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Class 216/37 - ETCHING AND COATING OCCUR IN THE SAME PROCESSING CHAMBER


Subclass of Class 216 - Etching a substrate: processes
Definition: Process wherein etching and coating occur in the same vessel.
No. of applications: 234
Last issue date: 05/24/2012


1            
Application No.Application TitleIssue Date
20120125577HEAT SINKING ELEMENT AND METHOD OF TREATING A HEAT SINKING ELEMENT
A heat sinking element and a method of treating a heat sinking element are provided. The heat sinking element includes a metal substrate. The metal substrate is mainly composed of aluminium. A surface of the metal substrate has a plurality of micro-nano holes and a diam...
05/24/2012
20120107556SUPERHYDROPHOBIC FILMS
Superhydrophobic films and methods of making such films are disclosed. More particularly, superhydrophobic films having durable nanostructures with high contrast ratios and various methods of producing such films are disclosed....
05/03/2012
20120107562METHODS FOR GRAPHENE-ASSISTED FABRICATION OF MICRO-AND NANOSCALE STRUCTURES AND DEVICES FEATURING THE SAME
Methods for graphene-assisted fabrication of a surface on a substrate are disclosed herein. In an exemplary method, fabricating an etched surface on a substrate includes, depositing at least one layer of graphene on the surface on the substrate, patterning the deposited...
05/03/2012
20120103935METHOD FOR IMPROVING SELF-ASSEMBLED POLYMER FEATURES
A method for processing a structure. The structure is formed and includes a substrate, a substructure having a sidewall and disposed on the substrate, a first polymer structure disposed on the substrate, and a second polymer structure disposed on the substrate such that...
05/03/2012
20120080404BLOCK COPOLYMER AND METHOD OF FORMING PATTERNS BY USING THE SAME
A method of forming patterns includes forming a layer composed of a ketene based random copolymer on a substrate, forming a block copolymer on the ketene based random copolymer layer and patterning the ketene based random copolymer layer by removing a part of the block ...
04/05/2012
20120037593METHOD AND SYSTEM FOR REMOVAL OF FILMS FROM PERIPHERAL PORTIONS OF A SUBSTRATE
A substrate processing apparatus includes an anti-reflection film processing block, a resist film processing block, and a resist cover film processing block. In the processing blocks, an anti-reflection film, a resist film, and a resist cover film are formed on a substr...
02/16/2012
20120041541IMPLANT AND METHOD FOR THE PRODUCTION THEREOF
An implant, in particular an intraluminal endoprosthesis, having an implant body (2, 4) containing an aluminum compound, preferably an aluminum alloy and/or aluminum oxide. Improved biocompatibility of the implant is achieved in that at least the part of the surf...
02/16/2012
20120037592Method for high aspect ratio patterning in a spin-on layer
A method of patterning a substrate is described. The method includes preparing a film stack on a substrate, wherein the film stack comprises a spin-on layer, and heating the spin-on layer to a cure temperature less than a thermal decomposition temperature of the spin-on...
02/16/2012
20120019122DEVICE HAVING ALIGNED CARBON NANOTUBE
A method comprising patterning a substrate to form exposed regions of the substrate sized to deter entangled growth of carbon nanotubes thereon and growing vertically aligned nanotubes on the exposed regions of the substrate....
01/26/2012
20120015195METHOD OF MAKING HEAT TREATED AND ION-BEAM ETCHED/MILLED COATED ARTICLE USING DIAMOND-LIKE CARBON (DLC) COATING AND PROTECTIVE FILM
There is provided a method of making a heat treated (HT) coated article to be used in shower door applications, window applications, or any other suitable applications where transparent coated articles are desired. For example, certain embodiments of this invention rela...
01/19/2012
20120012244TEMPORARY SUBSTRATE, TRANSFER METHOD AND PRODUCTION METHOD
The present invention relates to a method of manufacturing a temporary substrate, the temporary substrate thus produced, and a method of using the temporary substrate for transfer of a thin layer from an original substrate to a final substrate. The temporary substrate h...
01/19/2012
20120015498TEMPORARY SUBSTRATE, TRANSFER METHOD AND PRODUCTION METHOD
The present invention relates to a temporary substrate having a bonding surface prepared for receiving an additional substrate that will transfer a thin layer. This substrate includes a principal part or support and a surface layer thereon with the surface layer having ...
01/19/2012
20120015143Epitaxial substrate having nano-rugged surface and fabrication thereof
The invention provides an epitaxial substrate and fabrication thereof. The epitaxial substrate according to the invention includes a crystalline substrate. In particular, the crystalline substrate has an epitaxial surface which is nano-rugged and non-patterned. The epit...
