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| Application No. | Application Title | Issue Date |
| 20100134948 | HUMIDITY SENSOR HAVING ANODIC ALUMINUM OXIDE LAYER, AND FABRICATING METHOD THEREOF Disclosed are a humidity sensor and a fabricating method thereof. The humidity sensor includes a substrate, an anodic aluminum oxide layer formed on the substrate and having a plurality of holes, and electrodes formed on the anodic aluminum oxide layer, in order to impr... | 06/03/2010 |
| 20080316673 | Moisture Sensor A moisture sensor includes interdigitated first and second electrodes formed in trenches 26. A porous low-k dielectric 20 is provided between the electrodes. The electrodes are of Cu 30 surrounded by a barrier layer 28,32 to protect the Cu fr... | 12/25/2008 |
| 20070188974 | Humidity sensing structure having a cantilever resistor and method for fabricating the same A humidity sensing structure having a cantilever resistor and a method for fabricating the same are disclosed. The method includes providing a substrate having a first surface and a second surface; performing an oxidation process on the first surface and the second surf... | 08/16/2007 |
