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Class 700/109 - Quality control


Subclass of Class 700 - Data processing: generic control systems or specific applications
Definition: Subject matter wherein the data processing system or calculating
No. of applications: 148
Last issue date: 03/01/2012


1        
Application No.Application TitleIssue Date
20120053722CONTROLLING NON-PROCESS OF RECORD (POR) PROCESS LIMITING YIELD (PLY) INSPECTION WORK
A method of controlling a quantity of non-process of record (POR) process limiting yield (PLY) inspections in wafer processing includes setting aside planned capacity for non-POR work, upon receipt of a request for non-POR work, estimating a time required for completion...
03/01/2012
20120041582WIRELESS ADAPTER WITH PROCESS DIAGNOSTICS
A process device with diagnostics for use in an industrial process includes a process variable sensor or controller element which is configured to sense or control a process variable of a process fluid of the industrial process. Circuitry is coupled to the process varia...
02/16/2012
20110276169BATCH CONTROL USING BANG-BANG CONTROL
A method for batch control in a system. The system comprises at least two batch processing sets that share at least one shared equipment. A batch is initiated in each processing set. Process variables from each batch are monitored. At least one process variable from at ...
11/10/2011
20110238199MEASUREMENT METHOD AND DEVICE FOR THREAD PARAMETERS
A measurement method for thread parameters for a threaded object (3), by means of a measurement device (1) defining a spatial reference system (X, Y, Z) incorporating an optical sensor (5) to retrieve the shape of the threaded object, and defining a...
09/29/2011
20110213489MANUFACTURING OF INTEGRATED CIRCUIT DEVICES USING A GLOBAL PREDICTIVE MONITORING SYSTEM
A global predictive monitoring system for a manufacturing facility. The system may be employed in an integrated circuit (IC) device fabrication facility to monitor processing of semiconductor wafers. The system may include deployment of a swarm of individually separate ...
09/01/2011
20110213488PLANT MONITORING CONTROL DEVICE AND EVENT ANALYSIS SUPPORT METHOD
A plant monitoring control device (200) provides an operation console (201), a control device (207) and a data processing device (203) that acquires process data, alarm log data, auxiliary device operation log data and an operation command fr...
09/01/2011
20110208342Inspection Method and Apparatus, and Lithographic Apparatus
A metrology device for inspecting a substrate is provided. In an embodiment, the metrology device includes a remote radiation source device, an optical system for creating a radiation beam, and an optical fibre for transferring radiation from the optical system to the l...
08/25/2011
20110178627INTEGRATED MENU-DRIVEN MANUFACTURING METHOD AND SYSTEM
A menu-driven manufacturing technique includes determining a product and product configuration, along with process steps to be carried out in manufacturing workstations. Display screens corresponding to the particular manufacturing process steps are accessed and display...
07/21/2011
20110093109METHOD AND SYSTEM FOR CONTROLLING PRODUCTION OF ITEMS
The invention relates to a method for controlling a production of items on a production line, wherein a digital image of each of said items is processed so as to obtain at least identified product type data and identified item data, said identified product type data and...
04/21/2011
20110077765TOOL COMMONALITY AND STRATIFICATION ANALYSIS TO ENHANCE A PRODUCTION PROCESS
A method of analyzing production steps includes inputting application data associated with a production process having a plurality of process steps into a memory with each of the plurality of process steps including a plurality of tools. The method also includes loading...
03/31/2011
20110054659WAFER FABRICATION MONITORING SYSTEMS AND METHODS, INCLUDING EDGE BEAD REMOVAL PROCESSING
Systems and method for monitoring semiconductor wafer fabrication processing, for example based upon EBR line inspection, including capturing at least one image of a wafer at an intermediate stage of fabrication. The captured image(s) are compressed to generate a compos...
03/03/2011
20110035042System And Method For Cascade Information Handling System Manufacture
Information handling system manufacture through a burn rake that burns images and tests information handling systems is managed with a cascade first-in-first-out manufacture by allowing a predetermined burn time for each information handling system at each burn location...
02/10/2011
20110015773Semiconductor Wafer Monitoring Apparatus and Method
Metrology methods and apparatus for semiconductor wafer fabrication in which data for metrology is obtained by detecting a measurable property of a monitored entity, which is either (i) a wafer transporter (e.g. a FOUP) loaded with one or more wafers to be monitored, or...
