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| Application No. | Application Title | Issue Date |
| 20050225821 | Single piece torsional hinged device with central spines and perimeter ridges to reduce flexing A torsional hinged device having an optical surface, such as a mirror or refractive surface, formed from a single piece of silicon with reduced flexing. In addition to central spines to prevent or reduce flexing of the tips of the optical surface, the device may also in... | 10/13/2005 |
| 20050219675 | Tip-tilt-piston actuator A freely rotatable micromechanical plate is achieved by employing at least three rotatable plates that are each suspended from a substrate via respective springs, and are coupled via other respective springs to at least three moveable plate attachment points, so that ro... | 10/06/2005 |
| 20050206987 | Mirror rocking member for optical deflector There is disclosed a mirror rocking member for an optical deflector. The optical deflector comprises the mirror rocking member for deflecting light, and a driver for driving the member. The mirror rocking member comprises a movable plate having a reflective surface, an ... | 09/22/2005 |
| 20050206986 | Micro-actuator utilizing electrostatic and lorentz forces, and micro-actuator device, optical switch and optical switch array using the same The movable part 21 is fastened to the substrate 11 via flexure parts 27a and 27b, and can move upward and downward with respect to the substrate 11. The substrate 11 also serves as a fixed electrode. The movable p... | 09/22/2005 |
| 20050190426 | Optical scanning apparatus and image apparatus having the same The object of the present invention is to provide an optical scanning apparatus which is not limited in the disposition of a scanning device, can reduce the adherence of dust to each member of the scanning device, and is enhanced in the reliability of the scanning devic... | 09/01/2005 |
| 20050190425 | Optical switch In an optical switch for routing an optical signal, a deflecting member is mounted movably on a base and is tiltable about a fulcrum shaft so as to deflect the optical signal. Multiple elongate cantilevers are disposed on the base and are arranged around the deflecting ... | 09/01/2005 |
| 20050185239 | MULTILAYERED OSCILLATING DEVICE WITH SPINE SUPPORT A multilayered torsional hinged device such as a scanning mirror including a hinge layer with an attaching member pivotally supported by torsional hinges. A front layer is bonded to the front side of the attaching member and a back layer is bonded to the back side of th... | 08/25/2005 |
| 20050185310 | Mirror device, optical switch, electronic instrument and mirror device driving method To provide a mirror device, an optical switch, an electronic instrument, and a mirror device driving method in which a large driving displacement can be produced for a mirror with a smaller driving force, a silicon substrate includes: at least one first mirror-side oper... | 08/25/2005 |
| 20050185242 | Apodization technique for enhanced resolution of images The present invention provides an apodization mask that narrows the central lobe of an optical image of a point in a focusing system and suppresses the amplitudes of the sidelobes of the image that are within a predetermined radius of the central axis of the sidelobes, ... | 08/25/2005 |
| 20050185240 | Light deflector, method of manufacturing light deflector and torsion oscillating member There is disclosed a light deflector in which both ends of a movable plate is supported to a support substrate by an elastic support portion, a reflection surface is formed on one surface of the movable plate, and the movable plate is torsion-oscillated about a torsion ... | 08/25/2005 |
| 20050179976 | High performance MEMS scanner A high performance MEMS scanner is disclosed. In some embodiments, scanner mirror has a wide and short aspect ratio that is similar to rotating polygon facets. Long torsion arms allow large rotation angles including 20° zero-to-peak mechanical and greater. Suspensions ... | 08/18/2005 |
| 20050162722 | Light scanning device The invention provides a light scanning device for scanning light from a light source, the light scanning device having: a pivotably mounted mirror for receiving light from the light source; a counterbalance; and a drive for oscillatorily pivoting the mirror and the cou... | 07/28/2005 |
| 20050162765 | Micromirror with rib reinforcement The invention provides a micromirror for directing a beam of light. The micromirror includes a mirror plate movably coupled to a substrate and a lower reinforcement rib connected to a lower surface of the mirror plate. The lower reinforcement rib is formed in a rib tren... | 07/28/2005 |
| 20050162724 | Torsional hinged mirror assembly with central spines and perimeter ridges to reduce flexing A torsional hinged mirror design with reduced flexing. In addition to a central spine to prevent or reduce flexing of the tips, the mirror layer also includes perimeter ridges to reduce or prevent flexing or warping of the mirror edges. To provide an even stiffer mirror... | 07/28/2005 |
| 20050157363 | Multilayer torsional hinged mirror with a recessed drive/sensing permanent magnet A multilayered torsional hinged mirror assembly that includes a drive/sensing permanent magnet. To allow for permanent magnets having increased thicknesses, a hinge plate of the mirror defines a recess for receiving the permanent magnet. The recess may be etched complet... | 07/21/2005 |
| 20050152014 | Method for linearizing deflection of a mems device using binary electrodes and voltage odulation A micromechanical device comprising one or more electronically movable structure sets comprising for each set a first electrode supported on a substrate and a second electrode supported substantially parallel from said first electrode. Said second electrode is movable w... | 07/14/2005 |
