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| Application No. | Application Title | Issue Date |
| 20120126115 | SPECIMEN HOLDER HAVING ALIGNMENT MARKS For the microscopy of an object or a specimen with a combination of optical microscopy and particle beam microscopy, an electrically conducting specimen carrier (1) is used which is configured for use in a particle beam microscope as well as in an optical microsc... | 05/24/2012 |
| 20110309245 | SPECIMEN PREPARATION DEVICE, AND CONTROL METHOD IN SPECIMEN PREPARATION DEVICE Separation and the like of an excised specimen from a specimen are automatically performed. Marks for improving image recognition accuracy are provided in a region that becomes an excised specimen in a specimen and a region other than said region, or in a transfer means... | 12/22/2011 |
| 20110303844 | ELECTRON MICROSCOPE, AND SPECIMEN HOLDING METHOD It is an object of the present invention to provide an electron microscope for properly applying a retarding voltage to a sample which is brought into electrical conduction. In order to accomplish the above-described object, the following e... | 12/15/2011 |
| 20110253905 | SPECIMEN HOLDER ASSEMBLY A specimen holder assembly (500) suitable for tomographic inspection of a specimen in a transmission electron microscope comprising: a body portion (501) in the form of an elongate member arranged to be removably insertable into the column of the microscop... | 10/20/2011 |
| 20110248165 | SAMPLE HOLDER PROVIDING INTERFACE TO SEMICONDUCTOR DEVICE WITH HIGH DENSITY CONNECTIONS A novel specimen holder for specimen support specimen support devices for insertion in electron microscopes. The novel specimen holder of the invention provides mechanical support for specimen support devices and as well as electrical contacts to the specimens or specim... | 10/13/2011 |
| 20110240881 | SPECIMEN HOLDER AND SPECIMEN HOLDER MOVEMENT DEVICE The present disclosure significantly reduces the waiting time from inserting a specimen holder into an electron microscope until high quality data acquisition is possible. Characterizing the present disclosure, it is a specimen holder partly made of low thermal expansio... | 10/06/2011 |
| 20110198326 | LASER PROCESSING SYSTEM, OBJECT MOUNT AND LASER PROCESSING METHOD A processing system includes a common base, an object mount configured to hold an object for inspection or processing, and at least one aperture plate provided on the object mount. The aperture plate has at least one aperture The processing system also includes a laser ... | 08/18/2011 |
| 20110198512 | CHARGED CORPUSCULAR BEAM APPARATUS An object of the invention is to provide a charged corpuscular beam apparatus which is equipped with a static elimination mechanism suitable for eliminating electric charges deposited on front and back surfaces of a specimen. To achieve the foregoing object, there is pr... | 08/18/2011 |
| 20110196223 | PROTON TOMOGRAPHY APPARATUS AND METHOD OF OPERATION THEREFOR The invention relates to a method and apparatus for charged particle tomographic imaging using a tomography system. The tomography imaging system is optionally simultaneously operational with a charged particle cancer therapy system using common elements, allows tomogra... | 08/11/2011 |
| 20110180724 | SAMPLE TRANSFER DEVICE AND SAMPLE TRANSFERRING METHOD A sample transfer device is provided which can insert to a charged particle beam apparatus a sample to be observed and analyzed under irradiation of a charged particle beam while suppressing to a minimum the time to expose the sample to the atmospheric environment. The ... | 07/28/2011 |
| 20110127427 | SPECIMEN HOLDER USED FOR MOUNTING A novel specimen holder for specimen support devices for insertion in electron microscopes. The novel specimen holder of the invention provides mechanical support for specimen support devices and as well as electrical contacts to the specimens or specimen support device... | 06/02/2011 |
| 20110017922 | VARIABLE-TILT TEM SPECIMEN HOLDER FOR CHARGED-PARTICLE BEAM INSTRUMENTS A variable-tilt specimen holder for a charged particle instrument having a tilt stage, where the tilt stage has a maximum range of tilt, a sample plate affixed to the tilt stage, and an ion-beam column having an ion-beam column axis. The variable-tilt specimen holder ha... | 01/27/2011 |
| 20100320396 | SAMPLE HOLDER FOR ELECTRON MICROSCOPE A sample holder capable of holding samples is provided which comprises a plurality of probes in contact with a sample, fine movement mechanisms for moving the plural probes, and a driver connected to the fine movement mechanisms, wherein the plural fine movement mechani... | 12/23/2010 |
