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Class 250/396ML - Magnetic lens


Subclass of Class 250 - Radiant energy
No. of applications: 179
Last issue date: 05/03/2012


1          
Application No.Application TitleIssue Date
20120104252Particle-Optical Systems and Arrangements and Particle-Optical Components for such Systems and Arrangements
A particle-optical arrangement comprises a charged-particle source for generating a beam of charged particles; a multi-aperture plate arranged in a beam path of the beam of charged particles, wherein the multi-aperture plate has a plurality of apertures formed therein i...
05/03/2012
20120049064Charged Particle Apparatus
An electromagnetic compound objective lens is provided for charged particle device, especially as an objective lens of low-voltage scanning electron microscope (LVSEM), which comprises a magnetic immersion lens and an electrostatic immersion lens. The magnetic immersion...
03/01/2012
20120043472CHARGED PARTICLE BEAM ACCELERATION AND EXTRACTION METHOD AND APPARATUS USED IN CONJUNCTION WITH A CHARGED PARTICLE CANCER THERAPY SYSTEM
The invention comprises a charged particle beam acceleration and/or extraction method and apparatus used in conjunction with charged particle beam radiation therapy of cancerous tumors. Novel design features of a synchrotron are described. Particularly, turning magnets,...
02/23/2012
20120037814ELECTRIC FIELD-GUIDED PARTICLE ACCELERATOR, METHOD, AND APPLICATIONS
A charged particle accelerator having a curvilinear beam trajectory maintained solely by a laterally directed, constant electric field; requiring no magnetic field. A method for controlling the trajectory of a charged particle in an accelerator by applying only a consta...
02/16/2012
20120037813MULTI-AXIS LENS, BEAM SYSTEM MAKING USE OF THE COMPOUND LENS, AND METHOD OF MANUFACTURING THE COMPOUND LENS
A lens system for a plurality of charged particle beams comprises a lens body with a first pole piece, a second pole piece and a plurality of lens openings for the respective charged particle beams; a common excitation coil arranged around the plurality of lens openings...
02/16/2012
20120032079INSPECTION SYSTEM BY CHARGED PARTICLE BEAM AND METHOD OF MANUFACTURING DEVICES USING THE SYSTEM
An inspection apparatus by an electron beam comprises: an electron-optical device 70 having an electron-optical system for irradiating the object with a primary electron beam from an electron beam source, and a detector for detecting the secondary electron image ...
02/09/2012
20120006997ELECTRON BEAM DEVICE WITH TILTING AND DISPERSION COMPENSATION, AND METHOD OF OPERATING SAME
An electron beam device 100 includes: a beam emitter 102 for emitting a primary electron beam 101; an objective electron lens 127 for focusing the primary electron beam 101 onto a specimen 130, the objective lens defining an opt...
01/12/2012
20120001085TREATMENT PLANNING SYSTEM, DEVICE FOR CALCULATING A SCANNING PATH AND PARTICLE THERAPY SYSTEM
In a particle therapy treatment planning system for creating treatment plan data, the movement of a target (patient's affected area) is extracted from plural tomography images of the target, and the direction of scanning is determined by projecting the extracted movemen...
01/05/2012
20110309264DEVICE FOR GENERATING AN ION BEAM WITH MAGNETIC FILTER
The invention relates to a device (2) for generating an ion beam (4), comprising a support (6), an ion source (18), this ion source having a lower end (8) connected to the support (6) and an upper end (10) opposite the lo...
12/22/2011
20110309263Dual Beam System
A dual beam system includes an ion beam system and a scanning electron microscope with a magnetic objective lens. The ion beam system is adapted to operate optimally in the presence of the magnetic field from the SEM objective lens, so that the objective lens is not tur...
12/22/2011
20110297842ION BEAM IRRADIATION SYSTEM AND ION BEAM IRRADIATION METHOD
An ion beam irradiation method comprises calculating a scan voltage correction function with the maximum beam scan width depending on the measurement result of a beam current measurement device, calculating each of more than one scan voltage correction functions corresp...
12/08/2011
20110297841Generalized Focusing And Deflection Utilizing Deformed Conducting Electrodes
A charged particle focusing and deflection apparatus and system utilizing one or more (i.e. stacked) ring-shaped electrodes which are contorted or deformed to shape a multipole electric field and thereby effect multipole electric focusing and deflection. In particular t...
12/08/2011
20110291021Reflection Electron Beam Projection Lithography Using an ExB Separator
One embodiment disclosed relates to an apparatus for reflection electron beam lithography. The apparatus includes an electron source, a patterned electron reflector generator structure, a stage, a demagnifying electron lens, and an ExB separator. The ExB separator confi...
12/01/2011
20110284759METHOD FOR ADJUSTING OPTICAL AXIS OF CHARGED PARTICLE RADIATION AND CHARGED PARTICLE RADIATION DEVICE
Provided are a method for adjusting the optical axis of a charged particle beam and a device therefor, wherein an artificial criterion is quantified, and whether or not the adjustment of the axis of a charged particle beam is necessary is judged on the basis of the quan...
11/24/2011
20110284758Spherical Aberration Corrector and Method of Spherical Aberration Correction
A spherical aberration corrector and method is offered, which is easy to design and which can correct spherical aberration and even six-fold astigmatism in a charged particle beam instrument. The corrector has a first pair of multipole elements for producing a first pai...
