Quotables
"Telephone, n. An invention of the devil which abrogates some of the advantages of making a disagreeable person keep his distance. "
Ambose Bierce
PatentStorm News
Make the Most of Our Site
See this month's Top Inventors and Most Cited Patents.
Stay on top of the latest innovations by subscribing to an RSS feed.
Registered users: Manage your profile.
| Application No. | Application Title | Issue Date |
| 20120050709 | STAGE APPARATUS, LITHOGRAPHIC APPARATUS AND METHOD OF POSITIONING AN OBJECT TABLE A measurement system configured to measure a position dependent signal of an object table, the measurement system including at least one sensor mountable on the object table and a sensor target object mountable on a substantially stationary frame, and a mounting device ... | 03/01/2012 |
| 20120038936 | Measurement System Using Alignment Unit And Position Measuring Method In one example embodiment, position of the alignment unit is acquired using a fiducial mark formed on a moving table, and the moving table is moved such that an alignment mark formed on the workpiece is located within a field of view of the alignment unit to measure the... | 02/16/2012 |
| 20120019837 | POSITION DETECTING DEVICE, LIQUID EJECTING APPARATUS AND METHOD OF DETECTING SMEAR OF SCALE A position detecting device for detecting a position of an object, includes a light emitting portion that emits light, a light receiving portion that receives the light from the light emitting portion, and a scale that is arranged between the light emitting portion and ... | 01/26/2012 |
| 20120008150 | Autofocus system and method New and useful concepts for an autofocus system and method are provided. A basic concept uses fringe projection in an autofocus system and method. A further aspect provides spatial filtering concepts for the fringe projection concept. In yet another aspect, the fringe p... | 01/12/2012 |
| 20110279807 | MOVABLE BODY DRIVE METHOD AND SYSTEM, PATTERN FORMATION METHOD AND APPARATUS, EXPOSURE METHOD AND APPARATUS FOR DRIVING MOVABLE BODY BASED ON MEASUREMENT VALUE OF ENCODER AND INFORMATION ON FLATNESS OF SCALE, AND DEVICE MANUFACTURING METHOD A drive unit drives a wafer stage in a Y-axis direction based on a measurement value of an encoder that measures position information of the wafer stage in the Y-axis direction and based on information on the flatness of a scale that is measured by the encoder. In this ... | 11/17/2011 |
| 20110273725 | OPTICAL ENCODER HAVING CONTAMINATION AND DEFECT RESISTANT SIGNAL PROCESSING An encoder configuration comprises an illumination portion, a scale comprising a scale track, and a signal processing electronics. The signal processing electronics may include a detector comprising a first set of three detector sub-portions that provide a first set of ... | 11/10/2011 |
| 20110204484 | Sub-Wavelength Segmentation in Measurement Targets on Substrates Measurement targets for use on substrates, and overlay targets are presented. The targets include an array of first regions alternating with second regions, wherein the first regions include structures oriented in a first direction and the second regions include structu... | 08/25/2011 |
| 20110153265 | METHOD OF MEASURING PROPERTIES OF DYNAMIC POSITIONING ERRORS IN A LITHOGRAPHIC APPARATUS, DATA PROCESSING APPARATUS, AND COMPUTER PROGRAM PRODUCT Movements of a lithographic apparatus include dynamic positioning errors on one or more axes which cause corresponding errors which can be measured in the applied pattern. A test method includes operating the apparatus several times while deliberately imposing a relativ... | 06/23/2011 |
| 20110116066 | LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD A position measurements system to measure a position of a movable object with respect to another object includes two or more one dimensional (1D) encoder heads mounted on one of the movable object and the other object and each capable of emitting a measurement beam alon... | 05/19/2011 |
| 20110096161 | Displacement sensing system A displacement sensing system is disclosed. Two image capturing devices are settled at to opposite ends of a coordinate axis of the planar area, respectively, for capturing images of the planar area and an object placed thereon. Four pre-established LUT databases and an... | 04/28/2011 |
| 20110068731 | LINEAR ENCODER, LINEAR MOTOR SYSTEM, AND METHOD OF MANUFACTURING LINEAR ENCODER An encoder includes: a main scale having two or more band-shaped tracks in each of which an optical main grating is formed so that longitudinal direction of the main scale corresponds to a measurement axis direction; and an index scale opposed to the main scale so as to... | 03/24/2011 |
| 20110063622 | OPTICAL ENCODER FOR OBTAINING DISPLACEMENT INFORMATION OF OBJECT An optical encoder includes a light source 10, a scale 20 disposed so as to face the light source, a light receiving element 31 configured to receive luminous flux from the light source through the scale, and a signal processing circuit 39 co... | 03/17/2011 |
