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| Application No. | Application Title | Issue Date |
| 20090203299 | SUBSTRATE FLAT GRINDING DEVICE To provide a high-rigidity flat grinding device, a substrate flat grinding device has three fastening plate lifting-and-lowering mechanisms that have kinematic couplings and a cylinder rod that move the fastening plate upward or downward. Being a high-rigidity grinding ... | 08/13/2009 |
| 20080248734 | METHOD AND APPARATUS FOR IMPROVED CHEMICAL MECHANICAL PLANARIZATION AND CMP PAD A polishing pad includes a guide plate, a porous slurry distribution layer and a flexible under-layer. Polishing elements are interdigitated with one another through the slurry distribution layer and the guide plate. The polishing elements may be affixed to the compress... | 10/09/2008 |
| 20080200097 | POLISHING METHOD AND POLISHING APPARATUS The polishing method of a disk-shaped substrate for polishing an outer circumference 13 of a disk-shaped substrate using slurry is provided with in this sequence: a first polishing process for polishing the outer circumference 13 using an abrasive-grain in... | 08/21/2008 |
| 20080176488 | GRINDING METHOD OF A DISK-SHAPED SUBSTRATE AND GRINDING APPARATUS The grinding method of a disk-shaped substrate that grinds a disk-shaped substrate including a portion having a hole at the center thereof while rotating the disk-shaped substrate is provided with: grinding an inner circumference of the disk-shaped substrate while an in... | 07/24/2008 |
| 20070197146 | COMPOSITE RETAINING RING A two part retaining ring is described that has a lower ring and an upper ring. The lower ring contacts a polishing surface during chemical mechanical polishing. The upper surface and the lower surface of the lower ring have thick and thin subportions to increase the fl... | 08/23/2007 |
| 20070072523 | Optical disk restoration apparatus The present invention intends to provide an optical disk restoration apparatus that is simple structured and small sized to reduce the production cost, and that can evenly apply a substantially uniform pressing force. This object can be achieved by an optical disk resto... | 03/29/2007 |
