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| Application No. | Application Title | Issue Date |
| 20120128894 | Crucible for Electron Gun Evaporation A lower crucible component 3 comprises a lower planer surface 5 sometimes supporting an upper crucible component 1, the lower planner surface 5 having an inside section 9, outer vertical wall 11, upper crown 12, inner ver... | 05/24/2012 |
| 20120107504 | EVAPORATION SYSTEM AND METHOD A deposition system is provided which is adapted for depositing a thin film onto a substrate. The deposition system includes a substrate carrier adapted for carrying the substrate and at least one tilted evaporator crucible. The at least one tilted evaporator crucible i... | 05/03/2012 |
| 20120103262 | APPARATUS OF MANUFACTURING SILICON CARBIDE SINGLE CRYSTAL A apparatus (1) for manufacturing a silicon carbide single crystal comprises a graphite crucible (10) and configured so that the upper opening (11b) of a cylindrical crucible main body (11) has been blocked with a cover member (12 | 05/03/2012 |
| 20120107218 | PRODUCTION METHOD OF SILICON CARBIDE CRYSTAL, SILICON CARBIDE CRYSTAL, AND PRODUCTION DEVICE OF SILICON CARBIDE CRYSTAL A production method of a SiC crystal includes the following steps. That is, there is prepared a production device including a crucible and a heat insulator covering an outer circumference of the crucible. A source material is placed in the crucible. A seed crystal is pl... | 05/03/2012 |
| 20120103261 | APPARATUS AND SYSTEMS FOR INTERMIXING CADMIUM SULFIDE LAYERS AND CADMIUM TELLURIDE LAYERS FOR THIN FILM PHOTOVOLTAIC DEVICES An apparatus for sequential deposition of an intermixed thin film layer and a sublimated source material on a photovoltaic (PV) module substrate is provided, along with associated processes. The process can include introducing a substrate into a deposition chamber, wher... | 05/03/2012 |
| 20120083100 | THERMALIZING GAS INJECTORS FOR GENERATING INCREASED PRECURSOR GAS, MATERIAL DEPOSITION SYSTEMS INCLUDING SUCH INJECTORS, AND RELATED METHODS Methods of depositing material on a substrate include forming a precursor gas and a byproduct from a source gas within a thermalizing gas injector. The byproduct may be reacted with a liquid reagent to form additional precursor gas, which may be injected from the therma... | 04/05/2012 |
| 20120070579 | METHOD AND APPARATUS FOR COATING GLASS SUBSTRATE A coating process for coating a surface of a glass substrate in normal air pressure, in which coating process at least one liquid starting material is atomized into droplets and the formed droplets are guided towards the surface to be coated. The formed droplets are vap... | 03/22/2012 |
| 20120070605 | SILICON CARBIDE INGOT, SILICON CARBIDE SUBSTRATE, MANUFACTURING METHOD THEREOF, CRUCIBLE, AND SEMICONDUCTOR SUBSTRATE An SiC ingot includes a bottom face having 4 sides; four side faces extending from the bottom face in a direction intersecting the direction of the bottom face; and a growth face connected with the side faces located at a side opposite to the bottom face. At least one o... | 03/22/2012 |
| 20120067287 | EVAPORATION BOAT FOR VACUUM VAPOR DEPOSITION AND VACUUM VAPOR DEPOSITION SYSTEM The present invention provides an evaporation boat, comprising: a source material container configured to contain source material and provided with an opening; a cover plate disposed, with a predetermined gap, above the opening of the source material container, wherein ... | 03/22/2012 |
| 20120071001 | VAPORIZING AND FEED APPARATUS AND VAPORIZING AND FEED METHOD A vaporizing and feed apparatus for vaporizing and feeding a solid film-forming raw material comprises a supercritical fluid feeding part for producing and feeding a supercritical fluid, a supercritical fluid adjusting part for dissolving the solid film-forming raw mate... | 03/22/2012 |
| 20120048199 | CRUCIBLE AND EVAPORATION DEPOSITION DEVICE HAVING SAME A crucible includes a body, an ejector and a drive member. The body has a receptacle for receiving coating material, and a bottom in the receptacle. The bottom has an ejector hole communicating with the receptacle. The ejector is positioned below the receptacle and rece... | 03/01/2012 |
| 20120040083 | METHOD FOR FORMING METAL OXIDE FILM, METAL OXIDE FILM, AND APPARATUS FOR FORMING METAL OXIDE FILM The present invention aims at providing a method for forming a metal oxide film which can further improve the production efficiency while maintaining low resistance of a metal oxide film formed thereby. In the method for forming a metal oxide film of the present inventi... | 02/16/2012 |
| 20120039789 | APPARATUS FOR MANUFACTURING ALUMINUM NITRIDE SINGLE CRYSTAL, METHOD FOR MANUFACTURING ALUMINUM NITRIDE SINGLE CRYSTAL, AND ALUMINUM NITRIDE SINGLE CRYSTAL Provided is a manufacturing device of an aluminum nitride single crystal including a crucible. An aluminum nitride raw material and a seed crystal are stored in an inner portion of the crucible. The seed crystal is placed so as to face the aluminum nitride raw material.... | 02/16/2012 |
