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Patent No. 5356330

Apparatus for Simulating a High Five

A self-righting hand-arm configuration which is adapted to pivot when struck by a user, thereby simulating a "high five."

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Class 438/456 - Having enclosed cavity


Subclass of Class 438 - Semiconductor device manufacturing: process
Definition: Process for joining plural semiconductive substrates into
No. of applications: 45
Last issue date: 03/01/2012


1    
Application No.Application TitleIssue Date
20120048596Structure And Process For Electrical Interconnect And Thermal Management
A method for making a structure for thermal management of circuit devices. The method provides a first substrate and a second substrate where at least one of the first and second substrates includes a circuit element. The method forms in at least one of the first substr...
03/01/2012
20110281419METHOD FOR MANUFACTURING DIELECTRIC ISOLATION TYPE SEMICONDUCTOR DEVICE
A method for manufacturing a dielectric isolation type semiconductor device comprises: forming a plurality of trenches in a first region on a major surface of a semiconductor substrate; forming a first dielectric layer on the major surface of the semiconductor substrate...
11/17/2011
20100193884Method of Fabricating High Aspect Ratio Transducer Using Metal Compression Bonding
A method and apparatus are described for fabricating a high aspect ratio MEMS device by using metal thermocompression bonding to assemble a reference wafer (100), a bulk MEMS active wafer (200), and a cap wafer (300) to provide a proof mass (200<...
08/05/2010
20100181676SUBSTRATE BONDING WITH METAL GERMANIUM SILICON MATERIAL
A method that in one embodiment is useful in bonding a first substrate to a second substrate includes forming a layer including metal over the first substrate. The layer including metal in one embodiment surrounds a semiconductor device, which can be a micro electromech...
07/22/2010
20090315169FRAME AND METHOD OF MANUFACTURING ASSEMBLY
The frame (1) comprises an intermediate layer (5) sandwiched between a first layer (3) with a first pattern and a second layer (4) with a second pattern. Adhesion layers (2,12) are present on the first and second layer (3,4) res...
12/24/2009
20090305482SYSTEMS, DEVICES, AND METHODS FOR SEMICONDUCTOR DEVICE TEMPERATURE MANAGEMENT
Devices, systems, and methods for semiconductor die temperature management are described and discussed herein. An IC device is described that includes at least one intra-die cooling structure. In an embodiment, the IC device includes a semiconductor die formed of integr...
12/10/2009
20090220710PROCESS OF MAKING A MICROTUBE AND MICROFLUIDIC DEVICES FORMED THEREWITH
A process for producing a micromachined tube (microtube) suitable for microfluidic devices. The process entails isotropically etching a surface of a first substrate to define therein a channel having an arcuate cross-sectional profile, and forming a substrate structure ...
09/03/2009
20090194787VERTICAL OUTGASSING CHANNELS
InP epitaxial material is directly bonded onto a Silicon-On-Insulator (SOI) wafer having Vertical Outgassing Channels (VOCs) between the bonding surface and the insulator (buried oxide, or BOX) layer. H2O and other molecules near the bonding surface migrate t...
08/06/2009
20090057879STRUCTURE AND PROCESS FOR ELECTRICAL INTERCONNECT AND THERMAL MANAGEMENT
A structure and method for thermal management of integrated circuits. The structure for thermal management of integrated circuits includes first and second substrates bonded together, at least one of the first and second substrates including at least one circuit element...
03/05/2009
20080277258MEMS plate switch and method of manufacture
Systems and methods for forming an electrostatic MEMS plate switch include forming a deformable plate on a first substrate, forming the electrical contacts on a second substrate, and coupling the two substrates using a hermetic seal. The deformable plate may have a flex...
11/13/2008
20080264471Solar cell modules comprising compositionally distinct encapsulant layers
The present invention provides a solar cell pre-laminate assembly comprising one or more solar cells laminated between two compositionally distinct encapsulant layers, and the method of preparing a solar cell module from such an assembly....
10/30/2008
20080261377METHOD OF FORMING A DEVICE WAFER WITH RECYCLABLE SUPPORT
A method for forming a device wafer with a recyclable support by providing a wafer having first and second surfaces, with at least the first surface of the wafer comprising a semiconductor material that is suitable for receiving or forming electronic devices thereon, pr...
10/23/2008
