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| Application No. | Application Title | Issue Date |
| 20120069353 | PROFILE MEASURING APPARATUS, METHOD FOR MEASURING PROFILE, AND METHOD FOR MANUFACTURING PRODUCT There is provided a profile measuring apparatus which measures a profile of an object, including an imaging element; an image formation optical system including an objective lens; a measuring direction changing unit which is configured to change inclination of a surface... | 03/22/2012 |
| 20120026511 | METHOD AND APPARATUS FOR MEASURING SURFACE PROFILE OF AN OBJECT A method for measuring a surface profile of an object, the method includes, acquiring information about a first direction where a step of a surface of the object extends relative to a scanning direction, setting phase distribution applied to the irradiation beam accordi... | 02/02/2012 |
| 20110317171 | PHOSPHOR WHEEL CONFIGURATION FOR HIGH INTENSITY POINT SOURCE A phosphor point source element comprises a disk substrate and light emitting phosphor particles arranged on the substrate to provide a circular operational track having a desirable tightly packed particle arrangement adjacent to a flat operational surface of an operati... | 12/29/2011 |
| 20110286006 | CHROMATIC CONFOCAL POINT SENSOR APERTURE CONFIGURATION A central ray blocking aperture element is utilized in a chromatic confocal point sensor optical pen for chromatic range sensing. The central ray blocking aperture element blocks light which would otherwise pass through the chromatic confocal point sensor optical pen pr... | 11/24/2011 |
| 20110279826 | NONCONTACT SURFACE SHAPE MEASURING METHOD AND APPARATUS THEREOF Even if a return beam from a work to be measured does not agree with the center of a two-piece sensor, a correction value is calculated according to a voltage difference between two sensors of the two-piece sensor if the voltage difference is within a neighborhood range... | 11/17/2011 |
| 20110188053 | FOCUSING METHODS AND OPTICAL SYSTEMS AND ASSEMBLIES USING THE SAME A method for controlling a focus of an optical system. The method includes providing a pair of incident light beams to a conjugate lens. The incident light beams are directed by the lens to converge toward a focal region. The method also includes reflecting the incident... | 08/04/2011 |
| 20110133054 | WEIGHTING SURFACE FIT POINTS BASED ON FOCUS PEAK UNCERTAINTY A machine vision inspection system acquires a plurality of images of a workpiece region of interest at various focus heights, and determines a Z-height (e.g., the best focus height) for the region of interest based on a focus peak determining data set for the region of ... | 06/09/2011 |
| 20110090483 | Apparatus for the optical inspection of wafers A metrology tool (1) for measuring the positions of structures (32) on a mask surface (31) is disclosed. On a measuring stage (33) a reflector (36) selective with respect to the wavelength is provided, which essentially reflects light ... | 04/21/2011 |
| 20110007324 | PROBE MICROSCOPE A probe microscope includes a cantilever having a probe for contact with an object, first and second displacement detection optical systems, and an object lens. The first displacement detection optical system includes a first light source and a first displacement detect... | 01/13/2011 |
| 20100299103 | THREE DIMENSIONAL SHAPE MEASUREMENT APPARATUS, THREE DIMENSIONAL SHAPE MEASUREMENT METHOD, AND COMPUTER PROGRAM A 3D shape measurement apparatus for measuring a 3D shape of an object existing on a measurement area, comprising, a pattern projection unit for projecting a pattern having a periodicity onto the measurement area, and a capturing unit for capturing an image of the area ... | 11/25/2010 |
| 20100284025 | INTENSITY COMPENSATION FOR INTERCHANGEABLE CHROMATIC POINT SENSOR COMPONENTS Methods for providing compensation for non-uniform response of a light source and wavelength detector subsystem of a chromatic point sensor (CPS) are provided. Light from the light source is input into an optical path that bypasses the measurement path through a CPS opt... | 11/11/2010 |
| 20100171962 | System and Method for Probe Mark Analysis A method for analyzing probe mark, the method includes: scanning the probe mark by multiple spots; evaluating a probe mark characteristic in response to detection signals generated by multiple sensors of the chromatic confocal system that is characterized by a sub-micro... | 07/08/2010 |
| 20100165358 | Method and apparatus for imaging three-dimensional structure An apparatus for determining surface topology of a portion of a three-dimensional structure is provided, that includes a probing member, an illumination unit, a light focusing optics, a translation mechanism, a detector and a processor.... | 07/01/2010 |
| 20100165357 | Method and apparatus for imaging three-dimensional structure An apparatus for determining surface topology of a portion of a three-dimensional structure is provided, that includes a probing member, an illumination unit, a light focusing optics, a translation mechanism, a detector and a processor.... | 07/01/2010 |
| 20100128285 | THREE DIMENSIONAL PROFILE INSPECTING APPARATUS A three-dimensional profile inspecting apparatus includes at least two optical inspecting apparatuses and a tilt angle adjusting mechanism. The tilt angle adjusting mechanism is equipped with the at least two optical inspecting apparatuses so as to adjust the tilt angle... | 05/27/2010 |
| 20090153879 | Method and apparatus for imaging three-dimensional structure An apparatus for determining surface topology of a portion (26) of a three-dimensional structure is provided, that includes a probing member, an illumination unit, a light focusing optics, a translation mechanism, a detector and a processor.... | 06/18/2009 |
| 20080316502 | APPARATUS AND METHOD FOR MEASURING DISPLACEMENT, SURFACE PROFILE AND INNER RADIUS An apparatus and a method are proposed for measuring displacement, surface profile and roughness of a moving object or an inner radius of a hollow cylinder. The apparatus includes a light emitting unit, a light dispersing unit for receiving light from the light emitting... | 12/25/2008 |
