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3M employee and church chorister Art Fry needed something to temporarily mark pages in his hymnal. He was in luck because his colleague, Spencer Silver, accidentally developed a glue that was too weak for other purposes. After initially discouraging consumer response, Post-it Notes became a hit in 1979.
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| Number | Title | Issue Date |
| 7638106 | Method of treating a gas stream A method is described of treating a gas stream exhausted from an atomic layer deposition (ALD) process chamber to which two or more gaseous precursors are alternately supplied. Between the process chamber and a vacuum pump used to draw the gas stream from the chambe... | 12/29/2009 |
| 7541061 | Vacuum chamber load lock structure and article transport mechanism A vacuum chamber used for processing articles, such as integrated circuit wafers, display panels, and the like, has a small load lock chamber formed at an opening in a wall of the chamber by a moveable article supporting surface within the chamber and a cover outsid... | 06/02/2009 |
| 7539459 | Active noise cancellation system, arrangement, and method Noise of a noise-producing object may be at least partially cancelled by a system that emits sound at a polarity substantially opposite to a polarity of detected noise and includes a member having elements disposed in the vicinity of a noise-producing object, some o... | 05/26/2009 |
| 7537440 | Scroll compressor with multiple isolated inlet ports A scroll compressor having a scroll wall arrangement with a fixed scroll having fixed scroll walls and an orbiting scroll having orbiting scroll wall, an inlet at a radially outer portion and an outlet at a radially central portion, a first flow path defined by the ... | 05/26/2009 |
| 7500822 | Combined vacuum pump load-lock assembly A load-lock and dry vacuum pump assembly includes a load-lock having a load-lock housing, the load-lock housing includes a mating system having a flange-like cylinder and a cylinder concentrically located relative to said flange-like cylinder; a dry vacuum pump that... | 03/10/2009 |
| 7494633 | Gas abatement Apparatus is described for treating an effluent fluid stream from a semiconductor manufacturing process tool. The apparatus comprises a combustion chamber, means for heating the combustion chamber, and a nozzle for injecting the effluent stream into the combustion c... | 02/24/2009 |
| 7445023 | Apparatus for conveying gases to and from a chamber Apparatus comprising: a chamber having a chamber inlet and a chamber outlet; a first inlet for receiving a first gas stream; a second inlet for receiving a second gas stream; a first outlet for outputting the first gas stream to a first vacuum pump; a second outlet ... | 11/04/2008 |
| 7442016 | Scroll pump and method of assembling same A method of assembling a scroll pump comprises the following steps carried out sequentially; the step of mounting a first bearing means (20) and drive shaft (14) for rotation relative to a housing (12): the step of fastening a first flange porti... | 10/28/2008 |
| 7438534 | Wide range pressure control using turbo pump The present invention is an apparatus and method for controlling a process flow rate and a pressure in a vacuum process chamber that is evacuated by a turbomolecular pump. A throttle valve between the pump and the process chamber is controlled to regulate the pressu... | 10/21/2008 |
| 7404698 | Turbomolecular pump with static charge control The present invention relates to turbomolecular vacuum pumps and an arrangement for reducing or eliminating an accumulated static charge in the rotor caused by an interaction of the rotor with either electrically charged or neutral particles in the pumped media. Ele... | 07/29/2008 |
| 7392825 | Arrangement for tool equipment An arrangement comprising ancillary equipment mounted to a semiconductor processing tool and service center remote from the semiconductor processing tool minimizing the local space requirements and facilitates easy access for repair. ... | 07/01/2008 |
| 7318706 | Valving for multi-stage vacuum pumps A multi-stage vacuum pump comprises a first piston in a first cylinder defining a first stage pumping chamber and a second piston in a second cylinder defining a second stage pumping chamber. The pump has a spool valve between the first and second cylinders for cont... | 01/15/2008 |