| 20050151953 | Maskless optical writer A maskless pattern generating system for use in lithography includes a light source that generates a light beam, a programmable pattern generator that generates a pattern image from the light beam based on a control signal input, and a controller to provide the control ... | 07/14/2005 |
| 20050146765 | RESONANT SCANNING MIRROR WITH INERTIALLY COUPLED ACTIVATION A system and method for providing a resonant beam sweep about a first axis. A mirror or reflective surface supported by a first pair of torsional hinges is driven into resonant oscillations about the first axis by inertially coupling energy through the first pair of tor... | 07/07/2005 |
| 20050141071 | Device for shifting the position of a swiveling holder The invention is directed to a device for switching a swivelable holder between two positions, e.g., for switching microscope objectives. The actuating element and swivelable holder are connected by two stretchable connection elements which serve to transmit the rotatio... | 06/30/2005 |
| 20050134980 | Projection objective and method for its manufacture A method of manufacturing a projection objective (22) of a microlithographic projection exposure apparatus (10) is described. The projection objective (22) comprises at least one mirror (M1 to M6) that each have a mirror support (24... | 06/23/2005 |
| 20050128457 | Defect mitigation in spatial light modulator used for dynamic photolithography A spatial light modulator for use in a photolithography system includes light modulation elements configured to photolithographically transfer an image onto a substrate using an optical oversampling technique to reduce defects in the transferred image. A first set of th... | 06/16/2005 |
| 20050122604 | Optical deflector An optical deflector includes a magnet unit, which generates a magnetic field, and a movable plate unit, which is placed in the magnetic field. The movable plate unit has an inner movable plate having a reflecting surface, an outer movable plate, two inner torsion bars ... | 06/09/2005 |
| 20050083497 | Composite printing Systems and techniques for printing substrates. In one implementation, a method includes patterning a substrate with a substantially arbitrary arrangement of features by introducing irregularity into a repeating array of features. ... | 04/21/2005 |
| 20050078345 | Scanning device with improved magnetic drive A magnetic drive for providing pivotal motion to a mirror device. The magnetic drive may be used to drive any torsional hinged mirror, but is particularly suitable for driving a high-speed, torsional hinged mirror at its resonant frequency for use as the drive engine of... | 04/14/2005 |
| 20050063038 | Oscillating micromirror with bimorph actuation The present invention relates to a micromirror comprising a mobile part (11) with a reflecting area (19), a fixed part (12), two torsion arms (14) originating from the mobile part (11) materializing an axis (13) about which the ... | 03/24/2005 |
| 20050046918 | Tiltable-body apparatus, and method of fabricating the same The tiltable-body apparatus including a frame member, a tiltable body, and a pair of torsion springs having a twisting longitudinal axis. The torsion springs are disposed along the twisting longitudinal-axis opposingly with the tiltable body being interposed, support th... | 03/03/2005 |
| 20050046917 | Vibration mirror, optical scanning device, and image forming using the same, method for making the same, and method for scanning image A vibration mirror is reciprocatively vibrated by an electrostatic force to reflect an incident light beam. The vibration mirror comprises a reflection means for reflecting the incident light beam; a reflection means holding substrate for holding the reflection means; a... | 03/03/2005 |
| 20050029902 | A MICRO-ELECTRICAL-MECHANCAL SYSTEM (MEMS) DEVICE HAVING A PLURALITY OF PAIRS OF REFLECTIVE ELEMENT ACTUATORS LOCATED ON OPPOSING SIDES OF A REFLECTIVE ELEMENT AND A METHOD OF MANUFACTURE THEREFOR A micro-electrical-mechanical system (MEMS) device and a method of manufacture therefor. The micro-electrical-mechanical system includes a reflective element and a reflective element actuator located adjacent a perimeter of the reflective element and outside a path of m... | 02/10/2005 |
| 20050030604 | HIGH SPEED SCANNING OR STEERING DEVICE A high speed, high displacement steering device used for rapid mirror or light source pointing consisting of a pivoting central element and mounting stem, two orthogonally arranged and offset “V” shaped flexure elements connected to two orthogonally arranged moving ... | 02/10/2005 |
| 20050023573 | Deformable mirror using piezoelectric actuators formed as an integrated circuit and method of use A deformable optical device includes a reflection device having a first reflecting surface and a second surface, an actuator (e.g., an integrated circuit piezoelectric actuator) having a support device and moveable extensions extending therefrom, which are coupled to th... | 02/03/2005 |
| 20050007640 | Optical scanner with micro-optics for beam combination An optical scanner having a micro-optical element for combining two light beams is disclosed. The optical scanner has a micro-optical element including two parts, which serves to combine two light beams emitted, by two beam sources on a photodetector. The first part of ... | 01/13/2005 |
| 20050002078 | Pressure sensitive deformable mirror A deformable mirror includes a reflecting surface disposed on a diaphragm and a diaphragm carrier that supports the diaphragm. The diaphragm carrier defines a non-circular, pressurizable rear surface of the diaphragm. ... | 01/06/2005 |
