Class 219/121.36 - Using plasma

Subclass of Class 219 - Electric heating
Definition: Subject matter wherein the working arc is an ionized gas
No. of applications: 38
Last issue date: 11/24/2011

Application No.	Application Title	Issue Date
20110284506	HEAT TREATMENT APPARATUS The present invention relates to a heat treatment apparatus that performs activation annealing or defect repair annealing and surface oxidization which succeed impurity doping intended to control the conductive property of a semiconductor substrate. In the present inven...	11/24/2011
20110248002	PLASMA GENERATION APPARATUS Provided is an apparatus, such as an arc mitigating device, that includes an annular body that defines a lumen and a longitudinal axis, the annular body having a body length along the longitudinal axis. An electrode can be disposed coaxially within the lumen. The electr...	10/13/2011
20110150653	Plasma Induced Flow Control of Boundary Layer at Airfoil Endwall Plasma generators (48, 49, 70, 71) in an endwall (25) of an airfoil (22) induce aerodynamic flows in directions (50) that modify streamlines (47) of the endwall boundary layer toward a streamline geometry (46) of a midspan regio...	06/23/2011
20110120980	System and Method for Aerodynamic Flow Control A vortex generator system comprises one or more plasma streamwise vortex generators (PSVGs) or plasma wedge vortex generators (PWVGs). The PSVGs and PWVGs each comprises a first electrode and a second electrode separated by a dielectric layer. The first electrode extend...	05/26/2011
20100308022	METHOD AND DEVICE FOR THE PLASMA TREATMENT OF RUNNING METAL SUBSTRATES The invention relates to a method and a device for the plasma treatment of metal substrates or insulating substrates (3) running substantially continuously through a vacuum chamber having a treatment zone (2), the plasma being sustained by radiofrequency i...	12/09/2010
20100201272	Plasma generating system having nozzle with electrical biasing The present invention provides a plasma generating system that includes: a microwave generator for generating microwave energy; a power supply connected to the microwave generator for providing power thereto; a microwave cavity; a waveguide operatively connected to the ...	08/12/2010
20100147808	CASING AND PLASMA JET SYSTEM USING THE SAME A casing is used for being rotatably disposed in a plasma jet system. The casing is rotated around a central axis. The casing comprises a main body and a plasma nozzle. The main body has a first cavity. The plasma nozzle is disposed under the main body and has a second ...	06/17/2010
20100139863	VOLTAGE NON-UNIFORMITY COMPENSATION METHOD FOR HIGH FREQUENCY PLASMA REACTOR FOR THE TREATMENT OF RECTANGULAR LARGE AREA SUBSTRATES A vacuum vessel and at least two electrodes define an internal process space. At least one power supply is connectable with the electrodes. A substrate holder holds a substrate to be treated in the internal process space. At least one of the electrodes has along a first...	06/10/2010
20100135621	MULTI-ELECTRODE SYSTEM WITH VIBRATING ELECTRODES A multi-electrode system includes a fiber holder that holds at least one optical fiber, a plurality of electrodes arranged to generate a heated field to heat the at least one optical fiber, and a vibration mechanism that causes at least one of the electrodes from the pl...	06/03/2010
20100096367	APPARATUS FOR GENERATING REMOTE PLASMA Provided is an apparatus for generating remote plasma, which can improve thin-film quality by preventing an arc at a bias electrode. The apparatus includes a radio frequency (RF) electrode installed inside an upper portion of a chamber, a bias electrode installed apart ...	04/22/2010
20100044351	Connection Between a Plasma Torch Wearing Part and a Plasma Torch Wearing Part Holder, Plasma Torch Wearing Part and Plasma Torch Wearing Part Holder Connection between a plasma torch wearing part and a plasma torch wearing part holder, plasma torch wearing part and plasma torch wearing part holder....	02/25/2010
20100018954	ENHANCED PIERCING THROUGH CURRENT PROFILING In general, the present invention provides a method of piercing a workpiece with a plasma arc torch of the type having a plasma gas flow path for directing a plasma gas through the torch and a secondary gas flow path for directing a secondary gas through the torch. The ...	01/28/2010
