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Class 257/19 - Si x Ge 1-x


Subclass of Class 257 - Active solid-state devices (e.g., transistors, solid-state diodes)
Definition: Subject matter wherein at least one of the strained superlattice
No. of applications: 130
Last issue date: 09/22/2011


1        
Application No.Application TitleIssue Date
20110227042METHOD FOR PRODUCING SEMICONDUCTOR SUBSTRATE, SEMICONDUCTOR SUBSTRATE, METHOD FOR MANUFACTURING ELECTRONIC DEVICE, AND REACTION APPARATUS
There is provided a method of producing a semiconductor wafer by thermally processing a base water having a portion to be thermally processed that is to be thermally processed. The method comprises a step of providing, on the base wafer, a portion to be heated that gene...
09/22/2011
20110186816SEMICONDUCTOR DEVICE WAFER, SEMICONDUCTOR DEVICE, DESIGN SYSTEM, MANUFACTURING METHOD AND DESIGN METHOD
A device forming thin film for forming a semiconductor device; an inhibition portion that surrounds the device forming thin film and inhibits growth of a precursor of the device forming thin film into a crystal; a sacrificial growth portion that is formed by causing the...
08/04/2011
20110108801SINGLE-CRYSTAL SEMICONDUCTOR LAYER WITH HETEROATOMIC MACRO-NETWORK
A single-crystal layer of a first semiconductor material including single-crystal nanostructures of a second semiconductor material, the nanostructures being distributed in a regular crystallographic network with a centered tetragonal prism....
05/12/2011
20110100411SEMICONDUCTOR NANOWIRE THERMOELECTRIC MATERIALS AND DEVICES, AND PROCESSES FOR PRODUCING SAME
The present invention provides nanowires and nanoribbons that are well suited for use in thermoelectric applications. The nanowires and nanoribbons are characterized by a periodic compositional longitudinal modulation. The nanowires are constructed using lithographic te...
05/05/2011
20100163842Multiple-Gate Transistors with Reverse T-Shaped Fins
A method of forming an integrated circuit structure includes forming a first insulation region and a second insulation region in a semiconductor substrate and facing each other; and forming an epitaxial semiconductor region having a reversed T-shape. The epitaxial semic...
07/01/2010
20100117059LIGHT MODULATION COMPRISING SI-GE QUANTUM WELL LAYERS
Optical modulators include active quantum well structures coherent with pseudosubstrates comprising relaxed buffer layers on a silicon substrate. In a preferred method the active structures, consisting of Si1−x Gex barrier and well layers with di...
05/13/2010
20090315076TRANSISTOR GATE ELECTRODE HAVING CONDUCTOR MATERIAL LAYER
Various embodiments of the invention relate to a PMOS device having a transistor channel of silicon germanium material on a substrate, a gate dielectric having a dielectric constant greater than that of silicon dioxide on the channel, a gate electrode conductor material...
12/24/2009
20090267052LAYER TRANSFER OF LOW DEFECT SiGe USING AN ETCH-BACK PROCESS
A method for forming strained Si or SiGe on relaxed SiGe on insulator (SGOI) or a SiGe on Si heterostructure is described incorporating growing epitaxial Si1-yGey layers on a semiconductor substrate, smoothing surfaces by Chemo-Mechanical Polishing...
10/29/2009
20090236587SEMICONDUCTOR DEVICE INCLUDING A PLURALITY OF DIFFERENT FUNCTIONAL ELEMENTS AND METHOD OF MANUFACTURING THE SAME
At least first and second Si1-xGex (0≦x≦1) layers are formed on an insulating film. At least first and second material layers are formed correspondingly to the at least first and second Si1-xGex (0≦x≦1) layers. A latti...
09/24/2009
20090173939Hybrid Wafers
A hybrid wafer comprises a single-crystal SixGe1-x layer (15), where 0≦x≦1, a high thermal conductivity layer (10), and between the single-crystal SixGe1-x layer (15) and the high thermal conductivity ...
07/09/2009
20090173933Thermal Sensor with a Silicon/Germanium Superlattice Structure
A silicon/germanium (SiGe) superlattice thermal sensor is provided with a corresponding fabrication method. The method forms an active CMOS device in a first Si substrate, and a SiGe superlattice structure on a second Si-on-insulator (SOI) substrate. The first substrate...
07/09/2009
20090134381Semiconductor device and fabrication method thereof
A semiconductor device includes a gate electrode formed on a silicon substrate via a gate insulation film in correspondence to a channel region, source and drain regions of a p-type diffusion region formed in the silicon substrate at respective outer sides of sidewall i...
