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| Application No. | Application Title | Issue Date |
| 20120103254 | THIN-FILM FORMATION SYSTEM AND ORGANIC EL DEVICE MANUFACTURING SYSTEM Provided is thin-film formation system including: a first conveying mechanism to convey a substrate and a deposition mask to a substrate carry-in position; a second conveying mechanism to convey the substrate and the deposition mask aligned by an alignment mechanism pla... | 05/03/2012 |
| 20120103257 | DEPOSITION RING AND ELECTROSTATIC CHUCK FOR PHYSICAL VAPOR DEPOSITION CHAMBER Embodiments of the invention generally relate to a process kit for a semiconductor processing chamber, and a semiconductor processing chamber having a kit. More specifically, embodiments described herein relate to a process kit including a deposition ring and a pedestal... | 05/03/2012 |
| 20120107487 | ROLL TO ROLL PATTERNED DEPOSITION PROCESS AND SYSTEM A continuous roll-to-roll apparatus for providing a patterned deposit of a material onto a moving substrate web includes a payout station for feeding out a substrate web, a take-up station for taking up the substrate web, and a web transport system for advancing the web... | 05/03/2012 |
| 20120107506 | FILM FORMATION METHOD AND FILM FORMATION APPARATUS Provided is a film formation apparatus capable of causing a substrate and a mask to be in a substantially horizontal state and brought into intimate contact with each other without deforming mask apertures. A region inside a mask frame and outside aperture regions of a ... | 05/03/2012 |
| 20120067279 | CONVEYING DEVICE AND DEPOSITION DEVICE USING SAME A conveying device for a deposition device includes a transport device and a carrier. The transport device includes a main body, two wheels, a connection shaft, and a first bevel gear. The connection shaft is mounted on the main body. The two wheels are mounted on two o... | 03/22/2012 |
| 20120070999 | REPLACEABLE SUBSTRATE MASKING ON CARRIER AND METHOD FOR PROCESSING A SUBSTRATE A holding device adapted for holding a mask and a substrate during processing is described. The holding device includes a substrate carrier adapted for carrying the substrate; and a mask for masking the substrate, wherein the mask is releasably connected to the substrat... | 03/22/2012 |
| 20120070996 | POLAR REGIONS FOR ELECTROSTATIC DE-CHUCKING WITH LIFT PINS An apparatus for electrostatic chucking and dechucking of a semiconductor wafer includes an electrostatic chuck with a number of zones. Each zone includes one or more polar regions around a lift pin that contacts a bottom surface of the semiconductor wafer. The apparatu... | 03/22/2012 |
| 20120048187 | COATING HOLDER AND COATING DEVICE HAVING SAME A coating device includes a chamber, an evaporative source, a coating holder, and a supporting structure. The evaporative source is positioned at the bottom of the chamber. The coating holder is positioned at the top of the chamber and includes concentric annular parts ... | 03/01/2012 |
| 20120048186 | CARRIER FOR A SUBSTRATE AND A METHOD FOR ASSEMBLING THE SAME Carriers for substrates and to methods for assembling the same in the field of vacuum deposition of thin films. In particular, a carrier for a substrate to be coated in a vacuum chamber includes a first frame comprising two vertical sections and two horizontal sections ... | 03/01/2012 |
| 20120043300 | NanoNeedles Pulling System The present invention provides a description for an instrument for creating arrays of metal nanostructures allows on various substrates at the wafer scale. Embodiment methods permit for the formation of individual and arrays of metal alloys of nanostructures by bringing... | 02/23/2012 |
| 20120042823 | SUSCEPTOR SUPPORT SYSTEM The present disclosure is directed to a susceptor support that includes a hub and a plurality of arms extending radially from the hub, where each arm has a terminal end positioned away from the hub. The susceptor support also includes a plurality of elongated rectangula... | 02/23/2012 |
| 20120045581 | SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS A hydrophobizing agent is supplied to a substrate and a surface of the substrate is hydrophobized. Thereafter, the substrate is dried. The substrate to be processed is maintained in a state of not contacting water until it is dried after being hydrophobized. Collapse of... | 02/23/2012 |
| 20120015104 | Method and Apparatus for Depositing LED Organic Film In one embodiment the disclosure relates to an apparatus for depositing an organic material on a substrate, including a source heater for heating organic particles to form suspended organic particles; a transport stream for delivering the suspended organic particles to ... | 01/19/2012 |
