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Class 438/287 - Gate insulator structure constructed of diverse dielectrics (e.g., MNOS, etc.) or of nonsilicon compound


Subclass of Class 438 - Semiconductor device manufacturing: process
Definition: Process for making an insulated gate field effect transistor
No. of applications: 589
Last issue date: 05/24/2012


1                      
Application No.Application TitleIssue Date
20120129310METHODS OF FABRICATING A SEMICONDUCTOR DEVICE HAVING A HIGH-K GATE DIELECTRIC LAYER AND SEMICONDUCTOR DEVICES FABRICATED THEREBY
A method of fabricating a semiconductor device includes forming a lower interfacial layer on a semiconductor layer, the lower interfacial layer being a nitride layer, forming an intermediate interfacial layer on the lower interfacial layer, the intermediate interfacial ...
05/24/2012
20120127795NON-VOLATILE MEMORY AND MANUFACTURING METHOD THEREOF AND OPERATING METHOD OF MEMORY CELL
A non-volatile memory and a manufacturing method thereof and a method for operating a memory cell are provided. The non-volatile memory includes a substrate, first and second doped regions, a charged-trapping structure, first and second gates and an inter-gate insulatio...
05/24/2012
20120104512SEALED AIR GAP FOR SEMICONDUCTOR CHIP
A semiconductor chip including a substrate; a dielectric layer over the substrate; a gate within the dielectric layer, the gate including a sidewall; a contact contacting a portion of the gate and a portion of the sidewall; and a sealed air gap between the sidewall, the...
05/03/2012
20120104509SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
A semiconductor device includes: a first conductivity type transistor and a second conductivity type transistor, wherein each of the first conductivity type transistor and the second conductivity type includes a gate insulating film formed on a base, a metal gate electr...
05/03/2012
20120083086SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREFOR
There is provided a semiconductor device including a semiconductor substrate (10), a high concentration diffusion region (22) formed within the semiconductor substrate (10), a first low concentration region (24) that has a lower impurity conc...
04/05/2012
20120070951SEMICONDUCTOR DEVICE AND FABRICATION METHOD THEREFOR
There is provided a semiconductor device including bit lines (14) formed in a semiconductor substrate (10), insulating film lines (18) located on the bit lines (14) to successively run in a length direction of the bit lines (14), gate ...
03/22/2012
20120068275SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME
A method for fabricating a semiconductor device includes forming a high-dielectric constant insulating film including a high-dielectric constant film; forming a first conductive film including an oxide film on an upper surface thereof and containing at least one of high...
03/22/2012
20120052645SEMICONDUCTOR DEVICE PRODUCTION METHOD
A semiconductor device production method includes: forming a gate insulating film on the p-type region of a semiconductor substrate; forming a first aluminum oxide film with an oxygen content lower than stoichiometric composition on the gate insulating film; forming a t...
03/01/2012
20120045879TUNNEL EFFECT TRANSISTORS BASED ON ELONGATE MONOCRYSTALLINE NANOSTRUCTURES HAVING A HETEROSTRUCTURE
Tunnel field-effect transistors (TFETs) are regarded as successors of metal-oxide semiconductor field-effect transistors (MOSFETs), but silicon-based TFETs typically suffer from low on-currents, a drawback related to the large resistance of the tunnel barrier. To achiev...
02/23/2012
20120045880METAL GATE TRANSISTOR AND METHOD FOR FABRICATING THE SAME
A method for fabricating metal gate transistor is disclosed. The method includes the steps of: providing a substrate, wherein the substrate comprises a transistor region defined thereon; forming a gate insulating layer on the substrate; forming a stacked film on the gat...
02/23/2012
20120038009Novel methods to reduce gate contact resistance for AC reff reduction
A method (and semiconductor device) of fabricating a semiconductor device provides a field effect transistor (FET) with reduced gate contact resistance (and series resistance) for improved device performance. An impurity is implanted or deposited in the gate stack in an...
02/16/2012
20120032280MOS TRANSISTORS INCLUDING SiON GATE DIELECTRIC WITH ENHANCED NITROGEN CONCENTRATION AT ITS SIDEWALLS
A method of forming an integrated circuit (IC) having at least one MOS device includes forming a SiON gate dielectric layer on a silicon surface. A gate electrode layer is deposited on the SiON gate layer and then patterning forms a gate stack. Exposed gate dielectric s...
02/09/2012
20120025287 Memory Cell, An Array, And A Method for Manufacturing A Memory Cell
A memory cell (100) comprising a transistor, the transistor comprising a substrate (101), a first source/drain region (102), a second source/drain region (112), a gate (104) and a gate insulating layer (103) positioned between t...
