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| Application No. | Application Title | Issue Date |
| 20120045588 | DEPOSITION SYSTEM WITH A ROTATING DRUM A deposition method comprises flowing a first gas into a metallization zone maintained at a first pressure. A second gas flows into a reaction zone maintained at a second pressure. The second pressure is less than the first pressure. A rotating drum includes at least on... | 02/23/2012 |
| 20120028390 | THIN FILM DEPOSITION APPARATUS AND METHOD OF MANUFACTURING ORGANIC LIGHT-EMITTING DISPLAY DEVICE WITH THE SAME A thin film deposition apparatus that may prevent a patterning slit sheet from sagging and increase a tensile force of the patterning slit sheet, and a method of manufacturing an organic light-emitting display device using the same.... | 02/02/2012 |
| 20110297087 | VACUUM METALLIZATION DEVICE WITH MEANS TO CREATE METAL-FREE AREAS A system for vacuum deposition of a coating on a web material (N), includes: a feed path of the web material in a vacuum environment; along the feed path, a process roller (19) around which the web material is guided; associated with the process roller, at least ... | 12/08/2011 |
| 20110263107 | METHOD OF FORMING POLYCRYSTALLINE SILICON LAYER AND ATOMIC LAYER DEPOSITION APPARATUS USED FOR THE SAME A method of forming a polycrystalline silicon layer and an atomic layer deposition apparatus used for the same. The method includes forming an amorphous silicon layer on a substrate, exposing the substrate having the amorphous silicon layer to a hydrophilic or hydrophob... | 10/27/2011 |
| 20110256654 | DOUBLE-SIDED REUSABLE TEMPLATE FOR FABRICATION OF SEMICONDUCTOR SUBSTRATES FOR PHOTOVOLTAIC CELL AND MICROELECTRONICS DEVICE MANUFACTURING This disclosure presents manufacturing methods and apparatus designs for making TFSSs from both sides of a re-usable semiconductor template, thus effectively increasing the substrate manufacturing throughput and reducing the substrate manufacturing cost. This approach a... | 10/20/2011 |
| 20110244693 | COMPONENT FOR SEMICONDUCTOR PROCESSING APPARATUS AND MANUFACTURING METHOD THEREOF A component for a semiconductor processing apparatus includes a matrix defining a shape of the component, and a protection film covering a predetermined surface of the matrix. The protection film consists essentially of an amorphous oxide of a first element selected fro... | 10/06/2011 |
| 20110230010 | SYSTEM AND METHOD FOR FABRICATING PHOTOVOLTAIC CELLS A substrate processing system includes a source unit configured to supply a deposition material to a substrate, a substrate holder configured to hold a substrate to receive the deposition material, a shadow mask comprising a frame that includes two opposing arms; and a ... | 09/22/2011 |
| 20110217802 | Fabrication System and Manufacturing Method of Light Emitting Device The present invention provides a vapor deposition method and a vapor deposition system of film formation systems by which EL materials can be used more efficiently and EL materials having superior uniformity with high throughput rate are formed. According to the present... | 09/08/2011 |
| 20110186820 | THIN FILM DEPOSITION APPARATUS, METHOD OF MANUFACTURING ORGANIC LIGHT-EMITTING DISPLAY DEVICE BY USING THE APPARATUS, AND ORGANIC LIGHT-EMITTING DISPLAY DEVICE MANUFACTURED BY USING THE METHOD A thin film deposition apparatus, a method of manufacturing an organic light-emitting display device by using the thin film deposition apparatus, and an organic light-emitting display device manufactured using the method. In the thin film deposition apparatus for formin... | 08/04/2011 |
| 20110168986 | THIN FILM DEPOSITION APPARATUS, METHOD OF MANUFACTURING ORGANIC LIGHT-EMITTING DISPLAY DEVICE BY USING THE APPARATUS, AND ORGANIC LIGHT-EMITTING DISPLAY DEVICE MANUFACTURED BY USING THE METHOD A thin film deposition apparatus, a method of manufacturing an organic light-emitting display device by using the thin film deposition apparatus, and an organic light-emitting display device manufactured by using the method. The thin film deposition apparatus includes: ... | 07/14/2011 |
| 20110165327 | THIN FILM DEPOSITION APPARATUS A thin film deposition apparatus that can be simply applied to produce large-sized display devices on a mass scale and that improves manufacturing yield. The thin film deposition apparatus includes a deposition source that discharges a deposition material; a deposition ... | 07/07/2011 |
| 20110129595 | Deposition source, deposition apparatus having the same, and method of forming thin film A deposition source includes a first deposition source section, the first deposition source section being configured to store a deposition material, a second deposition source section, the second deposition source section being separate from the first deposition source ... | 06/02/2011 |
| 20110123707 | THIN FILM DEPOSITION APPARATUS AND METHOD OF MANUFACTURING ORGANIC LIGHT-EMITTING DISPLAY DEVICE BY USING THE SAME A thin film deposition apparatus including a deposition source having a crucible to contain a deposition material and a heater to heat and vaporize the deposition material; a nozzle unit disposed at a side of the deposition source along a first direction and having a pl... | 05/26/2011 |