| 20100305747 | METHOD AND APPARATUS FOR SAMPLE EXTRACTION AND HANDLING An improved method and apparatus for extracting and handling samples for S/TEM analysis. Preferred embodiments of the present invention make use of a micromanipulator and a hollow microprobe probe using vacuum pressure to adhere the microprobe tip to the sample. By appl... | 12/02/2010 |
| 20100270476 | REACTION FORCE TREATMENT MECHANISM, XY STAGE APPARATUS, INSPECTION APPARATUS The invention can provide a reaction force treatment mechanism used in a stage apparatus including a pedestal, a platen which supported by the pedestal through a vibration isolation unit, a mobile body which supported by the platen and moves on the platen, and an actuat... | 10/28/2010 |
| 20100264330 | CHARGED PARTICLE BEAM APPLICATION APPARATUS An apparatus capable of improving image quality by making it possible to suck specimens of different sizes electrostatically, and uniformalizing an electric field of a specimen edge portion, while suppressing increase in prime cost is provided. Specimen holding means is... | 10/21/2010 |
| 20100258432 | SPUTTERING APPARATUS, SPUTTER DEPOSITION METHOD, AND ANALYSIS APPARATUS A sputtering apparatus includes a substrate holder, a magnetic field applying unit, and target mounting table. The substrate holder includes a first stage which can mount a substrate and can rotate about a first rotating shaft, a second stage which can rotate about a se... | 10/14/2010 |
| 20100230584 | Method for setting an operating parameter of a particle beam device and a sample holder for performing the method A method for adjusting an operating parameter of a particle beam device and a sample holder, which is suitable in particular for performing the method are provided. An adjustment of an operating parameter of a particle beam device is possible without transfer of the sam... | 09/16/2010 |
| 20100230609 | SAMPLE CARRIER FOR SAMPLE HOLDER The invention relates to a composite structure of a sample carrier 20 and a sample holder 30 for use in a TEM, for example. The sample carrier is hereby separately embodied from the sample holder. Although such compositions are already known, the known com... | 09/16/2010 |
| 20100230608 | SAFE MOTION The present invention relates to an inertial slider (10) and a method for safely and controllably approach an object (2) towards a fixed object (3) for instance inside a transmission electron microscope (101). The inertial slider is controlle... | 09/16/2010 |
| 20100230592 | Sample Transfer Unit and Sample Transferring Method There is provided a mini environment type transfer unit which can efficiently transfer a sample to a critical dimension scanning electron microscope (CD-SEM) even in the case of use of a SMIF pod which can store only one photomask. In addition to a load port, a stocker ... | 09/16/2010 |
| 20100224792 | METHOD FOR CHARACTERIZING VIBRATIONAL PERFORMANCE OF CHARGED PARTICLE BEAM MICROSCOPE SYSTEM AND APPLICATION THEREOF A method of characterizing the vibrational performance of a charged particle beam microscope system having at least one encoder is disclosed. The encoder is part of a control system for controlling the speed of a stage whereupon a sample is secured for imaging. A plural... | 09/09/2010 |
| 20100181480 | CHARGED PARTICLE BEAM DEVICE According to the present invention, a charged particle beam device has an unlimitedly rotatable sample stage and an electric field control electrode for correcting electric field distortion at a sample peripheral part. A voltage is applied to a sample on the unlimitedly... | 07/22/2010 |
| 20100181495 | DEVICE AND METHOD FOR PREPARING SPECIMENS A method and a device for preparing specimens for a cryo-electron microscope are described. A carrier is fixed to a holder, sample liquid is applied to the carrier, and a blotting device for removing excess sample liquid from the carrier by means of the absorbing medium... | 07/22/2010 |
| 20100163746 | Irradiation device for material test using gamma ray from spent nuclear fuel assembly The present invention relates to an irradiation device for material test using a gamma ray radiated from a spent nuclear fuel assembly and provides the irradiation device for material test using a gamma ray radiated from a spent nuclear fuel assembly wherein an irradiat... | 07/01/2010 |
| 20100140498 | OPERATION STAGE FOR WAFER EDGE INSPECTION AND REVIEW The present invention relates to an operation stage of a charged particle beam apparatus which is employed in a scanning electron microscope for substrate (wafer) edge and backside defect inspection or defect review. However, it would be recognized that the invention ha... | 06/10/2010 |
| 20100102226 | PATTERNING DEVICE HOLDING APPARATUS AND APPLICATION THEREOF A patterning device holding apparatus includes a support platform unit with a plurality of first positioning projections and a gripper unit. The gripper unit includes a head portion and a plurality of second positioning projections disposed on the head portion, and a ro... | 04/29/2010 |
