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Class 257/410 - Gate insulator includes material (including air or vacuum) other than SiO 2


Subclass of Class 257 - Active solid-state devices (e.g., transistors, solid-state diodes)
Definition: Subject matter wherein the gate electrode insulator includes
No. of applications: 331
Last issue date: 05/03/2012


1                  
Application No.Application TitleIssue Date
20120104513FIELD EFFECT TRANSISTOR HAVING AN ASYMMETRIC GATE ELECTRODE
The gate electrode of a metal oxide semiconductor field effect transistor (MOSFET) comprises a source side gate electrode and a drain side gate electrode that abut each other near the middle of the channel. In one embodiment, the source side gate electrode comprises a s...
05/03/2012
20120080760Dielectric structure, transistor and manufacturing method thereof
The present invention discloses a dielectric structure, a transistor and a manufacturing method thereof with praseodymium oxide. The transistor with praseodymium oxide comprises at least a III-V substrate, a gate dielectric layer and a gate. The gate dielectric layer is...
04/05/2012
20120080756SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME
A semiconductor device includes a high dielectric gate insulating film formed on a substrate, and a metal gate electrode formed on the high dielectric gate insulating film. The metal gate electrode includes a crystalline portion and an amorphous portion. A halogen eleme...
04/05/2012
20120068275SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME
A method for fabricating a semiconductor device includes forming a high-dielectric constant insulating film including a high-dielectric constant film; forming a first conductive film including an oxide film on an upper surface thereof and containing at least one of high...
03/22/2012
20120049171ELECTRONIC DEVICE AND METHOD OF MANUFACTURING THE SAME, AND SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
Disclosed herein is an electronic device, including: (A) a control electrode; (B) a first electrode and a second electrode; and (C) an active layer composed of an organic semiconductor material layer provided between the first electrode and the second electrode so as to...
03/01/2012
20120049297SEMICONDUCTOR DEVICE
A gate insulating film includes an oxygen-containing insulating film and a high dielectric constant insulating film formed on the oxygen-containing insulating film and containing a first metal. The high dielectric constant insulating film further includes a second metal...
03/01/2012
20120049296Oxide Deposition by Using a Double Liner Approach for Reducing Pattern Density Dependence in Sophisticated Semiconductor Devices
A silicon dioxide material may be provided in sophisticated semiconductor devices in the form of a double liner including an undoped silicon dioxide material in combination with a high density plasma silicon dioxide, thereby providing reduced dependency on pattern densi...
03/01/2012
20120043623METHOD AND STRUCTURE FOR FORMING HIGH-K/METAL GATE EXTREMELY THIN SEMICONDUCTOR ON INSULATOR DEVICE
A semiconductor device is provided that includes a gate structure present on a substrate. The gate structure includes a gate conductor with an undercut region in sidewalls of a first portion of the gate conductor, wherein a second portion of the gate conductor is presen...
02/23/2012
20120043624ULTRA-THIN BODY TRANSISTOR AND METHOD FOR MANUFCTURING THE SAME
An ultra-thin body transistor and a method for manufacturing an ultra-thin body transistor are disclosed. The ultra-thin body transistor comprises: a semiconductor substrate; a gate structure on the semiconductor substrate; and a source region and a drain region in the ...
02/23/2012
20120043622PROGRAMMABLE FETs USING Vt-SHIFT EFFECT AND METHODS OF MANUFACTURE
Programmable field effect transistors (FETs) are provided using high-k dielectric metal gate Vt shift effect and methods of manufacturing the same. The method of controlling Vt shift in a high-k dielectric metal gate structure includes applying a current to a gate conta...
02/23/2012
20120043625Field effect transistors, methods of fabricating a carbon-insulating layer using molecular beam epitaxy and methods of fabricating a field effect transistor
Field effect transistors, methods of fabricating a carbon insulating layer using molecular beam epitaxy and methods of fabricating a field effect transistor using the same are provided, the methods of fabricating the carbon insulating layer include maintaining a substra...
02/23/2012
20120032279III-V METAL-OXIDE-SEMICONDUCTOR DEVICE
A barrier layer, hafnium oxide layer, between a III-V semiconductor layer and an lanthanum oxide layer is used to prevent interaction between the III-V semiconductor layer and the lanthanum oxide layer. Meanwhile, the high dielectric constant of the lanthanum oxide can ...
02/09/2012
20120025326SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
An interface oxide layer, a gate insulating film, and a gate electrode are sequentially provided on the upper surface of a semiconductor substrate. The gate insulating film has a first high-k film and a second high-k film. The first high-k film is provided on the interf...
