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Class 204/192.25 - Semiconductor


Subclass of Class 204 - Chemistry: electrical and wave energy
Definition: Processes wherein the material is a semiconductor.
No. of applications: 84
Last issue date: 04/05/2012


1      
Application No.Application TitleIssue Date
20120080090Transparent conductor film stack with cadmium stannate, corresponding photovoltaic device, and method of making same
Certain example embodiments relate to a transparent conductor film stack with cadmium stannate used as a front contact layer and/or a buffer layer in a photovoltaic device or the like. The cadmium stannate-based layers may be provided between the front glass substrate a...
04/05/2012
20120049183ELECTRONIC DEVICE, MANUFACTURING METHOD OF ELECTRONIC DEVICE, AND SPUTTERING TARGET
A film formation is performed using a target in which a material which is volatilized more easily than gallium when heated at 400° C. to 700° C., such as zinc, is added to gallium oxide by a sputtering method with high mass-productivity which can be applied to a large...
03/01/2012
20120048726METHODS OF SPUTTERING USING A NON-BONDED SEMICONDUCTING TARGET
A sputtering cathode is generally provided. The sputtering cathode can include a semiconducting target (e.g., a cadmium sulfide target, a cadmium tin oxide target, etc.) defining a sputtering surface and a back surface opposite to the sputtering surface. A backing plate...
03/01/2012
20120043658Semiconductor Constructions; And Methods For Providing Electrically Conductive Material Within Openings
Some embodiments include methods for depositing copper-containing material utilizing physical vapor deposition of the copper-containing material while keeping a temperature of the deposited copper-containing material at greater than 100° C. Some embodiments include met...
02/23/2012
20120025148SPUTTERING TARGET OF OXIDE SEMICONDUCTORS AND THE MANUFACTURING METHODS OF OXIDE SEMICONDUCTOR LAYERS
A technique capable of forming an oxide semiconductor target with a high quality in a low cost is provided. In a step of manufacturing zinc tin oxide (ZTO target) used in manufacturing an oxide semiconductor forming a channel layer of a thin-film transistor, by purposel...
02/02/2012
20120024366Thin film solar cell structure and fabricating method thereof
A thin film solar cell structure and the fabricating method thereof are disclosed. A passivation layer is embedded into the thin film solar cell structure to be in contact with an absorbing layer. The interface trap density of the absorbing layer is reduced by the surfa...
02/02/2012
20120003836MOVABLE GROUND RING FOR A PLASMA PROCESSING CHAMBER
A movable ground ring of a movable substrate support assembly is described. The movable ground ring is configured to fit around and provide an RF return path to a fixed ground ring of the movable substrate support assembly in an adjustable gap capacitively-coupled plasm...
01/05/2012
20110306165METHOD FOR PRODUCING a-IGZO OXIDE THIN FILM
There is provided a method for producing an a-IGZO oxide thin film by sputtering, which can control the carrier density of the film to a given value with high reproducibility. The method is an amorphous In—Ga—Zn—O based oxide thin film production method including:...
12/15/2011
20110278510Tin-Doped Indium Oxide Thin Films And Method For Making Same
The tin-doped indium oxide thin film in accordance with the present invention has a tin-doped indium oxide, yttrium ions and europium ions, wherein the yttrium ions are proportional to 0.1-10 mol % of the tin-doped indium oxide while the europium ions proportional to 0....
11/17/2011
20110256673DEPOSITION METHOD AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
An object is to provide a deposition method in which a gallium oxide film is formed by a DC sputtering method. Another object is to provide a method for manufacturing a semiconductor device using a gallium oxide film as an insulating layer such as a gate insulating laye...
10/20/2011
20110240462DEPOSITION APPARATUS AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
An object of one embodiment of the present invention is to provide a deposition apparatus for depositing an oxide semiconductor film into which impurities are not mixed. Another object is to provide a method for manufacturing a semiconductor device including an oxide se...
10/06/2011
20110212268METHOD FOR HIGH VOLUME MANUFACTURE OF ELECTROCHEMICAL CELLS USING PHYSICAL VAPOR DEPOSITION
Embodiments of the present invention relate to apparatuses and methods for fabricating electrochemical cells. One embodiment of the present invention comprises a single chamber configurable to deposit different materials on a substrate spooled between two reels. In one ...
09/01/2011
20110203916MAGNETRON-SPUTTERING FILM-FORMING APPARATUS AND MANUFACTURING METHOD FOR A SEMICONDUCTOR DEVICE
A magnetron-sputtering film-forming apparatus includes: a vacuum film-forming chamber (11); electrostatic chuck units (12) for adjusting a temperature of the substrate (14); a target (15) for causing high-frequency magnetron sputtering; power...
