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Class 216/2 - ETCHING OF SEMICONDUCTOR MATERIAL TO PRODUCE AN ARTICLE HAVING A NONELECTRICAL FUNCTION


Subclass of Class 216 - Etching a substrate: processes
Definition: Process of etching a semiconductive precursor, substrate,
No. of applications: 167
Last issue date: 02/16/2012


1          
Application No.Application TitleIssue Date
20120037591METHOD OF FABRICATING A SCALABLE NANOPOROUS MEMBRANE FILTER
A method of fabricating a nanoporous membrane filter having a uniform array of nanopores etch-formed in a thin film structure (e.g. (100)-oriented single crystal silicon) having a predetermined thickness, by (a) using interferometric lithography to create an etch patter...
02/16/2012
20120021204STRUCTURE AND METHOD TO FORM NANOPORE
A method of fabricating a material having nanoscale pores is provided. In one embodiment, the method of fabricating a material having nanoscale pores may include providing a single crystal semiconductor. The single crystal semiconductor layer is then patterned to provid...
01/26/2012
20120002912FABRICATION TOLERANT POLARIZATION CONVERTER
The present invention provides a polarization converter, and a method for fabricating the same. The polarization converter includes a geometric shape which induces rotation of a polarization of an optical signal from a first polarization state to a second polarization s...
01/05/2012
20110281102METHOD FOR MANUFACTURING POROUS MICROSTRUCTURES, POROUS MICROSTRUCTURES MANUFACTURED ACCORDING TO THIS METHOD, AND THE USE THEREOF
A method for manufacturing porous microstructures in a silicon semiconductor substrate, porous microstructures manufactured according to this method, and the use thereof....
11/17/2011
20110279188RESONATOR USING CARBON NANO SUBSTANCE AND METHOD OF MANUFACTURING RESONATOR
A resonator and a method of manufacturing a resonator are provided. The resonator includes a sacrificial layer formed on a substrate, and a resonant structure formed on the sacrificial layer, the resonant structure comprising a carbon nano-substance layer and a silicon ...
11/17/2011
20110241189APPARATUS FOR AND METHODS OF ATTACHING HEAT SLUGS TO PACKAGE TOPS
A frame includes heat slug pads coupled together in a N×M matrix such that singulation of the heat slug pads consists of one or more passes across the frame, wherein the one or more passes are parallel. A method of attaching heat slug pads to packages includes gatherin...
10/06/2011
20110229667NANOSTRUCTURED SUPERHYDROPHOBIC, SUPEROLEOPHOBIC AND/OR SUPEROMNIPHOBIC COATINGS, METHODS FOR FABRICATION, AND APPLICATIONS THEREOF
Systems, techniques and applications for nanoscale coating structures and materials that are superhydrophobic with a water contact angle greater than about 140° or 160° and/or superoleophobic with an oil contact angle greater than about 140° or 160°. The nanostructu...
09/22/2011
20110188801SEMICONDUCTOR HOLLOW-CORE WAVEGUIDE USING PHOTONIC CRYSTAL GRATINGS
A semiconductor hollow-core waveguide using high-contrast gratings or photonic crystal claddings and a method of manufacturing the same includes providing a layered semiconductor structure; creating an etching mask pattern over the layered semiconductor structure; perfo...
08/04/2011
20110172605MICRONEEDLE, MICRONEEDLE ARRAY AND PRODUCTION METHOD THEREFOR
The present invention provides a microneedle, comprising a shaft of a monocrystalline material having at least three was which are formed by a crystal plane of the monocrystalline material; and a tip connected to an end of the shaft comprising at least three walls which...
07/14/2011
20110164237SPECTRAL PURITY FILTER, LITHOGRAPHIC APPARATUS, AND METHOD FOR MANUFACTURING A SPECTRAL PURITY FILTER
A transmissive spectral purity filter is configured to transmit extreme ultraviolet radiation. The spectral purity filter includes a filter part having a plurality of apertures configured to transmit extreme ultraviolet radiation and to suppress transmission of a second...
07/07/2011
20110135265METHOD OF FORMING WAVEGUIDE FACET AND PHOTONICS DEVICE USING THE METHOD
Provided are a method of forming a waveguide facet and a photonics device using the method. The method includes forming at least one optical device die including waveguides on a substrate, forming at least one trench in a lower surface of the substrate, and cleaving the...