01/20/2011
20100332011METHODS AND ARRANGEMENTS FOR IN-SITU PROCESS MONITORING AND CONTROL FOR PLASMA PROCESSING TOOLS
An arrangement for implementing an automatic in-situ process control scheme during execution of a recipe is provided. The arrangement includes control-loop sensors configured at least for collecting a first set of sensor data to facilitate monitoring set points during t...
12/30/2010
20100312372SYSTEM AND METHOD FOR PLANNING GLOBAL LOGISTICS IN TFT-LCD MANUFACTURING INDUSTRY
A system and a method of planning global logistics for a TFT-LCD manufacturing industry are provided. The system includes an input module and an industry characteristic planning module with a front-end process transformation module and a back-end transportation allocati...
12/09/2010
20100292826RETICLE MANIPULATION DEVICE
A reticle manipulating device comprising a housing capable of having a controlled environment wherein at least one processing module is connected to the housing and capable of processing a reticle. A transport apparatus is, connected to the housing for transporting the ...
11/18/2010
20100293075METHOD FOR MANUFACTURING SHOES BY USING AN INTERACTIVE SYSTEM
A method for obtaining shoes includes a step for obtaining shoe information; a step for communication with manufacturers; a step for manufacturing the shoes; a step for delivery and/or try-on; a step for amendment, and a step for finish manufacture. The method allows th...
11/18/2010
20100256795CLOUD COMPUTING AS A BASIS FOR EQUIPMENT HEALTH MONITORING SERVICE
A system includes a computing cloud having at least one data storage unit and at least one processing unit. The computing cloud is configured to provide at least one service. The system also includes a plurality of clients each configured to communicate with the computi...
10/07/2010
20100234974METHOD AND SYSTEM FOR OPERATING A CYCLIC PRODUCTION MACHINE IN COORDINATION WITH A LOADER OR UNLOADER MACHINE
A method for synchronizing a first machine of a manufacturing process section arranged to carry out a production cycle including a working part and a non-working part. The first machine is operated in conjunction with at least one second machine. The first machine carri...
09/16/2010
20100228374SEMICONDUCTOR SUBSTRATE PROCESSING METHOD AND APPARATUS
A semiconductor substrate processing apparatus and a method for processing semiconductor substrates are provided. The method may include providing a semiconductor substrate having a surface and a plurality of features on the surface, each feature being positioned on the...
09/09/2010
20100217423Method for Providing Functions in an Industrial Automation System, Control Program and Industrial Automation System
In order to provide functions in an industrial automation system having control units which are coupled via a communication network, functions of the automation system are made available by services. Components of a service are subdivided into service-specific component...
08/26/2010
20100211205METHOD FOR PROCESS DIAGNOSIS AND ROTARY ATOMIZER ARRANGEMENT
A rotary atomizer arrangement and methods for operating the same are disclosed. An exemplary atomizer may be used for the coating of work pieces, and may include a bell plate driven by an electric motor. The exemplary atomizer may further be configured for the detection...
08/19/2010
20100198387QUALITY CONTROL SYSTEM, QUALITY CONTROL APPARATUS, QUALITY CONTROL METHOD AND COMPUTER READABLE MEDIUM
A quality control method includes: extracting, from a time series distribution of troubles that have occurred in electronic equipments, a first characteristics of states of occurrence of the troubles; specifying one or more parts included in the electronic equipments, t...
08/05/2010
20100185314GST Film Thickness Monitoring
In polishing a substrate having a layer of GST disposed over an underlying layer, during polishing, a non-polarized light beam is directed onto the layer of GST. The non-polarized light beam reflects from the first substrate to generate a reflected light beam having an ...
07/22/2010
20100152869PHASED ACCEPTANCE OF A PRODUCT
System(s) and method(s) are provided to enable phased acceptance of a product as part of an acquisition contract. Phased acceptance establishes a set of one or more phases of product acceptance, each directed to grant approval of a set of specific aspects of the product...
06/17/2010
20100114348Frozen compositions and methods for piercing a substrate
Certain embodiments disclosed herein relate to compositions, methods, devices, systems, and products regarding frozen particles. In certain embodiments, the frozen particles include materials at low temperatures. In certain embodiments, the frozen particles provide vehi...
05/06/2010
20100017009SYSTEM FOR MONITORING MULTI-ORDERABLE MEASUREMENT DATA
A computer-based measurement monitoring system and method for monitoring multi-stage processes capable of producing multi-orderable data and identifying, at any stage in the monitored process, unacceptable deviations from an expected value at particular stages of the pr...
