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Class 451/388 - Vacuum


Subclass of Class 451 - Abrading
Definition: Work holder in which the workpiece is held in place by atmospheric
No. of applications: 43
Last issue date: 05/03/2012


1    
Application No.Application TitleIssue Date
20120108148Method of Modifying Flat Glass Surface and Apparatus for Carrying Out the Method
The method of modifying the flat glass surface is based on that the surface of a glass is worked by abrasive grains of synthetic diamond which are situated in the mass of plastic threads that are a part of a rotating brush. The glass is first tarnished using brushes wit...
05/03/2012
20120040277DAMASCENE RETICLE AND METHOD OF MANUFACTURE THEREOF
A reticle carrier for a polishing tool capable of accommodating a reticle includes a base plate with an obverse and reverse surfaces, a retaining ring secured to the obverse surface of the base plate forming a recess defined by the obverse surface of the rigid base plat...
02/16/2012
20110281509HOLDING JIG, SEMICONDUCTOR WAFER GRINDING METHOD, SEMICONDUCTOR WAFER PROTECTING STRUCTURE AND SEMICONDUCTOR WAFER GRINDING METHOD AND SEMICONDUCTOR CHIP FABRICATION METHOD USING THE STRUCTURE
A backgrinding machine 10 of a semiconductor wafer W includes: a table 13 set on the working plane of a mount 11; a multiple number of holding jigs 20 arranged via check tables 15 on table 13; a grinding machine 30 for pe...
11/17/2011
20110256806OPHTHALMIC MACHINE AND METHOD FOR MACHINING AND/OR POLISHING A LENS
The invention relates to an ophthalmic machining machine comprising machining means and means for supporting a blank. The invention is characterised in that the machine is capable of transferring marks to said blank that can be identified by monitoring means for reposit...
10/20/2011
20110237163SUBSTRATE POLISHING APPARATUS AND METHOD
A substrate polishing apparatus includes a substrate holding mechanism having a head for holding a substrate to be polished, and a polishing mechanism including a polishing table with a polishing pad mounted thereon. The substrate held by the head is pressed against the...
09/29/2011
20110159792MULTI-FUNCTIONAL GRINDING APPARATUS
A multi-functional grinding apparatus includes a fixed barrel, a moving barrel, a cutting device, a grinding plate, and an actuator. The fixed barrel defines a chamber therein and includes a number of inner side surfaces, the inner side surfaces are substantially parall...
06/30/2011
20110136414POLISHING HEAD AND POLISHING APPARATUS
A polishing head for holding a workpiece when a surface of the workpiece is polished and a polishing apparatus provided with the polishing head, and more particularly a polishing head for holding the workpiece on a rubber film and a polishing apparatus provided with the...
06/09/2011
20110065367ARC SURFACE GRINDING DEVICE
A grinding device includes a fixed barrel, a moving barrel, a grinding plate, and an actuator. The fixed barrel defines a chamber and includes a number of inner surfaces substantially parallel to a central axis, each of which defines a holding groove therein for holding...
03/17/2011
20110021116METHOD FOR PROCESSING AN EDGE OF A GLASS PLATE
A method for beveling a thin glass plate by simultaneously grinding an edge of the glass using multiple abrasive cup wheels, wherein the edge of the glass plate is extended from the fixturing device. The extension of the glass plate allows the glass plate to bend in res...
01/27/2011
20100291839Grinding Method of Strip Glass and a Vacuum Suction Plate Used in the Same
A grinding method of a strip glass comprises: the strip glass to be ground is absorbed to a vacuum suction plate, then the strip glass is transferred to the glass edge chamfering apparatus by the vacuum suction plate. Grinding a side of the strip glass forms a predefine...
11/18/2010
20100267317Substrate holder and substrate holding method
A substrate holder is a mechanism for holding a substrate, to be polished, by vacuum suction. The substrate holder includes a substrate-holding stage having a suction surface for the substrate, and a fluid passage selectively coupled to a vacuum source and a fluid suppl...
10/21/2010
20100227536Glass Polishing System
A glass polishing system includes a lower unit capable of rotating a glass placed at a fixed position, an upper unit contacting with the glass and capable of being passively rotated due to the rotation of the glass, a moving unit for moving the upper unit in a horizonta...
