Class 318/649 - Stable platforms

Subclass of Class 318 - Electricity: motive power systems
Definition: Subject matter in which the measuring instrument includes
No. of applications: 35
Last issue date: 04/01/2010

Application No.	Application Title	Issue Date
20100079101	HANDHELD OR VEHICLE-MOUNTED PLATFORM STABILIZATION SYSTEM A hand-held or vehicle-mounted stabilization system including a platform supported by two or more rotatably-coupled gimbal frames each having a pivot assembly disposed at its rotation axis to couple an actuator to a rotation sensor having a rotation-sensitive sensor axi...	04/01/2010
20080180053	Positioning device having dynamically isolated frame, and lithographic device provided with such a positioning device A positioning device includes an object table, a sub-system for processing an object to be placed on the object table, a drive unit for displacing the object table relative to the sub-system, and a measuring system for measuring a position of the object table relative t...	07/31/2008
20080166213	High-speed substrate manipulator A mechanism for manipulation of a substrate over a substantially planar region has at least three, and up to six, degrees of freedom (DOF). The mechanism may be manufactured in various configurations, including triangular, and may use inherent symmetry to reduce the num...	07/10/2008
20080122397	Planar motor A common electrode plate formed on a common electrode base attached to the lower surface of the movable stage faces a split electrode plate formed on a split electrode base attached to the upper surface of a main base, which are apart from each other at a predetermined ...	05/29/2008
20080067967	STAGE APPARATUS AND LITHOGRAPHIC APPARATUS A stage apparatus and a lithographic apparatus comprising such a stage apparatus are described. The stage apparatus includes an electromagnetic motor arranged to displace an object table, an electromagnetic actuator configured to position the object table and a device c...	03/20/2008
20080054836	SYSTEM AND METHOD FOR FACILITATING FLUID THREE-DIMENSIONAL MOVEMENT OF AN OBJECT VIA DIRECTIONAL FORCE A reeving system for filming movies, sporting events, or any other activity that requires fluid movement of a camera or other object to any position within a defined volume of space. To accomplish positioning embodiments move an object throughout three-dimensional space...	03/06/2008
20080054838	METHOD FOR CONTROLLING THE POSITION OF A MOVABLE OBJECT, A POSITIONING SYSTEM, AND A LITHOGRAPHIC APPARATUS A method of actuating a movable object in a first degree of freedom includes a) providing a first motor assembly including one or more motors of a first type and a second motor assembly including one or more motors of a second type, each of the first and second motor as...	03/06/2008
20070273861	STAGE DEVICE, EXPOSURE APPARATUS, AND MICRODEVICE MANUFACTURING METHOD A stage device including a base, a stage movable portion being movable along said base without contact thereto, an interferometer configured to measure a position of the stage movable portion, at least one of a piping element and a wiring element connected to the stage ...	11/29/2007
20070267995	Six Degree-of-Freedom Stage Apparatus Methods and apparatus for providing a fine stage with up to six degrees of freedom are disclosed. According to one aspect of the present invention, a stage apparatus includes a first stage assembly, a second stage assembly, and a countermass arrangement. The first stage...	11/22/2007
20070194741	DRIVING APPARATUS, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD A driving apparatus for moving an object. The apparatus includes a first actuator which drives the object in X and Y directions, a second actuator which drives a reaction force counter which receives a reaction force generated when the first actuator drives the object, ...	08/23/2007
20070176572	Method of optimizing servo controller power in two-dimensional flexure mems storage devices A method of optimizing a servo controller power required in the operation of two-dimensional flexure (Microelectronic Memory Storage) MEMS devices. Furthermore, provided is an arrangement for optimizing servo controller power in a two-dimensional flexure MEMS storage de...	08/02/2007
20070096677	LOCK MECHANISM FOR STAGE APPARATUS A lock mechanism for a stage apparatus, the stage apparatus having a stationary support board and a movable stage relatively movable in a plane parallel to the stationary support board, includes a pair of engaging members projecting from the movable stage; a rotational ...	05/03/2007
20070046244	Z-theta table activated by two rotary motors A Z-θ table includes a bed capable of undergoing linear displacement along the Z-axis and angular positioning. The table includes two rotary motors arranged in a substantially concentric manner with two fixed stators. The interior rotor includes a device for guiding an...	03/01/2007
20070035267	Stage device This invention relates to a stage device which is moved with high accuracy in an X-Y direction and a rotating direction using a planar motor. The invention is aimed at reducing the size of the stage device and at performing accurately measurement of a position of the st...	02/15/2007
20060232140	System and method for controlling a stage assembly A stage assembly (220) that moves a work piece (200) a movement step (257) includes a first stage (238), a first mover assembly (242), a second stage (240), and a second mover assembly (244). The first mover assembly (...	10/19/2006
20060208684	Dynamic aperture driving apparatus and method for reducing vibration The present invention generally relates to a dynamic aperture for controlling the intensity of light of projection lens, more particularly to a dynamic aperture driving apparatus and method for reducing vibration by which vibrations are minimized in spite of command for...	09/21/2006
20060038525	Prober and testing apparatus using same A prober includes a frame having a frame ground terminal, a chuck stage, servo motors for driving the chuck stage, servo amplifiers connected to the servo motors, first floating mounts on which the servo amplifiers are provided, a second floating mount on which the serv...	02/23/2006
20060033463	System and method for facilitating fluid three-dimensional movement of an object via directional force A reeving system for filming movies, sporting events, or any other activity that requires fluid movement of a camera or other object to any position within a defined volume of space. To accomplish positioning embodiments move an object throughout three-dimensional space...	02/16/2006
