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Class 427/534 - Cleaning or removing part of substrate (e.g., etching with plasma, glow discharge, etc.)


Subclass of Class 427 - Coating processes
Definition: Processes wherein, prior to the coating, etching influenced
No. of applications: 96
Last issue date: 05/03/2012


1      
Application No.Application TitleIssue Date
20120107520Removing Residues from Substrate Processing Components
Residues are removed from a surface of a substrate processing component which has a polymer coating below the residues. In one version, the component surfaces are contacted with an organic solvent to remove the residues without damaging or removing the polymer coating. ...
05/03/2012
20120040160METHOD OF MAKING HEAT TREATED AND ION-BEAM ETCHED/MILLED COATED ARTICLE USING DIAMOND-LIKE CARBON (DLC) PROTECTIVE FILM
There is provided a method of making a heat treated (HT) coated article to be used in shower door applications, window applications, or any other suitable applications where transparent coated articles are desired. For example, certain embodiments of this invention rela...
02/16/2012
20120012373Submount and Method of Manufacturing the Same
A submount with an electrode layer having excellent wettability in soldering and method of manufacturing the same are disclosed. A submount (1) for having a semiconductor device mounted thereon comprises a submount substrate (2), a substrate protective lay...
01/19/2012
20120009354Method for treating surface of glass substrate and apparatus for performing same
A method for treating a surface of a glass substrate according to the invention has the steps of placing the glass substrate into a vacuum treatment chamber, introducing a gas into the vacuum treatment chamber, providing electric power to generate an ion source and usin...
01/12/2012
20120003438GRAPHENE PROCESSING FOR DEVICE AND SENSOR APPLICATIONS
A supported graphene device comprises at least one graphene feature of 1 to about 10 graphene layers having a predetermined shape and pattern, with at least a portion of each graphene feature being supported on a substrate. In some embodiments the device comprises graph...
01/05/2012
20110305846APPARATUS AND METHOD FOR SURFACE PROCESSING
The present disclosure provides a surface processing apparatus, comprising a reaction chamber provided to form a deposition layer on a substrate, a carrying chamber connected to the reaction chamber and comprising a slot, and a plasma generator installed in the slot and...
12/15/2011
20110256323INHIBITING EXCESS PRECURSOR TRANSPORT BETWEEN SEPARATE PRECURSOR ZONES IN AN ATOMIC LAYER DEPOSITION SYSTEM
Systems and methods for ALD thin film deposition include a mechanism for removing excess non-chemisorbed precursors from the surface of a substrate in a translation-based process involving multiple separate precursor zones. Excess precursor removal mechanisms according ...
10/20/2011
20110198117LAMINATE AND PROCESS FOR PRODUCING THE LAMINATE
A laminate including a resin layer and a metal layer, the resin layer being obtained by modifying at least part of the surface of a resin film including a thermoplastic cyclic olefin resin by ionizing irradiation, and the metal layer being formed on the modified area of...
08/18/2011
20110195200METHOD AND DEVICE FOR DESCALING A METAL STRIP
A method and a device for descaling a metal strip, in which the metal strip is guided in a direction of conveyance through at least one plasma descaling unit in which it is subjected to a plasma descaling. The metal strip is subjected to an automatically controlled cool...
08/11/2011
20110195199PROCESS AND DEVICE FOR SOLDERING IN THE VAPOR PHASE
The invention provides a coating system for coating substrates in a cyclic mode. The process stations of the coating system are disposed in a circular fashion. A handling mechanism is provided for transferring the substrates between the process stations. The process sta...
08/11/2011
20110148279WHITE LED PHOSPHOR FILM AND ITS MANUFACTURING METHOD
A white LED phosphor film is provided. The white LED phosphor film includes a transparent phosphor carrier, and an LED phosphor layer. The LED phosphor layer is manufactured on the phosphor carrier by screen printing process. A method of manufacturing the white LED phos...
06/23/2011
20110143049LUBRICANT REMOVAL TO REUSE DISKS FOR CONDITIONING DEPOSITION TOOLS
A disk that is identified as defective in a manufacturing process is reused for conditioning a deposition tool that deposits a magnetic material onto disks. After the disk has been identified as defective, a surface of the disk is cleaned in a cleaning tool to remove a ...
