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Class 279/3 - VACUUM


Subclass of Class 279 - Chucks or sockets
Definition: Chucks adapted to hold work-pieces, etc., by external atmospheric
No. of applications: 24
Last issue date: 03/22/2012


Application No.Application TitleIssue Date
20120068420CENTERING METHOD FOR OPTICAL ELEMENTS
A method for centering a circular optical element using a non-self-centering chuck adapted to grip the element at two grip strengths. The element is rotated in the chuck while measuring the lateral position of the element's outer rim with a probe. The positions of maxim...
03/22/2012
20110308067POSITIONING APPARATUS, A SUBSTRATE PROCESSING APPARATUS AND METHOD FOR FIXING A REFERENCE MEMBER
Provided is a positioning apparatus including: a reference member that is serving as a reference for positioning; a support part that supports the reference member; and a first fixing member provided on the support part that fixes the reference member and the support pa...
12/22/2011
20110241298WAFER FLATTENING APPARATUS AND METHOD
An apparatus and method are disclosed for securing a substantially circular wafer comprising a chuck comprising a plurality of tensioning grooves each comprising at least one arcuate bend having a bend radius substantially less than an outer region radius, and a vacuum ...
10/06/2011
20110198817THIN WAFER CARRIER
An improved wafer carrier device for carrying and holding semiconductor wafers that have a thickness of below 100 micrometers includes a transportable wafer chuck having an enclosed vacuum reservoir and a top surface configured to support a wafer. The top surface has on...
08/18/2011
20110179621FIXTURE ASSEMBLY AND METHOD FOR DISASSEMBLING ELECTRONIC DEVICE
A fixture apparatus includes at least one top vacuum chuck and a driving mechanism. The at least one top vacuum chuck is capable of applying negative force to a surface of a top cover of an electronic device. The driving mechanism is connected to the at least one top va...
07/28/2011
20110073776ATTRACTION MEMBER, AND ATTRACTION DEVICE AND CHARGED PARTICLE BEAM APPARATUS USING THE SAME
A chucking member for holding a target is removably mounted on a chucking stage with a plurality of vacuum holes. the chucking member has a substrate removably mounted on the chucking stage. The substrate has a vacuum region in which the target being to be arranged, the...
03/31/2011
20100301534VACUUM CHUCK
The invention relates to a vacuum chuck capable of reducing cost and weight by making its structure simple and shortening the clamping time. The invention comprises a main body 100 including a support projection 110 and a vacuum groove 111 arranged ...
12/02/2010
20100194061Head Used For Attracting a Workpiece
A workpiece vacuum chuck head, which serves to vacuum-chuck a light, minute workpiece and to release and place the vacuum-chucked workpiece on a workpiece placement surface, includes a base section, a workpiece vacuum chuck section, and a follower mechanism section for ...
08/05/2010
20100013169THIN WAFER CHUCK
Methods and systems, in one embodiment, are described related to a chuck with a plurality of vacuum grooves on a surface. Each single vacuum groove of the plurality of vacuum grooves has a single port connected with a single vacuum line coupled to a vacuum source. The s...
01/21/2010
20090179365HIGH TEMPERATURE VACUUM CHUCK ASSEMBLY
A vacuum chuck and a process chamber equipped with the same are provided. The vacuum chuck assembly comprises a support body, a plurality of protrusions, a plurality of channels, at least one support member supporting the support body, at least one resilient member coup...
07/16/2009
20090031955VACUUM CHUCKING HEATER OF AXISYMMETRICAL AND UNIFORM THERMAL PROFILE
Embodiments of a vacuum chuck having an axisymmetrical and/or more uniform thermal profile are provided herein. In some embodiments, a vacuum chuck includes a body having a support surface for supporting a substrate thereupon; a plurality of axisymmetrically arranged gr...
02/05/2009
20080277885Wiring-Free, Plumbing-Free, Cooled, Vacuum Chuck
A solar cell production system utilizes self-contained vacuum chucks that hold and cool solar cell wafers during transport on a conveyor between processing stations during a fabrication process. Each self-contained vacuum chuck includes its own local vacuum pump and a c...
11/13/2008
20080203679Tool Holder Comprising A Suction System
This patent document relates, as its title indicates, to a tool holder with suction system of the type used in automatic machining systems with numerical control for the adaptation and securing of different machining tools, characterised in that it integrates in a singl...
08/28/2008
20080174076VACUUM SYSTEM
The invention relates to a vacuum system, in particular a vacuum gripping system having at least one vacuum gripping apparatus for gripping workpieces and/or a vacuum component, in particular having a sensor for sensing states in the vacuum gripping system and/or one of...
07/24/2008
20080148558APPARATUS FOR TRANSFERRING SEMICONDUCTOR CHIP AND METHOD OF TRANSFERRING SEMICONDUCTOR CHIP USING THE SAME
Provided are an apparatus for transferring a semiconductor chip and a method of transferring a semiconductor chip using the same, which can inhibit the occurrence of a void to enhance the reliability of a semiconductor package. The apparatus for transferring the semicon...
06/26/2008
20080146124SEMICONDUCTOR MANUFACTURING APPARATUS AND SEMICONDUCTOR MANUFACTURING METHOD
A semiconductor manufacturing apparatus includes a supporting unit for supporting a semiconductor wafer received from a CMP apparatus and a vacuuming system for holding the wafer on the supporting unit. The vacuuming is applied only in a peripheral area of the wafer. In...
06/19/2008
20080054884Chuck for holding a device under test
A chuck for a probe station. ...
03/06/2008
20080054885Chuck for holding a device under test
A chuck for a probe station. ...
03/06/2008
20080042374Chuck for holding a device under test
A chuck for a probe station. ...
02/21/2008
20070063453Vacuum chuck and suction board
The vacuum chuck according to the present invention is provided with a sucking plate for sucking and holding an object to be sucked, in which a sucking layer made of a porous ceramic and a dense material layer are integrated, the sucking layer being located on the side ...
03/22/2007
20070029740Body for keeping a wafer, method of manufacturing the same and device using the same
A wafer holding body for placing a semiconductor wafer, a method of manufacturing the same, and an device using the wafer holding body are provided, wherein a channel is formed in the wafer holding body. ...
02/08/2007
20070007733Vaccum-assisted fixture for holding a part
An inspection fixture, including a manifold having an inlet opening and an outlet opening for communicating with a negative pressure source for producing a vacuum within the manifold. A part collet is provided for being positioned in the inlet opening and held in place ...
01/11/2007
20050173024Semiconductor deivce configured for reducing post-fabrication damage
A semiconductor device includes an IC die configured to reduce post-fabrication damage to the device. The IC die is formed such that at least a portion of one or more perimeter edges of the die are beveled by an etching process. The semiconductor device may include a pl...
08/11/2005
20050156389Suction device
A suction device includes a substrate having a plurality of apertures. In each of the apertures, an adjusting member is mounted. The adjusting member has a tube and a rim. The tube has a close inner end and an open outer end and the rim is projected from the tube and at...
07/21/2005
 
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