02/02/2012
20120018812METHOD AND STRUCTURE FOR BALANCING POWER AND PERFORMANCE USING FLUORINE AND NITROGEN DOPED SUBSTRATES
Methods and systems evaluate an integrated circuit design for power consumption balance and performance balance, using a computerized device. Based on this process of evaluating the integrated circuit, the methods and systems can identify first sets of integrated circui...
01/26/2012
20120018816SELF-ALIGNED SILICIDATION FOR REPLACEMENT GATE PROCESS
A semiconductor device is formed with low resistivity self aligned silicide contacts with high-K/metal gates. Embodiments include postponing silicidation of a metal layer on source/drain regions in a silicon substrate until deposition of a high-K dielectric, thereby pre...
01/26/2012
20110316095Semiconductor device and manufacturing method thereof
A semiconductor device includes a silicon substrate, an SiO film, and a High-K film. The SiO film is first formed on the silicon substrate and then subjected to a nitridation process to obtain an SiON film from the SiO film. The nitridation process is performed such tha...
12/29/2011
20110309455Gate-Last Fabrication of Quarter-Gap MGHK FET
A quarter-gap p-type field effect transistor (PFET) formed by gate-last fabrication includes a gate stack formed on a silicon substrate, the gate stack including: a high-k dielectric layer located on the silicon substrate; and a gate metal layer located over the high-k ...
12/22/2011
20110309449INTERFACE-FREE METAL GATE STACK
A method of fabricating a gate stack for a transistor includes forming a high dielectric constant layer on a semiconductor layer. A metal layer is formed on the high dielectric constant layer. A silicon containing layer is formed over the metal layer. An oxidized layer ...
12/22/2011
20110298060INTERFACE STRUCTURE FOR CHANNEL MOBILITY IMPROVEMENT IN HIGH-K METAL GATE STACK
A gate stack structure for field effect transistor (FET) devices includes a nitrogen rich first dielectric layer formed over a semiconductor substrate surface; a nitrogen deficient, oxygen rich second dielectric layer formed on the nitrogen rich first dielectric layer, ...
12/08/2011
20110298062METAL GATE STRUCTURES AND METHODS FOR FORMING THEREOF
Metal gate structures and methods for forming thereof are provided herein. In some embodiments, a method for forming a metal gate structure on a substrate having a feature formed in a high k dielectric layer may include depositing a first layer within the feature atop t...
12/08/2011
20110298061STRUCTURE AND METHOD FOR REPLACEMENT GATE MOSFET WITH SELF-ALIGNED CONTACT USING SACRIFICIAL MANDREL DIELECTRIC
The present disclosure provides a method for forming a semiconductor device that includes forming a replacement gate structure overlying a channel region of a substrate. A mandrel dielectric layer is formed overlying source and drain regions of the substrate. The replac...
12/08/2011
20110291204SEMICONDUCTOR DEVICE HAVING STI WITH NITRIDE LINER AND UV LIGHT SHIELDING FILM
A semiconductor device has: a silicon substrate; trench formed downward from the surface of the silicon substrate, the trench defining active regions on the surface of the silicon substrate; a first liner layer of a silicon nitride film covering an inner wall of the tre...
12/01/2011
20110284968SEMICONDUCTOR DEVICES INCLUDING GATE STRUCTURE AND METHOD OF FABRICATING THE SAME
A semiconductor device includes a semiconductor substrate having a top surface and a recessed portion including at least two oblique side surfaces and a first bottom surface therebetween, a gate insulating layer formed on the recessed portion, a gate electrode formed on...
11/24/2011
20110272765MOSFET GATE AND SOURCE/DRAIN CONTACT METALLIZATION
A MOSFET is described incorporating a common metal process to make contact to the source, drain and the metal gate respectively which may be formed concurrently with the same metal or metals....
11/10/2011
20110266637Precise Resistor on a Semiconductor Device
A method includes forming a polysilicon layer on a substrate; and patterning the polysilicon layer to form a polysilicon resistor and a polysilicon gate. A first ion implantation is performed on the polysilicon resistor to adjust electric resistance of the polysilicon r...
11/03/2011
20110260263SEMICONDUCTOR DEVICE WITH ISOLATION TRENCH LINER
A method of manufacturing a semiconductor device is provided herein, where the width effect is reduced in the resulting semiconductor device. The method involves providing a substrate having semiconductor material, forming an isolation trench in the semiconductor materi...
10/27/2011
20110254106SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD
A semiconductor device includes a gate insulation film formed over a semiconductor substrate; a cap film formed over the gate insulation film; a silicon oxide film formed over the cap film; a metal gate electrode formed over the silicon oxide film; and source/drain diff...