06/16/2011
20110117289Deposition Apparatus and Deposition Method
[Object] To provide a deposition apparatus and a deposition method that are capable of reducing an evacuation time in an evacuation system having a large condensing load to improve productivity.

[Solving Means] A deposition apparatus that f...

05/19/2011
20110111132SYSTEM AND METHOD FOR DEPOSITING COATINGS ON INNER SURFACE OF TUBULAR STRUCTURE
A system and method for depositing coatings on an inner surface of a tubular structure includes at least one pump for creating and maintaining a vacuum in the tubular structure, a meshed electrode adapted to be positioned in a center of the tubular structure, and a bias...
05/12/2011
20110111236Method for Treating and Sticking Work Pieces Made of Metal or a Metal Alloy Comprising a Hydrated Oxide and/or Hydroxide Layer
A method for treating a bond area of a workpiece, and a method for adhesively bonding workpieces are disclosed. The method for treating a bond area of a workpiece includes cleaning the bond area, activating the bond area, coating at least a portion of the bond area with...
05/12/2011
20110052833GAS DISTRIBUTION SHOWERHEAD AND METHOD OF CLEANING
During a deposition process, material may deposit not only on the substrate, but also on other chamber components. In a MOCVD chamber, one of those components is the gas distribution showerhead. The showerhead may be cleaned by bombarding the showerhead with radicals ge...
03/03/2011
20110036845CONTAINER COMPRISING AN INNER LINING, A METHOD OF APPLYING SUCH A LINING TO A CONTAINER AND USE OF A PEEL-ABLE COATING AS AN INNER LINING IN A CONTAINER
The invention relates to a container (1) for holding fluid or particle compositions which container (1) comprises an inner lining (6) applied to an inner side (2) of the container (1), where the container (1) is provided with an...
02/17/2011
20110027528GAS DIFFUSER MEMBRANE WITH COATED SUBSTRATE AND METHOD FOR MANUFACTURING THE SAME
A flexible diffuser membrane for diffusing gas into a liquid includes a substrate covered wholly or partially by a thin coating. The substrate is formed by a mold or extruder and is of an elevated temperature upon exiting the mold or extruder. The coating may be applied...
02/03/2011
20110007450MULTILAYER ANODE
The invention relates to the field of electrical engineering, in particular to multilayer film electrodes for electrolytic capacitors. The proposed multilayer anode is implemented as a substrate with a developed surface on which are sequentially arrayed a conforming lay...
01/13/2011
20100316857Reinforcing Material for the Local Reinforcement of a Component Formed With a Composite Material, and Method
Disclosed is a reinforcing material for the local reinforcement of a component formed with a composite material, in particular in areas of force introduction and/or connecting areas. The reinforcing material is formed by a metallic sheet-like formation, the metallic she...
12/16/2010
20100305673Ink Jet Printing of Implantable Electrodes
An implantable electrode device and a corresponding method of fabricating such a device are described. An electrode network of wires and contacts is developed by inkjet deposition of conductive metal material over portions of the electrode substrate for electrically con...
12/02/2010
20100291665BIOCOMPATIBLE THREE DIMENSIONAL MATRIX FOR THE IMMOBILIZATION OF BIOLOGICAL SUBSTANCES
The present invention relates to a method of producing a solid coated carrier carrying biological material. Furthermore, the invention relates to a solid coated carrier to which biological material is attached and uses of the solid coated carrier for the preparation of ...
11/18/2010
20100282980Stable Calibration Means for Apparatus for Photo Reduction of Contaminants in Blood
An apparatus for irradiating blood or blood products, preferably with ultra violet or visible light, to reduce contaminants in the blood or blood products. A removable radiometer having light integrating chambers detects the light intensity, allowing the radiation chara...
11/11/2010
20100279027System And Method For Applying Abrasion-Resistant Coatings
A method for applying an abrasion-resistant coating to a substrate including the steps of generating an atmospheric plasma, introducing a precursor to the atmospheric plasma, the precursor being selected to form the abrasion-resistant coating, and positioning the substr...
11/04/2010
20100276607Method of depositing protective structures
A process of preparing a lamella from a substrate includes manufacturing a protection strip on an edge portion of the lamella to be prepared from the substrate, and preparing the lamella, wherein the manufacturing the protection strip includes a first phase of activatin...
