICAL LEADS An implantable pressure sensor, which may be incorporated within an implantable medical electrical lead, includes an insulative sidewall, which contains a gap capacitor and an integrated circuit. The insulative sidewall of the pressure sensor includes a pressure sensiti... | 12/17/2009 |
| 20090293626 | PRESSURE SENSOR WITH TEMPERATURE COMPENSATION The invention provides for a pressure sensor with compensation for temperature variations. The sensor has CMOS layers deposited on a substrate, a conductive layer connected to the CMOS and a passivation layer deposited on the CMOS layers. The arrangement also includes a... | 12/03/2009 |
| 20090235752 | ELECTROSTATIC CAPACITANCE DIAPHRAGM VACUUM GAUGE AND VACUUM PROCESSING APPARATUS In an electrostatic capacitance diaphragm vacuum gauge, a diaphragm and a detection electrode opposing the diaphragm are arranged in a vacuum. The electrostatic capacitance diaphragm vacuum gauge measures pressure by measuring the change degree of an electrostatic capac... | 09/24/2009 |
| 20090205432 | PRESSURE SENSING SYSTEM AND METHOD A pressure sensing system positions a microelectromechanical (MEMS) diaphragm of a MEMS pressure sensor die in a housing to indirectly sample pressure state of a fluid being measured. A second housing diaphragm is used to make direct contact with the fluid being measure... | 08/20/2009 |
| 20090177096 | CONTACT FORCE SENSOR PACKAGE, BLOOD PRESSURE METER WITH THE SAME, AND METHOD FOR FABRICATING THE CONTACT FORCE SENSOR PACKAGE A contact force sensor package includes a substrate layer having a vibration detection unit and a pair of first junction pads that are electrical connection ports which are provided on an upper surface of the substrate layer, a flexible circuit substrate layer having a ... | 07/09/2009 |
| 20090120195 | Pressure sensor A pressure transmitter is provided. The pressure transmitter includes a pressure sensor including a pair of process fluid pressure ports each having a deflectable diaphragm. A first variable capacitor is disposed within the pressure sensor and has a capacitance that var... | 05/14/2009 |
| 20090064790 | Microreactor Glass Diaphragm Sensors Microfluidic devices having wall structures comprised of sintered glass frit and further including a glass, glass-ceramic or ceramic membrane structure sealed by a sintered seal to said wall structures, such that a fluid passage or chamber is defined at least in part by... | 03/12/2009 |
| 20080282806 | Electrostatic pressure sensor with porous dielectric diaphragm A pressure sensor comprises a first pressure chamber containing fill fluid at a first pressure, a second pressure chamber containing fill fluid at a second pressure, a porous dielectric diaphragm having first and second major surfaces exposed to the first and second pre... | 11/20/2008 |
| 20080223140 | Industrial pressure sensor having enhanced dielectric fill fluid A capacitive pressure sensor for an industrial process transmitters comprises a housing, a sensing diaphragm, an electrode and a fill fluid. The housing includes an interior cavity and a channel extending from an exterior of the housing to the cavity. The sensing diaphr... | 09/18/2008 |