| 20100328681 | DISPLACEMENT ENCODER INCLUDING PHOSPHOR ILLUMINATION SOURCE A position sensing optical encoder includes an illumination source that operates by providing primary radiation having a first level of intensity uniformity to saturate at least a portion of a relatively broad phosphor area including uniformly distributed phosphor. The ... | 12/30/2010 |
| 20100321665 | LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD A method of determining a defect in a grid plate of an encoder-type position measurement system, the method including providing an encoder-type position measurement system to measure a position of a movable object with respect to another object, the encoder-type positio... | 12/23/2010 |
| 20100297561 | LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD A lithographic apparatus is provided with an optical encoder measurement system having an irradiation system to direct an irradiation beam to a first scale. The system has optics to direct a primary diffracted beam diffracted from the first scale upon irradiation by the... | 11/25/2010 |
| 20100237256 | CHARGED PARTICLE BEAM WRITING METHOD, METHOD FOR DETECTING POSITION OF REFERENCE MARK FOR CHARGED PARTICLE BEAM WRITING, AND CHARGED PARTICLE BEAM WRITING APPARATUS The reference mark has steps and is formed on a sample. A stage moves in X and Y directions. The sample M is placed on the stage. An optical lever type height position sensor emits light to detect the reference mark FM′ by the stage being scanned. The spot position of... | 09/23/2010 |
| 20100227263 | POSITION DETECTOR AND EXPOSURE APPARATUS A position detector includes a first planar encoder including a first encoder head unit mounted on a test object that is a movable member, and a first grating unit mounted on a fixed member, the first planar encoder being configured to detect a position of the test obje... | 09/09/2010 |
| 20100225930 | BEAM IRRADIATION DEVICE AND POSITION DETECTING DEVICE In a beam irradiation device, laser light emitted from a laser light source is entered into a mirror. An actuator pivotally moves the mirror into which laser light is entered, whereby a targeted area is scanned with the laser light. Servo light emitted from a semiconduc... | 09/09/2010 |
| 20100220138 | POSITION DETECTING DEVICE, LIQUID EJECTING APPARATUS AND METHOD OF DETECTING SMEAR OF SCALE A position detecting device for detecting a position of an object, includes a light emitting portion that emits light, a light receiving portion that receives the light from the light emitting portion, and a scale that is arranged between the light emitting portion and ... | 09/02/2010 |
| 20100195118 | SCALE, DISPLACEMENT DETECTION APPARATUS PROVIDED WITH THE SAME, AND IMAGING APPARATUS PROVIDED WITH THE SAME A scale for a displacement detection apparatus includes a base, and reflection layers formed on the base in a lattice structure, wherein the scale is used as a member displaceable relative to a light-emitting element whose emission wavelength is approximately 1000 nm or... | 08/05/2010 |
| 20100188668 | TOTAL INTERNAL REFLECTION DISPLACEMENT SCALE Methods and systems for determining the displacement of a substrate using a scale comprising TIR scale features are described. A scale that includes a number of total internal reflection (TIR) prisms as scale elements is disposed on the substrate. Light directed towards... | 07/29/2010 |
| 20100188669 | LASER BEAM CENTERING AND POINTING SYSTEM An optical instrument aligns an optical beam without the need for physical intervention of the instrument within the apparatus or platforms from which the trajectory of the beam to be ascertained. The alignment apparatus and method enable the desired function to be real... | 07/29/2010 |
| 20100134779 | POSITION MEASUREMENT METHOD, POSITION CONTROL METHOD, MEASUREMENT METHOD, LOADING METHOD, EXPOSURE METHOD AND EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD A part of a plate of a predetermined shape detachably mounted on a moving body is detected by an alignment system while the position of the moving body is measured by a measurement unit that sets a movement coordinate system of the movement body, and based on the detect... | 06/03/2010 |
| 20100039656 | METHOD FOR DETERMINING AN INFLUENCING VARIABLE ACTING ON THE ECCENTRICITY IN A GONIOMETER The invention relates to a method for determining at least one influencing variable acting on the eccentricity in a goniometer, using a detector arrangement consisting of four optical detector elements, and a rotational body comprising a plurality of pattern elements ar... | 02/18/2010 |
| 20100026963 | OPTICAL PROJECTION GRID, SCANNING CAMERA COMPRISING AN OPTICAL PROJECTION GRID AND METHOD FOR GENERATING AN OPTICAL PROJECTION GRID The present invention relates to an optical projection grid (1) for producing a light distribution, which projection grid (1) has a transmittance distribution, wherein the transmittance distribution is formed by subregions (2a, 2b .... | 02/04/2010 |
| 20090324174 | DEVICE CONSISTING OF AT LEAST ONE OPTICAL ELEMENT An optical assembly comprises at least one optical element movable in at least two degrees of freedom and at least one actuator for adjusting the least one optical element; at least one sensor for sensing the position of the at least one element in at least two degrees ... | 12/31/2009 |