20090293675	METHOD AND APPARATUS OF PRODUCING NANOPARTICLES USING NEBULIZED DROPLET Methods of generating nanoparticles are described that comprises feeding nebulized droplets into a radio frequency plasma torch to generate nanoparticles, wherein the majority of the nanoparticles generated have a diameter of less than about 50 nm. These methods are use...	12/03/2009
20090283502	PLASMA PROCESSING APPARATUS AND CONTROL METHOD FOR PLASMA PROCESSING APPARATUS A unit for minimizing the problem that affects a substrate to be processed at the time of turning off a plasma is provided in a plasma processing apparatus using a magnetic field. The plasma processing apparatus comprises: a plasma-generating high-frequency power supply...	11/19/2009
20090261080	ENHANCED PLASMA FILTER A device is provided for compressing a plasma stream flowing in a plasma flow direction and maintaining the plasma stream in the compressed state. The device has a plasma compression region; a plurality of first magnets positioned around the plasma compression region fo...	10/22/2009
20090250443	PLASMA PROCESSING APPARATUS Provided is a plasma processing apparatus including a chamber, a lower electrode, an upper electrode, and a substrate sensor. The chamber is configured to provide a reaction space. The lower electrode is disposed at a lower region in the chamber to mount a substrate the...	10/08/2009
20090159571	Plasma Cutter Having High Power Density Systems and methods are provided for a torch power system having a high power density. In one embodiment, a system is provided that includes a torch power unit having a compressor and power electronics that include one or more power converters, wherein the torch power u...	06/25/2009
20090159572	Plasma Cutter Having Thermal Model for Component Protection A system is provided that includes a torch power unit. The torch power unit includes a monitor and/or control configured to determine a temperature of a component of the torch power unit based on the one or more inputs without a direct temperature measurement of the com...	06/25/2009
20090159573	FOUR SURFACES COOLING BLOCK A cooling block for coupling a remote plasma source to a resistor is disclosed. As processed substrates become larger for solar panels, organic light emitting diodes, and flat panel displays, a greater amount of cleaning gas and hence, plasma from a remote plasma source...	06/25/2009
20090134129	ABLATIVE PLASMA GUN APPARATUS AND SYSTEM An ablative plasma gun subassembly is disclosed. The subassembly includes a body, a first pair and a second pair of gun electrodes having distal ends disposed within an interior of the body, and ablative material disposed proximate the distal ends of at least one of the...	05/28/2009
20090043416	METHODS AND APPARATUS FOR EX SITU SEASONING OF ELECTRONIC DEVICE MANUFACTURING PROCESS COMPONENTS In one aspect, a method of improving the performance of an electronic device manufacturing facility is provided, including the step of reducing the number of electronic device manufacturing component seasoning steps which are performed using production equipment, whereb...	02/12/2009
20090032502	Method and apparatus for sensing the length of a lead The technology features an apparatus and a method for sensing the length of a lead that connects to a power source to a thermal processing system such as a plasma torch system. Components disposed in the thermal processing system enable the length of the lead to be sens...	02/05/2009
20080296268	Plasma generator and workpiece processing apparatus using the same Disclosed are a plasma generator and a workpiece processing apparatus, wherein an adapter 38 is attached to a distal end of each of a plurality of plasma generation nozzles 31 to convert a spot-shaped spout port of the plasma generation nozzle 31 to...	12/04/2008
20080283507	PLASMA TREATMENT APPARATUS AND METHOD OF PLASMA TREATMENT A plasma treatment apparatus and a method of plasma treatment for reducing generation of Na atoms in the case where a silica glass and the like are used for a member made of dielectric material are provided. The provided plasma treatment apparatus includes a dielectric ...	11/20/2008
20080283508	Method for Cleaning a Torch and Flame Treatment Assembly A method for cleaning a work surface (22) of a torch (10) which serves for flame treatment of objects (12), in which the cleaning of the work surface (22) is performed during operation of the torch (10) in several phases in a time succ...	11/20/2008