06/09/2011
20110130478ORDERED POROUS MESOSTRUCTURED MATERIALS FROM NANOPARTICLE-BLOCK COPOLYMER SELF-ASSEMBLY
The invention provides mesostructured materials and methods of preparing mesostructured materials including metal-rich mesostructured nanoparticle-block copolymer hybrids, porous metal-nonmetal nanocomposite mesostructures, and ordered metal mesostructures with uniform ...
06/02/2011
20110116347SPRUNG BALANCE RESONATOR FOR A TIMEPIECE
The invention relates to a resonator (11) with a balance (13) and balance spring (15) including a balance (13) mounted on a staff (17), a balance spring (15) integral with a collet (14) and mounted on said staff. Accordin...
05/19/2011
20110103197ONE-PIECE REGULATING MEMBER AND METHOD OF MANUFACTURING THE SAME
The invention relates to a one-piece regulating member including a balance cooperating with a hairspring made in a layer of silicon-based material and including a balance spring coaxially mounted on a collet. According to the invention, the collet includes one extending...
05/05/2011
20110045582METHODS AND APPARATUS FOR INTEGRATED CELL HANDLING AND MEASUREMENTS
Method and systems that provide improved cell handling and assays in microfluidic systems and devices particularly using lateral cell trapping and methods of fabrication of the same....
02/24/2011
20110027407PROFILE CONTROL UTILIZING A RECESSED IMPRINT TEMPLATE
An imprint template is provided with a shallower field bordering the patterned region. The shallower field can be formed with additional lithography/etch steps after (or before) the formation of the features in the patterned region. The template is used to establish a t...
02/03/2011
20100296986Microscreen for filtering particles in microfluidics applications and production thereof
A microscreen and its production method for filtering particles in microfluidics applications. The microscreen includes an at least regionally p-doped Si substrate having a recess, a macroporous membrane connected to the Si substrate via n-doped regions, the recess of t...
11/25/2010
20100272387Photonic crystal circuit comprising a guided mode adapter and optical system including said circuit coupled with an optical fiber
The invention relates to a photonic crystal circuit comprising a guide produced in a photonic crystal membrane on the surface of a substrate and a mode adapter coupled to said guide, wherein the membrane includes a central point constituting the mode adapter having a se...
10/28/2010
20100227018METHOD TO FABRICATE A MOULD FOR LITHOGRAPHY BY NANO-IMPRINTING
The invention concerns a device forming an imprint mould in three dimensions and comprising at least:
    • a substrate, comp...
09/09/2010
20100143198SAMPLE SUPPORT STRUCTURE AND METHODS
A sample support structure comprising a sample support manufactured from a semiconductor material and having one or more openings therein. Methods of making and using the sample support structure....
06/10/2010
20100110840BREGUET OVERCOIL BALANCE SPRING MADE OF MICRO-MACHINABLE MATERIAL
The invention relates to a Breguet overcoil balance spring (1) that includes a hairspring (3) mounted in a single part, made of micro-machinable material, and coaxially with a collet (5). According to the invention, the balance spring has a terminal...
05/06/2010
20100112492FABRICATION OF A HIGH FILL RATIO SILICON SPATIAL LIGHT MODULATOR
A method for forming an optical deflection device includes providing a semiconductor substrate comprising an upper surface region and a plurality of drive devices within one or more portions of the semiconductor substrate. The upper surface region includes one or more p...
05/06/2010
20100067084OPTICAL SCANNING MIRROR, SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD THEREOF
A semiconductor structure provided with an insulation structure in a moving unit is manufactured easily. An optical scanning mirror (semiconductor structure) is formed by processing an SOI substrate consists of a first silicon layer, an oxide film and a second silicon l...
03/18/2010
20100025361REFLECTIVE PLANAR LIGHTWAVE CIRCUIT WAVEGUIDE
A method of making a planar lightwave circuit (PLC) waveguide capable of being integrated with a surface-mounted component is presented. The method entails etching a silicon substrate to form a slanted wall, forming a nonreflective waveguide portion on the silicon subst...
02/04/2010
20100007935Optical scanning device, retinal scanning display and manufacturing method of optical scanning device
An optical scanning device includes an oscillating mirror portion having a reflection surface, and a frame portion holding the oscillating mirror portion. The optical scanning device reflects an incident optical flux by the reflection surface so as to convert the incide...
