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| Application No. | Application Title | Issue Date |
| 20120049061 | Detector System for Transmission Electron Microscope In a transmission electron microscope detector system, image data is read out from the pixels and analyzed during an image acquisition period. The image acquisition process is modified depending on the results of the analysis. For example, the analyses may indicate the ... | 03/01/2012 |
| 20120049060 | Detector System for Use with Transmission Electron Microscope Spectroscopy A detector system for a transmission electron microscope includes a first detector for recording a pattern and a second detector for recording a position of a feature of the pattern. The second detector is preferably a position sensitive detector that provides accurate,... | 03/01/2012 |
| 20120049062 | PHASE CONTRAST ELECTRON MICROSCOPE A phase contrast electron microscope has an objective with a back focal plane, a first diffraction lens, which images the back focal plane of the objective magnified into a diffraction intermediate image plane, a second diffraction lens whose principal plane is mounted ... | 03/01/2012 |
| 20120032076 | METHOD FOR INSPECTING EUV RETICLE AND APPARATUS THEREOF A method of inspecting an EUV reticle is proposed, which uses an electron beam (EB) with low density and high energy to scan the surface of an EUV reticle for inspecting the EUV reticle. A step of conditioning surface charge is followed by a step of inspecting surface o... | 02/09/2012 |
| 20120032077 | Pattern measuring apparatus and pattern measuring method A pattern measurement apparatus and a pattern measurement method are capable of easily distinguishing a line pattern and a space pattern from one another, without being affected by the luminance of the pattern. The pattern measurement apparatus includes: irradiation uni... | 02/09/2012 |
| 20120019648 | ELECTRON MICROSCOPE An electron microscope according to the present invention includes: a backscattered electron detector provided with a backscattered electron detecting element (9); a low-vacuum secondary electron detector provided with a bias electrode (11) and a specimen ... | 01/26/2012 |
| 20120012747 | Contrast for Scanning Confocal Electron Microscope A scanning confocal transmission electron microscope includes a descan deflector and a corrector below the sample. The microscope uses a detector that is preferably significantly larger than the resolution of the microscope and is positioned in the real image plane, whi... | 01/19/2012 |
| 20110315876 | Blocking Member for Use in the Diffraction Plane of a TEM The invention relates to a blocking member to be placed in the diffraction plane of a TEM. It resembles the knife edge used for single sideband imaging, but blocks only electrons deflected over a small angle. As a result the Contrast Transfer Function of the TEM accordi... | 12/29/2011 |
| 20110303843 | SAMPLE OBSERVING METHOD AND SCANNING ELECTRON MICROSCOPE Provided is a sample observing method wherein the effect on throughput is minimized, and a pattern profile can be obtained at high accuracy even in a complicated LSI pattern, regardless of the scanning direction of an electron beam. In the sample observing method, the p... | 12/15/2011 |
| 20110291008 | ELECTRON MICROSCOPE SPECIMEN AND METHOD FOR PREPARING THE SAME A method for preparing an electron microscope specimen is provided. The method includes providing a wafer sample with an analysis region disposed thereon. A dicing process is performed to cut a sample piece from the wafer sample. The sample piece includes a target pilla... | 12/01/2011 |
| 20110284744 | METHOD AND SYSTEM FOR 4D TOMOGRAPHY AND ULTRAFAST SCANNING ELECTRON MICROSCOPY A 4D electron tomography system includes a stage having one or more degrees of freedom, an electron source, and electron optics operable to direct electron pulses to impinge on a sample supported on the stage. A pulse of the electron pulses impinges on the sample at a f... | 11/24/2011 |
| 20110278454 | SCANNING ELECTRON MICROSCOPE A scanning electron microscope having a charged particle beam that when in a state being irradiated toward a sample, a voltage is applied to the sample so that the charged particle beam does not reach the sample. The scanning electron microscope also detects information... | 11/17/2011 |
| 20110282021 | Apparatus and Method for Modifying Physical Properties of Nanostructure Using Focused Electron Beam, and Nano-Barcode and Serial-Junction Nanowire Fabricated Thereby According to one embodiment of the present invention, a portion of a light-emitting polymer material or a conductive polymer material can be irradiated with a focused electron beam, so that the physical properties of that portion can be modified. For this purpose, one e... | 11/17/2011 |