20060001395	System to determine proper wafer alignment An apparatus for aligning a wafer is provided, which normally senses a flat zone of the wafer by sensors regardless of an external light so that the wafer is aligned in a set mode, in order to increase or maximize production yield. A body has all kinds of drivers. An or...	01/05/2006
20050280390	Electromagnetic alignment and scanning apparatus An exposure apparatus that irradiates an energy beam to a substrate includes a projection optical system that projects the energy beam to the substrate, and a support device having a flexible structure to support the projection optical system. According to one embodimen...	12/22/2005
20050242764	Positioning apparatus, exposure apparatus, and semiconductor device manufacturing method A positioning apparatus includes an X stage, a linear motor (X-axis) which drives the X stage along the X-axis, a linear motor (Y-axis) which drives a Y stage along the Y-axis, a laser interferometer which detects position information of the stages along the X and Y dir...	11/03/2005
20050236908	Stage positioning unit for photo lithography tool and for the like A photolithography tool, e.g. for microelectronics production, having the stage units (both mask and substrate stage units) composed of two identical stage assemblies which are simultaneously driven with the programmed production motions. The acceleration time histories...	10/27/2005
20050189901	Stage devices and exposure systems comprising same Stage devices are disclosed that can be made small and lightweight and that produce little magnetic-field disturbance. As a result, high-precision scan positioning can be performed using them. In an exemplary configuration, a Y-slider driven by a linear motor is deploye...	09/01/2005
20050174551	Position control and heat dissipation for photolithography systems A photolithography system that uses a variable reluctance linear motor (VRLM) to move a reticle or wafer stage is described. In addition to moving the stage, one or more of the surfaces of the VRLM is formed on the reticle or wafer stage and serves as a heat dissipation...	08/11/2005
20050162634	Cable tray assembly for precision drive stage A cable tray assembly includes a wafer table placed on a precision drive stage of which motions along specified mutually perpendicular X- and Y-directions are independently controlled. A plurality of conduits such as electrical and/or optical cables and gas- and/or liqu...	07/28/2005
20050128460	Lithographic apparatus and device manufacturing method In a lithographic projection apparatus and a device manufacturing method, a movable part is controlled to produce a motion, an absolute value of at least one of a fourth and a higher derivative to time of the position of the motion being limited to less than a maximal v...	06/16/2005
20050128463	LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD A lithographic apparatus includes an illumination system for providing a beam of radiation, an article support for supporting a flat article to be placed in a beam path of the beam of radiation on the article support, a backfill gas feed arranged in the article support ...	06/16/2005
20050093502	Stage with isolated actuators for low vacuum environment Methods and apparatus for enabling a stage apparatus to scan an object within a vacuum environment while isolating actuators, cables, and hoses from the vacuum environment are disclosed. According to one aspect of the present invention, a stage apparatus includes a firs...	05/05/2005
20050088133	Electromagnetic alignment and scanning apparatus A scanning exposure method moves a mask stage in a scanning direction by a driver having a first portion coupled to the mask stage, which includes a reflective portion positioned along the scanning direction. A counter weight having at least one beam extending along the...	04/28/2005
20050083006	Electromagnetic alignment and scanning apparatus In a scanning exposure method, a mask stage that holds a mask is moved in a scanning direction by a first electromagnetic driver having a first portion coupled to the mask stage, and a second portion. A position of the mask stage is detected by a position detector that ...	04/21/2005
20050046820	Bearing arrangement for reaction mass in a controlled environment A reaction mass apparatus for stabilizing a scanning system during lithographic processing comprises a baseframe; at least one reaction mass movably coupled to the baseframe by at least three first bearings and coupled to a stage by at least two second bearings and at l...	03/03/2005
20050029981	Foam core chuck for the scanning stage of a lithography system A foam core chuck for use in a scanning stage of a lithography system is disclosed. In accordance with an embodiment of the present invention, the lithography stage includes a frame and a chuck supported by the frame. The chuck has a foam core structure that is covered ...	02/10/2005
20050024004	CABLING SYSTEM AND METHOD FOR FACILITATING FLUID THREE-DIMENSIONAL MOVEMENT OF A SUSPENDED CAMERA Embodiments of the invention are ideally suited for use filming movies, sporting events, or any other activity that requires fluid movement of a camera or other object to any position within a defined volume of space. To accomplish such positioning embodiments of the in...	02/03/2005
20050024005	SYSTEM AND METHOD FOR FACILITATING FLUID THREE-DIMENSIONAL MOVEMENT OF AN OBJECT VIA DIRECTIONAL FORCE Embodiments of the invention are ideally suited for use filming movies, sporting events, or any other activity that requires fluid movement of a camera or other object to any position within a defined volume of space. To accomplish such positioning embodiments of the in...	02/03/2005
20050001579	Ultra-fast precision motor with X, Y and Theta motion and ultra-fast optical decoding and absolute position detector Ultra-fast precision motor with X, Y and Theta motion and ultra-fast optical decoding and absolute position detector A high-speed and extremely large range positioning apparatus capable of producing motions in multiple dimensions with high precision and very high reliab...	01/06/2005

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Class 318/649 - Stable platforms