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Class 438/282 - Buried channel


Subclass of Class 438 - Semiconductor device manufacturing: process
Definition: Process for making an insulated gate field effect transistor
No. of applications: 61
Last issue date: 12/08/2011


1    
Application No.Application TitleIssue Date
20110300681RAISED SOURCE/DRAIN WITH SUPER STEEP RETROGRADE CHANNEL
Systems and methods for raised source/drain with super steep retrograde channel are described. In accordance with a first embodiment, a semiconductor device comprises a substrate comprising a surface and a gate oxide disposed above the surface comprising a gate oxide th...
12/08/2011
20110183481PLANAR FIELD EFFECT TRANSISTOR STRUCTURE AND METHOD
Disclosed is a transistor that incorporates epitaxially deposited source/drain semiconductor films and a method for forming the transistor. A crystallographic etch is used to form recesses between a channel region and trench isolation regions in a silicon substrate. Eac...
07/28/2011
20110147845Remote Doped High Performance Transistor Having Improved Subthreshold Characteristics
Devices comprising, and a method for fabricating, a remote doped high performance transistor having improved subthreshold characteristics are disclosed. In one embodiment a field-effect transistor includes a channel layer configured to convey between from a source porti...
06/23/2011
20110147712QUANTUM WELL TRANSISTORS WITH REMOTE COUNTER DOPING
A quantum well device and a method for manufacturing the same are disclosed. In an embodiment, a quantum well structure comprises a quantum well region overlying a substrate and a remote counter doping comprising dopants of conductivity opposite to the conductivity of t...
06/23/2011
20100015818Method for Producing a Stop Zone in a Semiconductor Body and Semiconductor Component Having a Stop Zone
A method for producing a buried stop zone in a semiconductor body and a semiconductor component having a stop zone, the method including providing a semiconductor body having a first and a second side and a basic doping of a first conduction type. The method further inc...
01/21/2010
20090221119FABRICATION OF A SEMICONDUCTOR DEVICE WITH STRESSOR
In a semiconductor fabrication process, an epitaxial layer is formed overlying a substrate, wherein there is a lattice mismatch between the epitaxial layer and the substrate. A hard mask having an opening is formed overlying the epitaxial layer. A recess is formed throu...
09/03/2009
20090159987SEMICONDUCTOR DEVICE FOR REDUCING INTERFERENCE BETWEEN ADJOINING GATES AND METHOD FOR MANUFACTURING THE SAME
A semiconductor device includes a semiconductor substrate having an active region having a plurality of recessed channel areas extending across the active region and a plurality of junction areas also extending across the active region. Gates are formed in and over the ...
06/25/2009
20090127635Transistor including an active region and methods for fabricating the same
A transistor including an active region and methods thereof. The active region may include corners with at least one of a rectangular, curved or rounded shape. The methods may include isotropically etching at least a portion of the active region such that the portion in...
05/21/2009
20090047766METHOD FOR FABRICATING RECESS CHANNEL MOS TRANSISTOR DEVICE
A method for fabricating recess channel MOS transistors of the present invention utilizes a lithography process to form trenches in the recess channel MOS transistors after finishing a STI process. Furthermore, the method of the present invention can make the critical d...
02/19/2009
20090026554SOURCE/DRAIN STRESSORS FORMED USING IN-SITU EPITAXIAL GROWTH
A method for forming a semiconductor device is provided. The method includes forming a semiconductor layer. The method further includes forming a gate structure overlying the semiconductor layer. The method further includes forming a high-k sidewall spacer adjacent to t...
01/29/2009
20090020837Semiconductor device and manufacturing method thereof
A long channel semiconductor device and a manufacturing method thereof are provided. The method for forming a long channel semiconductor device includes: providing a substrate; forming a trench in the substrate with a trench bottom defining a first channel length; formi...
01/22/2009
20090020807SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME
Disclosed are a semiconductor device and a method for fabrication of the same. The fabrication method may include selectively forming an oxide layer pattern on a semiconductor substrate, forming an insulation layer pattern on the same substrate to cover edge portions of...
01/22/2009
20080318384Method of forming quantum wire gate device
The present invention relates to a method of forming a quantum wire gate device. The method includes patterning a first oxide upon a substrate. Preferably the first oxide pattern is precisely and uniformly spaced to maximize quantum wire numbers per unit area. The metho...