| 20100090107 | METHOD AND HANDLING APPARATUS FOR PLACING PATTERNING DEVICE ON SUPPORT MEMBER FOR CHARGED PARTICLE BEAM IMAGING A patterning device handling apparatus for use in charged particle beam imaging is disclosed. The disclosed patterning device handling apparatus comprises a first gripping member and a second gripping member. The first gripping member is equipped with a plurality of fir... | 04/15/2010 |
| 20100032581 | MICRO-GRIPPER A method is described for producing a micro-gripper, which comprises a base body and a gripping body connected integrally to the base body, which projects beyond the base body and provides a receptacle slot on a free end area in such a way that a micrometer-scale or sub... | 02/11/2010 |
| 20100025580 | GRID HOLDER FOR STEM ANALYSIS IN A CHARGED PARTICLE INSTRUMENT A grid holder for STEM analysis in a charged-particle instrument has a base jaw and a pivoting jaw. Both jaws have a substantially congruent inclined portion. The base jaw has a flat portion for mounting the holder on the sample carousel of a charged-particle instrument... | 02/04/2010 |
| 20100006771 | SPECIMAN HOLDER AND SPECIMAN HOLDER MOVEMENT DEVICE It is an object of the present invention to provide a significantly beneficial specimen holder which allows mounting one or more specimens, for example, a specimen to be examined and a standard adjustment specimen for aberration correction in one specimen holder at the ... | 01/14/2010 |
| 20090314955 | Specimen Holder, Specimen Inspection Apparatus, and Specimen Inspection Method A specimen holder is offered which can reduce the amount of chemical sprayed over a specimen consisting of cultured cells. The specimen holder has an open specimen-holding surface. At least a part of the specimen-holding surface is formed by a film and a tapering portio... | 12/24/2009 |
| 20090309043 | CHARGED PARTICLE BEAM APPARATUS AND SAMPLE HOLDING SYSTEM An object of the present invention is to obtain a charged particle beam apparatus that includes a simplified sample positioning mechanism used with an electrostatic chuck, allow the sample to be released easily when residual attraction occurs, and enable observation thr... | 12/17/2009 |
| 20090302234 | Method and Apparatus for Observing Inside Structures, and Specimen Holder An object of the invention is to provide a method and apparatus for observing inside structures and a specimen holder, wherein aging degradation of a good sample to a bad sample can be tracked in the same field of view, using the same specimen in order to determine the ... | 12/10/2009 |
| 20090283696 | Pre-Cryogenic Electron Microscope Specimen Holder A pre-cryogenic electron microscope specimen holder is disclosed. The pre-cryogenic electron microscope specimen holder includes a specimen holding member and a cryogenic energy storing member. The cryogenic energy storing member further includes a liquid gas storing tr... | 11/19/2009 |
| 20090250625 | SPECIMEN STAGE APPARATUS AND SPECIMEN STAGE POSITIONING CONTROL METHOD A specimen stage apparatus has a braking structure which can generate a braking force enough to stop a specimen stage while keeping a movable table from increasing in its weight. The specimen stage apparatus has an X guide fixed on an X base and representing a guide str... | 10/08/2009 |
| 20090242795 | Cryo-charging specimen holder for electron microscope The present invention relates to a cryo-charging specimen holder for the electron microscope, particularly to a cryo-charging specimen holder for the electron microscope to hold various biological materials. The major feature of the invention is to charge the biological... | 10/01/2009 |
| 20090242796 | SPECIMEN PRE-TREATMENT APPARATUS AND SPECIMEN HOLDER In a specimen pre-treatment apparatus, a specimen support part is screwed in a hollow column casing part while facing a specimen support end toward the same direction as an open end of the hollow column casing part. A specimen holder is arranged so that the specimen sup... | 10/01/2009 |
| 20090236540 | STAGE AND ELECTRON MICROSCOPE APPARATUS A sample stage for electron microscope according to an embodiment of the invention includes at least two actuators capable of expanding and contracting or capable of swinging for moving a target sample in a predetermined direction. With a coordination of the two actuato... | 09/24/2009 |
| 20090230320 | SCANNING PROBE APPARATUS In a scanning probe apparatus capable of always effectively canceling an inertial force to suppress vibration even in repetitive use while replacing a sample holding table or a probe, a stage for a sample or the probe includes a drive element for moving the sample holdi... | 09/17/2009 |