10/20/2011
20110248350METHOD AND STRUCTURE FOR WORK FUNCTION ENGINEERING IN TRANSISTORS INCLUDING A HIGH DIELECTRIC CONSTANT GATE INSULATOR AND METAL GATE (HKMG)
Adjustment of a switching threshold of a field effect transistor including a gate structure including a Hi-K gate dielectric and a metal gate is achieved and switching thresholds coordinated between NFETs and PFETs by providing fixed charge materials in a thin interfaci...
10/13/2011
20110248346SEMICONDUCTOR DEVICE AND FABRICATION METHOD FOR THE SAME
The semiconductor device includes a first transistor and a second transistor formed in a semiconductor substrate. The first transistor includes: a first gate insulating film formed on the semiconductor substrate; and a first gate electrode formed on the first gate insul...
10/13/2011
20110248359SEMICONDUCTOR DEVICE HAVING METAL GATE AND MANUFACTURING METHOD THEREOF
A semiconductor device includes a semiconductor substrate, a gate dielectric layer formed on the semiconductor substrate, and at least a first conductive-type metal gate formed on the gate dielectric layer. The first conductive-type metal gate includes a filling metal l...
10/13/2011
20110241130SEMICONDUCTOR DEVICE HAVING A BLOCKING STRUCTURE AND METHOD OF MANUFACTURING THE SAME
A semiconductor device includes a blocking structure between a metal layer and at least one underlying layer. The blocking structure has a first layer configured for preventing diffusion of metal from the metal layer into the at least one underlying layer, and a second ...
10/06/2011
20110233683CHEMICAL MECHANICAL POLISHING (CMP) METHOD FOR GATE LAST PROCESS
A method for fabricating a semiconductor device is provided which includes providing a semiconductor substrate, forming a plurality of transistors, each transistor having a dummy gate structure, forming a contact etch stop layer (CESL) over the substrate including the d...
09/29/2011
20110227170MOSFET STRUCTURE AND METHOD OF FABRICATING THE SAME
There is provided a MOSFET structure and a method of fabricating the same. The method comprises: providing a semiconductor substrate; forming a dummy s gate on the semiconductor substrate; forming source/drain regions; selectively etching the dummy gate to a position wh...
09/22/2011
20110221009METHOD AND APPARATUS FOR REDUCING GATE RESISTANCE
An apparatus has a semiconductor device that includes: a semiconductor substrate having a channel region, a high-k dielectric layer disposed at least partly over the channel region, a gate electrode disposed over the dielectric layer and disposed at least partly over th...
09/15/2011
20110215425TUNNELING FIELD-EFFECT TRANSISTOR WITH DIRECT TUNNELING FOR ENHANCED TUNNELING CURRENT
Horizontal and vertical tunneling field-effect transistors (TFETs) having an abrupt junction between source and drain regions increases probability of direct tunneling of carriers (e.g., electrons and holes). The increased probability allows a higher achievable on curre...
09/08/2011
20110186912TRANSISTOR GATE ELECTRODE HAVING CONDUCTOR MATERIAL LAYER
Various embodiments of the invention relate to a PMOS device having a transistor channel of silicon germanium material on a substrate, a gate dielectric having a dielectric constant greater than that of silicon dioxide on the channel, a gate electrode conductor material...
08/04/2011
20110186934Low mismatch semiconductor device and method for fabricating same
Disclosed is a low mismatch semiconductor device that comprises a lightly doped channel region having a first conductivity type and a first dopant concentration in a semiconductor body, and a high-k metal gate stack including a gate metal layer formed over a high-k gate...
08/04/2011
20110169104METHODS AND APPARATUS OF FLUORINE PASSIVATION
The present disclosure provides methods and apparatus of fluorine passivation in IC device fabrication. In one embodiment, a method of fabricating a semiconductor device includes providing a substrate and passivating a surface of the substrate with a mixture of hydroflu...
07/14/2011
20110121409Field effect transistors, methods of fabricating a carbon-insulating layer using molecular beam epitaxy and methods of fabricating a field effect transistor
Field effect transistors, methods of fabricating a carbon insulating layer using molecular beam epitaxy and methods of fabricating a field effect transistor using the same are provided, the methods of fabricating the carbon insulating layer include maintaining a substra...
05/26/2011
20110115034TRANSISTOR
A transistor including a substrate, a gate, a semiconductor layer, a stacked insulating layer and a source and a drain is provided. The gate is disposed on the substrate. The semiconductor layer is disposed on the substrate, and a first type carrier is the main carrier ...
05/19/2011
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