11/24/2011
20110266455CHARGED PARTICLE BEAM EXTRACTION METHOD AND APPARATUS USED IN CONJUNCTION WITH A CHARGED PARTICLE CANCER THERAPY SYSTEM
The invention comprises a charged particle beam extraction method and apparatus used in conjunction with charged particle beam radiation therapy of cancerous tumors. The system uses a radio-frequency cavity system to induce betatron oscillation of a charged particle str...
11/03/2011
20110248179ION SOURCE
An ion source is disclosed which utilizes independently powered electrodes that are isolated with a series of insulators. The ion source comprises an anode electrode with a hollow interior, where the anode is disposed between a cathode and an anti-cathode. A magnet or e...
10/13/2011
20110240874PARTICLE BEAM IRRADIATION APPARATUS AND PARTICLE BEAM THERAPY SYSTEM
When the IMRT technology for a radiation therapy system utilizing an X-ray or the like is applied as it is to a particle beam therapy system having a conventional wobbler system, there is posed the problem that it is required to utilize two or more boluses. The objectiv...
10/06/2011
20110240875PARTICLE BEAM IRRADIATION APPARATUS AND PARTICLE BEAM THERAPY SYSTEM
The objective is to eliminate the effect of the hysteresis of a scanning electromagnet so that, in the raster scanning or the hybrid scanning, there is obtained a particle beam irradiation apparatus that realizes high-accuracy beam irradiation. There are provided a scan...
10/06/2011
20110233397RADIO-FREQUENCY-FREE HYBRID ELECTROSTATIC/MAGNETOSTATIC CELL FOR TRANSPORTING, TRAPPING, AND DISSOCIATING IONS IN MASS SPECTROMETERS
Mass spectrometry cells include one or more interleaved magnetostatic and electrostatic lenses. In some examples, the electrostatic lenses are based on electrical potentials applied to magnetostatic lens pole pieces. In other alternatives, the electrostatic lenses can i...
09/29/2011
20110218430CHARGED PARTICLE CANCER THERAPY PATIENT POSITIONING METHOD AND APPARATUS
The invention comprises a patient positioning and/or repositioning system, such as a laying, semi-vertical, or seated patient positioning, alignment, and/or control method and apparatus used in conjunction with multi-axis charged particle radiation therapy. Patient posi...
09/08/2011
20110210263Particle Beam Transport Apparatus And Method Of Transporting A Particle Beam With Small Beam Spot Size
An apparatus for transporting a charged particle beam is provided. The apparatus may include: means for scanning the charged particle beam on a target, a dipole magnet arranged upstream of the means for scanning, at least three quadrupole lenses arranged between the dip...
09/01/2011
20110210264Distributed Ion Source Acceleration Column
An ion beam system uses a separate accelerating electrode, such as a resistive tube, to accelerate the ions while maintaining a low electric field at an extended, that is, distributed ion source, thereby improving resolution. A magneto-optical trap can be used as the io...
09/01/2011
20110204250MAGNET FOR ION BEAM IRRADIATION APPARATUS EQUIPPED WITH PROTECTIVE MEMBER THAT COVERS PLURALITY OF MAGNETIC FIELD CONCENTRATING MEMBERS
A magnet used in an ion beam irradiation apparatus includes a pair of magnetic poles arranged facing each other on an inner side of the magnet across an ion beam; a plurality of magnetic field concentrating members that are arranged on each of the opposing surfaces of t...
08/25/2011
20110204249EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS
An extreme ultraviolet light generation apparatus used in combination with a laser system, the apparatus may include: a chamber provided with at least one inlet port for introducing a laser beam outputted from the laser system into the chamber; a target supply unit prov...
08/25/2011
20110186743Systems And Methods For Scanning A Beam Of Charged Particles
Systems and methods of an ion implant apparatus include an ion source for producing an ion beam along an incident beam axis. The ion implant apparatus includes a beam deflecting assembly coupled to a rotation mechanism that rotates the beam deflecting assembly about the...
08/04/2011
20110186747Systems And Methods For Scanning A Beam Of Charged Particles
Systems and methods of an ion implant apparatus include an ion source for producing an ion beam along an incident beam axis. The ion implant apparatus includes a beam deflecting assembly coupled to a rotation mechanism that rotates the beam deflecting assembly about the...
08/04/2011
20110182410CHARGED PARTICLE CANCER THERAPY BEAM PATH CONTROL METHOD AND APPARATUS
The invention comprises a charged particle beam path coupling an injector, synchrotron accelerator, beam transport system, targeting system, and/or patient interface method and apparatus. Preferably, the injector comprises: a negative ion beam source, a two phase ion so...
07/28/2011
20110180720CHARGED PARTICLE BEAM ACCELERATION METHOD AND APPARATUS AS PART OF A CHARGED PARTICLE CANCER THERAPY SYSTEM
The invention comprises a charged particle beam acceleration method and apparatus used as part of multi-axis charged particle radiation therapy of cancerous tumors. The accelerator includes a synchrotron having advances in turning magnets, edge focusing magnets, magneti...
07/28/2011
20110174985LITHOGRAPHY SYSTEM WITH LENS ROTATION
The invention relates to a charged particle based lithography system for projecting an image on a target using a plurality of charged particle beamlets for transferring said image to said target, said system comprising a charged particle column comprising:

07/21/2011

20110174984CHARGED PARTICLE BEAM EXTRACTION METHOD AND APPARATUS USED IN CONJUNCTION WITH A CHARGED PARTICLE CANCER THERAPY SYSTEM
The invention comprises a charged particle beam extraction method and apparatus used in conjunction with charged particle beam radiation therapy of cancerous tumors. The system uses a radio-frequency (RF) cavity system to induce betatron oscillation of a charged particl...
07/21/2011
20110170079RADIATION SYSTEM AND LITHOGRAPHIC APPARATUS
A radiation system is configured to generate a radiation beam. The radiation system includes a radiation source configured to generate a plasma that emits radiation and debris, and a radiation collector configured to direct collected radiation to a radiation beam emissi...
07/14/2011
20110163229HIGH THROUGHPUT SEM TOOL
A scanning charged particle beam device (100) is described. The scanning charged particle beam device includes a beam emitter (102) for emitting a primary electron beam, a first scan stage for scanning the beam over a specimen, an achromatic beam separator...
07/07/2011
20110163243PARTICLE BEAM IRRADIATION APPARATUS
There is obtained a particle beam irradiation apparatus which does not use any IF sentence (conditional expression for case classification) and can calculate a control command and enhance irradiation position precision. The particle beam irradiation apparatus is provide...
07/07/2011
20110147604PARTICLE BEAM IRRADIATION SYSTEM AND PARTICLE BEAM THERAPY SYSTEM
The objective is to eliminate the effect of the hysteresis of a scanning electromagnet so that there is obtained a particle beam irradiation system that realizes high-accuracy beam irradiation. There are provided a magnetic-field sensor that measures the magnetic field ...
06/23/2011
20110139996MULTI-AXIS MAGNETIC LENS
The present invention relates to a multi-axis magnetic lens for a charged particle beam system. The apparatus eliminates the undesired non-axisymmetric transverse magnetic field components from the magnetic field generated by a common excitation coil and leaves the desi...
06/16/2011
20110139979ISOTOPE ION MICROSCOPE METHODS AND SYSTEMS
Ion microscope methods and systems are disclosed. In general, the systems and methods involve relatively light isotopes, minority isotopes or both. In some embodiments, He-3 is used....
06/16/2011
20110139997Ion transporter, ion transport method, ion beam irradiator, and medical particle beam irradiator
To obtain high-directivity, stable, and high-intensity ion beam.

An ion beam irradiator 10 is constituted by a combination of a laser-driven ion/electron generator 20 and an ion transporter 30 and is configured to guide...

06/16/2011
20110143512METHOD FOR DUAL ENERGY IMPLANTATION FOR ULTRA-SHALLOW JUNCTION FORMATION OF MOS DEVICES
A method for forming a lightly doped drain (LDD) region in a semiconductor substrate. The method includes generating an ion beam of a selected species, and accelerating the ion beam, wherein the accelerated ion beam includes a first accelerated portion and a second acce...
06/16/2011
20110121195PARTICLE BEAM THERAPY SYSTEM AND ADJUSTMENT METHOD FOR PARTICLE BEAM THERAPY SYSTEM
The objective is to obtain a particle beam therapy system, the irradiation flexibility of which is high and that can reduce the amount of irradiation onto a normal tissue. There are provided a scanning electromagnet that performs scanning and outputting in such a way th...
05/26/2011
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