02/02/2012
20120025327SEMICONDUCTOR DEVICE WITH METAL GATES AND METHOD FOR FABRICATING THE SAME
A semiconductor device includes a gate insulation layer formed over a substrate and having a high dielectric constant, a gate electrode formed over the gate insulation layer and a work function control layer formed between the substrate and the gate insulation layer and...
02/02/2012
20120028429METHOD OF FORMING A NON-VOLATILE ELECTRON STORAGE MEMORY AND THE RESULTING DEVICE
The invention provides a method of forming an electron memory storage device and the resulting device. The device comprises a gate structure which, in form, comprises a first gate insulating layer formed over a semiconductor substrate, a self-forming electron trapping l...
02/02/2012
20120024963SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
An object of this invention is to provide a semiconductor device (an RFID) with reduced loss of voltage/current corresponding to a threshold value of a transistor, and having a voltage/current rectification property. Another object of this invention is to simplify a fab...
02/02/2012
20120018790NON-VOLATILE MEMORY AND FABRICATING METHOD THEREOF
A non-volatile memory including a substrate, a stacked gate structure, two doped regions and a plurality of spacers is provided. The stacked gate structure is disposed on the substrate, wherein the stacked gate structure includes a first dielectric layer, a charge stora...
01/26/2012
20120018795NON-VOLATILE MEMORY AND MANUFACTURING METHOD THEREOF
A manufacturing method of a non-volatile memory is disclosed. A gate structure is formed on a substrate and includes a gate dielectric layer and a gate conductive layer. The gate dielectric layer is partly removed, thereby a symmetrical opening is formed among the gate ...
01/26/2012
20120019284Normally-Off Field Effect Transistor, a Manufacturing Method Therefor and a Method for Programming a Power Field Effect Transistor
A normally-off power field-effect transistor semiconductor structure is provided. The structure includes a channel, a source electrode, a gate electrode and trapped charges which arranged between the gate electrode and the channel such that the channel is in an off-stat...
01/26/2012
20120015488HIGH-K GATE DIELECTRIC OXIDE
A dielectric such as a gate oxide and method of fabricating a gate oxide that produces a more reliable and thinner equivalent oxide thickness than conventional SiO2 gate oxides are provided. Gate oxides formed from elements such as zirconium are thermodynamically stable...
01/19/2012
20120012921MEMORY ARRAYS HAVING SUBSTANTIALLY VERTICAL, ADJACENT SEMICONDUCTOR STRUCTURES AND THE FORMATION THEREOF
Memory arrays and methods of their formation are disclosed. One such memory array has memory-cell strings are formed adjacent to separated substantially vertical, adjacent semiconductor structures, where the separated semiconductor structures couple the memory cells of ...
01/19/2012
20110315961Ultrathin Spacer Formation for Carbon-Based FET
A method for formation of a carbon-based field effect transistor (FET) includes depositing a first dielectric layer on a carbon layer located on a substrate; forming a gate electrode on the first dielectric layer; etching an exposed portion of the first dielectric layer...
12/29/2011
20110309434NONVOLATILE MEMORY DEVICE AND MANUFACTURING METHOD THEREOF
A nonvolatile memory device and a manufacturing method thereof are provided. The manufacturing method includes the following steps. First, a substrate is provided. Then, a tunneling dielectric layer is formed on the substrate, and a dummy gate is form on the tunneling d...
12/22/2011
20110303972SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
A semiconductor device manufacturing method of an embodiment includes the steps of: forming a first insulating layer on a semiconductor substrate; forming on the first insulating layer an amorphous or polycrystalline semiconductor layer having a narrow portion; forming ...
12/15/2011
20110303968Nonvolatile Memory Array With Continuous Charge Storage Dielectric Stack
An integrated circuit of an array of nonvolatile memory cells has a dielectric stack layer over the substrate, and implanted regions in the substrate under the dielectric stack layer. The dielectric stack layer is continuous over a planar region, that includes locations...
12/15/2011
20110298061STRUCTURE AND METHOD FOR REPLACEMENT GATE MOSFET WITH SELF-ALIGNED CONTACT USING SACRIFICIAL MANDREL DIELECTRIC
The present disclosure provides a method for forming a semiconductor device that includes forming a replacement gate structure overlying a channel region of a substrate. A mandrel dielectric layer is formed overlying source and drain regions of the substrate. The replac...