09/09/2010
20100227537Glass Polishing System
A glass polishing system includes a lower unit capable of rotating a glass placed at a fixed position, an upper unit capable of contacting with the glass and being passively rotated due to the rotation of the glass, and a moving unit for moving the upper unit in a horiz...
09/09/2010
20100130105Substrate supporting unit, and apparatus and method for polishing substrate using the same
Provided are a substrate supporting unit and an apparatus and method for polishing a substrate using the same. The substrate supporting unit vacuum-absorbs a bottom surface of the substrate during a polishing process, and supports the substrate in a state where the subs...
05/27/2010
20100112910LINEAR PRESSURE FEED GRINDING WITH VOICE COIL
The present invention is directed to an apparatus for grinding or polishing at least one edge of a glass substrate. The apparatus includes a grinding unit configured to remove a predetermined amount of material from the edge when in an aligned position. The grinding uni...
05/06/2010
20100112905WAFER HEAD TEMPLATE FOR CHEMICAL MECHANICAL POLISHING AND A METHOD FOR ITS USE
The present invention is a planar template for a CMP tool polishing head possessing a means of securing a wafer in CMP polishing where the back surface of the template is held to the polishing head by retaining means and a method for using the planar template....
05/06/2010
20090325467Method of Thinning Wafer and Support plate
A wafer can be thinned without occurrences of dimples. A support plate 1 has a number of through holes 10. A circuit forming surface of a wafer 2 is adhered to one surface of the support plate by an adhesive member 4, and a dimple prevention ...
12/31/2009
20090325469SUBSTRATE SUPPORTING UNIT AND SINGLE TYPE SUBSTRATE POLISHING APPARATUS USING THE SAME
Provided are a substrate supporting unit and a single type substrate polishing apparatus using the substrate supporting unit. During a polishing process, the bottom surface of a substrate is attached to the substrate supporting unit by vacuum suction, and during a post-...
12/31/2009
20090305617Support plate, carrier device, releasing device, and releasing method
A support plate for supporting a wafer includes a plurality of through holes piercing the support plate in the thickness direction, and a belt-shaped or island-like flat portion on which the plurality of through holes are not formed....
12/10/2009
20090298402Surface grinding machine
It has special application for preparing surfaces of two pieces of a composite material (fiber and resin) which have to be glued by means of an adhesive, establishing a perfect mutual contact between them. The preparation of the surface needs to be uniformed and without...
12/03/2009
20090291624SUBSTRATE POLISHING APPARATUS AND METHOD
A substrate polishing apparatus includes a substrate holding mechanism having a head for holding a substrate to be polished, and a polishing mechanism including a polishing table with a polishing pad mounted thereon. The substrate held by the head is pressed against the...
11/26/2009
20090258583DEVICE AND PROCESS FOR APPLYING AND/OR DETACHING A WAFER TO/FROM A CARRIER
The invention relates to a device for applying and/or detaching a wafer to/from a carrier with
    • a deformable membrane wh...
10/15/2009
20090191791Polishing method and polishing apparatus
A polishing method can safely detach and lift up a workpiece from a polishing surface without carrying out the operation of making the workpiece overhang the polishing surface. The polishing method includes carrying out processing of a surface to be polished of a workpi...
07/30/2009
20090186560WAFER DE-CHUCKING
A carrier head (100) for a CMP tool, wherein the membrane (108) defining a chamber with a contact surface (102) of the carrier head (100) has a number of integral tubes (110) termining in openings coupled directly to the substrate (...
07/23/2009
20090081930Automatic machine and automatic method for grinding the perimetric edge of glass sheets
An automatic machine and an automatic method for grinding the perimetric edge of rectangular or nonrectangular of glass sheets arranged substantially vertically, comprising at least one conveyor and at least one workhead provided with an abrasive tool for grinding the g...
03/26/2009
20090081852HOLDING JIG, SEMICONDUCTOR WAFER GRINDING METHOD, SEMICONDUCTOR WAFER PROTECTING STRUCTURE AND SEMICONDUCTOR WAFER GRINDING METHOD AND SEMICONDUCTOR CHIP FABRICATION METHOD USING THE STRUCTURE
A backgrinding machine 10 of a semiconductor wafer W includes: a table 13 set on the working plane of a mount 11; a multiple number of holding jigs 20 arranged via check tables 15 on table 13; a grinding machine 30 for pe...