11/04/2010
20100237043PLASMA DEPOSITION TO INCREASE ADHESION
Plasma etching of a polymeric dielectric material such as polyurethane results in volatile byproducts that are deposited onto the surface of an inert substrate. The surface treatment increases adhesiveness so that the surface of the inert material may be bonded to anoth...
09/23/2010
20100227147TRANSPARENTE POROUS SIO2 COATING FOR A TRANSPARENT SUSTRATE MATERIAL HAVING IMPROVED OPTICAL PROPERTIES
A transparent porous SiO2-coating for a transparent substrate material has improved optical properties. These properties can be obtained, in particular, by plasma treatment....
09/09/2010
20100215866Method for coating an electrode on a wafer
There is disclosed a method for coating an electrode on a wafer. Firstly, there is provided a wafer. Secondly, a metal area is defined in an upper surface of the wafer. Thirdly, the metal area is roughened via etching. Finally, an electrode is coated on the metal area v...
08/26/2010
20100208196Surface Modification of Contact Lenses
Contact lenses which exhibit improved wetability are provided. In one aspect, the surface of the contact lenses may be modified using a hydrophilic layer which imparts improved wetability to the contact lens. The contact lens may be exposed to a first plasma so as to ge...
08/19/2010
20100136255ICE LAYERS IN CHARGED PARTICLE SYSTEMS AND METHODS
Charged particle sources, systems and methods are disclosed....
06/03/2010
20100136254COATING SYSTEM AND METHOD FOR VIBRATIONAL DAMPING OF GAS TURBINE ENGINE AIRFOILS
A coating system and coating method for damping vibration in an airfoil of a rotating component of a turbomachine. The coating system includes a metallic coating on a surface of the airfoil, and a ceramic coating overlying the metallic coating. The metallic coating cont...
06/03/2010
20100129564Method for deposition of electrochemically active thin films and layered coatings
The present invention involves a method for deposition of thin film and electrochemically active layered coatings for use as components including electrodes and solid electrolytes for electrochemical generation and storage devices including batteries, supercapacitors, f...
05/27/2010
20100098875PRE-COATING AND WAFER-LESS AUTO-CLEANING SYSTEM AND METHOD
In a wafer processing system having an electrode, an electrostatic chuck (ESC) and a confinement chamber portion, the ESC is established to be RF-floating, whereas a confinement chamber portion is grounded during a pre-coating process. Accordingly, the confinement chamb...
04/22/2010
20100059365PROCESS FOR MANUFACTURING A MASK HAVING SUBMILLIMETRIC OPENINGS FOR PRODUCING A SUBMILLIMETRIC GRID, AND SUBMILLIMETRIC GRID
A process for manufacturing a mask having submillimetric openings on a surface portion of a substrate, characterized in that:
03/11/2010
20100055562NANOWIRE LAYER ADHESION ON A SUBSTRATE
Techniques for forming nanowire layers on a substrate are provided....
03/04/2010
20100045169NANO ELECTRONIC DEVICES
Nano material devices are provided. In one embodiment, a nano material device comprises a substrate, a first layer disposed on the substrate, a second layer and a third layer The first layer is configured to include a first set of electrodes at least partially parallel ...
02/25/2010
20100048029Surface Preparation for Thin Film Growth by Enhanced Nucleation
Various processes and related systems are provided for making structures on substrate surfaces. Disclosed are methods of making a structure supported by a substrate by providing a substrate having a receiving surface and exposing at least a portion of the receiving surf...
02/25/2010
20100028570TRANSFER SHEET AND METHOD FOR FORMING THE SAME
A transfer sheet includes a supporting substrate, a photothermal conversion layer disposed on the supporting substrate, and a passive layer disposed on the photothermal conversion layer....
02/04/2010
20100021650METHOD OF MANUFACTURING MICRO STRUCTURE, AND METHOD OF MANUFACTURING MOLD MATERIAL
Disclosed herein are a method of producing microstructure and a method of producing mold, the methods permitting production of much smaller pores than before in an atmosphere where impurities are negligible and also permitting production of microstructures having a smal...
01/28/2010
20100012483MULTILAYER HARD COATING FOR TOOLS
A multilayer hard coating for tools for machining applications with a multilayer structure for improving the wear resistance of workpieces includes at least one (AlyCr1-y)X layer (0.2≦y≦0.7), wherein X is one of the following elements N, C, B, ...
01/21/2010
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