12/25/2008
20080296622BURIED CHANNEL MOSFET USING III-V COMPOUND SEMICONDUCTORS AND HIGH k GATE DIELECTRICS
A semiconductor-containing heterostructure including, from bottom to top, a III-V compound semiconductor buffer layer, a III-V compound semiconductor channel layer, a III-V compound semiconductor barrier layer, and an optional, yet preferred, III-V compound semiconducto...
12/04/2008
20080277743SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME
A semiconductor device includes a substrate having a recess in an area where a gate is to be formed, spacers formed over sidewalls of the recess, and a first gate electrode filling in the recess. The spacers include material having the first work function or insulation ...
11/13/2008
20080246087MOS TRANSISTOR FOR REDUCING SHORT-CHANNEL EFFECTS AND ITS PRODUCTION
The invention is related to a MOS transistor and its fabrication method to reduce short-channel effects. Existing process has the problem of high complexity and high cost to reduce short-channel effects by using epitaxial technique to produce an elevated source and drai...
10/09/2008
20080203483SEMICONDUCTOR DEVICE INCLUDING A RECESSED-CHANNEL-ARRAY MISFET
A semiconductor device includes RCA MISFETs formed in active regions of a semiconductor substrate, the active regions being defined by shallow-trench-isolation (STI) structure. The top surface of the insulating film is flush with the top surface of the active regions. T...
08/28/2008
20080164522Semiconductor device and manufacturing method thereof
To provide a semiconductor device that has a three dimensional gate dielectric film, is easily manufactured, and a gate structure thereof can be easily miniaturize. A semiconductor device comprises: a three-dimensional gate dielectric film formed on a semiconductor subs...
07/10/2008
20080157232SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THE SAME, AND NAND GATE CIRCUIT USING THE SEMICONDUCTOR DEVICE
A method of forming a semiconductor device that can include forming a channel region in a semiconductor substrate; forming a first gate electrode and a second gate electrodes over the semiconductor substrate, the first gate electrode and the second gate electrode being ...
07/03/2008
20080157132METHOD FOR FORMING THE GATE OF A TRANSISTOR
A method of forming a gate of a transistor can include forming a nitride film over a semiconductor substrate; forming a photoresist pattern defining a gate channel region of a transistor over the nitride film; forming a nitride pattern by etching the nitride film using ...
07/03/2008
20080105897STRUCTURE AND METHOD OF FABRICATING FINFET WITH BURIED CHANNEL
A method of manufacturing a fin structure comprises forming a first structure of a first material type on a wafer and forming a buried channel of a second material adjacent sidewalls of the first structure. The second material type is different than the first material t...
05/08/2008
20080035962Semiconductor Device And Method of Manufacturing the Same
A semiconductor device includes a semiconductor substrate, source and drain regions formed on the semiconductor substrate, a recess channel that is formed on the inner surface of a recess region, which is formed on the semiconductor substrate between the source and drai...
02/14/2008
20080001222Semiconductor Device Of High Breakdown Voltage And Manufacturing Method Thereof
Disclosed are a high breakdown voltage semiconductor device and a method of manufacturing the same. According to the invention, an insulation spacer capable of substitute-performing functions of an inter-insulation film, a contact hole and a mask, etc. by a self-alignme...
01/03/2008
20080001173BURIED CHANNEL MOSFET USING III-V COMPOUND SEMICONDUCTORS AND HIGH k GATE DIELECTRICS
A semiconductor-containing heterostructure including, from bottom to top, a III-V compound semiconductor buffer layer, a III-V compound semiconductor channel layer, a III-V compound semiconductor barrier layer, and an optional, yet preferred, III-V compound semiconducto...
01/03/2008
20070241414Semiconductor Device and Manufacturing Process Therefor
This invention relates to a semiconductor device having a beam made of a semiconductor to which strain is introduced by deflection, and a current is permitted to flow in the beam. ...
10/18/2007
20070238252Cosmic particle ignition of artificially ionized plasma patterns in the atmosphere
This invention is a method and apparatus for creating artificially ionized regions in the atmosphere utilizing ionization trails of cosmic rays and micro-meteors to ignite plasma patterns in electric field patterns formed by ground based electromagnetic wave radiators. ...