08/25/2011
20110198212SPUTTERING APPARATUS AND MANUFACTURING METHOD OF SEMICONDUCTOR LIGHT-EMITTING ELEMENT
A sputtering apparatus (1) includes: a chamber (10) having an inside maintained in a depressurized state to generate plasma discharge (20); a cathode (22) placed in the chamber (10) and holding a target (21); and a substrate hol...
08/18/2011
20110198213Sputtering Apparatus, Thin-Film Forming Method, and Manufacturing Method for a Field Effect Transistor
[Object] To provide a sputtering apparatus, a thin-film forming method, and a manufacturing method for a field effect transistor, which are capable of reducing damage of a base layer.

[Solving Means] The sputtering apparatus according to th...

08/18/2011
20110180763OXIDE SINTERED BODY AND SPUTTERING TARGET
An oxide sintered body includes indium oxide and gallium solid-solved therein, the oxide sintered body having an atomic ratio “Ga/(Ga+In)” of 0.001 to 0.12, containing indium and gallium in an amount of 80 atom % or more based on total metal atoms, and having an In<...
07/28/2011
20110180392SPUTTERING TARGET FOR OXIDE SEMICONDUCTOR, COMPRISING InGaO3(ZnO) CRYSTAL PHASE AND PROCESS FOR PRODUCING THE SPUTTERING TARGET
Disclosed is a sputtering target for an oxide semiconductor, comprising In, Ga, and Zn. Also disclosed are a process for producing the sputtering target, a thin film of an oxide semiconductor using a sputtering target, and a method for thin-film transistor formation. Th...
07/28/2011
20110175084THIN FILM SEMICONDUCTOR MATERIAL PRODUCED THROUGH REACTIVE SPUTTERING OF ZINC TARGET USING NITROGEN GASES
The present invention generally comprises a semiconductor film and the reactive sputtering process used to deposit the semiconductor film. The sputtering target may comprise pure zinc (i.e., 99.995 atomic percent or greater), which may be doped with aluminum (about 1 at...
07/21/2011
20110171395METHOD OF FORMING A SPUTTERING TARGET
A sputtering target, including a sputtering layer and a support structure. The sputtering layer includes an alkali-containing transition metal. The support structure includes a second material that does not negatively impact the performance of a copper indium selenide (...
07/14/2011
20110139246METHODS FOR FORMING A TRANSPARENT CONDUCTIVE OXIDE LAYER ON A SUBSTRATE
Methods of depositing a transparent conductive oxide layer on a substrate are generally disclosed. A shield of greater than about 75% by weight molybdenum can be attached to a first surface of a substrate such that the shield contacts at least about 75% of the first sur...
06/16/2011
20110132745METHOD OF FABRICATING VARIABLE RESISTANCE LAYER FOR RESISTANCE MEMORY
A method of fabricating a variable resistance layer of a resistance memory is disclosed. The method includes placing a substrate in a sputtering chamber that has a copper target and a silicon oxide (SiO2) target or has a complex target made from copper and si...
06/09/2011
20110127158MANUFACTURING METHOD OF SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE
In a copper damascene wiring process, a tantalum-based laminated film, which is used as a barrier metal film, is continuously formed in a sputtering deposition chamber. When the continuous deposition process is discontinuously applied to a number of wafers, a tantalum f...
06/02/2011
20110127157LOW IMPEDANCE PLASMA
A magnetron sputtering apparatus (100) comprising: a magnetic array arranged to create a magnetic field (103) in the vicinity of a tubular target (2) which target at least partially surrounds the magnetic array and acts as a cathode (2a
06/02/2011
20110108116P-type NiO conducting film for organic solar cell, a method for preparation of NiO conducting film, and an organic solar cell with enhanced light-to-electric energy conversion using the same
A p-type NiO conducting film for an organic solar cell, a preparation method thereof, and an organic solar cell using the same and having enhanced power conversion efficiency, are provided, wherein the NiO conducting film is fabricated by vacuum sputtering in which nick...
05/12/2011
20110100446High haze transparent contact including ion-beam treated layer for solar cells, and/or method of making the same
Certain example embodiments of this invention relate to a front transparent conductive electrode for solar cell devices (e.g., amorphous silicon or a-Si solar cell devices), and/or methods of making the same. Advantageously, certain example embodiments enable high haze ...
05/05/2011
20110067998METHOD OF MAKING AN ELECTRICALLY CONDUCTIVE CADMIUM SULFIDE SPUTTERING TARGET FOR PHOTOVOLTAIC MANUFACTURING
An electrically conductive cadmium sulfide sputtering target, the method of making the same, and the method of manufacturing a photovoltaic cell using the same....
03/24/2011
20110067997SYNTHESIS OF HIGH-PURITY BULK COPPER INDIUM GALLIUM SELENIDE MATERIALS
A method for forming a high purity, copper indium gallium selenide (CIGS) bulk material is disclosed. The method includes sealing precursor materials for forming the bulk material in a reaction vessel. The precursor materials include copper, at least one chalcogen selec...
