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| Application No. | Application Title | Issue Date |
| 20110284505 | APPARATUS AND METHOD FOR TEMPERATURE CONTROL OF A SEMICONDUCTOR SUBSTRATE SUPPORT A recirculation system of a substrate support on which a semiconductor substrate is subjected to a multistep process in a vacuum chamber, the system comprising a substrate support having at least one liquid flow passage in a base plate thereof, an inlet and an outlet in... | 11/24/2011 |
| 20110210101 | PROCESSES FOR USING A PLASMA ARC TORCH TO OPERATE UPON AN INSULATION-COATED WORKPIECE A process for using a plasma arc torch is provided that includes operating a power source of the plasma arc torch to initiate an electric arc between an electrode of the plasma arc torch and a nozzle of the plasma arc torch at a starting arc current. A flow of argon-con... | 09/01/2011 |
| 20110155703 | UNIVERSAL INPUT POWER SUPPLY UTILIZING PARALLEL POWER MODULES A universal power supply for use in a plasma arc system is disclosed. The power supply can include a plurality of power modules for providing a DC output from an AC input. Each of the power modules can include a rectifier, a converter, an inverter, an isolation transfor... | 06/30/2011 |
| 20110120980 | System and Method for Aerodynamic Flow Control A vortex generator system comprises one or more plasma streamwise vortex generators (PSVGs) or plasma wedge vortex generators (PWVGs). The PSVGs and PWVGs each comprises a first electrode and a second electrode separated by a dielectric layer. The first electrode extend... | 05/26/2011 |
| 20110088739 | HIGH EFFICIENCY THERMOELECTRIC CONVERTER A composite includes a matrix having a plurality of matrix nanoparticles and a plurality of hetero-nanoparticles dispersed in the matrix. The hetero-nanoparticles include an atom having an atomic weight larger than the atoms in the matrix nanoparticles. A thermoelectric... | 04/21/2011 |
| 20110031224 | RETRACT START PLASMA TORCH WITH REVERSIBLE COOLANT FLOW An improved plasma torch and method of starting the torch are provided. The torch may comprise a main torch body with an electrode assembly coupled to a piston therein. The piston and electrode assembly are moveable between a starting position whereby the electrode asse... | 02/10/2011 |
| 20110000896 | SYSTEM AND METHOD FOR SELECTIVELY CONTROLLING ION COMPOSITION OF ION SOURCES A method is disclosed for adjusting the composition of plasmas used in plasma doping, plasma deposition and plasma etching techniques. The disclosed method enables the plasma composition to be controlled by modifying the energy distribution of the electrons present in t... | 01/06/2011 |
| 20100308022 | METHOD AND DEVICE FOR THE PLASMA TREATMENT OF RUNNING METAL SUBSTRATES The invention relates to a method and a device for the plasma treatment of metal substrates or insulating substrates (3) running substantially continuously through a vacuum chamber having a treatment zone (2), the plasma being sustained by radiofrequency i... | 12/09/2010 |
| 20100308021 | Ground Indicating Device A device and method are provided for determining whether sufficient ground exists to perform processes such requiring the establishment of an electrical arc such arc welding or plasma cutting. The device is capable of fastening to at least one object placed in between a... | 12/09/2010 |
| 20100294744 | DUAL MODE PLASMA ARC TORCH A dual mode plasma arc torch and methods of operation thereof are provided, wherein the plasma arc torch is operable with both a high frequency power supply and a contact start power supply.... | 11/25/2010 |
| 20100163534 | ATMOSPHERIC-PLASMA PROCESSING METHOD FOR PROCESSING MATERIALS A plasma treatment method for processing a material includes a step of subjecting the material to a substantially atmospheric-pressure plasma, thereby obviating the need of providing expensive vacuum apparatus and pumping assemblies, while facilitating a continuous and ... | 07/01/2010 |
| 20100065535 | METHOD AND APPARATUS FOR GENERATING A PLASMA FIELD A method and associated apparatus for generating a plasma field, including: arranging the points of discharge of a plurality of electrodes into a plane, applying voltage to each electrode, providing at least one grounded electrode, and controlling the path between the e... | 03/18/2010 |
| 20100051594 | MICRO-ARC ALLOY CLEANING METHOD AND DEVICE A cleaning device and method utilizes an electric circuit including a power supply electrically attached through a first lead to the alloy structure and a second lead connected to a probe. A protective atmosphere is provided over the surface of the alloy that is to be c... | 03/04/2010 |
| 20100048975 | Large-volume elimination of airborne chemical and biological warfare agents by making use of a microwave plasma burner The invention is related to an apparatus made of microwave plasma burner for a large-volume elimination of toxic airborne chemical and biological warfare agents. The apparatus can purify the interior air of large volume in an isolated space such as buildings, public tra... | 02/25/2010 |
| 20100025384 | FIELD ENHANCED INDUCTIVELY COUPLED PLASMA (FE-ICP) REACTOR Embodiments of field enhanced inductively coupled plasma reactors and methods of use of same are provided herein. In some embodiments, a field enhanced inductively coupled plasma processing system may include a process chamber having a dielectric lid and a plasma source... | 02/04/2010 |