| 20120040516 | METHOD AND DEVICE FOR DEPOSITING SEMICONDUCTOR FILM ON SUBSTRATE USING CLOSE-SPACED SUBLIMATION PROCESS A method and device for depositing a semiconductor film. The method includes: a) carrying a semiconductor material by a carrier gas to a crucible installed in a vacuum deposition chamber via a passage; and b) heating the crucible to sublimate the semiconductor material ... | 02/16/2012 |
| 20120040098 | CARBURETOR, CARBURETOR FOR MOCVD USING SAME, CENTER ROD FOR USE IN THE CARBURETOR OR CARBURETOR FOR MOCVD, METHOD FOR DISPERSING CARRIER GAS, AND METHOD FOR VAPORIZING CARRIER GAS Provided is a vaporizer that can efficiently cool a carrier gas, improve the effect of preventing a material from being clogged near the outlet port of a gas passage, contribute to prolonging the timing of maintenance and improving operating efficiency, and exert more u... | 02/16/2012 |
| 20120034378 | Delivery device and method of use thereof A delivery device comprises an inlet port and an outlet port. The delivery device comprises an inlet chamber and an outlet chamber, with the outlet chamber being opposedly disposed to the inlet chamber and in fluid communication with the inlet chamber via a conical sect... | 02/09/2012 |
| 20120024232 | EVAPORATION SOURCE FOR ORGANIC MATERIAL AND VAPOR DEPOSITING APPARATUS INCLUDING THE SAME The present invention described technology relates generally to an organic material evaporation source that can deposit an organic material on a large-sized substrate, and a vapor deposition apparatus including the same. An organic material evaporation source according ... | 02/02/2012 |
| 20120028408 | DISTRIBUTOR HEATER A vapor distributor assembly may include a carbon fiber heating element.... | 02/02/2012 |
| 20120028393 | VAPOR DEPOSITION APPARATUS AND PROCESS FOR CONTINUOUS DEPOSITION OF A DOPED THIN FILM LAYER ON A SUBSTRATE An apparatus and related process are provided for vapor deposition of a sublimated source material as a doped thin film on a photovoltaic (PV) module substrate. A receptacle is disposed within a vacuum head chamber and is configured for receipt of a source material supp... | 02/02/2012 |
| 20120027921 | VAPOR DEPOSITION APPARATUS AND PROCESS FOR CONTINUOUS DEPOSITION OF A THIN FILM LAYER ON A SUBSTRATE An apparatus and process for vapor deposition of a sublimated source material as a thin film on a photovoltaic module substrate are provided. The apparatus includes at least one receptacle disposed in a deposition head. Each receptacle is configured for receipt of a gra... | 02/02/2012 |
| 20120021126 | Vacuum Vapor Coating Device for Coating a Substrate A vacuum vapor coating device for coating a substrate with a coating material, the vacuum vapor coating device comprising a chamber (1) into which vacuum can be created, the chamber (1) comprises: at least one support (3) for receiving the substrate... | 01/26/2012 |
| 20110315078 | COATING SYSTEM A coating system includes a housing, a coating umbrella, a lift driver, a target material source, and a control device. The housing includes a ceiling and a floor. The coating umbrella is configured for receiving a number of workpieces and is suspended from the ceiling.... | 12/29/2011 |
| 20110318505 | METHOD FOR FORMING TANTALUM NITRIDE FILM AND FILM-FORMING APPARATUS FOR FORMING THE SAME A method for forming a tantalum nitride film, which comprises supplying a gaseous nitrogen atom-containing compound, as a reactant gas and supplying gaseous t-amylimido-tris-(dimethylamide)tantalum, as a gaseous raw material, to the surface of the substrate S to thus fo... | 12/29/2011 |
| 20110308449 | CRUCIBLE FOR PRODUCING SINGLE-CRYSTAL SILICON CARBIDE, AND PRODUCTION APPARATUS AND PRODUCTION METHOD FOR PRODUCING SINGLE-CRYSTAL SILICON CARBIDE The present invention, which provides a crucible for producing single-crystal silicon carbide, and a production apparatus and a production method for single-crystal silicon carbide, which are capable of stably growing a single-crystal silicon carbide ingot good in cryst... | 12/22/2011 |
| 20110306187 | METHOD AND APPARATUS FOR SILICON REFINEMENT A method and respect material for the production of chlorosilanes (primarily: trichlorosilane) and the deposition of high purity poly-silicon from these chlorosilanes. The source for the chlorosilane production consists of eutectic or hypo-eutectic copper-silicon, the c... | 12/15/2011 |
| 20110303153 | DEVICE AND METHOD FOR FABRICATING THIN FILMS BY REACTIVE EVAPORATION A device for fabricating thin films on a substrate includes a vacuum chamber, a rotatable platen configured to hold one or more substrates within the vacuum chamber, and a housing disposed within the vacuum chamber. The housing contains a heating element and is configur... | 12/15/2011 |