03/26/2009
20090026676Non-Contact Type Suction Holding Apparatus
[Problem] A non-contact type suction holding apparatus capable of reliably holding a plate-shaped member without damaging its surface by suction-holding the plate-shaped member with a portion except for its peripheral portion (main portion) in a non-contact state in whi...
01/29/2009
20080287044Method of transferring a wafer
A method of transferring a wafer is disclosed. The method comprises providing a pedestal and at least one spray orifice extending through the pedestal; disposing a wafer above the pedestal using a first robot, wherein the wafer has a first surface and a second surface, ...
11/20/2008
20080227374POLISHING HEAD TESTING WITH MOVABLE PEDESTAL
A polishing head is tested in a test station having a pedestal for supporting a test wafer and a controllable pedestal actuator to move a pedestal central wafer support surface and a test wafer toward the polishing head. In another aspect of the present description, the...
09/18/2008
20080153405CONTACT PLANARIZATION APPARATUS
A contact planarization apparatus includes a lower membrane assembly, an upper membrane assembly, a differential pressure assembly, and a curing or reflowing assembly. The lower membrane assembly supports a substrate to be planarized and biases it toward the upper membr...
06/26/2008
20080119118Retaining Ring, Flexible Membrane for Applying Load to a Retaining Ring, and Retaining Ring Assembly
A carrier head that has a base assembly, a retaining ring assembly, a carrier ring, and a flexible membrane is described. A retaining ring assembly has a flexible membrane shaped to provide an annular chamber and an annular retaining ring, wherein annular concentric pro...
05/22/2008
20080051018Semiconductor Wafer Handler
A semiconductor wafer handler comprises a ring (70) attached to a hub (80) by a plurality of spokes (90). Vacuum is applied to the surface of the semiconductor wafer through orifices (100) containing in the ring (70). Water and/or nitr...
02/28/2008
20070232209METHOD FOR POLISHING A SEMICONDUCTOR WAFER
An apparatus for polishing a wafer comprises a supporting portion having an abrasive pad disposed thereon, and a polishing head disposed over the abrasive pad. The polishing head comprises a carrier having at least two fluid passages, a retainer ring disposed on a lower...
10/04/2007
20070155288FIXTURE FOR GRINDING MACHINES
A fixture for grinding machines includes a first base (10) and a second base (20). The first base defines a first workpiece holding groove (11 ) therein, a first side surface (12) is formed corresponding to the first workpiece holding groove,...
07/05/2007
20070026772Apparatus for use in processing a semiconductor workpiece
The present invention provides a chuck for receiving and supporting a semiconductor workpiece for processing. The chuck includes a body for supporting the workpiece. The body is porous or has a plurality of openings, apertures or channels. A compressible corrosion resis...
02/01/2007
20060135047Method and apparatus for clamping a substrate in a high pressure processing system
Pressure biased wafer holding of a semiconductor wafer is provided for use in high pressure processing. The use of vacuum chucking for holding a semiconductor wafer during processing is applied to high pressure systems. Adverse effects of high pressure biases are preven...
06/22/2006
20060099892Substrate holding apparatus and polishing apparatus
The present invention relates to a substrate holding apparatus for holding a substrate such as a semiconductor wafer in a polishing apparatus for polishing the substrate to a flat finish. The substrate holding apparatus according to the present invention comprises a top...
05/11/2006
20060084371Wafer chuck
The influence of the slurry generated when polishing an orientation notch and the like is minimized. The holding members 10, 20 for holding the outer periphery of the wafer W and the driving mechanism 30 for driving the holding members 10, 20 all to...
04/20/2006
20050266783Retaining rings, planarizing apparatuses including retaining rings, and methods for planarizing micro-device workpieces
Retaining rings, planarizing apparatuses including retaining rings, and methods for mechanical and/or chemical-mechanical planarization of micro-device workpieces are disclosed herein. In one embodiment, a carrier head for retaining a micro-device workpiece during mecha...
12/01/2005
20050153635POLISHING HEAD OF CHEMICAL MECHANICAL POLISHING APPARATUS AND POLISHING METHOD USING THE SAME
A chemical mechanical polishing (CMP) apparatus includes a polishing head that is composed of a carrier and a membrane, and is positioned on a polishing pad of a supporting part. The polishing head has a supporter installed at an internal center of the carrier, a chucki...
07/14/2005
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