01/14/2010
20090232449Erbium-Doped Silicon Nanocrystalline Embedded Silicon Oxide Waveguide
An erbium (Er)-doped silicon (Si) nanocrystalline embedded silicon oxide (SiOx) waveguide and associated fabrication method are presented. The method provides a bottom layer, and forms an Er-doped Si nanocrystalline embedded SiOx film waveguide overlying the bottom laye...
09/17/2009
20090224216Surface-Activation of Semiconductor Nanostructures for Biological Applications
The present invention provides means and methods for producing surface-activated semiconductor nanoparticles suitable for in vitro and in vivo applications that can fluoresce in response to light excitation. Semiconductor nanostructures can be produced by generating a p...
09/10/2009
20090020499Method to Fabricate a Redirecting Mirror in Optical Waveguide Devices
A method of fabricating a turning mirror for an optical device includes the steps of depositing on a substrate, which defines a plane in which an optical signal propagates in a propagating direction, a photoresist layer sensitive to electrons and to UV radiation. The ma...
01/22/2009
20090003754SILICON STRUCTURE AND METHOD OF MANUFACTURING THE SAME
A silicon structure includes a silicon substrate; and an on-substrate structure including a silicon compound film and formed on said silicon substrate. At least one removal section removed through anisotropic etching and at least one supporting column left through the a...
01/01/2009
20090003770VERTICAL OPTICAL COUPLING STRUCTURE
The present disclosure provides an apparatus, method of manufacturing an apparatus, and method for operation of the same. The apparatus, in one embodiment, includes an optical coupling structure disposed within a cladding region, wherein the optical coupling structure i...
01/01/2009
20080317423Embedded Channels, Embedded Waveguide And Methods Of Manufacturing And Using The Same
Waveguide(s) (130) including at least partially buried channels) (120) within substrate(s) (100) having at least one substantially planar surface (110) are disclosed. According to some embodiments at least part of the channel (120) is ...
12/25/2008
20080283487PROCESS FOR PRODUCING THREE-DIMENSIONAL PHOTONIC CRYSTAL AND THE THREE-DIMENSIONAL PHOTONIC CRYSTAL
A process for producing a three-dimensional photonic crystal comprises the steps of providing a base material having first and second faces adjoining together at a first angle; forming a first mask on the first face; forming fine holes in the base material by dry-etchin...
11/20/2008
20080245764Method for producing a device including an array of microneedles on a support, and device producible according to this method
A method for producing a device which is suitable for delivering a substance into or through the skin and includes an array of microneedles developed out of an Si semiconductor substrate, the microneedles being affixed on and/or inside a flexible support made from a pol...
10/09/2008
20080241517Aluminum-plated components of semiconductor material processing apparatuses and methods of manufacturing the components
Aluminum-plated components of semiconductor material processing apparatuses are disclosed. The components include a substrate and an optional intermediate layer formed on at least one surface of the substrate. The intermediate layer includes at least one surface. An alu...
10/02/2008
20080197106Method for manufacturing semiconical microneedles and semiconical microneedles manufacturable by this method
A method for manufacturing semiconical microneedles in an Si-semiconductor substrate and a semiconical microneedles manufacturable made by this method....
08/21/2008
20080185286METHOD FOR THINNING A SAMPLE AND SAMPLE CARRIER FOR PERFORMING SAID METHOD
The invention describes a sample carrier (3) for thinning a sample (1) taken from e.g. a semiconductor wafer. The sample carrier comprises a ridged part (5), e.g. made of e.g. copper, with an outer boundary (6), and a supporting film (4
08/07/2008
20080182424METHOD FOR SELECTIVELY CONTROLLING LENGTHS OF NANOWIRES
A method for selectively controlling lengths of nanowires in a substantially non-uniform array of nanowires includes establishing at least two different catalyzing nanoparticles on a substrate. A nanowire from each of the at least two different catalyzing nanoparticles ...
07/31/2008
20080179613Silicon Deflector on a Silicon Submount For Light Emitting Diodes
The present invention deals with a process for the manufacturing of reflecting optical barriers comprising silicon and useful in combination with light emitting devices, wherein the process comprises anisotropic wet etching of the silicon material in such a manner that ...
07/31/2008
20080131325Nanotipped device and method
A dispensing device has a cantilever comprising a plurality of thin films arranged relative to one another to define a microchannel in the cantilever and to define at least portions of a dispensing microtip proximate an end of the cantilever and communicated to the micr...
06/05/2008
20080099425New slotted guide structure
The invention relates to a method for producing a slotted guide, in which:
    • a) a layer of a material having a refractive...
05/01/2008
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