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Class 310/324 - Diaphragm


Subclass of Class 310 - Electrical generator or motor structure
Definition: Subject matter in which the resonant structure is a diaphragm
No. of applications: 77
Last issue date: 08/25/2011


1    
Application No.Application TitleIssue Date
20110204749SHORT RANGE ULTRASONIC DEVICE WITH BROADBEAM ULTRASONIC TRANSDUCERS
An apparatus comprises a first transducer support configured to receive a first transducer in a first opening. A face of the first face of the transducer is located in a first plane. The apparatus also comprises a second transducer support configured to receive a second...
08/25/2011
20100277040THIN FILM DETECTOR FOR PRESENCE DETECTION
A transducer (800) is provided where a membrane (830) is formed over a front substrate (615); and a piezoelectric layer (820) is formed over the membrane (830) at an active portion (821) and peripheral portions located adjacent ...
11/04/2010
20100238216Piezoelectric Actuator, Method Of Manufacturing Piezoelectric Actuator, Liquid Ejection Head, Method Of Manufacturing Liquid Ejection Head And Image Forming Apparatus
A piezoelectric actuator includes: a piezoelectric layer formed by a film formation method so as to have orientation in a prescribed orientation direction; and a pair of electrodes, disposed on a same surface which is substantially perpendicular to the orientation direc...
09/23/2010
20100109104PRESSURE SENSOR AND WIRE GUIDE ASSEMBLY
A pressure sensor chip is described. The pressure sensor chip include a substrate, a polycrystalline silicon layer, at least one silicon layer, and a diaphragm movement element. The polycrystalline silicon layer is formed on the substrate and has a cavity recess formed ...
05/06/2010
20100072860PIEZOELECTRIC MICROSPEAKER AND METHOD OF FABRICATING THE SAME
Provided is a method of fabricating a piezoelectric microspeaker. According to the method, drive units having a piezoelectric layer and an electrode are symmetrically formed so as to be disposed over and under a diaphragm, respectively. When a thin conductive layer is u...
03/25/2010
20100066206Bonding On Silicon Substrate Having A Groove
A method and apparatus for bonding on a silicon substrate are disclosed. An apparatus includes a membrane having a membrane surface, a groove in the membrane surface, a transducer having a transducer surface substantially parallel to the membrane surface, and an adhesiv...
03/18/2010
20100053891SYSTEM AND METHOD FOR MINIATURIZATION OF SYNTHETIC JETS
A micro-electromechanical (MEM) synthetic jet actuator includes a semiconductor substrate having a cavity extending therethrough, such that a first opening is formed in a first surface of the semiconductor substrate and such that a second opening is formed in a second s...
03/04/2010
20090236939HIGH-PERFORMANCE ELECTROACTIVE POLYMER TRANSDUCERS
Transducers employing electroactive polymer films are disclosed....
09/24/2009
20090231395METHOD OF DRIVING PIEZOELECTRIC ACTUATOR AND METHOD OF DRIVING LIQUID EJECTION HEAD
A method of driving a piezoelectric actuator has the step of driving a piezoelectric actuator including a diaphragm, a lower electrode formed on one surface of the diaphragm, a piezoelectric film formed in epitaxial growth or oriented growth on an opposite side of the l...
09/17/2009
20090152999PIEZOELECTRIC ACTUATOR AND METHOD FOR MANUFACTURING PIEZOELECTRIC ACTUATOR
In a method for manufacturing a piezoelectric actuator, a ceramic sintered body is prepared and a size of the ceramic sintered body is adjusted in a thickness direction defined below by grinding piezoelectric ceramic layers, included in the ceramic sintered body, locate...
06/18/2009
20090146532Liquid Transporting Apparatus and Piezoelectric Actuator
First and second piezoelectric thin layers are arranged on an upper surface of a vibration plate which covers a pressure chamber. An individual electrode is formed on an upper surface, of the second piezoelectric thin layer, at a portion facing the pressure chamber, and...
06/11/2009
20090146531Manufacturing Process For Thin Film Bulk Acoustic Resonator (FBAR) Filters
Method for fabricating an acoustical resonator on a substrate having a top surface. First, a depression in said top surface is generated. Next, the depression is filled with a sacrificial material. The filled depression has an upper surface level with said top surface o...
06/11/2009
20090115288PIEZOELECTRIC LOUDSPEAKER
A full range loudspeaker, comprising a frame with a membrane secured onto said frame and a piezoelectric actuator attached on said membrane and able to be driven over the full audible frequency range....