20080251502	CONTROLLED FUSION IN A FIELD REVERSED CONFIGURATION AND DIRECT ENERGY CONVERSION A system and apparatus for controlled fusion in a field reversed configuration (FRC) magnetic topology and conversion of fusion product energies directly to electric power. Preferably, plasma ions are magnetically confined in the FRC while plasma electrons are electrost...	10/16/2008
20080245969	Method and Apparatus for Creating a Plasma An apparatus is provided for producing a plasma for a work surface, for example to deposit material thereon. The apparatus comprises an enclosure which contains an ionizable gas, a plurality of plasma excitation devices each of which is arranged to enable microwaves to ...	10/09/2008
20080223174	METHODS AND APPARATUS FOR SPRAY FORMING, ATOMIZATION AND HEAT TRANSFER The present invention is directed to methods and apparatus that use electrostatic and/or electromagnetic fields to enhance the process of spray forming preforms or powders. The present invention also describes methods and apparatus for atomization and heat transfer with...	09/18/2008
20080173641	MICROWAVE PLASMA APPARATUS AND METHOD FOR MATERIALS PROCESSING A microwave plasma apparatus for processing a material includes a plasma chamber, a microwave radiation source, and a waveguide guiding microwave radiation from the microwave radiation source to the plasma chamber. A process gas flows through the plasma chamber and the ...	07/24/2008
20080129208	Atmospheric Processing Using Microwave-Generated Plasmas An atmospheric plasma processing system is presented. In accordance with embodiments of the present invention, an atmospheric pressure plasma microwave processing apparatus includes a processing area or chamber wherein parts are processed; at least one multi-mode microw...	06/05/2008
20080053988	Plasma generation apparatus and workpiece processing apparatus using the same Disclosed is a plasma generation apparatus, which comprises a microwave generation section adapted to generate a microwave, a gas supply section adapted to supply a gas to be plasmatized, a plasma generation nozzle which is provided with an inner electrode adapted to re...	03/06/2008
20080023448	Plasma processing apparatus capable of adjusting temperature of sample stand A plasma processing apparatus is provided which processes a sample held on a sample table arranged in a process chamber in a vacuum container by using a plasma formed in the process chamber. The plasma processing apparatus comprises: paths arranged in the sample table i...	01/31/2008
20070284343	Apparatus for treating a waste gas using plasma torch Disclosed is a waste gas treatment apparatus having a waste gas inlet for flowing a waste gas into a main combustion chamber provided in empty space inside a body, and a plasma torch configured to propagate flames against the waste gas flowing through the waste gas inle...	12/13/2007
20070284342	Plasma treatment method and apparatus A device for plasma treating a surface comprises a movable plasma generator and an actuator for moving the plasma generator. The actuator may be configured to move the plasma generator in a first direction along a path and then in a second direction along substantially ...	12/13/2007
20070272663	Microwave plasma generator The present invention discloses a microwave plasma generator which includes a chamber, a conductive inorganic substance, a trace gas and a microwave source. The conductive inorganic substance and the trace gas are housed in the chamber with an inner pressure about 0.001...	11/29/2007
20070235420	PLASMA PROCESSING APPARATUS A plasma processing apparatus performs a desired plasma processing on a target substrate by using a plasma generated from a processing gas by forming a high frequency electric field in an evacuable processing chamber having an electrode. The plasma processing apparatus ...	10/11/2007
20070221632	Plasma processing method, plasma processing apparatus and storage medium [Object] In forming micro lenses, a transcription film formed on a wafer is etched via a resist mask to thereby reduce distances between the micro lenses in a short period of time. [Constitution of the Inventio...	09/27/2007
20070210036	PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS A plasma processing is performed by using a plasma processing apparatus which includes a first electrode and a second electrode disposed relatively movable to the first electrode between which an object to be processed is disposed, and a solid dielectric material dispos...	09/13/2007

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Class 219/121.36 - Using plasma