| 20110278451 | Simultaneous Electron Detection The invention provides multiple detectors that detect electrons that have passed through a sample. The detectors preferably detect electrons after the electrons have been passed through a prism that separates electrons according to their energies. Electrons in different... | 11/17/2011 |
| 20110278452 | PATTERN CHECK DEVICE AND PATTERN CHECK METHOD Provided is a pattern inspection apparatus including: a charge formation means which forms charge on a surface of a substrate (7) by generating an electron beam from a second electron source (20) which is different from an electron source (I) which generat... | 11/17/2011 |
| 20110272578 | CHARGED PARTICLE RADIATION DEVICE PROVIDED WITH ABERRATION CORRECTOR There is provided a charged particle radiation device provided with an aberration corrector capable of correcting aberration with high precision in a short time by automatically setting an aberration coefficient measuring condition to thereby realize measurement with hi... | 11/10/2011 |
| 20110276526 | POSITION RESOLVED MEASUREMENT APPARATUS AND A METHOD FOR ACQUIRING SPACE COORDINATES OF A QUANTUM BEAM INCIDENT THEREON The position calculation of prior art position sensitive detector systems relies on a known geometry pattern of individual electrodes and the distribution of the charge parts. A heuristic estimation is made in order to calculate an initial coordinate of irradiation. In ... | 11/10/2011 |
| 20110266439 | Method of Using a Direct Electron Detector for a TEM A method of using a direct electron detector in a TEM, in which an image with a high intensity peak, such as a diffractogram or an EELS spectrum, is imaged on said detector. As known the high intensity peak may damage the detector. To avoid this damage, the centre of th... | 11/03/2011 |
| 20110240854 | TRANSMISSION ELECTRON MICROSCOPE HAVING ELECTRON SPECTROMETER In a spectral image formed by two orthogonal axes, one of which is an axis of the amount of energy loss and the other of which is an axis of positional information, by the use of an electron spectrometer and a transmission electron microscope, distortion in the spectral... | 10/06/2011 |
| 20110233403 | INCOHERENT TRANSMISSION ELECTRON MICROSCOPY A transmission electron microscope includes an electron beam source to generate an electron beam. Beam optics are provided to converge the electron beam. An aberration corrector corrects the electron beam for at least a spherical aberration. A specimen holder is provide... | 09/29/2011 |
| 20110233402 | Phase-shifting element and particle beam device having a phase-shifting element A phase-shifting element for shifting a phase of at least a portion of a particle beam is described, as well as a particle beam device having a phase-shifting element of this type. In the phase-shifting element and the particle beam device having a phase-shifting elemen... | 09/29/2011 |
| 20110233400 | Pattern measurement apparatus and pattern measurement method A pattern measurement apparatus includes a beam intensity distribution creation unit to scan a charged particle beam over a reference pattern having edge portions formed at a right angle to create a line profile of the reference pattern and thus create a reference-beam ... | 09/29/2011 |
| 20110226950 | LINEAR MOTOR PAIR, MOVING STAGE AND ELECTRON MICROSCOPE When using a moving magnet type linear motor pair for a moving stage, the magnetic field in a space defined by the linear motor pair varies greatly in association with the movement of movable bodies. For this reason, 4N sets (N is a natural number) of magnet pairs 12... | 09/22/2011 |
| 20110226949 | Inspection System A combined inspection system for inspecting an object disposable in an object plane 19, comprises a particle-optical system, which provides a particle-optical beam path 3, and a light-optical system, which provides a light-optical beam path 5; and a... | 09/22/2011 |
| 20110220796 | METHODS AND DEVICES FOR HIGH THROUGHPUT CRYSTAL STRUCTURE ANALYSIS BY ELECTRON DIFFRACTION A method and device for electron diffraction tomography of a crystal sample, which employs scanning of the electron beam over a plurality of discrete locations of the sample, in combination with a beam scanning protocol as the beam converges at every discrete location (... | 09/15/2011 |
| 20110220791 | Ponderomotive Phase Plate For Transmission Electron Microscopes A ponderomotive phase plate system and method for controllably producing highly tunable phase contrast transfer functions in a transmission electron microscope (TEM) for high resolution and biological phase contrast imaging. The system and method includes a laser source... | 09/15/2011 |
| 20110215241 | Charged Particle Beam Detection Unit with Multi Type Detection Subunits A detection unit of a charged particle imaging system includes a multi type detection subunit in the charged particle imaging system, with the assistance of a Wien filter (also known as an E×B charged particle analyzer). The imaging system is suitable for a low beam cu... | 09/08/2011 |