12/08/2011
20110300682CHARGE TRAPPING DEVICES WITH FIELD DISTRIBUTION LAYER OVER TUNNELING BARRIER
A memory cell comprising: a semiconductor substrate with a surface with a source region and a drain region disposed below the surface of the substrate and separated by a channel region; a tunneling barrier dielectric structure with an effective oxide thickness of greate...
12/08/2011
20110291198Scaled Equivalent Oxide Thickness for Field Effect Transistor Devices
A method for forming a field effect transistor device includes forming an oxide layer on a substrate, forming a dielectric layer on the oxide layer, forming a first TiN layer on the dielectric layer, forming a metallic layer on the first layer, forming a second TiN laye...
12/01/2011
20110281412PRODUCTION OF A TRANSISTOR GATE ON A MULTIBRANCH CHANNEL STRUCTURE AND MEANS FOR ISOLATING THIS GATE FROM THE SOURCE AND DRAIN REGIONS
A method for fabricating a microelectronic device comprising: a support, an etched stack of thin layers comprising: at least one first block and at least one second block resting on the support, in which at least one drain region and at least one source region, respecti...
11/17/2011
20110272754MEMORIES AND THEIR FORMATION
Memories and their formation are disclosed. One such memory has a first array of first memory cells extending in a first direction from a first surface of a semiconductor. A second array of second memory cells extends in a second direction, opposite to the first directi...
11/10/2011
20110266604NONVOLATILE MEMORY DEVICE AND METHOD FOR FABRICATING THE SAME
A nonvolatile memory device includes a plurality of strings each having vertically-stacked active layers over a plurality of word lines, at least one bit line connection unit vertically formed over one end of the word lines and having a stairway shape, and a plurality o...
11/03/2011
20110263091MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
Disclosed is a semiconductor device using an oxide semiconductor, with stable electric characteristics and high reliability. In a process for manufacturing a bottom-gate transistor including an oxide semiconductor film, dehydration or dehydrogenation is performed by hea...
10/27/2011
20110254106SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD
A semiconductor device includes a gate insulation film formed over a semiconductor substrate; a cap film formed over the gate insulation film; a silicon oxide film formed over the cap film; a metal gate electrode formed over the silicon oxide film; and source/drain diff...
10/20/2011
20110256682Multiple Deposition, Multiple Treatment Dielectric Layer For A Semiconductor Device
A method is provided for fabricating a semiconductor device. A semiconductor substrate is provided. A first high-k dielectric layer is formed on the semiconductor substrate. A first treatment is performed on the high-k dielectric layer. In an embodiment, the treatment i...
10/20/2011
20110242888SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
The semiconductor device includes the nonvolatile memory cell in the main surface of a semiconductor substrate. The nonvolatile memory cell has a first insulating film over the semiconductor substrate, a conductive film, a second insulating film, the charge storage film...
10/06/2011
20110241131SEMICONDUCTOR MEMORY DEVICE WITH BIT LINE OF SMALL RESISTANCE AND MANUFACTURING METHOD THEREOF
A reduction of a resistance of a bit line of a memory cell array and a reduction of a forming area of the memory cell array are planed. Respective bit lines running at right angles to a word line are composed of a diffusion bit line formed in a semiconductor substrate a...
10/06/2011
20110233649NON-VOLATILE SEMICONDUCTOR MEMORY DEVICE
A non-volatile semiconductor memory device includes: a charge accumulation layer (CAL) on a substrate; a memory gate formed onto the substrate through the CAL; a first side gate formed through a first insulating film on a first side of the memory gate; a second side gat...
09/29/2011
20110233647METHODS FOR FORMING A MEMORY CELL HAVING A TOP OXIDE SPACER
Methods for fabricating a semiconductor memory cell that has a spacer layer are disclosed. A method includes forming a plurality of source/drain regions in a substrate where the plurality of source/drain regions are formed between trenches, forming a first oxide layer a...
09/29/2011
20110233689SEMICONDUCTOR DEVICE, PROCESS FOR PRODUCING SEMICONDUCTOR DEVICE, SEMICONDUCTOR SUBSTRATE, AND PROCESS FOR PRODUCING SEMICONDUCTOR SUBSTRATE
There is provided a semiconductor device that includes a III-V Group compound semiconductor having a zinc-blende-type crystal structure, an insulating material being in contact with the (111) plane of the III-V Group compound semiconductor, a plane of the III-V Group co...
09/29/2011
20110230028MANUFACTURING METHOD OF STRAIGHT WORD LINE NOR TYPE FLASH MEMORY ARRAY
In a manufacturing method of a straight word line NOR flash memory array, a source line is implanted after the formation of a word line in the NOR type flash memory array is completed, and a discrete implant region is formed in the NOR type flash memory array and parall...
09/22/2011
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