| 20120012053 | ROTATABLE SUPPORT ELEMENTS FOR STENTS Various embodiments of methods and devices for coating stents are described herein.... | 01/19/2012 |
| 20120012055 | Method and Apparatus for the Application of Powder Material to Substrates An apparatus for electrostatically applying a powder material to substrates is disclosed. The apparatus comprises a plurality of platens, each platen being arranged to hold a plurality of substrates, wherein each platen comprises an electrically conducting platen base h... | 01/19/2012 |
| 20110315080 | LIFT PIN, AND WAFER-PROCESSING APPARATUS COMPRISING SAME In a lift pin and an apparatus for processing a substrate having the same, the lift pin includes a body inserted into a penetration hole of a susceptor on which the substrate is positioned and moving along the penetration hole upward and downward in a direction vertical... | 12/29/2011 |
| 20110318489 | SUBSTRATE PROCESSING APPARATUS, PROCESSING TUBE, SUBSTRATE HOLDER, FIXING PART OF THE SUBSTRATE HOLDER, SUBSTRATE PROCESSING METHOD, AND SUBSTRATE MANUFACTURING METHOD There is provided a substrate processing apparatus, including: a substrate holder that holds a plurality of substrates (wafers) in a state of being arranged in a lateral direction (approximately in a horizontal direction) approximately in a vertical posture; a processin... | 12/29/2011 |
| 20110315076 | PRINTING MEDIUM HOLDER AND PRINTING APPARATUS According to one embodiment, a printing medium holder includes a housing and holding section and a winding-shaft holding section. The housing and holding section is detachably attachable to a member holding section of a printing apparatus. The housing and holding sectio... | 12/29/2011 |
| 20110315081 | SUSCEPTOR FOR PLASMA PROCESSING CHAMBER A susceptor for a plasma process apparatus, the susceptor having a graphite main body with a top surface for supporting at least one substrate, the top surface having a plasma sprayed aluminum oxide coating. A vacuum processing chamber, has a main chamber body, a shower... | 12/29/2011 |
| 20110306216 | MASK HOLDING DEVICE A holding device adapted for holding a mask and a substrate during processing of the substrate is provided. The holding device includes a mask frame adapted for supporting the mask and a substrate carrier adapted for carrying the substrate to be processed. The substrate... | 12/15/2011 |
| 20110297085 | SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND STORAGE MEDIUM A substrate processing apparatus is disclosed equipped with a transfer mechanism that transfers a substrate processed at a processing block to a carrier so that the increase of the number of transfer process is suppressed, improving the processing efficiency. The substr... | 12/08/2011 |
| 20110300297 | MULTI-WAFER ROTATING DISC REACTOR WITH INERTIAL PLANETARY DRIVE Wafer carriers and methods for moving wafers in a reactor. The wafer carrier may include a platen with a plurality of compartments and a plurality of wafer platforms. The platen is configured to rotate about a first axis. Each of the wafer platforms is associated with o... | 12/08/2011 |
| 20110283941 | STABLE WAFER-CARRIER SYSTEM One embodiment of the present invention provides a wafer-carrier system used in a deposition chamber for carrying wafers. The wafer-carrier system includes a base susceptor and a top susceptor nested inside the base susceptor with its wafer-mounting side facing the base... | 11/24/2011 |
| 20110274830 | METHOD FOR PRODUCING A FLEXIBLE CIRCUIT CONFIGURATION A method is specified for the production of a flexible circuit configuration, which allows the manufacturing of such flexible circuits on a carrier film cost-effectively and with high precision. For this purpose, the carrier film is fastened at the beginning of the meth... | 11/10/2011 |
| 20110271904 | ROTATABLE SUPPORT ELEMENTS FOR STENTS Various embodiments of methods and devices for coating stents are described herein.... | 11/10/2011 |
| 20110268882 | Ball spacer method for planar object leveling An apparatus for leveling an array of microscopic pens with respect to a substrate surface is provided. The apparatus includes an array of microscopic pens; a substrate having a substrate surface; a controllable arm comprising a spherical ball on an end thereof; a force... | 11/03/2011 |
| 20110259267 | FILM COATING HOLDER A film coating holder includes a top cover, a plurality of annular parts, and a plurality of connecting pieces. The top cover defines a plurality of first holes for receiving workpieces therein. The plurality of annular parts is stacked on each other with progressively ... | 10/27/2011 |
