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Class 392/416 - With chamber


Subclass of Class 392 - Electric resistance heating devices
Definition: Subject matter wherein the heating device is located in
No. of applications: 144
Last issue date: 05/24/2012


1        
Application No.Application TitleIssue Date
20120128336HEAT TREATMENT METHOD AND HEAT TREATMENT APPARATUS FOR HEATING SUBSTRATE BY LIGHT IRRADIATION
A semiconductor wafer in which a carbon thin film is formed on a surface of a silicon substrate implanted with impurities is irradiated with flash light emitted from flash lamps. Absorbing the flash light causes the temperature of the carbon thin film to increase. The s...
05/24/2012
20120070136Transparent Reflector Plate For Rapid Thermal Processing Chamber
The present invention generally relates to methods and apparatus for processing substrates. Embodiments of the invention include apparatuses for processing a substrate comprising a ceramic reflector plate, which may be optically transparent. The reflector plate may incl...
03/22/2012
20120008925TEMPERATURE SENSING DEVICE AND HEATING DEVICE
A technology to control temperature of a large substrate to be heated. A temperature sensing device is disposed lateral to a region where a radiation heater faces a substrate to be heated inside a heating chamber. A heating device has the heating chamber, the radiation ...
01/12/2012
20120003774RTP HEATING SYSTEM AND METHOD
An RTP heating system and an RTP heating method, which can heat a photovoltaic-device intermediate product having a glass substrate, a Mo layer, and a light absorption layer in formation. The RTP heating system is composed of a chamber; a support member located in the c...
01/05/2012
20110286726Warmers for scented oils
A warmer for scented oil is provided. The warmer includes a base, a cover removably positioned on the base, and a warming device. The cover has a substantially spherical shape with an opening at an upper apex and an open channel formed in the cover at the upper apex aro...
11/24/2011
20110283895Holding Cabinet for Separately Heating Food Trays
A food holding cabinet having one or more food-holding compartments has two or more zones in a compartment, wherein holding temperatures can be different from each other. A shelf made of glass-ceramic passes infrared energy from two or more heating elements attached to ...
11/24/2011
20110262113MULTI-FUNCTION ROASTER SYSTEM
A multi-function roaster system includes a roasting oven serving as a main body formed by two oven sidewalls to which a liftable cover is rotatably mounted. A open top grating roasting assembly is arranged at a bottom of the roasting oven. At a suitable location adjacen...
10/27/2011
20110262117Heat Treatment Apparatus and Heat Treatment Method
An object is to provide a method of activating impurity elements added to a semiconductor film, and a method of gettering, in a process of manufacturing a semiconductor device using a substrate having a low resistance to heat, such as glass, without changing the shape o...
10/27/2011
20110253482Device, system and method for assembling food orders
A device for assembling orders of food from prepared food items having multiple sides on different sides of the device is disclosed. Also disclosed is a system including the device and a method of assembling orders of food. Each side has a plurality of side receptacles ...
10/20/2011
20110253037VACUUM HEATING AND COOLING APPARATUS
The vacuum heating and cooling apparatus can rapidly heat and cool only the substrate after film-forming treatment while maintaining high vacuum. The temperature rise of members in the chamber with time caused by accumulation of heat is suppressed, and the variation of ...
10/20/2011
20110249960Heat Source Door For A Thermal Diffusion Chamber
A frame supporting a containment chamber, the containment chamber is preferably configured to enclose and confine a process chamber. A heat source module is disposed between the containment chamber and the process chamber, while a collar communicates with the process ch...
10/13/2011
20110229112Heating apparatus
A heating apparatus contains a chamber that has a space for placing a work piece, a filament lamp that has an arc tube, and a sealing portion provided at an end of the arc tube. The heating apparatus further contains a glass tube extending through the chamber. A cooling...
09/22/2011
20110222840Heating Configuration For Use in Thermal Processing Chambers
An apparatus for heat treating semiconductor wafers is disclosed. The apparatus includes a heating device which contains an assembly linear lamps for emitting light energy onto a wafer. The linear lamps can be placed in various configurations. In accordance with the pre...