05/07/2009
20090079300ULTRASONIC DEVICE WITH A DISK-SHAPED RESONATOR
The present invention refers to an ultrasonic device comprising an ultrasound transducer; and a disk-shaped metallic low-frequency ultrasound (NFLUS) resonator being mechanically connected with the ultrasound transducer on one side of the resonator; a container with an ...
03/26/2009
20090039737METHOD OF FABRICATING CASE, PIEZOELECTRIC OSCILLATOR, OSCILLATOR, ELECTRONIC APPLIANCE, AND RADIO CLOCK
A method of fabricating a case accommodating a piezoelectric vibrating piece therein in a piezoelectric oscillator including the piezoelectric vibrating piece, including the steps of: applying deep drawing to a conductive plate member to shape the plate member in a near...
02/12/2009
20080303377PIEZOELECTRIC SUBSTANCE AND PIEZOELECTRIC ELEMENT
A piezoelectric substance has a substrate, an electrode formed on the substrate, and a piezoelectric film formed on the electrode. The piezoelectric film is formed of crystals having a main phase of (NaxKyLiz)NbO3 (0<x<1...
12/11/2008
20080225089PIEZOELECTRIC ACTUATOR, LIQUID EJECTION HEAD, IMAGE FORMING APPARATUS, AND METHOD OF MANUFACTURING PIEZOELECTRIC ACTUATOR
The piezoelectric actuator has: a diaphragm made of silicon; an insulating layer formed on a front surface of the diaphragm; a plurality of individual electrodes formed on a surface of the insulating layer; a plurality of piezoelectric bodies formed respectively on surf...
09/18/2008
20080199332PIEZOELECTRIC PUMP AND PIEZOELECTRIC VIBRATOR
Embodiments of the present disclosure may include a piezoelectric pump having: a piezoelectric vibrator whose periphery may be fluid-tightly sealed; and a pump chamber and an air chamber that may be formed on front and rear sides of the piezoelectric vibrator. The piezo...
08/21/2008
20080179995PIEZOELECTRIC THIN-FILM RESONATOR
In a piezoelectric resonator, a portion of a thin film unit is supported by a substrate. A portion of the thin film unit acoustically isolated from the substrate includes a) a vibration unit and b) an additional film. The vibration unit includes a piezoelectric film san...
07/31/2008
20080143457FBAR band pass filter, duplexer having the filter and methods for manufacturing the same
A duplexer including an FBAR band pass filter that can be easily embodied in single chip, and a method for manufacturing the same are disclosed. The duplexer of a mobile communication device includes a transmitting band pass filter, formed on an upper portion of a subst...
06/19/2008
20080111452PIEZOELECTRIC/ELECTROSTRICTIVE MATERIAL, PIEZOELECTRIC/ELECTROSTRICTIVE BODY, AND PIEZOELECTRIC/ELECTROSTRICTIVE ELEMENT
A piezoelectric/electrostrictive material having a nonstoichiometric composition represented by a general formula (1):


(1−x)(BiaNabTiO3+δ)−x(Kc

05/15/2008
20080111453PIEZOELECTRIC/ELECTROSTRICTIVE FILM ELEMENT
A lower electrode 4 and an auxiliary electrode 8, a piezoelectric/electrostrictive film 5, and an upper electrode 6 are sequentially arranged in layers on a substrate 1. The lower electrode 4 is continuously formed in a region r...
05/15/2008
20080067895CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER AND PRODUCTION METHOD OF SAME
A capacitive micromachined ultrasonic transducer (cMUT) is constituted by a plurality of transducer elements comprising plural transducer cells that are mutually connected in parallel and comprises: a silicon substrate; a bottom electrode placed on the top surface of th...
03/20/2008
20080061655METHODS AND SYSTEMS FOR POSITIONING MICRO ELEMENTS
A micro device may comprise a substrate, a first micro structure coupled to the substrate, a second micro structure coupled to the substrate, and port configured to receive an input. The first micro structure is configured to move into engagement with the second micro s...
03/13/2008
20080042520METHODS AND SYSTEMS FOR MICRO BEARINGS
A micro drive assembly may comprise a substrate, a micro shall oriented in-plane with the substrate and at least one micro bearing to support rotation of the micro shaft. The micro shaft and micro bearing may be in or less than the micrometer domain....
02/21/2008
20080018203Piezoelectric electroacoustic transducing device
In order to simultaneously realize both improvements of the acoustic performance of a bimorph piezoelectric electroacoustic transducing device and the productivity, in a bimorph piezoelectric vibrator 10 in which a disk-like first piezoelectric element 12 ...