| 20080130014 | Displacement Measurement Sensor Using the Confocal Principle with an Optical Fiber A displacement measurement sensor using the confocal principle with an optical fiber for measuring small changes in distance to a specular target surface comprises a monochromatic light source such as a laser diode 12 coupled to a multimode optical fiber. The fib... | 06/05/2008 |
| 20080130013 | DEVICE AND METHOD FOR MEASUREMENT OF SURFACES The invention relates to a device for measuring surfaces and to a method, which uses, preferably, the device. The device comprises a light source which is used to produce a multi-colored light beam. The light beam can be focused by an imaging optical system on a plurali... | 06/05/2008 |
| 20070296979 | Three-dimensional shape measuring apparatus A three-dimensional shape measuring apparatus includes a measuring section and a data integrating section. The measuring section has three-dimensional measurement dimensions, and measures a three-dimensional shape of a measurement object in a non-contact state. The meas... | 12/27/2007 |
| 20070263228 | DEVICE AND PROCESS FOR OPTICAL DISTANCE MEASUREMENT Device and process for determining a distance to an object. The device includes at least one lens arranged to focus light from a source onto the object and to collect light reflected and scattered from the object. An apertured element includes a circular aperture struct... | 11/15/2007 |
| 20070247640 | Exposure Apparatus, Exposure Method and Device Manufacturing Method, and Surface Shape Detection Unit In subroutine 201 and step 205, a best image-forming plane of a projection optical system and an offset component of a multipoint AF system are detected as calibration information. During measurement of a wafer alignment mark by an alignment system in step... | 10/25/2007 |
| 20070242279 | Device and method for the contactless measurement of at least one curved surface A device and a method for the contactless measurement of at least one curved surface. The device comprises at least one light source for generating light with a continuous spectrum, and a light exit face assigned to the light source. It furthermore has at least one meas... | 10/18/2007 |
| 20070216911 | Curved Surface Shape Inspection Method, Fiber Optical Block, and Curved Surface Shape Inspection Device In a fiber optic block 10 formed by bundling and integrating a plurality of optical fibers 11 each composed of a core region 12 and a clad region 13, an at least partially curved input end face 14 composed of one end of each optical fi... | 09/20/2007 |
| 20070153296 | Optical measuring device for measuring a cavity An optical measuring device for measuring an inner wall of a cavity has a confocal proximity sensor. The beam path of the illumination light and the measuring light is deflected by a rotatably mounted reflector. By introducing an object-side end of the measuring device ... | 07/05/2007 |
| 20070109559 | Method and apparatus for imaging three-dimensional structure Determining surface topology of a portion (26) of a three-dimensional structure is provided. An array of incident light beams (36) passing through a focusing optics (42) and a probing face is shone on said portion. The focusing optics defines one or... | 05/17/2007 |
| 20060215177 | System and method for determining a shape of a surface of an object and method of manufacturing an object having a surface of a predetermined shape A system and method for determining a shape of a surface comprises a chromatic imaging optics for generating a dispersion in a measuring light. Colour information contained in measuring light emerging from the surface to be tested and received by a detector may be used ... | 09/28/2006 |
| 20060158665 | Method and apparatus for imaging three-dimensional structure Determining surface topology of a portion (26) of a three-dimensional structure is provided. An array of incident light beams (36) passing through a focusing optics (42) and a probing face is shone on said portion. The focusing optics defines one or... | 07/20/2006 |
| 20060109483 | Trench measurement system employing a chromatic confocal height sensor and a microscope A system for the measurement of high aspect ratio trenches. The preferred embodiment consists of three elements: a) an integrated microscope and optical height sensor, b) an axially dispersive, afocal lens system, which is included in the optical height sensor, and c) a... | 05/25/2006 |
| 20060087660 | Device for measuring in three dimensions a topographical shape of an object A device for measuring in three dimensions a topographical shape of an object. The device comprises an arrayed confocal imaging system having a confocal topographical mask provided for converting light produced by a light source into an array of small spots. The mask be... | 04/27/2006 |
| 20060072123 | Methods and apparatus for making images including depth information A method for making an image of an object including depth information comprising the steps of: illuminating the object with a periodic pattern of light from an illuminating arrangement; the illuminating arrangement being such that the pattern is in focus in a focal plan... | 04/06/2006 |
| 20050264828 | Method and apparatus for imaging three-dimensional structure Determining surface topology of a portion (26) of a three-dimensional structure is provided. An array of incident light beams (36) passing through a focusing optics (42) and a probing face is shone on said portion. The focusing optics defines one or... | 12/01/2005 |
| 20050213108 | Method of calibrating a scanning system A method of measuring an object on a coordinate positioning apparatus. A first object is placed on a coordinate positioning apparatus and measured with a workpiece contacting probe to create measurement data. The measurement data is collected at multiple stylus deflecti... | 09/29/2005 |
| 20050122530 | System and method for optical scanning An optical scanning system includes a probe and a processor. The probe includes a mechanical oscillator responsive to AC voltage signals and an optical fiber. The optical fiber has a free end that executes an oscillatory scanning motion in response to being mechanically... | 06/09/2005 |
| 20050030528 | Confocal wafer-inspection system A confocal wafer inspection system including: (a) a table to carry a wafer for inspection, the table having two vertical degrees of freedom to enable XY axis movements; (b) a movement device for moving the table along the degrees of freedom; (c) a confocal height measur... | 02/10/2005 |