| 20110209548 | ASSESSING METAL STACK INTEGRITY IN SOPHISTICATED SEMICONDUCTOR DEVICES BY MECHANICALLY STRESSING DIE CONTACTS The metallization system of complex semiconductor devices may be evaluated in terms of mechanical integrity on the basis of a measurement system and measurement procedures in which individual contact elements, such as metal pillars or solder bumps, are mechanically stim... | 09/01/2011 |
| 20110204230 | ELECTRON BEAM TYPE SUBSTRATE INSPECTING APPARATUS An electron beam type substrate inspection apparatus (1) capable of inspecting an inspection substrate (8) in a short time is provided. It includes means (11)(12) for scanning an electron beam (9) within a... | 08/25/2011 |
| 20110204229 | ELECTRON MICROCOPE WHITH INTEGRATED DETECTOR(S) An electron microscope including a vacuum chamber for containing a specimen to be analyzed, an optics column, including an electron source and a final probe forming lens, for focusing electrons emitted from the electron source, a specimen stage positioned in the vacuum ... | 08/25/2011 |
| 20110192976 | ABERRATION-CORRECTING DARK-FIELD ELECTRON MICROSCOPY A transmission electron microscope includes an electron beam source to generate an electron beam. Beam optics are provided to converge the electron beam. An aberration corrector corrects the electron beam for at least a spherical aberration. A specimen holder is provide... | 08/11/2011 |
| 20110192975 | SELECTABLE COULOMB APERTURE IN E-BEAM SYSTEM A selectable Coulomb aperture in charged particle system comprises a non-magnetic conductive plate with a plurality of holes therein. The plurality of holes has variant sizes or diameters to select different beam currents of primary beam in the charged particle system. ... | 08/11/2011 |
| 20110186735 | ELECTRON SOURCE, ELECTRON GUN, AND ELECTRON MICROSCOPE DEVICE AND ELECTRON BEAM LITHOGRAPHY DEVICE USING IT An electron source is implemented which has a lower work function of an electron emission surface, yields emitted electrons of a narrower energy bandwidth and higher current density, and lasts longer than existing Zr/O/W electron sources. Further, an electron microscope... | 08/04/2011 |
| 20110174972 | APPARATUS AND METHODS FOR CONTROLLING ELECTRON MICROSCOPE STAGES Methods and apparatus for generating an image of a specimen with a microscope (e.g., TEM) are disclosed. In one aspect, the microscope may generally include a beam generator, a stage, a detector, and an image generator. A plurality of crystal parameters, which describe ... | 07/21/2011 |
| 20110174971 | Phase contrast imaging and preparing a tem therefor New methods for phase contrast imaging in transmission electron microscopy use the imaging electron beam itself to prepare a hole-free thin film for use as an effective phase plate, in some cases eliminating the need for ex-situ fabrication of a hole and reducing requir... | 07/21/2011 |
| 20110168888 | WEAK-LENS COUPLING OF HIGH CURRENT ELECTRON SOURCES TO ELECTRON MICROSCOPE COLUMNS A dynamic transmission electron microscope (DTEM) according to one embodiment includes an electron gun positioned at a top of a column for emitting electrons; an accelerator for accelerating the electrons; a C0 lens positioned below the accelerator for focusing g... | 07/14/2011 |
| 20110155904 | Method and Apparatus for Pattern Position and Overlay Measurement Systems and methods using imaged device patterns to measure overlay between different layers in a semiconductor manufacturing process, such as a double-patterning process. Images of pattern features are acquired by scanning electron microscopy. The position of a pattern... | 06/30/2011 |
| 20110155906 | TRANSMISSION ELECTRON MICROSCOPE APPARATUS COMPRISING ELECTRON SPECTROSCOPE, SAMPLE HOLDER, SAMPLE STAGE, AND METHOD FOR ACQUIRING SPECTRAL IMAGE A transmission electron microscope apparatus, a sample holder and a sample stage and a method for acquiring spectral images as well are provided which can acquire spectral images at a time from a plurality of samples and measure highly accurate chemical shifts from elec... | 06/30/2011 |
| 20110139978 | CHARGED PARTICLE BEAM DEVICE, METHOD OF OPERATING A CHARGED PARTICLE BEAM DEVICE A charged particle beam device is provided, including a primary beam source for generating a primary charged particle beam, an objective lens for focusing the primary charged particle beam onto a specimen, and an achromatic beam separator adapted to separate the primary... | 06/16/2011 |
| 20110139986 | Electron Microscope An electron microscope has an electron beam source generating an accelerated electron beam, electromagnetic lenses for converging the electron beam, alignment coils for adjusting the optical axis of the beam transmitted through the lenses, a control unit for controlling... | 06/16/2011 |