01/19/2012
20120006785Wear Resistant Vapor Deposited Coating, Method of Coating Deposition and Applications Therefor
A low friction top coat over a multilayer metal/ceramic bondcoat provides a conductive substrate, such as a rotary tool, with wear resistance and corrosion resistance. The top coat further provides low friction and anti-stickiness as well as high compressive stress. The...
01/12/2012
20120009798STENCIL MASK PROFILE
An apparatus and method are provided which allow the low cost patterned deposition of material onto a workpiece. A stencil mask, having chamfered edges is applied to the surface of the workpiece. The material is then deposited onto the workpiece, such as by PECVD. Becau...
01/12/2012
20120004673MEDICAL MATERIAL FOR IN VIVO IMPLANTATION CONTAINING SOFTENING AGENT AND/OR MOISTURIZING AGENT, METHOD FOR CONTROLLING CONTENT OF SOFTENING AGENT AND/OR MOISTURIZING AGENT IN THE MEDICAL MATERIAL, AND METHOD FOR PRODUCING THE MEDICAL MATERIAL FOR IN VIVO IMPLANTATION
Provided are a medical material for in vivo implantation which causes no retention of an exudates in the surroundings and yet shows a flexibility; a method for controlling the content of a softening agent and/or a moisturizing agent in the medical material; and a method...
01/05/2012
20110317972Optical device, optical arrangement and optical element holder
Embodiments provide an optical device including a carrier; a light source; a receiving chamber in or on the carrier wherein the receiving chamber is configured to receive an optical element; the optical element received in the receiving chamber; a plurality of actuators...
12/29/2011
20110315658ALUMINUM OXIDE FILM REMOVER AND METHOD FOR SURFACE TREATMENT OF ALUMINUM OR ALUMINUM ALLOY
Disclosed herein is an aluminum oxide film remover for removing an oxide film on the surface of aluminum or aluminum alloy, which comprises silver ions and/or copper ions, a solubilizing agent for silver ions and/or copper ions, and a quaternary ammonium hydroxide compo...
12/29/2011
20110315659PATTERN FORMATION METHOD AND IMPRINT MATERIAL
According to one embodiment, a pattern formation method is disclosed. The method can include forming a foundation film on a patterning film. The foundation film includes a reaction initiator to produce at least one of an acid and a base. The method can include forming a...
12/29/2011
20110318525NANOWIRE FABRICATION
Techniques for making nanowires with a desired diameter are provided. The nanowires can be grown from catalytic nanoparticles, wherein the nanowires can have substantially same diameter as the catalytic nanoparticles. Since the size or the diameter of the catalytic nano...
12/29/2011
20110318930METHODS OF MANUFACTURING SEMICONDUCTOR DEVICES
A first gas for plasma etch and a second gas for plasma deposition are introduced onto a semiconductor substrate, the semiconductor substrate including a mask pattern. A flow rate of the first and second gases is periodically changed within a range of flow rates during ...
12/29/2011
20110309049TECHNIQUES FOR PLASMA PROCESSING A SUBSTRATE
Techniques for plasma processing a substrate are disclosed. In one particular exemplary embodiment, the technique may be realized with a method comprising introducing a feed gas proximate to a plasma source, where the feed gas may comprise a first and second species, wh...
12/22/2011
20110305895ARTICLES HAVING NON-FOULING SURFACES AND PROCESSES FOR PREPARING THE SAME INCLUDING PRETREATMENT OF ARTICLES
Processes are described herein for preparing medical devices and other articles having a low-fouling surface on a substrate comprising a polymeric surface. The polymeric surface material may possess a range of polymeric backbones and substituents while providing the art...
12/15/2011
20110286896Patterning Of Surfaces To Control The Storage, Mobility And Transport Of Liquids For Microfluidic Applications
Systems and methods to pattern surfaces to create regions of variable adhesive force on a superhydrophobic paper surface. By taking advantage of high surface energy sticky islands on a non-sticky superhydrophobic surface, microliter water drops can be registered or conf...
11/24/2011
20110287227METHOD FOR PRODUCING A METAL-OXIDE-COATED WORKPIECE SURFACE WITH PREDETERMINABLE HYDROPHOBIC BEHAVIOUR
It is proposed to produce a workpiece (10) with a metal-oxide-coated surface (9) with a selectable degree of hydrophobic behaviour, by the surface of a substrate material (1) being provided at least in partial regions with a microstructure (2, 3<...
11/24/2011
20110288497Nano-Scale Coatings and Related Methods Suitable for In-Vivo Use
A nano-scale device and method of manufacturing and use. The nano-scale device may be used in-vivo and may comprise a fluid path with an inlet microchannel, an outlet microchannel, and a nanochannel. The fluid path comprises bio-robust material. In certain embodiments, ...