| 20110111124 | METHOD AND DEVICE FOR LUBRICATING ROLLERS AND A ROLLED STRIP OF A ROLLING STAND A method for lubricating rolls, especially work rolls (2, 3) of a rolling stand, and rolling stock (6) passed between the rolls during the rolling operation, in which a lubricant-gas mixture, a lubricant-water-gas mixture, a lubricant-water mixture and/or ... | 05/12/2011 |
| 20110107968 | SEMICONDUCTOR MANUFACTURING APPARATUS A semiconductor manufacturing apparatus includes: a reaction chamber for providing an airtight process space; a boat for loading/unloading a pair of semiconductor substrates into/from the reaction chamber, wherein the boat includes susceptors and rotary tables to be rot... | 05/12/2011 |
| 20110088622 | THIN FILM DEPOSITION APPARATUS A thin film deposition apparatus can be simply applied to produce large-sized display devices on a mass scale and improves manufacturing yield. The thin film deposition apparatus for forming a thin film on a substrate includes: a deposition source that discharges a depo... | 04/21/2011 |
| 20110053296 | THIN FILM DEPOSITION APPARATUS AND METHOD OF MANUFACTURING ORGANIC LIGHT-EMITTING DISPLAY DEVICE BY USING THE SAME A thin film deposition apparatus and a method of manufacturing an organic light-emitting display device by using the same, and more particularly, to a thin film deposition apparatus that can remove a deposition material deposited on a patterning slit sheet without perfo... | 03/03/2011 |
| 20110053301 | THIN FILM DEPOSITION APPARATUS AND METHOD OF MANUFACTURING ORGANIC LIGHT-EMITTING DISPLAY DEVICE BY USING THE SAME A thin film deposition apparatus that is suitable for production of large-sized substrates with fine patterns includes: an electrostatic chuck including a body that contacts a substrate that constitutes a deposition target and including a supporting surface supporting t... | 03/03/2011 |
| 20110042659 | THIN FILM DEPOSITION APPARATUS, METHOD OF MANUFACTURING ORGANIC LIGHT-EMITTING DISPLAY DEVICE BY USING THE APPARATUS, AND ORGANIC LIGHT-EMITTING DISPLAY DEVICE MANUFACTURED BY USING THE METHOD A thin film deposition apparatus that includes a thin film deposition assembly incorporating: a deposition source that discharges a deposition material; a deposition source nozzle unit that is disposed at a side of the deposition source and includes a plurality of depos... | 02/24/2011 |
| 20110039367 | MASKED ION IMPLANT WITH FAST-SLOW SCAN An improved method of producing solar cells utilizes a mask which is fixed relative to an ion beam in an ion implanter. The ion beam is directed through a plurality of apertures in the mask toward a substrate. The substrate is moved at different speeds such that the sub... | 02/17/2011 |
| 20110033964 | THIN FILM DEPOSITION APPARATUS AND METHOD OF MANUFACTURING ORGANIC LIGHT-EMITTING DISPLAY DEVICE BY USING THE SAME A thin film deposition apparatus and a method of manufacturing an organic light-emitting display device using the thin film deposition apparatus. The thin film deposition apparatus includes a plurality of thin film deposition assemblies, each of which includes: a deposi... | 02/10/2011 |
| 20110033621 | THIN FILM DEPOSITION APPARATUS INCLUDING DEPOSITION BLADE A thin film deposition apparatus for use with a substrate having deposition regions separated by non-deposition regions includes a deposition source, a first nozzle assembly disposed in front of the deposition source, at least one barrier wall assembly disposed in front... | 02/10/2011 |
| 20110008541 | METHOD AND APPARATUS FOR ORGANIC VAPOR PRINTING In one embodiment, the disclosure relates to providing a first gas stream carrying vaporized material and depositing the vaporized material onto a substrate by directing a plurality of gas streams containing the vaporized material to a substrate, forming an gas curtain ... | 01/13/2011 |
| 20100267245 | HIGH EFFICIENCY EPITAXIAL CHEMICAL VAPOR DEPOSITION (CVD) REACTOR The present disclosure presents a chemical vapor deposition reactor having improved chemical utilization and cost efficiency. The wafer susceptors of the present disclosure may be used in a stackable configuration for processing many wafers simultaneously. The reactors ... | 10/21/2010 |
| 20100252199 | MULTIFREQUENCY CAPACITIVELY COUPLED PLASMA ETCH CHAMBER A plasma processing system for use with a gas. The plasma processing system comprises a first electrode, a second electrode, a gas input port, a power source and a passive circuit. The gas input port is operable to provide the gas between the first electrode and the sec... | 10/07/2010 |
| 20100224128 | SEMICONDUCTOR MANUFACTURING APPARATUS Provided is a semiconductor manufacturing apparatus in which the density of plasma generating in a reaction chamber can be uniformly maintained. The semiconductor manufacturing apparatus comprises a process chamber configured to process a substrate, a plurality of elect... | 09/09/2010 |