| 7278831 | Apparatus and method for control, pumping and abatement for vacuum process chambers The present invention is an apparatus and method for controlling pressure, pumping a vacuum and providing abatement for a plurality of vacuum processing chambers. The system may be used in semiconductor manufacture. Multiple vacuum processing chambers are exhausted ... | 10/09/2007 |
| 7214041 | Seal assemblies A seal assembly for the protection of a static seal device for use in a vacuum pump. The seal assembly comprising at least two components which are sealingly connected together, an o-ring seal, which is engaged between the two components to prevent transfer of fluid... | 05/08/2007 |
| 7198455 | Vacuum pumping arrangement In a pumping arrangement for a chamber, a regenerative pumping mechanism comprises a rotor and a stator having an annular channel within which rotor blades rotate to urge fluid along the channel. The channel has a stripper, a channel inlet positioned adjacent one en... | 04/03/2007 |
| 7175383 | Regenerative fluid pump and stator for the same A regenerative fluid pump (10) comprises a rotor having rotor blades for compressing fluid on two fluid flow paths, the first of which extends between a first pump inlet (12a) and a first pump outlet (14a), and a second of which ex... | 02/13/2007 |
| 7165458 | Vacuum gauge A thermal conductivity type pressure gauge comprises a gauge head (2) being rotatably mountable in a vessel whose environmental pressure is to be measured and an elongate electrical filament (6) mounted in the gauge head, the gauge head (2) havi... | 01/23/2007 |
| 7163036 | Method of supplying fluorine In a method of delivering high purity fluorine to a processing system, an on-site fluorine generator supplies high purity fluorine to a fixed storage tank, from which the high purity fluorine is supplied to the processing system. To provide a back up to the fluorine... | 01/16/2007 |
| 7140847 | Integrated high vacuum pumping system The present invention relates to the integration of a TMP with the associated bypass line and valves so that a single sub-assembly is created. The housing of the TMP is significantly modified to accommodate the associated equipment necessary for constructing a high-... | 11/28/2006 |
| 7140833 | Integrated turbo/drag/regenerative pump with counter-rotating turbo blades The present invention relates to vacuum pumps and a method for creating and maintaining a high vacuum. A vacuum pump includes a regenerative section and a turbo-molecular section. A common first rotor carries forward-rotating elements of both the regenerative sectio... | 11/28/2006 |
| 7137274 | System for liquefying or freezing xenon Apparatus for producing liquid or solid xenon comprises a duct 12 having an inlet 14 for receiving gaseous xenon and an outlet 16 for outputting gaseous xenon at a reduced temperature to a nozzle located in a vacuum chamber 60. A housing ... | 11/21/2006 |
| 7097713 | Method for removing a composite coating containing tantalum deposition and arc sprayed aluminum from ceramic substrates A method for removing a metallic layer from the surface of a ceramic substrate, the method including the steps of immersing the metallic coated ceramic substrate in a solution of up to 31% hydrochloric acid for a sufficient time to at least substantially dissolve or... | 08/29/2006 |
| 7094036 | Vacuum pumping system A vacuum pumping system comprises a first gas supply for supplying a first gas, such as xenon, to a vacuum chamber. A pump receives the gas output from the chamber. A second gas supply supplies a purge gas, such as nitrogen or helium, for pumping with the first gas.... | 08/22/2006 |
| 7021903 | Fore-line preconditioning for vacuum pumps The present invention is an apparatus and method for evacuating a number of vacuum processing chambers containing incompatible gases. The gases are directed to a subatmospheric abatement chamber containing preconditioning devices. The gases are treated in the abatem... | 04/04/2006 |
| 6946838 | NMR measuring system An improvement in a magnetic resonance method for determining at least one property of multiple samples, including introducing multiple samples into the interrogation zone simultaneously; applying a gradient magnetic field to the interrogation zone wherein different... | 09/20/2005 |
| 6942466 | Mechanical pumps A mechanical pump having an inlet and spaced therefrom an outlet for the passage of fluid therethrough and incorporating at least one flame arrester. ... | 09/13/2005 |