11/24/2011
20110272382TEMPLATE MANUFACTURING METHOD, TEMPLATE INSPECTING METHOD AND INSPECTING APPARATUS, NANOIMPRINT APPARATUS, NANOIMPRINT SYSTEM, AND DEVICE MANUFACTURING METHOD
There is provided a template inspection apparatus which inspects a replica template, manufactured by an imprinting method from a master template having a depression/protrusion pattern, the template inspection apparatus including: an inspection light source part which ra...
11/10/2011
20110272381Methods Of Utilizing Block Copolymer To Form Patterns
Some embodiments include methods of forming patterns. A block copolymer film may be formed over a substrate, with the block copolymer having an intrinsic glass transition temperature (Tg,0) and a degradation temperature (Td). A temperature window m...
11/10/2011
20110269364NANO PATTERNING METHOD AND METHODS FOR FABRICATING SURFACE PLASMON COLOR FILTER AND LIQUID CRYSTAL DISPLAY DEVICE USING THE SAME
Disclosed are a nano patterning method for fabricating a surface plasmon color filter having a transmissive pattern which selectively transmits light of specific wavelengths, and methods for fabricating a surface plasmon color filter and a liquid crystal display (LCD) d...
11/03/2011
20110270168RELEASING DEVICE FOR ADMINISTERING A BIO-ACTIVE AGENT
A releasing device for administering a bio-active agent to a human, animal, or plant is described herein. The device comprises a core of a solid organic matrix, in which a bio-active agent is contained. A metallic layer surrounds the core to form an outer shell, and at ...
11/03/2011
20110253969Narrow Graphene Nanoribbons from Carbon Nanotubes
Disclosed is a method for making graphene nanoribbons (GNRs) by controlled unzipping of structures such as carbon nanotubes (CNTs) by etching (e.g., argon plasma etching) of nanotubes partly embedded in a polymer film. The GNRs have smooth edges and a narrow width distr...
10/20/2011
20110256347METHOD FOR MAKING DIAMOND COMPOSITE MATERIALS
The invention relates to a method for depositing a diamond coating onto a substrate, said method resulting in the production of a coating characterised by a novel morphology of the diamond in the form of pyramids containing submicronic grains. The method is carried out ...
10/20/2011
20110252799CONDENSER TUBE HAVING INCREASED HYDROPHOBICITY, PRODUCTION METHOD AND USE THEREOF
A condenser tube has a superhydrophobic surface. The superhydrophobic surface is produced on steam condenser tubes to achieve an improved runoff of condensation drops. These condenser tubes may be used in steam power generation. The surface of the condenser tube is text...
10/20/2011
20110240595Super-Hydrophobic Surfaces, Methods of Their Construction and Uses Therefor
This invention provides novel super-liquidphobic nanofibers and structures comprising such nanofibers, as well as methods and uses for such nanofibers....
10/06/2011
20110242219Durable Non-Wetting Coating on Fluid Ejector
A method of forming a nozzle plate of a fluid ejection device includes etching a bore in the first side of the multi-layer substrate, depositing a liner in the bore, removing a layer from a second side of the multi-layer substrate, wherein the removing exposes a closed ...
10/06/2011
20110238153ENDOPROSTHESES
Endoprostheses include an endoprosthesis wall that includes a surface layer that includes a metallic material and that defines a plurality of discrete pores. A porous material is disposed in one or more pores of the surface layer. The endoprostheses can, for example, de...
09/29/2011
20110233169TITANIUM NANO-SCALE ETCHING ON AN IMPLANT SURFACE
A method of forming an implant to be implanted into living bone is disclosed. The method comprises the act of roughening at least a portion of the implant surface to produce a microscale roughened surface. The method further comprises the act of immersing the microscale...
09/29/2011
20110236277MICROFLUID CONTROL DEVICE AND METHOD OF MANUFACTURING THE SAME
Provided are a plastic microfluid control device having a multi-step microchannel and a method of manufacturing the same. The device includes a lower substrate, and a fluid channel substrate contacting the lower substrate and having a multi-step microchannel having at l...
09/29/2011
20110226733PATTERNING PROCESS
A patterning process comprises (a) providing at least one substrate having at least one major surface; (b) providing at least one patterning composition comprising at least one functionalizing molecule that is a perfluoropolyether organosulfur compound; (c) applying the...
09/22/2011
20110229667NANOSTRUCTURED SUPERHYDROPHOBIC, SUPEROLEOPHOBIC AND/OR SUPEROMNIPHOBIC COATINGS, METHODS FOR FABRICATION, AND APPLICATIONS THEREOF
Systems, techniques and applications for nanoscale coating structures and materials that are superhydrophobic with a water contact angle greater than about 140° or 160° and/or superoleophobic with an oil contact angle greater than about 140° or 160°. The nanostructu...
09/22/2011
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