09/15/2011
20110211817METHOD FOR HEATING PART IN PROCESSING CHAMBER OF SEMICONDUCTOR MANUFACTURING APPARATUS AND SEMICONDUCTOR MANUFACTURING APPARATUS
There is provided a method for heating a part within a processing chamber of a semiconductor manufacturing apparatus having a substrate in the processing chamber and performing a process on the substrate. The heating method includes generating heating lights which is ge...
09/01/2011
20110170845DECOY SYSTEM, NOTABLY FOR IMPROVISED EXPLOSIVE DEVICES
The decoy system, notably for terrestrial mines or improvised explosive devices, includes: a means of producing heat energy including an air or water boiler, a means of emitting radiation in the infrared spectrum including a chamber that is fed with fluid by the product...
07/14/2011
20110171355FOOD WARMING CABINET
A food warming cabinet keeps food warm and on display in serving trays using infrared heaters instead of hot water. The infrared heaters are located below the trays and direct IR at the trays. In an alternate embodiment, the IR heaters can also conduct heat into the tra...
07/14/2011
20110135288Furnace for Conditioning Preforms
A furnace for conditioning preforms with several heating chambers rotating in a circle for heating one preform each with infrared radiation, and having holding devices for holding the preforms during heating, so that a section of the preform to be conditioned is essenti...
06/09/2011
20110123178Apparatus and Method for Enhancing the Cool Down of Radiatively Heated Substrates
The present invention generally relates to methods and apparatus for processing substrates. Embodiments of the invention include apparatuses for processing a substrate comprising a dynamic heat sink that is substantially transparent to light from a radiant heat source, ...
05/26/2011
20110114634RECIPROCATING OSCILLATING CONVEYOR OVEN
A conveyor oven having an oven chamber with a single opening by which a food product enters and exits on a conveyor belt that is reversibly driven to convey the food product in and out of the oven chamber in a reciprocating manner. Also, the food is conveyed to a cookin...
05/19/2011
20110089166TEMPERATURE MEASUREMENT AND CONTROL OF WAFER SUPPORT IN THERMAL PROCESSING CHAMBER
The present invention provides apparatus and methods for achieving uniform heating to a substrate during a rapid thermal process. More particularly, the present invention provides apparatus and methods for controlling the temperature of an edge ring supporting a substra...
04/21/2011
20110091189BROILER FOR COOKING APPLIANCES
A broiler assembly for a cooking appliance, the cooking appliance having an oven cavity and the broiler assembly is disposed within the oven cavity. The broiler assembly includes a reflector having first and second sides, side retainers coupled to a respective one of th...
04/21/2011
20110081137MANUFACTURING EQUIPMENT AND MANUFACTURING METHOD
There are provided a manufacturing apparatus and a manufacturing method for manufacturing a substrate having a dielectric film, including a heat treatment apparatus that subjects a substrate on which a raw material containing composite oxide is applied, to heat treatmen...
04/07/2011
20110076786Method and apparatus for controlled thermal processing
A materials processing system comprises a thermal processing chamber including a heating source, a first noncontacting thermal measurement device positioned to measure temperature on a first area of the material being processed, and, a second noncontacting thermal measu...
03/31/2011
20110064393OVEN
An oven is provided for re-baking welding consumables in an efficient and improved heat distribution manner. The oven includes a first chamber having a plurality of first chamber vents positioned on at least one sidewall of the first chamber and a heating source in a se...
03/17/2011
20110059211Apparatus and method with individual preparation and hybrid heating for making generally flat dough based products
An apparatus for making generally flat dough based products includes a supply station having at least two hoppers for holding different ingredients and respective valve mechanisms disposed below outlets of the hoppers and being operable to control the quantities of ingr...
03/10/2011
20110052159APPARATUS FOR UNIFORM THERMAL PROCESSING
An apparatus of thermal processing is provided. A heating lamp and a reflector are disposed over a wafer and the heat flux distribution on the wafer generated by the individual heating lamp is measured and adjusted. A set of heating lamps formed by heating lamps is disp...
03/03/2011
20110034040LOCALIZED ANNEAL
A method of forming a device is presented. The method includes providing a wafer having an active surface and dividing the wafer into a plurality of portions. The wafer is selectively processed by localized heating of a first of the plurality of portions. The wafer is t...