| 6935364 | Magnetically-operated relief valves A valve comprising a housing having an inlet and spaced therefrom an outlet, a passageway extending between the inlet and the outlet, and a mechanism located in the passageway for controlling the flow of a fluid between the inlet and the outlet, the mechanism includ... | 08/30/2005 |
| 6916162 | Scroll compressor A scroll compressor which comprises a scroll assembly comprising two scroll walls, and a drive for causing a relative orbiting motion between the scroll walls for compressing fluid on two fluid flow paths between an inlet and an exhaust of the scroll assembly. A fir... | 07/12/2005 |
| 6908601 | Method for the production of nitrogen trifluoride The invention provides a method and apparatus for producing nitrogen trifluoride. The invention involves passing a working fluid through a heat engine cycle and using the mechanical energy generated by the working fluid to produce sufficient mixing intensity within ... | 06/21/2005 |
| 6863493 | Lubricating systems for regenerative vacuum pumps In a vacuum pump of the regenerative type or including a regenerative section in which a rotatable vertical shaft is supported by upper and lower bearings, a lubricating system for lubricating the upper bearing comprising an axial bore extending along the shaft and ... | 03/08/2005 |
| 6860365 | Lubrication system for rotating machines and pumps A system for lubricating the upper bearing supporting a rotatable vertical shaft in a machine or pump comprising an axial bore extending along substantially the length of the shaft and communicating at its lower open end with a reservoir containing lubricating fluid... | 03/01/2005 |
| 6857857 | Reciprocating machines A reciprocating machine such as a vacuum pump includes a cylinder in which a reciprocating piston is disposed for reciprocating movement. A variable voltage driver is provided for driving the piston and a vibration sensor is provided for sensing contact between the ... | 02/22/2005 |
| 6799612 | Filling apparatus A filling apparatus may include a conveyor for transporting the vials in an aseptic zone and a vial filler including a dispenser, for example, a filling needle, connected to a fluid supply. The vial filler may be disposed in the aseptic zone. The apparatus may also ... | 10/05/2004 |
| 6783429 | Apparatus and method for sampling a chemical-mechanical polishing slurry An apparatus and method for drawing a sample of a chemical-mechanical polishing slurry for analysis of at least one property, e.g., particle size distribution, is described. The apparatus comprises (i) a plurality of sample delivery lines, each line carrying a chemi... | 08/31/2004 |
| 6769310 | Flow-indicating device and associated mechanism and method A flow-indicating device is provided, comprising a tubular body adapted to direct a flow therethrough. The body has opposed ends, with one end being a downstream end, and has a flow element disposed therein. A shaping block is operably engaged with the body so as to... | 08/03/2004 |
| 6708984 | Seal assemblies A seal assembly comprising a main O-ring seal element for engaging in a fluid tight manner opposed surfaces of two objects to be sealingly connected together and a barrier element positioned to protect all or a substantial portion of the surface of the main O-ring s... | 03/23/2004 |
| 6709228 | Vacuum pumps A compound vacuum pump comprising at least one turbo-molecular stage and downstream therefrom a multi-channel molecular drag stage, a first inlet through which fluid can pass through the turbo-molecular stage and the molecular drag stage towards a pump outlet, a sec... | 03/23/2004 |
| 6701972 | Vacuum load lock, system including vacuum load lock, and associated methods A system is provided that includes a load lock apparatus having an interior configured to receive an object. At least one inlet valve may be flow coupled to the interior of the load lock apparatus, and at least one outlet valve may also be flow coupled to... | 03/09/2004 |
| 6672855 | Vacuum pumps A vacuum pump having a screw mechanism and comprising two externally threaded rotors mounted on respective shafts in a pump body and adapted for counter-rotation therein with intermeshing of the rotor threads with close tolerances between the threads and ... | 01/06/2004 |
| 6626639 | Vacuum pump A compound vacuum pump includes a regenerative section and a Holweck section. An annular abutment is formed on the radially innermost rotating cylinder of the Holweck section. The abutment acts to cause dust and foreign particles entering an inlet of the ... | 09/30/2003 |