10/11/2007
20070218638Recessed gate structure and method for preparing the same
A recessed gate structure comprises a semiconductor substrate, a recess positioned in the semiconductor substrate, a gate oxide layer positioned in the recess and a conductive layer positioned on the gate oxide layer, wherein the semiconductor substrate has a multi-step...
09/20/2007
20070141789Semiconductor device having a surface conducting channel and method of forming
A semiconductor device including a metal oxide layer, a channel area of the metal oxide layer, a preservation layer formed on the channel area of the metal oxide layer, and at least two channel contacts coupled to the channel area of the metal oxide layer, and a method ...
06/21/2007
20070059889RECESSED GATE ELECTRODE AND METHOD OF FORMING THE SAME AND SEMICONDUCTOR DEVICE HAVING THE RECESSED GATE ELECTRODE AND METHOD OF MANUFACTURING THE SAME
A recessed gate electrode structure includes a first recess and a second recess in communication with the first recess both formed in a substrate. The second recess is larger than the first recess. A gate dielectric layer is formed on a top surface of the substrate and ...
03/15/2007
20070048945Memory device and method of making same
A radial memory device includes a phase-change material, a first electrode in electrical communication with the phase-change material, the first electrode having a substantially planar first area of electrical communication with the phase-change material. The radial mem...
03/01/2007
20070037352Display device and manufacturing method of display device
According to one feature of the present invention, a display device is manufactured according to the steps of forming a semiconductor layer; forming a gate insulating layer over the semiconductor layer; forming a gate electrode layer over the gate insulating layer; form...
02/15/2007
20060286753Method for Producing a Stop Zone in a Semiconductor Body and Semiconductor Component Having a Stop Zone
A method for producing a buried stop zone in a semiconductor body and a semiconductor component having a stop zone, has the method steps of: providing a semiconductor body having a first and a second side and a basic doping of a first conduction type, irradiating the se...
12/21/2006
20060286786METHOD AND APPARATUS FOR INCREASE STRAIN EFFECT IN A TRANSISTOR CHANNEL
A semiconductor device having a transistor channel with an enhanced stress is provided. To achieve the enhanced stress transistor channel, a nitride film is preferentially formed on the device substrate with little to no nitride on a portion of the gate stack. The nitri...
12/21/2006
20060220114Semiconductor device and manufacturing method thereof
An ideal step-profile in a channel region is realized easily and reliably, whereby suppression of the short-channel effect and prevention of mobility degradation are achieved together. A silicon substrate is amorphized to a predetermined depth from a semiconductor film,...
10/05/2006
20060216897Semiconductor device having a round-shaped nano-wire transistor channel and method of manufacturing same
A field-effect transistor (FET) with a round-shaped nano-wire channel and a method of manufacturing the FET are provided. According to the method, source and drain regions are formed on a semiconductor substrate. A plurality of preliminary channel regions is coupled bet...
09/28/2006
20060183288Processes for forming electronic devices including a semiconductor layer
An impurity can be introduced into a semiconductor layer of a workpiece to affect the oxidation and the relative concentration of one element with respect to another element within the semiconductor layer. The impurity can be selectively implanted using one or more mask...
08/17/2006
20060081928Isolation spacer for thin SOI devices
A semiconductor device comprises a semiconductor mesa overlying a dielectric layer, a gate stack formed overlying the semiconductor mesa, and an isolation spacer formed surrounding the semiconductor mesa and filling any undercut region at edges of the semiconductor mesa...
04/20/2006
20060051922Strained silicon device manufacturing method
A method of manufacturing a microelectronic device includes forming a p-channel transistor on a silicon substrate by forming a poly gate structure over the substrate and forming a lightly doped source/drain region in the substrate. An oxide liner and nitride spacer are ...
03/09/2006
20060046400Method of forming a semiconductor structure comprising transistor elements with differently stressed channel regions
A semiconductor structure comprising a first transistor element and a second transistor element is provided. Stress in channel regions of the first and the second transistor element is controlled by forming stressed layers having a predetermined stress over the transist...
03/02/2006
20060046399Forming abrupt source drain metal gate transistors
A gate structure may be utilized as a mask to form source and drain regions. Then the gate structure may be removed to form a gap and spacers may be formed in the gap to define a trench. In the process of forming a trench into the substrate, a portion of the source drai...
03/02/2006
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