02/10/2011
20110034866BROADBAND INFRARED HEATING OF MEDICAL FLUIDS
A system for heating a medical fluid includes a container including a fluid path including an inlet side and an outlet side. A broadband infrared radiation source including a power supply is coupled to a broadband emitter for emitting infrared radiation. The broadband e...
02/10/2011
20110019982Rapid thermal processing apparatus and method of manufacture of semiconductor device
A rapid thermal processing apparatus comprises a processing chamber which subjects a semiconductor substrate to rapid thermal processing. A substrate support part is arranged in the processing chamber and supports the substrate. A lamp part optically irradiates the subs...
01/27/2011
20110019981ROTARY FURNACE FOR RADIATIVE HEAT TREATMENT OF SOLIDS
A rotary furnace (1) for the heat treatment of solids includes at least one rotary tube into which the solids are introduced and a first heater outside of the rotary tube that makes it possible to conduct a portion of the heat treatment in the absence of oxygen. ...
01/27/2011
20110008028LAMP AND HEATING DEVICE
Provided are a lamp and a heating device which are capable of effectively preventing a seal portion from being overheated with a simple structure. A lamp includes: a tube portion in which a filament including a coil portion is contained; a seal portion filled with a met...
01/13/2011
20110008027COOKER AND CONTROLLING METHOD FOR THE SAME
A cooker and a controlling method for the same are provided. A carbon heater has a wavelength bandwidth of 1.5˜2.5 μm where a radiant energy is maximum, and the carbon heater provides the radiant energy into a cavity in order to heat food disposed therein....
01/13/2011
20110002677METHOD AND SYSTEM FOR DIGITAL NARROWBAND, WAVELENGTH SPECIFIC COOKING, CURING, FOOD PREPARATION, AND PROCESSING
A system for direct injection of selected thermal-infrared (IR) wavelength radiation or energy into food items for a wide range of processing purposes is provided. These purposes may include heating, raising or maintaining the temperature of the food articles. The syste...
01/06/2011
20100329649Infra-red heater assembly
An infra-red heater assembly takes on the conditions that afflict buildings: bed bugs, termites, other insects, molds, bacteria, and the like, and their resulting odors, and other contaminants. The assembly includes a portable electric infra-red emitting panel system wi...
12/30/2010
20100322601ELECTRIC BROIL ELEMENT
A radiant energy electric broil element for a food heating unit, including a cross-sectional geometrical configuration having a planar flattened portion with a length greater than a planar length of any other planar portion, the planar flattened portion oriented in a di...
12/23/2010
20100322602Continuous Media Web Heater
A radiant heating unit is selectively operated to move radiant heating panels to regulate heating of a continuous web of media as the web moves along a media pathway in an imaging device. The radiant heating panels in a radiant heating unit may be moved to any one of a ...
12/23/2010
20100294139COOKER
The present invention relates to a cooker. In the present invention, a carbon heater is used to cook foods in a cooking chamber and electric current applied to the carbon heater is controlled by a switching element, such that an effective wavelength range and an availab...
11/25/2010
20100282733THERMAL PROCESSING APPARATUS
A thermal processing apparatus includes a chamber for accommodating a semiconductor wafer and a radiant fitting. The radiant fitting includes a plurality of first radiant sources having a first reflectivity positioned in a center region of the radiant fitting and a plur...
11/11/2010
20100273333HEAT TREATMENT METHOD AND HEAT TREATMENT APPARATUS FOR HEATING SUBSTRATE BY LIGHT IRRADIATION
A semiconductor wafer in which a carbon thin film is formed on a surface of a silicon substrate implanted with impurities is irradiated with flash light emitted from flash lamps. Absorbing the flash light causes the temperature of the carbon thin film to increase. The s...
10/28/2010
20100272422RETORT FURNACE FOR HEAT AND/OR THERMOCHEMICAL TREATMENT
A retort furnace designed for heat and heat and chemical treatment in protective gas atmosphere, process gas atmosphere or in vacuum, equipped with a retort with a lid, made of steel or heat-resisting or creep-resisting alloys, separating the process atmosphere from the...
10/28/2010
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