20080217782METHOD FOR PREPARING 2-DIMENSIONAL SEMICONDUCTOR DEVICES FOR INTEGRATION IN A THIRD DIMENSION
A method which is intended to facilitate and/or simplify the process of fabricating interlayer vias by selective modification of the FEOL film stack on a transfer wafer is provided. Specifically, the present invention provides a method in which two dimensional devices a...
09/11/2008
20080218281Anodically Bonded Cell, Method for Making Same and Systems Incorporating Same
A cell suitable for use with an atomic clock and a method for making the same, the cell including: a silicon wafer having a recess formed therein; at least one amorphous silicate member having an ion mobility and temperature expansion coefficient approximately that of s...
09/11/2008
20080188059INTEGRATED SENSOR AND CIRCUITRY AND PROCESS THEREFOR
A micromachined sensor and a process for fabrication and vertical integration of a sensor and circuitry at wafer-level. The process entails processing a first wafer to incompletely define a sensing structure in a first surface thereof, processing a second wafer to defin...
08/07/2008
20080164606SPACERS FOR WAFER BONDING
A deformable spacer for wafer bonding applications is disclosed. The spacer may be used to keep wafers separated until desired conditions are achieved....
07/10/2008
20080128901Micro-electro-mechanical systems device and integrated circuit device integrated in a three-dimensional semiconductor structure
Semiconductor devices (300, 400, and 500) including an integrated circuit (IC) device (100) coupled to a micro-electro-mechanical systems (MEMS) device (200) and a method (600) for producing same are disclosed. The IC device includes a...
06/05/2008
20080124895WAFER BONDING METHOD
The invention is directed to a wafer bonding method for bonding a first wafer with a second wafer, wherein the first wafer has a first top surface and the second wafer has a second top surface formed thereon and the first wafer bonds with the second wafer in a manner th...
05/29/2008
20080096301Micro electro mechanical system
Embodiments of a micro electro mechanical system are disclosed....
04/24/2008
20080029878Method and Device For Secure, Insulated and Electrically Conductive Assembling Of Treated Semiconductor Wafers
The invention relates to a process for and an arrangement of the connection of processed semiconductor wafers (1, 2) wherein, in addition to the firm connection, there is an electric connection (5) between the semiconductor wafers and/or the electronic str...
02/07/2008
20070284681APPARATUS AND METHOD FOR PROTECTIVE COVERING OF MICROELECTROMECHANICAL SYSTEM (MEMS) DEVICES
A microelectromechanical system (MEMS) assembly includes a MEMS substrate having a plurality of MEMS devices, a plurality of bond pads, and a wafer cap. The wafer cap includes a unitary structure having a plurality of pockets and a plurality of apertures. The wafer cap ...
12/13/2007
20070238262Wafer bonding material with embedded rigid particles
A material for bonding a lid wafer to a device wafer, which includes an adhesive substance with rigid particles embedded in the adhesive substance. The rigid particles may be particles or spheres of alumina, silica, or diamond, for example. The adhesive substance may be...
10/11/2007
20070196998System and method for forming moveable features on a composite substrate
A method for forming moveable features suspended over a substrate is described, wherein a cavity beneath the moveable feature is first formed using a liquid etchant applied through one or more release holes. After formation of the cavity, the outline of the moveable fea...
08/23/2007
20070194663Packaging and Integration System for Micro Sensors in the Marine Environment
The integrated unmanned, affordable, microsystem in accordance with the present invention is used to deploy physical or chemical sensors for continuous monitoring of sea space over large time periods. The microsystem is capable of measuring ocean physical parameters ove...
08/23/2007
20070161149METHOD OF FABRICATING ORGANIC ELECTRONIC DEVICE
A fabricating method of organic electronic device is provided. The method comprises: providing a flexible substrate; fabricating a plurality of organic elements on the flexible substrate; fabricating a patterned spacing layer on the flexible substrate; and arranging a c...
07/12/2007
20070141805Method for bonding plastic micro chip
Disclosed is a method of bonding upper and lower substrates for manufacturing a plastic micro chip comprising the upper substrate, the lower substrate and a sample filling space having a predetermined height for filling a sample between the upper and lower substrates. A...
06/21/2007
20070077676METHOD OF FABRICATING PRESSURE SENSOR