| 20110263065 | MODULAR SYSTEM FOR HIGH-RATE DEPOSITION OF THIN FILM LAYERS ON PHOTOVOLTAIC MODULE SUBSTRATES A system and related method for deposition of multiple thin film layers on photovoltaic (PV) module substrates includes a first processing side wherein the substrates are conveyed in a first direction for deposition of a first thin film layer on the substrates. A second... | 10/27/2011 |
| 20110262634 | METHOD OF MANUFACTURING MAGNETORESISTIVE DEVICE AND APPARATUS FOR MANUFACTURING THE SAME A magnetoresistive device has an MgO (magnesium oxide) layer provided between a first ferromagnetic layer and a second ferromagnetic layer. The device is manufactured by forming a film of the MgO layer in a film forming chamber. A substance whose getter effect with resp... | 10/27/2011 |
| 20110253048 | WAFER HOLDER AND METHOD OF HOLDING A WAFER A wafer holder including a wafer stage and a wafer stage outer-ring surrounding the wafer stage wherein the wafer stage has a diameter smaller than the diameter of a wafer loaded on the wafer stage, the wafer stage outer-ring has an inner diameter at the upper side of t... | 10/20/2011 |
| 20110253042 | Methods of Processing Semiconductor Substrates, Electrostatic Carriers for Retaining Substrates for Processing, and Assemblies Comprising Electrostatic Carriers Having Substrates Electrostatically Bonded Thereto A method of processing a substrate includes physically contacting an exposed conductive electrode of an electrostatic carrier with a conductor to electrostatically bond a substrate to the electrostatic carrier. The conductor is removed from physically contacting the exp... | 10/20/2011 |
| 20110247558 | COATING HOLDER AND COATING DEVICE HAVING SAME A coating holder for holding a plurality of workpieces includes a rotating shaft, a first driving member, a plurality of hanging arms, a plurality of supporting trays, and a plurality of second driving members. The first driving member is configured for driving the rota... | 10/13/2011 |
| 20110244120 | THIN FILM DEPOSITION APPARATUS AND METHOD OF MANUFACTURING ORGANIC LIGHT-EMITTING DISPLAY DEVICE BY USING THE SAME A thin film deposition apparatus that can be easily used to manufacture large-sized display devices on a mass scale and that improves manufacturing yield, and a method of manufacturing an organic light-emitting display device by using the thin film deposition apparatus.... | 10/06/2011 |
| 20110240225 | TREATMENT APPARATUS FOR FLEXIBLE SUBSTRATE A position control device (21, 5) that controls a widthwise position of a flexible substrate 1 includes: a pair of upper nip rollers 21 (24, 25) that nip an upper edge portion of the flexible substrate, rotating shafts of the pair of upper ni... | 10/06/2011 |
| 20110240223 | SUBSTRATE PROCESSING SYSTEM There is provided a substrate processing system having high maintainability by widening a gap between various processing apparatuses connected with side surfaces of transfer modules and capable of achieving sufficient productivity by avoiding deterioration in throughput... | 10/06/2011 |
| 20110230010 | SYSTEM AND METHOD FOR FABRICATING PHOTOVOLTAIC CELLS A substrate processing system includes a source unit configured to supply a deposition material to a substrate, a substrate holder configured to hold a substrate to receive the deposition material, a shadow mask comprising a frame that includes two opposing arms; and a ... | 09/22/2011 |
| 20110203520 | PAN COATING APPARATUS In a pan coating apparatus (10) including a rotary drum (1) which rotates about a horizontal rotation axis (O), an air supply chamber (13) having a larger sectional area than that of an opening portion (7) is arranged on a front stage with re... | 08/25/2011 |
| 20110179995 | AUTOMATED FLUID DISPENSER An automated fluid dispenser for smoothly applying a viscous fluid onto a component is provided. The automated fluid dispenser can have a nozzle with a nozzle tip and a support. The nozzle can be pivotally attached to the support about a pivot axis. In addition, a tensi... | 07/28/2011 |
| 20110174217 | SHADOW MASK HELD MAGNETICALLY ON A SUBSTRATE SUPPORT The invention relates to a device for depositing laterally structured layers on a substrate (2) situated on a substrate support (1), using a shadow mask (3) lying flat on the substrate surface (2′) to be coated, the substrate support (1<... | 07/21/2011 |
| 20110177645 | ROLL-TO-ROLL EVAPORATION SYSTEM AND METHOD TO MANUFACTURE GROUP IBIIIAVIA PHOTOVOLTAICS The present inventions provide method and apparatus that employ constituents vaporized from one or more constituent supply source or sources to form one or more films of a precursor layer formed on a surface of a continuous flexible workpiece. Of particular significance... | 07/21/2011 |
