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Attorney: Zitzmann; Oliver A.M., Hultquist; Steven J.


Number of patents: 5
Last date: April 10, 2001

NumberTitleIssue Date
6214105Alkane and polyamine solvent compositions for liquid delivery chemical vapor deposition
A solvent composition for liquid delivery chemical vapor deposition of metal organic precursors, to form metal-containing films such as SrBi2 Ta2 O9 (SBT) films for memory devices. An SBT film may be formed using precursor...
04/10/2001
6177135Low temperature CVD processes for preparing ferroelectric films using Bi amides
Chemical vapor deposition is used to form a film of Bi oxide, Sr oxide, and Ta oxide on a heated substrate by decomposing the precursors of these oxides at the surface of the substrate. The precursor of Bi oxide is a Bi complex which includes at least one...
01/23/2001
6145020Microcontroller incorporating an enhanced peripheral controller for automatic updating the configuration date of multiple peripherals by using a ferroelectric memory array
The present invention is an enhanced peripheral controller communicating between a microcontroller and multiple peripherals that increases the speed with which configuration data sets are loaded. The enhanced peripheral controller includes a programmable ...
11/07/2000
6110529Method of forming metal films on a substrate by chemical vapor deposition
A method of forming on a substrate a metal film, comprising depositing said metal film on said substrate via chemical vapor deposition from a metalorganic complex of the formula: MAY X wherein: M is a y-valent metal; A is a monodentate or multidenta...
08/29/2000
5851270Low pressure gas source and dispensing apparatus with enhanced diffusive/extractive means
A gas storage and dispensing system in which a gas is sorptively retained on a bed of physical adsorbent material in a containment vessel, and gas is desorbed for selective dispensing thereof from the vessel. The vessel is equipped for gas discharge, with...
12/22/1998
 
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