01/21/2010
20100010659Thin Films measurment method and system
A method and system are presented for use in controlling the processing of a structure. First measured data is provided being indicative of at least one of the following: a thickness (d2) of at least one layer (L2) of the structure W in at least se...
01/14/2010
20100004772SYSTEMS AND METHODS FOR MANAGING MATERIAL STORAGE VESSELS HAVING INFORMATION STORAGE ELEMENTS
Material management systems and methods include material storage vessels with information (e.g., electronic information) storage. Information may be communicated from a storage device to a process tool controller and employed to set or adjust a process tool operating pa...
01/07/2010
20090299515COATING AND DEVELOPING APPARATUS, COATING AND DEVELOPING METHOD, AND STORAGE MEDIUM
When a product substrate passes a reference module which is an n-th module ahead of an inspection module in a transfer path, an inspection reservation signal for performing an inspection to a lot to which the product substrate belongs is outputted to the inspection modu...
12/03/2009
20090292386System and Method for Automatic Virtual Metrology
A server, a system and a method for automatic virtual metrology (AVM) are disclosed. The AVM system comprises a model-creation server and a plurality of AVM servers. The model-creation server is used to construct the first set of virtual metrology (VM) models (of a cert...
11/26/2009
20090287340In-line effluent analysis method and apparatus for CMP process control
An apparatus and method for collecting and analyzing the effluent stream created by a chemical mechanical planarization (CMP) process performs a continuous measurement of at least one effluent characteristic and integrates the results over time to create a volumetric an...
11/19/2009
20090287333AUTOMATED PROCESS FOR MANUFACTURING RADIATION FILTERS FOR RADIATION TREATMENT MACHINES INCLUDING MANUFACTURE SCHEDULING
Automating the process for providing a radiation filter is based on different software programs executed by a computer system. The software programs include customer interface software, tool path generation software and manufacture scheduling software. Each software pro...
11/19/2009
20090276074METHOD AND SYSTEM FOR MACHINING PROCESS CONTROL
A method and system for controlling machining processes are provided. The system includes a computer system communicatively coupled to a database. The computer system is configured to receive data relating to manufactured part processes, identify at least one machining ...
11/05/2009
20090271020SYSTEM AND METHOD FOR ANALYZING PERFORMANCE OF AN INDUSTRIAL ROBOT
A computing system is communicated with a metal fabrication device for analyzing performance of an industrial robot. The metal fabrication device includes the industrial robot, and a plate bender. The computing system is operable to generate an analysis report of the pe...
10/29/2009
20090259330METHOD OF CONTROLLING RESULT PARAMETER OF IC MANUFACTURING PROCEDURE
A method of controlling a result parameter of an IC manufacturing procedure is described. The value of at least one first variable of a process correlated with the result parameter is acquired, and the difference between the predicted value and the target value of the r...
10/15/2009
20090248189METHOD AND SYSTEM FOR AUTOMATIC GENERATION OF THROUGHPUT MODELS FOR SEMICONDUCTOR TOOLS
The throughput of complex cluster tools of a semiconductor manufacturing environment may be determined for a desired manufacturing scenario on the basis of automatically generated throughput models. The throughput models may be established on the basis of rule messages ...
10/01/2009
20090234485METHOD OF PERFORMING MEASUREMENT SAMPLING OF LOTS IN A MANUFACTURING PROCESS
A method of performing measurement sampling in a production process includes passing a lot through a manufacturing process, employing a set of combinational logistics to determine if sampling is indicated and, if sampling is indicated, establishing a sampling decision. ...
09/17/2009
20090222124ESTIMATION OF PROCESS CONTROL PARAMETERS OVER PREDEFINED TRAVEL SEGMENTS
A method of determining a segment-specific estimate of a parameter associated with a process control loop includes receiving signal data corresponding to a signal from a process control loop, storing the signal data, partitioning the stored signal data into a plurality ...
09/03/2009
20090222125METHOD FOR MANUFACTURING BASE MEMBER, METHOD FOR MANUFACTURING MOTOR, METHOD FOR MANUFACTURING INFORMATION APPARATUS, AND BASE MEMBER, MOTOR, AND INFORMATION APPARATUS
If a blank is mistakenly supplied to a precision machining apparatus corresponding to the wrong model, the missupply can be detected early on by a simple method.

A method for manufacturing a base member, which is a method for manufacturing ...

09/03/2009
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