05/28/2009
20090020748SI/SIGE INTERBAND TUNNELING DIODES WITH TENSILE STRAIN
Some disclosed interband tunneling diodes comprise a plurality of substantially coherently strained layers including layers selected from a group consisting of silicon, germanium, and alloys of silicon and germanium, wherein at least one of said substantially coherently...
01/22/2009
20080277647Materials and Optical Devices Based on Group IV Quantum Wells Grown on Si-Ge-Sn Buffered Silicon
A semiconductor structure including a single quantum well Ge1−x1−ySix1Sn/Ge1−x2Six2 heterostructure grown strain-free on Si(100) via a Sn1−xGex buffer layer is shown....
11/13/2008
20080276979SEMICONDUCTOR NANOWIRE THERMOELECTRIC MATERIALS AND DEVICES, AND PROCESSES FOR PRODUCING SAME
The present invention provides nanowires and nanoribbons that are well suited for use in thermoelectric applications. The nanowires and nanoribbons are characterized by a periodic longitudinal modulation, which may be a compositional modulation or a strain-induced modul...
11/13/2008
20080246019DEFECT REDUCTION BY OXIDATION OF SILICON
A method of fabricating high-quality, substantially relaxed SiGe-on-insulator substrate materials which may be used as a template for strained Si is described. A silicon-on-insulator substrate with a very thin top Si layer is used as a template for compressively straine...
10/09/2008
20080237575Silicon germanium and germanium multigate and nanowire structures for logic and multilevel memory applications
A method to provide a transistor or memory cell structure. The method comprises: providing a substrate including a lower Si substrate and an insulating layer on the substrate; providing a first projection extending above the insulating layer, the first projection includ...
10/02/2008
20080182424METHOD FOR SELECTIVELY CONTROLLING LENGTHS OF NANOWIRES
A method for selectively controlling lengths of nanowires in a substantially non-uniform array of nanowires includes establishing at least two different catalyzing nanoparticles on a substrate. A nanowire from each of the at least two different catalyzing nanoparticles ...
07/31/2008
20080142785Strain-inducing semiconductor regions
A method to form a strain-inducing semiconductor region is described. In one embodiment, formation of a strain-inducing semiconductor region laterally adjacent to a crystalline substrate results in a uniaxial strain imparted to the crystalline substrate, providing a str...
06/19/2008
20080135830SEMICONDUCTOR STRUCTURES WITH STRUCTURAL HOMOGENEITY
Semiconductor structures are formed with semiconductor layers having reduced compositional variation. Top surfaces of the semiconductor layers are substantially haze-free....
06/12/2008
20080099754METHOD FOR PROVIDING A NANOSCALE, HIGH ELECTRON MOBILITY TRANSISTOR (HEMT) ON INSULATOR
A method and resulting high electron mobility transistor comprised of a substrate and a relaxed silicon-germanium layer formed over the substrate. A dopant layer is formed within the relaxed silicon-germanium layer. The dopant layer contains carbon and/or boron and has ...
05/01/2008
20080078988Strained Si/SiGe/SOI islands and processes of making same
A process of making a strained silicon-on-insulator structure is disclosed. A recess is formed in a substrate to laterally isolate an active area. An undercutting etch forms a bubble recess under the active area to partially vertically isolate the active area. A thermal...
04/03/2008
20080078987UV-assisted dielectric formation for devices with strained germanium-containing layers
A method of forming a semiconductor device includes providing a substrate in a vacuum processing tool, the substrate having a strained Ge-containing layer on the substrate and a Si-containing layer on the strained Ge-containing layer, maintaining the substrate at a temp...
04/03/2008
20080067499Silicon/germanium superlattice thermal sensor
A silicon/germanium (SiGe) superlattice thermal sensor is provided with a corresponding fabrication method. The method forms an active CMOS device in a first Si substrate, and a SiGe superlattice structure on a second Si-on-insulator (SOI) substrate. The first substrate...
03/20/2008
20080054250Structure and methods for forming SiGe stressors
A semiconductor structure includes a semiconductor substrate; a gate stack on the semiconductor substrate; a stressor having at least a portion in the semiconductor substrate and adjacent to the gate stack, wherein the stressor comprises an impurity of a first conductiv...
03/06/2008
20080048175Semiconductor superjunction structure
Semiconductor structures and methods are provided for a semiconductor device (54-11, 54-12) employing a superjunction structure (81). The method comprises, forming (52-6) first spaced-apart regions (70-1, 70-2, ...