| 20090201513 | EXPOSURE APPARATUS, EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD An x linear encoder, which is configured of a pickup placed on a measurement mount and facing an x scale fixed on the lower surface of a barrel that houses a projection optical system, measures the displacement of the barrel with the measurement mount serving as a refer... | 08/13/2009 |
| 20090180084 | LITHOGRAPHIC APPARATUS WITH AN ENCODER ARRANGED FOR DEFINING A ZERO LEVEL A lithographic apparatus includes a position measuring system configured to measure a position of a moveable object with respect to a reference frame of the lithographic apparatus, in at least one direction of an orthogonal x-y-z coordinate system of the moveable object... | 07/16/2009 |
| 20090180125 | Rotary Encoder Apparatus Rotary encoder apparatus is described that comprises one or more readheads (114) and a radial scale (20). Each of the one or more readheads (114) includes a light emitting portion (30, 32) for illuminating the radial scale and a light detecti... | 07/16/2009 |
| 20090161086 | MOVABLE BODY SYSTEM, PATTERN FORMATION APPARATUS, EXPOSURE APPARATUS AND MEASUREMENT DEVICE, AND DEVICE MANUFACTURING METHOD A movable body system is equipped with a stage having a stage main section which moves along an XY plane and a stage which is finely movable in a direction (a Z-axis direction) orthogonal to the XY plane and a tilt direction with respect to the XY plane, and a measureme... | 06/25/2009 |
| 20090135436 | Optical position measuring arrangement A position measuring arrangement including a scale connected with a first object, wherein the scale includes a reference marking and a plurality of graduated areas, which are arranged a periodically in the measuring direction and have different optical properties. Respe... | 05/28/2009 |
| 20090135435 | REFERENCE SIGNAL GENERATING CONFIGURATION FOR AN INTERFEROMETRIC MINIATURE GRATING ENCODER READHEAD USING FIBER OPTIC RECEIVER CHANNELS A reference mark configuration for an interferometric miniature grating encoder readhead using fiber optic receiver channels is provided. The readhead includes “primary” fibers that provide reference mark primary signals processed to generate a reference signal with... | 05/28/2009 |
| 20090122323 | Scanning unit of an optical position measuring arrangement and position measuring arrangement having this scanning unit A scanning unit, by which a scale, which is movable in relation to the scanning unit in a measuring direction, can be optically scanned. The scanning unit including a detector arrangement and a transparent support having a first surface and a second surface, wherein the... | 05/14/2009 |
| 20090097041 | Method for determining the centrality of masks A method for determining the centrality of masks is disclosed. The mask is positioned in a coordinate measuring device on a measurement table displaceable in a direction perpendicular to the optical axis of an imaging measurement system in an interferometrically measura... | 04/16/2009 |
| 20090051935 | Automatic Geometric Calibration Using Laser Scanning Reflectometry Systems and methods for calibrating a solid-imaging system (10) are disclosed. A calibration plate (110) having a non-scattering surface (140) with a plurality (150) of light-scattering fiducial marks (156) in a periodic array is dispo... | 02/26/2009 |
| 20090033948 | Method of Measuring Shot Shape and Mask A method of measuring shot shape includes sequentially exposing a substrate with main scale marks (32) in compliance with a predetermined map, and forming a reference grid including a plurality of the main scale marks (32) arranged in the predetermined map... | 02/05/2009 |
| 20080309950 | Calibrating A Lithographic Apparatus The X, Y and Rz positions of a mask stage are measured using two optical encoder-reading heads measuring displacements of respective grid gratings mounted on the mask stage. The grid gratings are preferably provided on cut-away portions of the mask table so as to be cop... | 12/18/2008 |
| 20080291470 | SYSTEM ARCHITECTURE FOR SENSING AN ABSOLUTE POSITION USING A TARGET PATTERN A location system and a location system on a chip (LCoS) and method are described.... | 11/27/2008 |
| 20080285058 | OPTICAL POSITION-MEASURING DEVICE An optical position-measuring device is arranged for recording the relative position of a scanning unit and a scale movable to it in at least one measuring direction. The scale is configured as a combined unit which includes at least one reflector element as well as a m... | 11/20/2008 |
| 20080151265 | Method for positioning a target portion of a substrate with respect to a focal plane of a projection system A method is provided for positioning at least one target portion of a substrate with respect to a focal plane of a projection system. The method comprises performing height measurements of at least part of the substrate to generate height data, using predetermined corre... | 06/26/2008 |