| 20090294414 | METHOD OF PLASMA LOAD IMPEDANCE TUNING FOR ENGINEERED TRANSIENTS BY SYNCHRONIZED MODULATION OF A SOURCE POWER OR BIAS POWER RF GERERATOR A method processing a workpiece in a plasma reactor chamber in which a first one of plural applied RF plasma powers is modulated in accordance with a time-varying modulation control signal corresponding to a desired process transient cycle. The method achieves a reducti... | 12/03/2009 |
| 20090277883 | PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD The present invention provides means for controlling the temperature of a semiconductor wafer rapidly and uniformly in plane during etching processing by a large quantity of input heat by use of a refrigerating system by the heat of evaporation. A ring-shaped refrigeran... | 11/12/2009 |
| 20090266799 | Method for Operating a Steam Plasma Burner and Steam Cutting Device The invention relates to a method for operation of a steam plasma burner (6), comprising a cathode (22) and an anode (24) in the form of a nozzle (23) for machining a workpiece (20), wherein during the operation a current is applied be... | 10/29/2009 |
| 20090206064 | METHOD FOR PRODUCING THERMAL ENERGY The invention relates to a method for producing thermal energy, wherein, by means of a plasma arc which is located between a cathode and an anode, light initial material that is suitable for fusion processes is put into the plasma state by supplying electric energy. Use... | 08/20/2009 |
| 20090194513 | Method and apparatus for operating traveling spark igniter at high pressure An ignition circuit and a method of operating an igniter (preferably a traveling spark igniter) in an internal combustion engine, including a high pressure engine. A high voltage is applied to electrodes of the igniter, sufficient to cause breakdown to occur between the... | 08/06/2009 |
| 20090188898 | Electrode Assemblies, Plasma Apparatuses and Systems Including Electrode Assemblies, and Methods for Generating Plasma Electrode assemblies for plasma reactors include a structure or device for constraining an arc endpoint to a selected area or region on an electrode. In some embodiments, the structure or device may comprise one or more insulating members covering a portion of an electr... | 07/30/2009 |
| 20090159573 | FOUR SURFACES COOLING BLOCK A cooling block for coupling a remote plasma source to a resistor is disclosed. As processed substrates become larger for solar panels, organic light emitting diodes, and flat panel displays, a greater amount of cleaning gas and hence, plasma from a remote plasma source... | 06/25/2009 |
| 20090078686 | PLASMA ARC IGNITION USING A UNIPOLAR PULSE A starting circuit for use with a plasma torch is provided including circuitry for initiating a pilot arc using a unipolar voltage impulse. A transformer is selectively coupled to a DC source so that an impulse is introduced using the same DC source used to maintain an ... | 03/26/2009 |
| 20090020049 | WASTE DISPOSING APPARATUS The present invention relates to a waste disposing apparatus that, rather than using incineration, uses a system wherein heat is applied to a magnetic field generated by compounded granulated ores to promote the occurrence and activation of plasma, resulting in the main... | 01/22/2009 |
| 20080286169 | Device and Method for Destroying Liquid, Powder or Gaseous Waste Using an Inductively Coupled Plasma The invention relates to a thermal destruction process for at least one organic or halogenated organic product in liquid, gaseous or powder form. The process includes
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| 20080237202 | Plasma Arc Torch Having an Electrode With Internal Passages An electrode for a plasma arc cutting torch which minimizes the deposition of high emissivity material on the nozzle, reduces electrode wear, and improves cut quality. The electrode has a body having a first end, a second end in a spaced relationship relative to the fir... | 10/02/2008 |
| 20080210670 | METHOD AND APPARATUS FOR AUTOMATIC GAS CONTROL FOR A PLASMA ARCH TORCH A method and apparatus for controlling a gas supply to a plasma arc torch uses a proportional control solenoid valve positioned adjacent the torch to manipulate the gas flow to the torch, thereby extending electrode life during arc transfer and shutdown. Swirl ring desi... | 09/04/2008 |
| 20080173621 | Plasma Assisted Oxygen Decontaminant Generator and Sprayer An atomic oxygen generator/sprayer is invented. An array of three magnetized torches running at 60 Hz is used to generate non-thermal plasma; thus, the plasma effluent has relatively low temperature (touchable) and yet contains high energy electrons (>5 eV) capable to d... | 07/24/2008 |
| 20080169272 | Method and Apparatus for Automatic Gas Control for a Plasma Arc Torch A method and apparatus for controlling a gas supply to a plasma arc torch uses a proportional control solenoid valve positioned adjacent the torch to manipulate the gas flow to the torch, thereby extending electrode life during arc transfer and shutdown. Swirl ring desi... | 07/17/2008 |
| 20080121625 | DETECTING ARC DISCHARGES To detect arc discharges occurring in a plasma, a parameter of the plasma process is determined, and after a first period of time following the detection of an arc discharge the parameter is again determined. In the event that after the first period of time no arc disch... | 05/29/2008 |
| 20080105660 | APPARATUS AND METHOD TO CONFINE PLASMA AND REDUCE FLOW RESISTANCE IN A PLASMA REACTOR An apparatus configured to confine a plasma within a processing region in a plasma processing chamber. In one embodiment, the apparatus includes a ring that has a baffle having a plurality of slots and a plurality of fingers. Each slot is configured to have a width less... | 05/08/2008 |
