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| Application No. | Application Title | Issue Date |
| 20110205553 | Method for focusing an object plane and optical assembly A method for focusing an object plane (42) through an objective (30) and an optical assembly (10), with which the method can be carried out, are disclosed. A geometric reference structure (21) is positioned in a plane (36) conjugate to... | 08/25/2011 |
| 20110188053 | FOCUSING METHODS AND OPTICAL SYSTEMS AND ASSEMBLIES USING THE SAME A method for controlling a focus of an optical system. The method includes providing a pair of incident light beams to a conjugate lens. The incident light beams are directed by the lens to converge toward a focal region. The method also includes reflecting the incident... | 08/04/2011 |
| 20110019206 | Auto Focus System for Reticle Inspection Methods and apparatus relating to the inspection of photomasks are described. In an embodiment, an inspection tool may be automatically focused on a reticle utilizing various topographic mapping techniques. Other embodiments are also described.... | 01/27/2011 |
| 20100265519 | DISPLACEMENT SENSOR A displacement is accurately measured at high speed to a measurement object having various surface states. In a displacement sensor including a confocal optical system in which an objective lens is moved along an optical axis, light emitted from a laser diode is formed ... | 10/21/2010 |
| 20100195998 | Imaging device and focal point detector A focal point detector includes: a condenser lens for transmitting a light image from an optical system; and a distance measurement sensor group for receiving a luminous flux which has passed through the condenser lens. The sensor group includes a first distance measure... | 08/05/2010 |
| 20090310147 | OPTICAL DISPLACEMENT MEASURING INSTRUMENT A first light detector and a second light detector, in each of which a plurality of light-receiving elements are arranged in an adjoining manner, are respectively provided anterior to an image-forming point of first reflected light and posterior to an image-forming poin... | 12/17/2009 |
| 20090201514 | POSITION DETECTION METHOD, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD This invention discloses a position detection method for detecting the focus position of an optical position detection apparatus including an image sensor and an optical system which forms an image of a target object on the image sensing surface of the image sensor. In ... | 08/13/2009 |
| 20090115987 | POSITION MEASUREMENT SYSTEM AND LITHOGRAPHIC APPARATUS A measurement system includes a sensor arranged to co-operate with a first pattern arranged on a structure of the measurement system to determine a first position quantity of the sensor relative to the structure, and arranged to co-operate with a second pattern arranged... | 05/07/2009 |
| 20090021708 | Inspection method and apparatus lithographic apparatus, lithographic processing cell, device manufacturing method and distance measuring system A scatterometer has a focus sensor arranged to detect whether the target being measured is in a correct focal plane. A modulation is applied to a component of the focus sensor or the scatterometer such that a defocus as measured by the focus sensor varies according to a... | 01/22/2009 |
| 20080316502 | APPARATUS AND METHOD FOR MEASURING DISPLACEMENT, SURFACE PROFILE AND INNER RADIUS An apparatus and a method are proposed for measuring displacement, surface profile and roughness of a moving object or an inner radius of a hollow cylinder. The apparatus includes a light emitting unit, a light dispersing unit for receiving light from the light emitting... | 12/25/2008 |
| 20080305562 | Passive alignment of photodiode active area in three axes using microscopic focus A fixturing system and microscope/video camera setup enables an operator to manipulate a photodiode into position optically using known good targets for the X and Y location and using microscope focus/defocus/refocus for locating the active area of the avalanche photodi... | 12/11/2008 |
| 20080180696 | Process window for EUV lithography A method is provided for determining a process window for a lithography process using a reflective mask. The method begins by selecting a target Critical Dimension (CD) of a feature in an image pattern to be formed on a wafer and a corresponding CD tolerance. A CD of th... | 07/31/2008 |
| 20080158571 | Photodetector and Optical Pickup Apparatus Disclosed is a light detecting apparatus using a differential astigmatic method to focus 0th order light on any information surfaces of a multilayer optical disc medium, the 0th order light being among 0th order light, positive higher-order diffract... | 07/03/2008 |
| 20070127039 | Proximity detector Apparatus for detecting proximity between a first object (target object) and a second object (reference object), comprising a light source and a light detector adapted to receive resulting back-scattered light from the reference object when illuminated from the light so... | 06/07/2007 |
| 20070103701 | Displacement sensor In a sensor head, parallel rays or approximately parallel rays are generated by a pair of condenser lenses that reciprocate according to vibrations of a collimate lens and a tuning fork, and go out from a light port. To the light port, a lens holder in which an objectiv... | 05/10/2007 |
| 20070052975 | Arrangement for the optical distance determination of a reflecting surface The invention relates to an arrangement for optically determining the distance of a reflecting surface that can be used, in particular, for determining slight variations in distance such as can frequently occur in vibrating systems. Such an arrangement can also be used ... | 03/08/2007 |
| 20060268286 | Apparatus and method for measuring displacement, surface profile and inner radius An apparatus and a method are proposed for measuring displacement, surface profile and roughness of a moving object or an inner radius of a hollow cylinder. The apparatus includes a light emitting unit, a light dispersing unit for receiving light from the light emitting... | 11/30/2006 |
| 20050030553 | Displacement gauge and displacement measuring method A displacement gauge comprises an objective lens 15 that projects light onto a measurement subject 16, an exciting portion that vibrates the objective lens 15 at a preset amplitude along an optical axis direction of light passing through the objecti... | 02/10/2005 |