01/24/2008
20080001501Apparatus for Determining and/or Monitoring a Process Variable
An apparatus for determining and/or monitoring a process variable of a medium. The apparatus includes: An oscillatable unit secured on a membrane; a sending/receiving unit, which excites the membrane and the oscillatable unit to oscillate and which receives oscillations...
01/03/2008
20070278899PIEZOELECTRIC THIN-FILM RESONATOR
A piezoelectric thin-film resonator and a method of manufacturing thereof eliminate and prevent breaking of a piezoelectric thin film, disconnection of electrodes, and other known problems. The piezoelectric thin-film resonator includes a substrate and a suspended porti...
12/06/2007
20070278905Piezoelectric actuator and liquid-droplet jetting head
A piezoelectric actuator includes a first ceramic sheet having individual inner-electrodes formed thereon, a second ceramic sheet having a common inner-electrode formed thereon, a third ceramic sheet having individual surface-electrodes formed thereon, and a fourth cera...
12/06/2007
20070273248MOTION AMPLIFICATION USING PIEZOELECTRIC ELEMENT
A motion amplifier (22) comprises piezoelectric diaphragm (30) and drive electronics (26) for applying a drive signal to the piezoelectric diaphragm. The motion amplifier preferably comprises (in addition to the piezoelectric diaphragm) a reaction m...
11/29/2007
20070226974METHOD FOR MANUFACTURING ACTUATOR DEVICE AND LIQUID EJECTING HEAD INCLUDING ACTUATOR DEVICE PREPARED BY THE METHOD
A method is provided for manufacturing an actuator device including a substrate, a vibration plate, lower electrode, and a piezoelectric element having a piezoelectric layer, and an upper electrode. The vibration plate is formed by forming an insulating film comprised o...
10/04/2007
20070228880PIEZOELECTRIC THIN FILM RESONATOR
A piezoelectric thin film resonator includes a substrate, and a resonator section formed above the substrate and having a first electrode layer, a piezoelectric layer and a second electrode layer in which acoustic vibration is generated in a thickness direction of the p...
10/04/2007
20070205696Vibroswitch for flickering shoes
The present invention provides a vibro-switch for flickering shoes, which typically includes a plastic shell comprising of a hood and a hood pad enclosing a cylindrical cavity; disk cooper sheet attached with a piezoelectric ceramics chip on the bottom side is suspended...
09/06/2007
20070200458PIEZOELECTRIC THIN FILM DEVICE
The present invention is directed to improving characteristics of a piezoelectric thin film device. A piezoelectric thin film filter including four film bulk acoustic resonators has a configuration where a filter section and a base substrate are bonded to each other via...
08/30/2007
20070200459PIEZOELECTRIC THIN FILM DEVICE
The present invention is directed to preventing characteristic variations and damage caused by a difference in thermal expansion coefficient. A piezoelectric thin film filter, including four film bulk acoustic resonators, has a configuration where a filter section for p...
08/30/2007
20070200457High-speed acrylic electroactive polymer transducers
Devices employing electroactive polymer actuators are disclosed. Acrylic dielectric material based actuators are optionally provided in which architectures are presented that allow for improved power output as compared with other known acrylic dielectric material based ...
08/30/2007
20070194662THIN FILM PIEZOELECTRIC RESONATOR, METHOD OF MANUFACTURING THE SAME, AND FILTER INCLUDING THE SAME
A thin film piezoelectric resonator includes: a substrate having a cavity; a first dielectric layer provided on the substrate to cover the cavity; a second dielectric layer provided on the substrate and disposed in a peripheral region of the cavity, and having a thickne...
08/23/2007
20070186397Method of forming piezoelectric actuator of inkjet head
A method of forming a piezoelectric actuator of an inkjet head formed on a vibrating plate to provide a driving power for ejecting ink to each of pressure chambers is provided. The method includes forming a lower electrode on a vibrating plate, forming a piezoelectric l...
08/16/2007
20070176513Thin-film piezoelectric resonator and filter circuit
It is possible to provide a resonator structure that does not cause a variation in anti-resonant frequency can be achieved, even if the cavity and the upper and lower electrode shift. A thin-film piezoelectric resonator includes: a lower electrode provided on the princi...
08/02/2007
20070152540Piezoelectric thin film resonator and manufacturing method thereof
A piezoelectric thin film resonator which can reduce variations in resonant frequency and resonant resistance by uniformly planarizing a structural film, and a method of manufacturing the piezoelectric thin film resonator. The piezoelectric thin film resonator has a sub...
07/05/2007
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