A method of fabricating a pressure sensor. An SOI wafer having a single crystalline silicon layer, an insulating layer and a silicon substrate is provided. The single crystalline silicon layer has a pressure sensing device. The silicon substrate and the insulating layer...
04/05/2007
20070042565Fluidic MEMS device
A method of manufacturing a fluidic MEMS package includes attaching a cover plate with a plurality of openings to a substrate with a plurality of bond rings with breaches such that the cover plate, the substrate and the bond rings define a plurality of respective inner ...
02/22/2007
20070026636Wide and narrow trench formation in high aspect ratio MEMS
Methods have been provided for forming both wide and narrow trenches on a high-aspect ratio microelectromechanical (MEM) device on a substrate including a substrate layer (126), an active layer (128), and a first sacrificial layer (130) disposed at ...
02/01/2007
20070026559System and method for direct-bonding of substrates
A method of forming a MEMS (Micro-Electro-Mechanical System), includes forming an ambient port through a MEMS cap which defines a cavity containing a plurality of MEMS actuators therein; and bonding a lid arrangement to the MEMS cap to hermetically seal the ambient port...
02/01/2007
20070015341METHOD OF MAKING MEMS WAFERS
A wafer level package for a MEMS device is made by bonding a MEMS wafer and a lid wafer together to form a hermetically sealed cavity. One or more vias filled with conductive or semiconductive material is etched one of the wafers to form one or more rods extending throu...
01/18/2007
20070010067Exfoliating method, transferring method of thin film device, and thin film device, thin film integrated circuit device, and liquid crystal display device produced by the same
A transferring method including providing a substrate, forming a transferred layer over the substrate, joining a transfer member to the transferred layer, and removing the transferred layer from the substrate. The transferring method further includes transferring the tr...
01/11/2007
20060292823Method and apparatus for bonding wafers
Embodiments of a method and apparatus for bonding wafers are disclosed. The bonded wafers may include self-passivating interconnects. Other embodiments are described and claimed. ...
12/28/2006
20060240582Methods relating to the reconstruction of semiconductor wafers for wafer-level processing
Methods relating to the reconstruction of semiconductor wafers for wafer-level processing are disclosed. Selected semiconductor dice having alignment cavities formed in a surface thereof are placed in contact with liquid, gel or other flowable alignment droplets in a si...
10/26/2006
20060176224Antenna module fabrication method for a wireless electronic device
The antenna module fabrication for a wireless electronic device includes setting up the antenna and the assembly base that is to connect the antenna to the designated circuit board. The antenna and the assembly base are two independent pieces, and the positioning parts ...
08/10/2006
20060160274Methods relating to forming interconnects
Methods relating to forming interconnects through injection of conductive materials, to fabricating semiconductor component assemblies, and to resulting assemblies. A semiconductor component substrate, such as a semiconductor die or other substrate, has dielectric mater...
07/20/2006
20060141745Method and system for wafer bonding of structured substrates for electro-mechanical devices
A method for forming a composite substrate structure. The method includes providing a first substrate, the first substrate having a surface region and a backside region, providing a handling substrate, the handling substrate having a bonding surface and a handling surfa...
06/29/2006
20060110843Method of manufacturing an external force detection sensor
A method of manufacturing an external force detection sensor in which a sensor element is formed by through-hole dry etching of an element substrate, and an electrically conductive material is used as an etching stop layer during the dry etching. ...
05/25/2006
20060068564Micromachined electromechanical device
A method for fabricating a MEMS device comprises providing a substrate having a back side, a front side opposite to the back side and a periphery portion. A desired microstructure is formed on the back side of the substrate. The substrate is then supported for rotation....
03/30/2006
20050227400ENCAPSULATION WAFER PROCESS
A method of processing a wafer, and particularly a cap wafer configured for mating with a device wafer in the production of a die package. Masking layers are deposited on oxide layers present on opposite surfaces of the wafer, after which the masking layers are etched t...
10/13/2005
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