| 20110306217 | THIN FILM FORMING APPARATUS AND METHOD According to one embodiment, the thin film forming apparatus includes a boat capable of holding two wafers, in each of which a cutout portion is provided in an outer peripheral edge portion, in a groove portion for holding a wafer in a state where back surfaces face eac... | 12/15/2011 |
| 20110300695 | METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSING APPARATUS A method of manufacturing a semiconductor device includes the steps of loading a substrate into a processing chamber; processing the substrate by supplying plural kinds of reaction substances into the processing chamber multiple number of times; and unloading the proces... | 12/08/2011 |
| 20110298099 | SILICON DIOXIDE LAYER DEPOSITED WITH BDEAS A silicon dioxide layer is deposited onto a substrate using a process gas comprising BDEAS and an oxygen-containing gas such as ozone. The silicon dioxide layer can be part of an etch-resistant stack that includes a resist layer. In another version, the silicon dioxide ... | 12/08/2011 |
| 20110275196 | Thermal Evaporation Sources with Separate Crucible for Holding the Evaporant Material One aspect of the invention comprises a thermal evaporation source comprising an evaporant chamber, a heater for providing heat to the evaporation chamber; and a crucible in thermal communication with the evaporation chamber for containing a volume of evaporant. The eva... | 11/10/2011 |
| 20110265709 | Nitride Semiconductor Crystal Manufacturing Method, Nitride Semiconductor Crystal, and Nitride Semiconductor Crystal Manufacturing Apparatus Nitride semiconductor crystal manufacturing method according to which the following steps are carried out. To begin with, a crucible (101) for interiorly carrying source material (17) is prepared. Within the crucible (101), heating of the source mat... | 11/03/2011 |
| 20110247562 | Vaporizing Material at a Uniform Rate A method of vaporizing material at a uniform rate for forming a layer on a substrate includes feeding a column of vaporizable material from a temperature controlled region maintained below the vaporizable material's effective vaporization temperature to a source of vapo... | 10/13/2011 |
| 20110239941 | EVAPORATION APPARATUS Provided is an evaporation apparatus which reduces deformation of a mask, improves adhesion between a substrate and an evaporation mask, and improves accuracy of dividing a region on which a film is to be formed and a region on which the film is not to be formed. The ev... | 10/06/2011 |
| 20110226182 | CRUCIBLE, CRYSTAL PRODUCTION DEVICE, AND HOLDER A crucible includes a body portion having a hollow inner portion, and a projection portion connected to an inner circumferential surface of the body portion and projecting toward the inner portion. The projection portion has a side surface provided with a thread. A hold... | 09/22/2011 |
| 20110217224 | SILICON CARBIDE CRYSTAL, METHOD OF MANUFACTURING THE SAME, APPARATUS FOR MANUFACTURING THE SAME, AND CRUCIBLE A method of manufacturing SiC crystal includes the following steps. A manufacturing apparatus including a crucible having a main body portion and a heat insulating material covering the main body portion is prepared. In the main body portion, seed crystal is arranged op... | 09/08/2011 |
| 20110214606 | APPARATUS AND METHOD FOR PRODUCING SILICON CARBIDE SINGLE CRYSTAL A crucible includes: a crucible body configured to hold the sublimation raw material; a lid configured to close an opening of the crucible body and provided with a mounting portion configured to support the seed crystal; and a guide member extending toward a sublimation... | 09/08/2011 |
| 20110206865 | METHOD OF AND APPARATUS UTILIZING CARBON CORD FOR EVAPORATION OF METALS A high temperature evaporator is made using an electrically insulating crucible and a heating element made of woven graphite fibers. The crucible is manufactured out of an electrically insulating block to the required shape, and channels are machined on the walls of the... | 08/25/2011 |
| 20110204385 | Vapor Deposition of a Layer A method of depositing a layer onto a substrate, comprising heating an evaporator to a temperature capable of completely evaporating the evaporant to be deposited, dispensing into the evaporator one or more quantized units of the evaporant where the evaporant is complet... | 08/25/2011 |
| 20110206841 | METHOD AND DEVICE FOR CONDITIONING PAPER Method for conditioning paper, which comprises a first step of cooling and one of applying a liquid to the paper. In the cooling step, the temperature of the paper is reduced, e.g. below ambient temperature or below the dew point of a liquid-saturated gas mass applied i... | 08/25/2011 |
| 20110197816 | METHOD FOR VAPORIZING LIQUID MATERIAL CAPABLE OF VAPORIZING LIQUID MATERIAL AT LOW TEMPERATURE AND VAPORIZER USING THE SAME A vaporizer is provided with a vaporizing chamber heated by heaters; a primary filter positioned in a bottom end portion of the vaporizing chamber and heated by the heater; a liquid material supply portion for dropping down a flow-controlled liquid material from upper p... | 08/18/2011 |