02/28/2008
20080042123Methods for controlling thickness uniformity of SiGe regions
An integrated circuit includes a semiconductor substrate having a first region, at least one p-type region in the semiconductor substrate having SiGe regions formed therein, and at least one n-type region in the semiconductor substrate. All SiGe regions in the first reg...
02/21/2008
20080042124Semiconductor device and method for manufacturing the same
A semiconductor device and a method for manufacturing the same are disclosed, in which an insulating layer may be formed in a strained silicon layer under source/drain regions to substantially overcome conventional problems resulting from a channel decrease in the semic...
02/21/2008
20080023692TRANSISTOR HAVING A STRAINED CHANNEL REGION INCLUDING A PERFORMANCE ENHANCING MATERIAL COMPOSITION
By forming a semiconductor alloy in a silicon-based active semiconductor region prior to the gate patterning, material characteristics of the semiconductor alloy itself may also be exploited in addition to the strain-inducing effect thereof. Consequently, device perform...
01/31/2008
20080006818STRUCTURE AND METHOD TO FORM MULTILAYER EMBEDDED STRESSORS
A multilayer embedded stressor having a graded dopant profile for use in a semiconductor structure for inducing strain on a device channel region is provided. The inventive multilayer stressor is formed within areas of a semiconductor structure in which source/drain reg...
01/10/2008
20070295953Germanium phototransistor with floating body
A floating body germanium (Ge) phototransistor and associated fabrication process are presented. The method includes: providing a silicon (Si) substrate; selectively forming an insulator layer overlying the Si substrate; forming an epitaxial Ge layer overlying the insul...
12/27/2007
20070290192Method to prevent defects on SRAM cells that incorporate selective epitaxial regions
An SRAM device and method of forming MOS transistors of the device having reduced defects associated with selective epitaxial growth in moat tip regions is discussed. The SRAM device comprises a core region and a logic region, logic transistors within the logic region o...
12/20/2007
20070262295A METHOD FOR MANIPULATION OF OXYGEN WITHIN SEMICONDUCTOR MATERIALS
Methods and electronic devices fabricated by those methods are disclosed where the method allows controlled movement of oxygen during fabrication of electronic and photonic devices, facilitated by a technique of oxygen updiffusion (OUD). The method includes fabrication ...
11/15/2007
20070262296Photodetectors employing germanium layers
A germanium-based photodetector comprises a p- (or n-type) germanium layer, an intrinsic single crystal germanium layer formed on the p- (or n-) type germanium layer, and an n- (or p-type) germanium layer formed on the intrinsic single crystal germanium layer. An electr...
11/15/2007
20070257301MULTI-GATE FET WITH MULTI-LAYER CHANNEL
The invention concerns a field-effect transistor with a drain, a source, a channel in electrical contact with the source and the drain, and at least one gate, so as to apply an electric field to the channel when each gate is polarised, where the channel has a multi-laye...
11/08/2007
20070257249SILICON/SILCION GERMANINUM/SILICON BODY DEVICE WITH EMBEDDED CARBON DOPANT
A semiconductor structure and method of manufacturing a semiconductor device, and more particularly, an NFET device. The devices includes a stress receiving layer provided over a stress inducing layer with a material at an interface there between which reduces the occur...
11/08/2007
20070241323Trench-edge-defect-free recrystallization by edge-angle-optimized solid phase epitaxy: method and applications to hybrid orientation substrates
Edge-angle-optimized solid phase epitaxy is described as a method for forming hybrid orientation substrates comprising changed-orientation Si device regions free of the trench-edge defects typically seen when trench-isolated regions of Si are recrystallized to the orien...
10/18/2007
20070228357TECHNIQUE FOR PROVIDING STRESS SOURCES IN MOS TRANSISTORS IN CLOSE PROXIMITY TO A CHANNEL REGION
A strained semiconductor material may be positioned in close proximity to the channel region of a transistor, such as an SOI transistor, while reducing or avoiding undue relaxation effects of metal silicides and extension implantations, thereby providing enhanced effici...
10/04/2007
20070215859Strained silicon with elastic edge relaxation
A thin blanket epitaxial layer of SiGe is grown on a silicon substrate to have a biaxial compressive stress in the growth plane. A thin epitaxial layer of silicon is deposited on the SiGe layer, with the SiGe layer having a thickness less than its critical thicknesses. ...
09/20/2007
20070205408Microstructure for formation of a silicon and germanium on insulator substrate of Si1-XGeX type
The microstructure is designed for formation of a silicon and germanium on insulator substrate of Si1-XfGeXf type, with Xf comprised between a first value that is not zero and 1. The microstructure is formed by stacking of a silicon on insulator su...
09/06/2007
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