| 20100227060 | ATOMIC LAYER DEPOSITION APPARATUS AND METHOD OF FABRICATING ATOMIC LAYER USING THE SAME An atomic layer deposition apparatus includes a chamber, a vacuum pump to control a pressure in the chamber, a gas supply unit to supply a reaction gas into the chamber, a substrate holder disposed between the vacuum pump and the gas supply unit and having a heater, a m... | 09/09/2010 |
| 20100170439 | VAPOR DEPOSITION APPARATUS Contamination of organic EL device is prevented. After a colored layer of the first color is formed, a positioning device moves relatively a substrate and a mask inside the same vacuum chamber, and an opening of the mask is moved to a position above the region where a c... | 07/08/2010 |
| 20100062196 | PARTIALLY METALLIZED FILM HAVING BARRIER PROPERTIES A partially metallized packaging film and method of making is disclosed. In one aspect, at least one portion of a vaporized metal stream is shielded from contacting a sheet of packaging film during the metallization process. The shield is a rigid plate and can be shaped... | 03/11/2010 |
| 20100058985 | Photoresist supply apparatus and photoresist supply method Provided is a photoresist supply apparatus. The photoresist supply apparatus includes a discharge nozzle, a metering pump, a trap tank, a bottle, and a first drain line. The discharge nozzle discharges a photoresist onto a wafer. The metering pump supplies the photoresi... | 03/11/2010 |
| 20090324852 | Systems and methods for forming components with thermal barrier coatings Systems and methods for forming components with thermal barrier coatings are provided. In this regard, a representative method includes: providing a component having a first side and an opposing second side; and using a preformed mask to obstruct vapors from being depos... | 12/31/2009 |
| 20090298267 | SEMICONDUCTOR DEVICE MANUFACTURING APPARATUS AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD It is an apparatus for semiconductor device production in which a feed gas is fed into a chamber having a semiconductor wafer placed therein to deposit a thin film on the surface of the semiconductor wafer based on a catalyzed chemical reaction. It comprises the chamber... | 12/03/2009 |
| 20090217872 | BACKSIDE COATING PREVENTION DEVICE, COATING CHAMBER DEVICE FOR COATING PLATE-SHAPED SUBSTRATES, AND METHOD OF COATING A backside coating prevention device adapted for a coating chamber for coating plate-shaped substrates, said coating chamber comprising a plurality of walls, a coating material source for dispensing coating material into the coating chamber, a substrate support, a front... | 09/03/2009 |
| 20090220803 | FILM DEPOSITING APPARATUS, GAS BARRIER FILM, AND PROCESS FOR PRODUCING GAS BARRIER FILMS A film depositing apparatus comprises: a vacuum chamber; a rotatable drum that is provided within the chamber, that is longer than the substrate in a direction of its width perpendicular to the direction of transport of the substrate, and around which the substrate is w... | 09/03/2009 |
| 20090162997 | Thin diamond like coating for semiconductor processing equipment Accordingly, systems and methods of thin diamond like coatings for semiconductor processing equipment. A semiconductor substrate processing system includes an enclosure for containing a semiconductor processing gas. The enclosure has an interior surface that is at least... | 06/25/2009 |
| 20090159005 | COATINGS FOR SEMICONDUCTOR PROCESSING EQUIPMENT Systems and methods of coatings for semiconductor processing equipment. A semiconductor substrate processing system includes an enclosure for containing a semiconductor processing gas. The enclosure has an interior surface that is at least partially coated with a Silico... | 06/25/2009 |
| 20090145358 | DEPOSITION MATERIAL SUPPLYING MODULE AND THIN FILM DEPOSITION SYSTEM HAVING THE SAME A deposition material supplying module includes a canister configured to define a storage space in which a deposition material is stored, a material flow controller provided with at least one groove receiving the deposition material supplied from the canister and adapte... | 06/11/2009 |
| 20090136663 | VACUUM VAPOR DEPOSITION APPARATUS AND METHOD, AND VAPOR DEPOSITED ARTICLE FORMED THEREWITH When the ratio of a guest material to a host material is extremely small, it is difficult to maintain, with good accuracy, the ratio of the guest material to be vapor-deposited on the work surface and the distribution state of the guest material. The vacuum vapor deposi... | 05/28/2009 |
| 20090110847 | Apparatus and Method for Producing Light-Emitting Elements With Organic Compounds The invention relates to an apparatus and a method for the manufacture of light emitting elements comprising organic compounds. These elements are provided with organic light emitting diodes and can be displays or also lighting elements having such light emitting diodes... | 04/30/2009 |
| 20090092754 | FILM FORMATION METHOD, MASK FOR FILM FORMATION AND FILM FORMATION DEVICE A film formation method is provided for masking a part of a surface of an object and subsequently forming a film, by a chemical vapor deposition method, on a surface on which a film should be formed that is an exposed part of the surface of the object. The film formatio... | 04/09/2009 |