03/24/2011
20110061724Photovoltaic Cell Module And Method Of Forming Same
A photovoltaic cell module, a photovoltaic array including at least two modules, and a method of forming the module are provided. The photovoltaic cell module includes a substrate and a tie layer disposed on the substrate. The tie layer has a depth of penetration of fro...
03/17/2011
20110062016METHOD FOR MANUFACTURING ALUMINUM-CONTAINING NITRIDE INTERMEDIATE LAYER, METHOD FOR MANUFACTURING NITRIDE LAYER, AND METHOD FOR MANUFACTURING NITRIDE SEMICONDUCTOR ELEMENT
There is provided a method for manufacturing an aluminum-containing nitride intermediate layer, a method for manufacturing a nitride layer, and a method for manufacturing a nitride semiconductor element by using the nitride layer, in which at least one of the following ...
03/17/2011
20110065236Method for maintaining a smooth surface of crystallizable material
A method for maintaining a smooth surface of crystallizable material is disclosed. First, a substrate is provided. A target material layer is then formed on the substrate, with the target material being a crystallizable material. A protecting layer is subsequently forme...
03/17/2011
20110048515PASSIVATION LAYER FOR WAFER BASED SOLAR CELLS AND METHOD OF MANUFACTURING THEREOF
A solar cell module layer stack is described. The layer stack includes a doped silicon wafer substrate, a back contact layer for the solar cell module, and a first sputtered and annealed passivation layer between the wafer substrate and the back contact layer, wherein t...
03/03/2011
20110048928METHODS TO FABRICATE NON-METAL FILMS ON SEMICONDUCTOR SUBSTRATES USING PHYSICAL VAPOR DEPOSITION
Embodiments of the invention relate generally to semiconductor device fabrication and processes, and more particularly, to methods for implementing arrangements of magnetic field generators configured to facilitate physical vapor deposition (“PVD”) and/or for contro...
03/03/2011
20110011460Chalcogenide-Based Photovoltaic Devices and Methods of Manufacturing the Same
In one example embodiment, a method includes sputtering one or more absorber layers over a substrate. In a particular embodiment, the substrate is pre-heated to a substrate temperature of at least approximately 300 degrees Celsius prior to the sputtering and during the ...
01/20/2011
20110005922Methods and Apparatus for Protecting Plasma Chamber Surfaces
A method for creating a protective layer over a surface of an object comprising aluminum and magnesium for use in a semiconductor processing system, which includes oxidizing the surface of the object using a plasma electrolytic oxidation process. The method also include...
01/13/2011
20110000541METHOD FOR DEPOSITION A FILM ONTO A SUBSTRATE
Disclosed is a method for depositing a film onto a substrate, with a sputter deposition process
    • wherein the sputter dep...
01/06/2011
20100330738Oxide semiconductor target and manufacturing method of oxide semiconductor device by using the same
An oxide semiconductor target of a ZTO (zinc tin complex oxide) type oxide semiconductor material of an appropriate (Zn/(Zn+Sn)) composition having high mobility and threshold potential stability and with less restriction in view of the cost and the resource and with le...
12/30/2010
20100304571FILM ADHESIVE FOR SEMICONDUCTOR VACUUM PROCESSING APPARATUS
A bonded assembly to reduce particle contamination in a semiconductor vacuum chamber such as a plasma processing apparatus is provided, including an elastomeric sheet adhesive bond between mating surfaces of a component and a support member to accommodate thermal stress...
12/02/2010
20100301379METHOD FOR MANUFACTURING GROUP III NITRIDE SEMICONDUCTOR, METHOD FOR MANUFACTURING GROUP III NITRIDE SEMICONDUCTOR LIGHT-EMITTING DEVICE, GROUP III NITRIDE SEMICONDUCTOR LIGHT-EMITTING DEVICE, AND LAMP
A method for manufacturing a Group III nitride semiconductor of the present invention includes a sputtering step of forming a single-crystalline Group III nitride semiconductor on a substrate by a reactive sputtering method in a chamber in which a substrate and a Ga ele...
12/02/2010
20100294364Thermal Spray For Solar Concentrator Fabrication
A solar concentrator including a substantially-transparent optical element, a reflective material disposed on a convex surface of the optical element, an insulator layer on the reflective material, a conductive material that is thermal sprayed onto the insulator layer, ...
11/25/2010
20100206719METHOD FOR MANUFACTURING SOLAR CELL
A method for manufacturing a solar cell provided with an upper electrode which functions as an electrode for extracting electric power at a light incidence side of the solar cell and includes a ZnO-based transparent conductive film, the method comprising: forming the up...
08/19/2010
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